CN205856603U - Full-automatic tube-type PECVD graphite boat process point erecting device - Google Patents
Full-automatic tube-type PECVD graphite boat process point erecting device Download PDFInfo
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- CN205856603U CN205856603U CN201620652548.9U CN201620652548U CN205856603U CN 205856603 U CN205856603 U CN 205856603U CN 201620652548 U CN201620652548 U CN 201620652548U CN 205856603 U CN205856603 U CN 205856603U
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- process point
- graphite boat
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Abstract
This utility model relates to a kind of Full-automatic tube-type PECVD graphite boat process point erecting device, including process point feeding device, graphite boat conveyer device and process point press-loading apparatus, process point feeding device provides process point for described graphite boat conveyer device, and process point press-loading apparatus is arranged on the surface of graphite boat conveyer device.This utility model uses process point feeding device to carry out arrangement and the conveying of process point, the process point arranged is transported on the graphite boat in graphite boat conveyer device, re-use process point press-loading apparatus and process point is pressed fit in graphite boat, all operation is all automatically performed by machine, save manpower, improve installation effectiveness, improve labor productivity.
Description
Technical field
This utility model relates to solar battery sheet manufacturing technology field, especially relates to a kind of Full-automatic tube-type PECVD
Graphite boat process point erecting device.
Background technology
In the manufacture process of solar battery sheet, when silicon chip carries out its surface coating operation, need uncoated silicon
Sheet inserts on the loader of PECVD vacuum coating equipment, and at present, loader generally uses graphite boat as shown in figure 14, specifically
Operating process is: silicon chip insert graphite boat and is positioned thereon by graphite boat process point, then, will be loaded with the graphite of silicon chip
Boat is placed in PECVD vacuum coating equipment, uses pecvd process that silicon chip is carried out plated film.
Existing graphite boat process point is mainly installed by fixture block and the cylinder shape for being arranged in graphite boat piece installing hole
Portion forms, and fixture block is two and is symmetrically distributed in installation portion both ends of the surface, and fixture block is the most tapered cylinder, its end face
And use arc-shaped transitional surface between side, between root and the end face of installation portion of fixture block, form the card for engaging silicon chip respectively
Groove.Existing graphite boat is when using 30run (secondary), it may appear that edge blushing, and more serious to the later stage, and is doing
During MUL and NY technique, process point can be burnt, and when especially doing MUL technique, process point is burnt and increased the weight of, and ratio of burning once exceeded
30%.Therefore, in daily production, the maintenance of tubular type PECVD graphite boat and maintenance are more frequent, and the process point of graphite boat length is more,
If the most manually installing, labor workload is very big, and installation effectiveness is relatively low.
Utility model content
The technical problems to be solved in the utility model is: in order to overcome in prior art the maintenance of tubular type PECVD graphite boat and
Safeguarding more frequent, the process point of graphite boat length is more, if the most manually installing, labor workload is very big, and installation effectiveness is relatively
Low problem, it is provided that a kind of Full-automatic tube-type PECVD graphite boat process point erecting device.
This utility model solves its technical problem and be the technical scheme is that a kind of Full-automatic tube-type PECVD graphite boat
Process point erecting device, including process point feeding device, graphite boat conveyer device and process point press-loading apparatus, in described process point
Material device provides process point for described graphite boat conveyer device, and described process point press-loading apparatus is arranged on described graphite boat conveying dress
The surface put.
Further, in order to realize the fully automatic feeding of process point, described process point feeding device includes that process point is arranged
Device and process point transfer device, described process point transfer device is arranged on the surface of described process point arrangement apparatus.
Further, described process point arrangement apparatus includes base, installing plate and vibrating tray, and described installing plate slides and pacifies
Being contained on described base, described installing plate is driven by mobile device and realizes linear reciprocating motion, and two described vibrating trays divide
It is not positioned at the both sides of described mobile device, described installing plate has the blind hole that some and on graphite boat fabrication holes are corresponding,
The degree of depth of described blind hole is slightly less than the height of process point, and the discharging opening of two described vibrating trays is same with described installing plate respectively
Two described blind holes of end are coaxially disposed, for the position of positioning process point more accurately, the discharging opening of described vibrating tray
Radius and the radius of blind hole all equal with the radius of process point, the upper table of the discharging opening of described vibrating tray and described installing plate
Fit in face, process point from vibrating tray out after, can fall directly in blind hole, it is to avoid process point is falling into the process of blind hole
The movement of middle process point and setting.
