CN203683661U - Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace - Google Patents
Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace Download PDFInfo
- Publication number
- CN203683661U CN203683661U CN201320885706.1U CN201320885706U CN203683661U CN 203683661 U CN203683661 U CN 203683661U CN 201320885706 U CN201320885706 U CN 201320885706U CN 203683661 U CN203683661 U CN 203683661U
- Authority
- CN
- China
- Prior art keywords
- slide bar
- graphite boat
- high temperature
- bar
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The utility model discloses a graphite boat sticking point mounting and dismounting device used for a high temperature diffusion furnace. The graphite boat sticking point mounting and dismounting device used for the high temperature diffusion furnace comprises a support, a base used for mounting a graphite flake is arranged below the support, a cantilever is also arranged on the support, a slide bar which can slide up and down is arranged on the cantilever, the slide bar is arranged above the graphite flake, the front end of the slide bar is connected with an ejector rod, an auxiliary hole is formed in the graphite flake, a through hole corresponding to the auxiliary hole is formed in the base, and the ejector rod is vertically corresponding to the auxiliary hole and the through hole. In a graphite boat sticking point mounting and dismounting process, subfissure of a graphite boat flake is greatly reduced, and probability that edge of the graphite boat sticking point is broken is greatly reduced, so that the aims of the utility model are realized.
Description
Technical field
The utility model relates to a kind of graphite boat sheet stuck point handler, particularly a kind of PECVD graphite boat stuck point handler of producing for crystal silicon solar energy battery.
Background technology
PECVD utilizes high frequency electric source glow discharge to produce the process that plasma body carries out chemical vapour deposition.Be characterized in: depositing temperature is low, electron density is high, electronics average energy large, be rich in active particle and the free radical of a large amount of chemical vapour depositions.In PECVD plasma body, owing to containing highdensity ion, these antireflective passive films with the ion pair deposition of certain kinetic energy bombard, and can improve compactness and the stress of film.
In tubular type PECVD equipment, substrate, along the vertical placement of pole plate, is put a lot of groups.In the loading and uninstall process of substrate, easily graphite boat stuck point is caused to wearing and tearing; When graphite boat enters after Reaktionsofen, in the environment of high temperature and high frequency glow, graphite boat card is corrosion and aging easily.Thereby need a large amount of graphite boat stuck points of changing.
Utility model content
The purpose of this utility model is to provide a kind of graphite boat stuck point handler for high temperature dispersing furnace, for the deficiencies in the prior art, can in installation and removal process, reduce graphite boat stuck point and the hidden probability of splitting of graphite boat sheet.
The technical problem that the utility model solves can realize by the following technical solutions:
A kind of graphite boat stuck point handler for high temperature dispersing furnace, comprise a support, support below is provided with the base for graphite flake is installed, on support, be also provided with overarm, be provided with the slide bar that can slide up and down in overarm, slide bar is positioned at graphite flake top, slide bar front end is connected with push rod, on graphite flake, have a fabrication hole, be provided with the through hole corresponding with fabrication hole on base, described push rod is corresponding up and down with fabrication hole, through hole.
Slide bar is provided with a bar cover, and it is upper that bar cover is fixed on overarm, and slide bar is up and down to slide in bar cover.
Slide bar top is through bar cover, and slide bar is provided with screw thread through bar cover part, and slide bar is threaded part cover nut.
On slide bar, be also provided with and switch button, switch button bit in nut below.
On suspension, be also provided with the upper and lower rocking bar of a control slide bar.
Described push rod is connected to slide bar lower end by a retaining screw.
Adjust behind appropriate location when setscrew nut, opening switching button is quick release graphite boat stuck point; Close to switch to detain and get final product Fast Installation graphite boat stuck point.Realize the switching of hurrying up of switching fast graphite boat stuck point handler operating mode.
Beneficial effect, a kind of graphite boat stuck point handler for high temperature dispersing furnace described in the utility model, delicate structure, can effectively avoid the damage of graphite boat sheet, reduces the hidden probability of splitting of graphite boat stuck point and graphite boat sheet in installation and removal process.Simple to operate, easy to use.
Brief description of the drawings
Fig. 1 is the integral installation distribution structure schematic diagram of a kind of graphite boat stuck point handler for high temperature dispersing furnace described in the utility model.
Fig. 2 is the local structure schematic diagram of Fig. 1.
Fig. 3 is rocker structure assembling exploded view described in the utility model.
Fig. 4 is graphite flake schematic diagram described in the utility model.
Embodiment
For technique means, creation characteristic that the utility model is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the utility model.
