CN205790036U - Tubular type PECVD graphite boat process point feeding device - Google Patents
Tubular type PECVD graphite boat process point feeding device Download PDFInfo
- Publication number
- CN205790036U CN205790036U CN201620650763.5U CN201620650763U CN205790036U CN 205790036 U CN205790036 U CN 205790036U CN 201620650763 U CN201620650763 U CN 201620650763U CN 205790036 U CN205790036 U CN 205790036U
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- CN
- China
- Prior art keywords
- process point
- installing plate
- graphite boat
- sucker
- tubular type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
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Abstract
This utility model relates to a kind of tubular type PECVD graphite boat process point feeding device, and including process point arrangement apparatus and process point transfer device, process point transfer device is arranged on the surface of process point arrangement apparatus.This utility model uses process point arrangement apparatus that by the position of fabrication hole on graphite boat, process point is carried out one_to_one corresponding arrangement on a mounting board, the process point arranged is transported to subsequent processing by process point transfer device and carries out the installation of process point, whole conveying operations of process point are all automatically performed by machine, save manpower, improve installation effectiveness, improve labor productivity.
Description
Technical field
This utility model relates to solar battery sheet manufacturing technology field, especially relates to a kind of tubular type PECVD graphite boat
Process point feeding device.
Background technology
In the manufacture process of solar battery sheet, when silicon chip carries out its surface coating operation, need uncoated silicon
Sheet inserts on the loader of PECVD vacuum coating equipment, and at present, loader generally uses graphite boat as shown in Figure 8, specifically grasps
As process it is: silicon chip inserted graphite boat and is positioned thereon by graphite boat process point, then, the graphite boat of silicon chip will be loaded with
It is placed in PECVD vacuum coating equipment, uses pecvd process that silicon chip is carried out plated film.
Existing graphite boat process point is mainly installed by fixture block and the cylinder shape for being arranged in graphite boat piece installing hole
Portion forms, and fixture block is two and is symmetrically distributed in installation portion both ends of the surface, and fixture block is the most tapered cylinder, its end face
And use arc-shaped transitional surface between side, between root and the end face of installation portion of fixture block, form the card for engaging silicon chip respectively
Groove.Existing graphite boat is when using 30run (secondary), it may appear that edge blushing, and more serious to the later stage, and is doing
During MUL and NY technique, process point can be burnt, and when especially doing MUL technique, process point is burnt and increased the weight of, and ratio of burning once exceeded
30%.Therefore, in daily production, the maintenance of tubular type PECVD graphite boat and maintenance are more frequent, existing semi-automatic graphite boat work
Skill point erecting device, when the process point feeding of graphite boat, is to use artificial loading, owing to the fabrication hole on graphite boat is more, because of
Needing more process point during this feeding, if the most manually installing, labor workload is very big, and installation effectiveness is relatively low.
Utility model content
The technical problems to be solved in the utility model is: in order to overcome existing existing semi-automatic graphite boat process point to install
Device, when the process point feeding of graphite boat, is to use artificial loading, owing to the fabrication hole on graphite boat is more, therefore during feeding
Needing more process point, if the most manually installing, labor workload is very big, the problem that installation effectiveness is relatively low, it is provided that a kind of
Tubular type PECVD graphite boat process point feeding device.
This utility model solves its technical problem and be the technical scheme is that a kind of tubular type PECVD graphite boat process point
Feeding device, including process point arrangement apparatus and process point transfer device, described process point transfer device is arranged on described technique
The surface of some arrangement apparatus.
Further, described process point arrangement apparatus includes base, installing plate and vibrating tray, and described installing plate slides and pacifies
Being contained on described base, described installing plate is driven by mobile device and realizes linear reciprocating motion, and two described vibrating trays divide
It is not positioned at the both sides of described mobile device, described installing plate has the blind hole that some and on graphite boat fabrication holes are corresponding,
The discharging opening of two described vibrating trays is coaxially disposed with two described blind holes of one end with described installing plate respectively.
Further, described process point transfer device includes sucker, the lowering or hoisting gear driving sucker lifting and drives sucker
The mobile device of movement, described sucker is fixedly mounted on described lowering or hoisting gear by sucker installing plate, and described sucker is pottery
Sucker, some described suckers position on described sucker installing plate is corresponding with the position of the fabrication hole on graphite boat, described
Lowering or hoisting gear is slidably mounted in described mobile device.
For the ease of in subsequent processing, process point drawn by sucker, and on described installing plate, the degree of depth of blind hole is less than process point
Height.
For the position of positioning process point more accurately, the radius of the discharging opening of described vibrating tray and the radius of blind hole are equal
Equal with the radius of process point, the upper surface laminating of the discharging opening of described vibrating tray and described installing plate, process point is from vibration
Charging tray out after, can fall directly in blind hole, it is to avoid process point during falling into blind hole the movement of process point with perpendicular
Vertical.
Further, in order to simplify overall structure of the present utility model, described mobile device is screw rod driving device, including
Screw mandrel, screw mandrel tumbler, the guide rail with chute and slide block, described screw mandrel tumbler is fixing with described screw mandrel to be connected, institute
Stating slide block to be connected with described screw rod transmission, described slide block is slidably mounted in described guide rail.