Further, described process point transfer device includes sucker, the lowering or hoisting gear driving sucker lifting and drives sucker
The mobile device of movement, described sucker is fixedly mounted on described lowering or hoisting gear by sucker installing plate, and described sucker is pottery
Sucker, some described suckers position on described sucker installing plate is corresponding with the position of the fabrication hole on graphite boat, described
Lowering or hoisting gear is slidably mounted in described mobile device.
Further, described graphite boat conveyer device includes graphite boat stationary fixture and drives graphite boat stationary fixture to move
Mobile device, described graphite boat stationary fixture is slidably mounted in described mobile device.
Further, for the most fixing graphite boat, described graphite boat stationary fixture includes base plate, solid on described base plate
Dingan County, equipped with mounting blocks, described mounting blocks has always open, and two described mounting blocks are symmetrical arranged, and described base plate has
Screwed hole, described screwed hole female thread is provided with screw, described base plate has some and on graphite boat fabrication holes corresponding
Technique blind hole, the degree of depth of technique blind hole is equal with the height of fixture block in process point, it is simple in the installation process of process point, limit
The process point processed position in this fabrication hole.
Further, described process point press-loading apparatus includes guider and pressure point device, and described guider is with described
Pressure point device is oppositely arranged.
Further, described guider includes guide plate and drives the lowering or hoisting gear of guide plate lifting, described guide plate
It is fixedly mounted on described lowering or hoisting gear, described guide plate has on some pilot holes, some described pilot holes and graphite boat
Fabrication hole corresponding, be installed with pilot sleeve, described pilot hole at described guide plate upper surface pilot hole position
With described pilot sleeve concentric.
Further, described pressure point device includes pressing plate, the lowering or hoisting gear driving pressing plate lifting and drives pressing plate to move
Mobile device, described pressing plate is fixedly mounted on described lowering or hoisting gear, and lowering or hoisting gear is slidably mounted in described mobile device, institute
Stating and be installed with the depression bar that some and on graphite boat fabrication holes are corresponding on pressing plate, described depression bar is same with described pilot sleeve
Axle center.
Further, in order to simplify overall structure of the present utility model, described mobile device is screw rod driving device, including
Screw mandrel, screw mandrel tumbler, the guide rail with chute and slide block, described screw mandrel tumbler is fixing with described screw mandrel to be connected, institute
Stating slide block to be connected with described screw rod transmission, described slide block is slidably mounted in described guide rail.
Further, in order to simplify overall structure of the present utility model, described lowering or hoisting gear is for promoting cylinder.
The beneficial effects of the utility model are: this utility model use process point feeding device carry out the arrangement of process point with
Conveying, is transported to the process point arranged on the graphite boat in graphite boat conveyer device, and re-using process point press-loading apparatus will
Process point presses fit in graphite boat, and whole operations are all automatically performed by machine, save manpower, improve installation effectiveness, carry
High labor productivity.
Accompanying drawing explanation
With embodiment, this utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is three-dimensional assembling schematic diagram of the present utility model；
Fig. 2 is front view of the present utility model；
Fig. 3 is the three-dimensional assembling schematic diagram of process point arrangement apparatus in this utility model；
Fig. 4 is the enlarged drawing in this utility model Fig. 3 at A；
Fig. 5 is the three-dimensional assembling schematic diagram of process point transfer device in this utility model；
Fig. 6 is that in this utility model, graphite boat conveyer device assembles schematic diagram with the three-dimensional of guider；
Fig. 7 is the three-dimensional assembling schematic diagram of pressure point device in this utility model；
Fig. 8 is that in this utility model, graphite boat stationary fixture assembles schematic diagram with the three-dimensional of graphite boat；
Fig. 9 is the three-dimensional assembling schematic diagram of graphite boat stationary fixture in this utility model；
Figure 10 is the schematic three dimensional views of guide plate in this utility model；
Figure 11 is the schematic three dimensional views of installing plate in this utility model；
Figure 12 is sucker and the schematic three dimensional views of sucker installing plate in this utility model；
Figure 13 is the schematic three dimensional views of this utility model center platen；
Figure 14 is the top view of graphite boat.