Referring to Fig. 1-Fig. 4, a kind of graphite boat stuck point handler for high temperature dispersing furnace, comprise a support 1, support 1 below is provided with the base 2 for graphite flake 5 is installed, and is also provided with overarm 3 on support 1, in overarm 3, be provided with the slide bar 4 that can slide up and down, slide bar 4 is positioned at graphite flake 5 tops, and slide bar 4 front ends are connected with push rod 6, has a fabrication hole 51 on graphite flake 5, on base, be provided with the through hole corresponding with fabrication hole 21, described push rod 6 and fabrication hole 51, through hole are corresponding Shang Xia 21.
Slide bar 4 is provided with a bar cover 7, and bar cover 7 is fixed in overarm 3, and a side of bar cover 7 is provided with bar running-on 71, and slide bar 4 is up and down overlaps 7 interior slips at bar.
Slide bar 4 tops are through bar cover 7, and slide bar 4 sets up separately and is equipped with screw thread through bar cover upper portion, and slide bar 4 is threaded part cover nut 8.By the height of adjusting nut 8, can control the degree of depth that slide bar 4 declines.The part of slide bar 4 in bar cover 7 is with groove 72, and for the interlock of slide bar and gear 73,72 of gears connect rocking bar 10, as Fig. 2.
On slide bar 4, be also provided with and switch button 9, switch button 9 and be positioned at nut 8 belows.
On suspension 3, be also provided with suspension through hole 79.For fixed gear 73 and coupling shaft 74.On coupling shaft, be provided with spline 75, the shape of the shape of spline 75 and gear 72 through holes pretend with, for the interlock of gear, on coupling shaft 74, be also provided with through hole 76 and a silk hole, rocking bar 10 can be fixed with screw 77 through through hole 76 is rear.As Fig. 4, coupling shaft 74 passes after pad 78, then through gear 73, then wear this suspension through hole 79, then wear pad, be finally fixed on suspension 3 with nut.
On suspension 3, be also provided with the upper and lower rocking bar 10 of a control slide bar 4, one end of rocking bar is weighted spherical ball 101, and the other end is crank, and weighted spherical ball 101 is fixed on rocking bar, and crank is directly enclosed within rocking bar.Take off crank, rocking bar is through coupling shaft through hole, with the fixing rocking bar of the screw on coupling shaft.In handling stuck point process, after shake rocking bar, rocking bar can be got back to starting point under the action of gravity of weighted spherical ball, and slide bar 4 also can rise to starting point, referring to Fig. 3.
Described push rod 6 is connected to slide bar lower end by a retaining screw.
By the fabrication hole on graphite flake 51 with align as Fig. 1 base plate through holes 21, adjust and fixing M10 nut, now shake rocking bar, can load and unload stuck point.The only large 3-4mm in stuck point hole on base aperture ratio graphite boat sheet, makes the stressed rear deformation of graphite boat sheet little, so be not easy hidden splitting.
While needing switching working mode, only need rotation to switch button.When switching button is threaded to M10 nut below, graphite boat stuck point can be installed, can dismantle graphite boat stuck point switching after button shifts out.
A kind of graphite boat stuck point handler for high temperature dispersing furnace described in the utility model, delicate structure, can effectively avoid the damage of graphite boat sheet, reduces the hidden probability of splitting of graphite boat stuck point and graphite boat sheet in installation and removal process.Simple to operate, easy to use.
Claims (6)
1. the graphite boat stuck point handler for high temperature dispersing furnace, it is characterized in that, comprise a support, support below is provided with the base for graphite flake is installed, and is also provided with overarm on support, in overarm, be provided with the slide bar that can slide up and down, slide bar is positioned at graphite flake top, and slide bar front end is connected with push rod, has a fabrication hole on graphite flake, on base, be provided with the through hole corresponding with fabrication hole, described push rod is corresponding up and down with fabrication hole, through hole.
2. a kind of graphite boat stuck point handler for high temperature dispersing furnace according to claim 1, is characterized in that, slide bar is provided with a bar cover, and it is upper that bar cover is fixed on overarm, and slide bar is up and down to slide in bar cover.
3. a kind of graphite boat stuck point handler for high temperature dispersing furnace according to claim 1, is characterized in that, slide bar top is through bar cover, and slide bar is provided with screw thread through bar cover part, and slide bar is threaded part cover nut.
4. a kind of graphite boat stuck point handler for high temperature dispersing furnace according to claim 1, is characterized in that, is also provided with and switches button on slide bar, switches button bit in nut below.
5. a kind of graphite boat stuck point handler for high temperature dispersing furnace according to claim 1, is characterized in that, is also provided with the upper and lower rocking bar of a control slide bar on suspension.