Further, in order to simplify overall structure of the present utility model, described lowering or hoisting gear is for promoting cylinder.
The beneficial effects of the utility model are: this utility model uses process point arrangement apparatus to process point by graphite boat
The position of fabrication hole carries out one_to_one corresponding arrangement on a mounting board, the process point arranged is carried by process point transfer device
Carry out the installation of process point to subsequent processing, whole conveying operations of process point are all automatically performed by machine, save manpower,
Improve installation effectiveness, improve labor productivity.
Accompanying drawing explanation
With embodiment, this utility model is further illustrated below in conjunction with the accompanying drawings.
Fig. 1 is three-dimensional assembling schematic diagram of the present utility model；
Fig. 2 is front view of the present utility model；
Fig. 3 is the three-dimensional assembling schematic diagram of process point arrangement apparatus in this utility model；
Fig. 4 is the enlarged drawing in this utility model Fig. 3 at A；
Fig. 5 is the three-dimensional assembling schematic diagram of process point transfer device in this utility model；
Fig. 6 is the schematic three dimensional views of installing plate in this utility model；
Fig. 7 is the three-dimensional assembling schematic diagram that in this utility model, sucker and sucker are installed；
Fig. 8 is the top view of graphite boat.
In figure: 1. base, 2. installing plate, 3. vibrating tray, 4. blind hole, 5. discharging opening, 6. sucker, 7. screw mandrel, 8. guide rail,
9. motor, 10. graphite boat, 11. lift cylinders, 12. supports, 13. sucker installing plates.
Detailed description of the invention
Presently in connection with accompanying drawing, the utility model is described in more detail.These accompanying drawings are the schematic diagram of simplification,
Basic structure of the present utility model is described the most in a schematic way, and therefore it only shows the composition relevant with this utility model.
A kind of tubular type PECVD graphite boat process point feeding device as depicted in figs. 1 and 2, including process point arrangement apparatus,
Described process point arrangement apparatus includes base 1, installing plate 2 as shown in Figure 6 and vibrating tray 3, and described base 1 fixedly mounts
Having two closed slides having chute 8, be installed with slide block below described installing plate 2, described slide block is slidably mounted on institute
Stating on guide rail 8, described base 1 is rotatablely equipped with screw mandrel 7, described slide block is in transmission connection with described screw mandrel 7, and described screw mandrel 7 leads to
Crossing motor 9 and drive rotation, two described vibrating trays 3 lay respectively at the both sides of described guide rail 8, as it is shown on figure 3, described installing plate
Having the blind hole 4 that some and on graphite boat 10 fabrication holes are corresponding on 2, the degree of depth of described blind hole 4 is slightly less than the height of process point
Degree, the discharging opening 5 of two described vibrating trays 3 coaxially sets with two described blind holes 4 of one end with described installing plate 2 respectively
Put, as shown in Figure 4, for the position of positioning process point more accurately, the radius of the discharging opening 5 of described vibrating tray 3 and blind hole 4
Radius all equal with the radius of process point, the upper surface laminating of the discharging opening of described vibrating tray 35 and described installing plate 2, work
Skill point from vibrating tray 3 out after, can fall directly in blind hole 4, it is to avoid process point technique during falling into blind hole 4
The movement of point and setting.
Fixedly mount two closed slides 8 by support 12 on described base 1, support 12 rotates screw mandrel 7, screw mandrel are installed
7 drive rotation by motor 9, and on screw mandrel 7, slide block is installed in transmission, and slide block is slidably arranged in the chute on guide rail 8, solid on slide block
Dingan County's dress lift cylinder 11, the external part of lift cylinder 11 passes slide block, fixing even with sucker installing plate 13 as shown in Figure 7
Connect, as it is shown in figure 5, sucker installing plate 13 is positioned at the surface of installing plate 2, sucker installing plate 13 is installed with sucker 6, if
The dry described sucker 6 position on described sucker installing plate 13 is corresponding with the position of the fabrication hole on graphite boat 10, described suction
Dish 6 is pottery sucker.
Work process:
1, process point to be mounted need to put into vibrating tray 3, Vibration on Start-up charging tray 3, make process point enter vibration material
The discharging opening 5 of dish 3.
2, before the work of this device, the discharging opening 5 of two vibrating trays 3 respectively with installing plate 2 with two blind holes 4 of one end
Being coaxially disposed, start the motor 9 in process point arrangement apparatus, motor 9 drives screw mandrel 7 to rotate, and screw mandrel 7 drives installing plate 2 to move,
The intermittent discharging of the discharging opening 5 of vibrating tray 3, the interval time of discharging is identical, i.e. installing plate 2 moves a certain distance after vibration material
Dish 3 discharging, it is ensured that process point accurately falls in the blind hole 4 on installing plate 2.
3, after discharging opening 5 discharging seven times of vibrating tray 3, in the blind hole 4 on installing plate 2, all have been loaded with process point, close
Close the discharging opening 5 of vibrating tray 3.