In figure: 1. base, 2. installing plate, 3. vibrating tray, 4. blind hole, 5. discharging opening, 6. sucker, 7. base plate, 8. install
Block, the most always open, 10. graphite boat, 11. screws, 12. technique blind holes, 13. guide plates, 14. pilot holes, 15. pressing plates, 16. pressures
Bar, 17. screw mandrels, 18. guide rails, 19. motors, 20. lift cylinders, 21. sucker installing plates, 22. supports, 23. pilot sleeves.
Detailed description of the invention
Presently in connection with accompanying drawing, the utility model is described in more detail.These accompanying drawings are the schematic diagram of simplification,
Basic structure of the present utility model is described the most in a schematic way, and therefore it only shows the composition relevant with this utility model.
A kind of Full-automatic tube-type PECVD graphite boat process point erecting device as depicted in figs. 1 and 2, including such as Fig. 3 and Tu
Process point arrangement apparatus shown in 4, described process point arrangement apparatus includes base 1, installing plate 2 as shown in figure 11 and vibration material
Dish 3, described base 1 is installed with two closed slides 18 having chute, is installed with cunning below described installing plate 2
Block, described slide block is slidably mounted on described guide rail 18, described base 1 is rotatablely equipped with screw mandrel 17, and described slide block is with described
Screw mandrel 17 is in transmission connection, and described screw mandrel 17 is driven by motor 19 and rotates, and two described vibrating trays 3 lay respectively at described guide rail
The both sides of 18, described installing plate 2 has the blind hole 4 that some and on graphite boat 10 fabrication holes are corresponding, described blind hole 4 deep
Degree is slightly less than the height of process point, the discharging opening 5 of two described vibrating trays 3 respectively with described installing plate 2 with the two of one end
Individual described blind hole 4 is coaxially disposed, for the position of positioning process point more accurately, the radius of the discharging opening 5 of described vibrating tray 3
All equal with the radius of process point with the radius of blind hole 4, the discharging opening 5 of described vibrating tray 3 and the upper surface of described installing plate 2
Laminating, process point from vibrating tray 3 out after, can fall directly in blind hole 4, it is to avoid process point is in the mistake falling into blind hole 4
The movement of process point and setting in journey.
Fixedly mount two closed slides 18 by support 22 on described base 1, support 22 rotates screw mandrel 17, silk are installed
Bar 17 is driven by motor 19 and rotates, and on screw mandrel 17, slide block is installed in transmission, and slide block is slidably arranged in the chute on guide rail 18, sliding
Fixedly mounting lift cylinder 20 on block, the external part of lift cylinder 20 passes slide block, with sucker installing plate 21 as shown in figure 12
Fixing connection, as it is shown in figure 5, sucker installing plate 21 is positioned at the surface of installing plate 2, sucker installing plate 21 is installed with suction
Dish 6, some described suckers 6 position on described sucker installing plate 21 is corresponding with the position of the fabrication hole on graphite boat 10,
Described sucker 6 is pottery sucker.
On base 1, the side of process point arrangement apparatus is provided with two closed slides 18, the length of these two closed slides 18
Direction is vertical with the length direction of process point arrangement apparatus upper rail 18, and screw mandrel 17 is rotatably installed on base 1, and screw mandrel 17 passes through
Motor 19 drives and rotates, and on screw mandrel 17, slide block is installed in transmission, slide block fixedly mounts base plate 7, as shown in Figure 6.Between two base plates 7
Every installation, described base plate 7 is installed with mounting blocks 8, described mounting blocks 8 has always open 9, two described mounting blocks
8 are symmetrical arranged, and described base plate 7 has screwed hole, and described screwed hole female thread is provided with screw 11, and described base plate 7 has
The technique blind hole 12 that some and on graphite boat 10 fabrication holes are corresponding, as it is shown in figure 9, the degree of depth of technique blind hole 12 and process point
The height of middle fixture block is equal, it is simple in the installation process of process point, limits process point position in this fabrication hole.