6. a kind of graphite boat stuck point handler for high temperature dispersing furnace according to claim 1, is characterized in that, described push rod is connected to slide bar lower end by a retaining screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320885706.1U CN203683661U (en) | 2013-12-31 | 2013-12-31 | Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320885706.1U CN203683661U (en) | 2013-12-31 | 2013-12-31 | Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203683661U true CN203683661U (en) | 2014-07-02 |
Family
ID=51005585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201320885706.1U Expired - Fee Related CN203683661U (en) | 2013-12-31 | 2013-12-31 | Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203683661U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104465877A (en) * | 2014-12-15 | 2015-03-25 | 浙江鸿禧能源股份有限公司 | Graphite nail loading and unloading platform |
| CN105951060A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Demounting device for process points of tube type PECVD graphite boat |
| CN106736408A (en) * | 2017-02-13 | 2017-05-31 | 揭阳中诚集团有限公司 | Graphite boat process point automatic loader and unloader |
| CN108914090A (en) * | 2018-09-14 | 2018-11-30 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point changing machine |
| CN108914089A (en) * | 2018-09-13 | 2018-11-30 | 江苏润阳悦达光伏科技有限公司 | Automation graphite boat stuck point decorates device |
| CN109411568A (en) * | 2018-11-30 | 2019-03-01 | 江苏润阳悦达光伏科技有限公司 | The manual changing machine of slide rail type graphite boat stuck point |
-
2013
- 2013-12-31 CN CN201320885706.1U patent/CN203683661U/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104465877A (en) * | 2014-12-15 | 2015-03-25 | 浙江鸿禧能源股份有限公司 | Graphite nail loading and unloading platform |
| CN105951060A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Demounting device for process points of tube type PECVD graphite boat |
| CN106736408A (en) * | 2017-02-13 | 2017-05-31 | 揭阳中诚集团有限公司 | Graphite boat process point automatic loader and unloader |
| CN108914089A (en) * | 2018-09-13 | 2018-11-30 | 江苏润阳悦达光伏科技有限公司 | Automation graphite boat stuck point decorates device |
| CN108914089B (en) * | 2018-09-13 | 2024-01-02 | 江苏润阳悦达光伏科技有限公司 | Automatic graphite boat clamping point loading device |
| CN108914090A (en) * | 2018-09-14 | 2018-11-30 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point changing machine |
| CN108914090B (en) * | 2018-09-14 | 2024-01-02 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point replacing machine |
| CN109411568A (en) * | 2018-11-30 | 2019-03-01 | 江苏润阳悦达光伏科技有限公司 | The manual changing machine of slide rail type graphite boat stuck point |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203683661U (en) | Graphite boat sticking point mounting and dismounting device used for high temperature diffusion furnace | |
| CN102337513B (en) | Preparation method for transparent graphene conductive film | |
| CN111599988B (en) | Lithium-supplementing negative plate, lithium ion battery and preparation method of lithium-supplementing negative plate | |
| CN204740548U (en) | Be applied to high strength handle limit structure of server module | |
| CN203653755U (en) | Crucible for polycrystalline silicon ingot based on quartz particle embedded layer | |
| CN202616272U (en) | Small carrier disposing structure | |
| CN203112964U (en) | Crucible cover plate of forcefully-rectified polycrystalline ingot furnace | |
| CN203674241U (en) | Device for improving diffusion sheet resistance uniformity of silicon wafer | |
| CN207884162U (en) | A kind of electric power distributing cabinet that stability is good | |
| CN202688436U (en) | Detachable special gas hole | |
| CN206837954U (en) | Positive pole mixing device is used in a kind of lithium ion battery production | |
| CN202093403U (en) | Mechanical pressure type temperature controller stopping action plate | |
| CN207409564U (en) | A kind of tractor lithium battery group | |
| CN201165565Y (en) | Single crystal permanent magnet field | |
| CN202658218U (en) | Mask group for organic electroluminescent display evaporation | |
| CN204818704U (en) | A gun platform assembly fixture charges | |
| CN201966713U (en) | Bottom plate of thin hole discharging machine | |
| CN204981167U (en) | Graphite base for polycrystalline silicon reduction furnace with exhausting function | |
| CN202360550U (en) | Self-locking nut for supporting plate | |
| CN202066350U (en) | Crucible insulation board | |
| CN205028984U (en) | Radiating battery box of initiative | |
| CN203733883U (en) | Negative electrode structure of lithium battery | |
| CN206878054U (en) | A kind of battery tray | |
| CN203660007U (en) | Lithium battery formation cabinet | |
| CN209447899U (en) | A kind of solid spacer ring and the rectangular aluminum-shell battery comprising the device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140702 Termination date: 20161231 |