4, installing plate 2 is after filling process point, just moves to the underface of sucker installing plate 13, on sucker installing plate 13
Sucker 6 and blind hole 4 one_to_one corresponding on installing plate 2, start the lift cylinder 11 driving sucker installing plate 13 lifting, lifting air
Cylinder 11 external part drives sucker installing plate 13 close to installing plate 2, after sucker 6 contacts with process point, closes lift cylinder 11,
Starting sucker 6, process point is held by sucker 6, starts lift cylinder 11, and lift cylinder 11 external part bounces back, and drives sucker to install
Plate 13 resets, and closes lift cylinder 11.
5, starting the motor 9 in process point arrangement apparatus, motor 9 inverts, and drives installing plate 2 to reset, repeats the 2nd and the 3rd
Step.
6, starting the motor 9 in process point transfer device, motor 9 rotates, and drives screw mandrel 7 to rotate, and screw mandrel 7 rotates, and drives
Slide block moves, and slide block drives sucker installing plate 13 to move to moving down operation, after moving to move down operation, closes motor 9.
7, starting the lift cylinder 11 driving sucker installing plate 13 to lift, lift cylinder 11 external part stretches out, and drives sucker
Installing plate 13 moves immediately below it, when sucker 6 moves to relevant position, closes sucker 6, makes under the process point on sucker 6
Fall.
8, the motor 9 in process point transfer device is started, motor 9 reaction, drive screw mandrel 7 to rotate, screw mandrel 7 rotates, and drives
Slide block moves, slide block drive sucker installing plate 13 away from, reset, after reset close motor 9.
With above-mentioned according to desirable embodiment of the present utility model for enlightenment, by above-mentioned description, related work people
Member can carry out various change and amendment completely in the range of without departing from this utility model technological thought.This reality
The content being not limited in description by novel technical scope, it is necessary to determine its technology according to right
Property scope.
Claims (5)
1. a tubular type PECVD graphite boat process point feeding device, it is characterised in that: include process point arrangement apparatus and process point
Transfer device, described process point transfer device is arranged on the surface of described process point arrangement apparatus, described process point arrangement dress
Putting and include base (1), installing plate (2) and vibrating tray (3), described installing plate (2) is slidably mounted on described base (1), institute
Stating installing plate (2) and realize linear reciprocating motion by mobile device driving, two described vibrating trays (3) lay respectively at described shifting
The both sides of dynamic device, described installing plate (2) has the blind hole (4) that some and on graphite boat (10) fabrication holes are corresponding, and two
The discharging opening (5) of individual described vibrating tray (3) is coaxial with two described blind holes (4) of one end with described installing plate (2) respectively
Arranging, described process point transfer device includes sucker (6), the lowering or hoisting gear driving sucker (6) to lift and drives sucker (6) mobile
Mobile device, described sucker (6) is fixedly mounted on described lowering or hoisting gear, and described lowering or hoisting gear is slidably mounted on described movement
On device.
2. tubular type PECVD graphite boat process point feeding device as claimed in claim 1, it is characterised in that: described installing plate (2)
The degree of depth of upper blind hole (4) is less than the height of process point.
3. tubular type PECVD graphite boat process point feeding device as claimed in claim 1, it is characterised in that: described vibrating tray
(3) radius of discharging opening (5) and the radius of blind hole (4) are all equal with the radius of process point, the discharging of described vibrating tray (3)
The upper surface laminating of mouth (5) and described installing plate (2).
4. tubular type PECVD graphite boat process point feeding device as claimed in claim 1, it is characterised in that: described mobile device
For screw rod driving device, including screw mandrel (7), screw mandrel tumbler, the guide rail (8) with chute and slide block, described screw mandrel rotates
Device is fixing with described screw mandrel (7) to be connected, and described slide block is in transmission connection with described screw mandrel (7), and described slide block is slidably mounted on institute
State in guide rail (8).
5. tubular type PECVD graphite boat process point feeding device as claimed in claim 1, it is characterised in that: described lowering or hoisting gear
For promoting cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620650763.5U CN205790036U (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point feeding device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620650763.5U CN205790036U (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point feeding device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205790036U true CN205790036U (en) | 2016-12-07 |
Family
ID=58128987
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620650763.5U Withdrawn - After Issue CN205790036U (en) | 2016-06-27 | 2016-06-27 | Tubular type PECVD graphite boat process point feeding device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205790036U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105957922A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Feeding apparatus for processing points of tubular PECVD graphite boat |
| CN107369637A (en) * | 2017-07-11 | 2017-11-21 | 苏州通博半导体科技有限公司 | The inclined blend stop device of magazine in one kind prevention AD8312 equipment |
-
2016
- 2016-06-27 CN CN201620650763.5U patent/CN205790036U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105957922A (en) * | 2016-06-27 | 2016-09-21 | 常州亿晶光电科技有限公司 | Feeding apparatus for processing points of tubular PECVD graphite boat |
| CN107369637A (en) * | 2017-07-11 | 2017-11-21 | 苏州通博半导体科技有限公司 | The inclined blend stop device of magazine in one kind prevention AD8312 equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20161207 Effective date of abandoning: 20170510 |