The equal mounting bracket in both sides 22 of base 1 upper plate 7 place guide rail 18, support 22 fixedly mounts lift cylinder
20, the external part fixed installation guide plate 13 of lift cylinder 20, described guide plate 13 has some pilot holes 14, such as Figure 10 institute
Showing, some described pilot holes 14 are corresponding with the fabrication hole on graphite boat 10, described guide plate 13 upper surface pilot hole 14 place
Position is installed with pilot sleeve 23, described pilot hole 14 and described pilot sleeve 23 concentric.
On the screw mandrel 17 that driving sucker installing plate 21 moves, two slide blocks are installed in transmission, a slide block is installed and drives sucker
The lift cylinder 20 of installing plate 21 lifting, another slide block is installed the lift cylinder 20 driving pressing plate 15 lifting, two slide blocks
Compartment is arranged, and pressing plate 15 is fixing with the external part of lift cylinder 20 to be connected, as it is shown in fig. 7, pressing plate 15 is just being positioned at guide plate 13
Top, described pressing plate 15 is installed with the depression bar 16 that some and on graphite boat 10 fabrication holes are corresponding, as shown in figure 13,
Described depression bar 16 and described pilot sleeve 23 concentric.
Work process:
1, process point to be mounted need to put into vibrating tray 3, Vibration on Start-up charging tray 3, make process point enter vibration material
The discharging opening 5 of dish 3.
2, before the work of this device, the discharging opening 5 of two vibrating trays 3 respectively with installing plate 2 with two blind holes 4 of one end
Being coaxially disposed, start the motor 19 in process point arrangement apparatus, motor 19 drives screw mandrel 17 to rotate, and screw mandrel 17 drives installing plate 2
Mobile, the intermittent discharging of the discharging opening 5 of vibrating tray 3, the interval time of discharging is identical, after i.e. installing plate 2 moves a certain distance
Vibrating tray 3 discharging, it is ensured that process point accurately falls in the blind hole 4 on installing plate 2.
3, after discharging opening 5 discharging seven times of vibrating tray 3, in the blind hole 4 on installing plate 2, all have been loaded with process point, close
Close the discharging opening 5 of vibrating tray 3.
4, installing plate 2 is after filling process point, just moves to the underface of sucker installing plate 212, sucker installing plate 21
On sucker 6 and blind hole 4 one_to_one corresponding on installing plate 2, start the lift cylinder 20 driving sucker installing plate 21 lifting, lifting
Cylinder 20 external part drives sucker installing plate 21 close to installing plate 2, after sucker 6 contacts with process point, closes lift cylinder
20, start sucker 6, process point is held by sucker 6, starts lift cylinder 20, and lift cylinder 20 external part bounces back, and drives sucker peace
Dress plate 21 resets, and closes lift cylinder 20.
5, starting the motor 19 in process point arrangement apparatus, motor 19 inverts, and drives installing plate 2 to reset, and repeats the 2nd and the
3 steps.
6, starting the motor 19 in process point transfer device, motor 19 rotates, and drives screw mandrel 17 to rotate, and screw mandrel 17 rotates,
Band movable slider moves, slide block drive sucker installing plate 21 move to graphite boat conveyer device, due to pressing plate 15 installation slide block with
The installation slide block of sucker installing plate 21 is arranged on same screw mandrel 17, and interval is arranged, defeated to graphite boat at sucker installing plate 21
While sending device to move, slide block band dynamic pressure plate 15, away from graphite boat conveyer device, treats that sucker installing plate 21 moves to guide plate
After pilot sleeve 23 one_to_one corresponding on the surface of 13, the process point that on sucker installing plate 21, sucker 6 holds and guide plate 13,
Close motor 19.
7, while 1-6 step is carried out, the base plate 7 that graphite boat installs stationary fixture fixedly mounts graphite boat 10,
As shown in Figure 8, the fabrication hole on mounted graphite boat 10 and technique blind hole 12 one_to_one corresponding on base plate 7.
8, starting the motor 19 in graphite boat conveyer device, motor 19 rotates, and drives screw mandrel 17 to rotate, and screw mandrel 17 rotates,
Band movable slider moves, and slide block drives base plate 7 to move to guide plate 13, treats that base plate 7 moves to the underface of guide plate 13, graphite boat
When the fabrication hole on 10 and pilot hole 14 one_to_one corresponding in guide plate 13, close motor 19, owing to installing on a screw mandrel 17
Having two base plates 7, two base plates 7 intervals are arranged, when a base plate 7 is positioned at immediately below guide plate 13, another base plate 7 away from
Guide plate 13, convenient installation graphite boat 10 on base plate 7.
9, starting the lift cylinder 20 driving guide plate 13 to lift, lift cylinder 20 external part stretches out, and drives guide plate 13
Base plate 7 immediately below guide plate 13 moves, and during the upper surface of the lower surface of subject-oriented plate 13 and graphite boat 10, closes and rises
Sending down the abnormal ascending QI cylinder 20.
10, starting the lift cylinder 20 driving sucker installing plate 21 to lift, lift cylinder 20 external part stretches out, and drives sucker
The installing plate 21 guide plate 13 immediately below it moves, and treats lower surface and the upper table of pilot sleeve 23 on guide plate 13 of sucker 6
Face contact time, close sucker 6, make the process point on sucker 6 fall in pilot sleeve 23, due to pilot sleeve 23 inside radius with
The radius of process point is equal, and the fixture block in process point is setting up and down, enters in pilot sleeve 23.
11, the motor 19 in process point transfer device is started, motor 19 reaction, drive screw mandrel 17 to rotate, screw mandrel 17 rotates,
Band movable slider moves, and slide block drives sucker installing plate 21 to move away from graphite boat conveyer device, resets, due to pressing plate 15
The installation slide block installing slide block and sucker installing plate 21 is arranged on same screw mandrel 17, and interval is arranged, at sucker installing plate 21
While moving away from graphite boat conveyer device, slide block band dynamic pressure plate 15, near graphite boat conveyer device, treats that pressing plate 15 moves to
After the surface of guide plate 13, the depression bar 16 on pressing plate 15 and pilot sleeve 23 one_to_one corresponding on guide plate 13, close motor
19。
12, starting the lift cylinder 20 driving pressing plate 15 to lift, lift cylinder 20 external part stretches out, band dynamic pressure plate 15 guide
Close to plate 13, depression bar 16 stretches in pilot sleeve 23, promotes the process point in pilot sleeve 23 to move downward, treats under process point
The fixture block of side is with when on base plate 7, the bottom of technique blind hole 12 contacts, and lift cylinder 20 shrinks, and band dynamic pressure plate 15 is away from guide plate
13, after lift cylinder 20 resets, close lift cylinder 20.
13,1-12 step is repeated.
With above-mentioned according to desirable embodiment of the present utility model for enlightenment, by above-mentioned description, related work people
Member can carry out various change and amendment completely in the range of without departing from this utility model technological thought.This reality
The content being not limited in description by novel technical scope, it is necessary to determine its technology according to right
Property scope.
Claims (3)
1. a Full-automatic tube-type PECVD graphite boat process point erecting device, it is characterised in that: include process point feeding device,
Graphite boat conveyer device and process point press-loading apparatus, described process point feeding device provides technique for described graphite boat conveyer device
Point, described process point press-loading apparatus is arranged on the surface of described graphite boat conveyer device；
Described process point feeding device includes that process point arrangement apparatus and process point transfer device, described process point transfer device set
Put the surface at described process point arrangement apparatus；
Described process point arrangement apparatus includes base (1), installing plate (2) and vibrating tray (3), and described installing plate (2) slides and pacifies
Being contained on described base (1), described installing plate (2) is driven by mobile device and realizes linear reciprocating motion, two described vibrations
Charging tray (3) lays respectively at the both sides of described mobile device, and described installing plate (2) has some and on graphite boat (10) technique
The blind hole (4) that hole is corresponding, the discharging opening (5) of two described vibrating trays (3) respectively with described installing plate (2) with one end
Two described blind holes (4) are coaxially disposed；
Described process point transfer device includes sucker (6), the lowering or hoisting gear driving sucker (6) to lift and drives sucker (6) mobile
Mobile device, described sucker (6) is fixedly mounted on described lowering or hoisting gear, and described lowering or hoisting gear is slidably mounted on described movement
On device；
Described graphite boat conveyer device includes graphite boat stationary fixture and the mobile device driving graphite boat stationary fixture to move, institute
State graphite boat stationary fixture to be slidably mounted in described mobile device；
Described graphite boat stationary fixture includes base plate (7), and described base plate (7) is installed with mounting blocks (8), described mounting blocks
(8) having on always open (9), two described mounting blocks (8) are symmetrical arranged, and described base plate (7) has screwed hole, described spiral shell
Pit female thread is provided with screw (11), described base plate (7) has some and on graphite boat (10) fabrication holes corresponding
Technique blind hole (12)；
Described process point press-loading apparatus includes guider and pressure point device, and described guider is relative with described pressure point device to be set
Put；
Described guider includes guide plate (13) and the lowering or hoisting gear driving guide plate (13) to lift, and described guide plate (13) is solid
Dingan County is contained on described lowering or hoisting gear, and described guide plate (13) has some pilot holes (14), some described pilot holes (14)
Corresponding with the fabrication hole on graphite boat (10), fixedly mount at described guide plate (13) upper surface pilot hole (14) position
There are pilot sleeve (23), described pilot hole (14) and described pilot sleeve (23) concentric；
Described pressure point device includes pressing plate (15), the lowering or hoisting gear driving pressing plate (15) to lift and the shifting driving pressing plate (15) movement
Dynamic device, described pressing plate (15) is fixedly mounted on described lowering or hoisting gear, and lowering or hoisting gear is slidably mounted in described mobile device,
The depression bar (16) that some and on graphite boat (10) fabrication holes are corresponding, described depression bar it is installed with on described pressing plate (15)
(16) with described pilot hole (14) concentric.
2. Full-automatic tube-type PECVD graphite boat process point erecting device as claimed in claim 1, it is characterised in that: described shifting
Dynamic device is screw rod driving device, including screw mandrel (17), and screw mandrel tumbler, the guide rail (18) with chute and slide block, described
Screw mandrel tumbler is fixing with described screw mandrel (17) to be connected, and described slide block is in transmission connection with described screw mandrel (17), and described slide block is sliding
Move and be arranged in described guide rail (18).
3. Full-automatic tube-type PECVD graphite boat process point erecting device as claimed in claim 1, it is characterised in that: described liter
Falling unit is for promoting cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620652548.9U CN205856603U (en) | 2016-06-27 | 2016-06-27 | Full-automatic tube-type PECVD graphite boat process point erecting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620652548.9U CN205856603U (en) | 2016-06-27 | 2016-06-27 | Full-automatic tube-type PECVD graphite boat process point erecting device |
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| Publication Number | Publication Date |
|---|---|
| CN205856603U true CN205856603U (en) | 2017-01-04 |
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ID=57636219
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620652548.9U Active CN205856603U (en) | 2016-06-27 | 2016-06-27 | Full-automatic tube-type PECVD graphite boat process point erecting device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108914090A (en) * | 2018-09-14 | 2018-11-30 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point changing machine |
-
2016
- 2016-06-27 CN CN201620652548.9U patent/CN205856603U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108914090A (en) * | 2018-09-14 | 2018-11-30 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point changing machine |
| CN108914090B (en) * | 2018-09-14 | 2024-01-02 | 江苏润阳悦达光伏科技有限公司 | Semi-automatic graphite boat stuck point replacing machine |
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