CN105946126B - 硅棒流水作业系统及硅棒流水作业方法 - Google Patents
硅棒流水作业系统及硅棒流水作业方法 Download PDFInfo
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- CN105946126B CN105946126B CN201610345641.XA CN201610345641A CN105946126B CN 105946126 B CN105946126 B CN 105946126B CN 201610345641 A CN201610345641 A CN 201610345641A CN 105946126 B CN105946126 B CN 105946126B
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- silicon rod
- intercept
- cut
- equipment
- silicon
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 730
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 730
- 239000010703 silicon Substances 0.000 title claims abstract description 730
- 238000000034 method Methods 0.000 title claims abstract description 33
- 230000008569 process Effects 0.000 title claims abstract description 18
- 235000013312 flour Nutrition 0.000 claims abstract description 50
- 238000003801 milling Methods 0.000 claims abstract description 50
- 230000005540 biological transmission Effects 0.000 claims abstract description 39
- 238000005498 polishing Methods 0.000 claims abstract description 39
- 238000003754 machining Methods 0.000 claims abstract description 35
- 238000005520 cutting process Methods 0.000 claims description 210
- 230000007246 mechanism Effects 0.000 claims description 55
- 238000012546 transfer Methods 0.000 claims description 33
- 230000001105 regulatory effect Effects 0.000 claims description 6
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000007599 discharging Methods 0.000 abstract description 17
- 238000000227 grinding Methods 0.000 description 89
- 238000004140 cleaning Methods 0.000 description 40
- 230000033001 locomotion Effects 0.000 description 30
- 238000005259 measurement Methods 0.000 description 21
- 230000003028 elevating effect Effects 0.000 description 16
- 230000000694 effects Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 230000006872 improvement Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 7
- 230000004308 accommodation Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000005096 rolling process Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 230000011218 segmentation Effects 0.000 description 5
- 238000009966 trimming Methods 0.000 description 5
- 238000005406 washing Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000004576 sand Substances 0.000 description 3
- 238000009987 spinning Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010511 deprotection reaction Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0064—Devices for the automatic drive or the program control of the machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
Abstract
Description
Claims (5)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610345641.XA CN105946126B (zh) | 2016-05-23 | 2016-05-23 | 硅棒流水作业系统及硅棒流水作业方法 |
PCT/CN2017/085048 WO2017202245A1 (zh) | 2016-05-23 | 2017-05-19 | 硅棒多工位加工机及硅棒多工位加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610345641.XA CN105946126B (zh) | 2016-05-23 | 2016-05-23 | 硅棒流水作业系统及硅棒流水作业方法 |
Publications (2)
Publication Number | Publication Date |
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CN105946126A CN105946126A (zh) | 2016-09-21 |
CN105946126B true CN105946126B (zh) | 2019-01-29 |
Family
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CN201610345641.XA Active CN105946126B (zh) | 2016-05-23 | 2016-05-23 | 硅棒流水作业系统及硅棒流水作业方法 |
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Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2017202245A1 (zh) * | 2016-05-23 | 2017-11-30 | 上海日进机床有限公司 | 硅棒多工位加工机及硅棒多工位加工方法 |
CN106711067B (zh) * | 2016-12-30 | 2023-08-22 | 沈阳昊霖智能装备有限公司 | 一种硅棒粘接自动化生产线 |
CN106827268A (zh) * | 2017-01-25 | 2017-06-13 | 上海日进机床有限公司 | 晶体硅工件截断机及晶体硅工件截断方法 |
CN106945187B (zh) * | 2017-04-01 | 2019-06-21 | 天通日进精密技术有限公司 | 线切割设备 |
CN106827274A (zh) * | 2017-04-01 | 2017-06-13 | 上海日进机床有限公司 | 硅棒截断设备及硅棒截断方法 |
CN107053504B (zh) * | 2017-04-01 | 2019-12-10 | 天通日进精密技术有限公司 | 线切割设备及线切割方法 |
CN106827273B (zh) * | 2017-04-01 | 2019-04-02 | 天通日进精密技术有限公司 | 线切割设备及线切割方法 |
CN109421178A (zh) * | 2017-09-01 | 2019-03-05 | 隆基绿能科技股份有限公司 | 工件加工生产线 |
CN107498722B (zh) * | 2017-10-17 | 2019-09-13 | 福州大学 | 可自动定心的单晶硅棒料夹持机构及其工作方法 |
CN110126107B (zh) * | 2018-02-09 | 2024-02-23 | 天通日进精密技术有限公司 | 硅棒转换装置、硅棒开方设备及硅棒开方方法 |
CN109366321B (zh) * | 2018-11-08 | 2021-06-04 | 中山市德工机械科技有限公司 | 一种智能金属表面机器人抛光打磨处理生产线 |
CN109605192A (zh) * | 2019-01-31 | 2019-04-12 | 青岛高测科技股份有限公司 | 一种半导体全自动滚圆机 |
CN110253768B (zh) * | 2019-05-27 | 2021-11-23 | 浙江鸿达石英电子科技有限公司 | 一种用于石英棒的自动切棒设备 |
CN110405487A (zh) * | 2019-09-04 | 2019-11-05 | 苏州铜盟电气有限公司 | 一种全自动化加工设备 |
CN111113050B (zh) * | 2019-12-19 | 2021-03-09 | 晋江荣达机械有限公司 | 一种自动化钣金部件上料加工成型装置 |
CN111112199A (zh) * | 2020-01-15 | 2020-05-08 | 长治高测新材料科技有限公司 | 一种硅棒自动切割、清洗、吹干一体化装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN105583958A (zh) * | 2016-03-03 | 2016-05-18 | 青岛高测科技股份有限公司 | 一种单晶硅立式单棒开方机 |
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JP3113145B2 (ja) * | 1994-03-22 | 2000-11-27 | 株式会社東京精密 | ウェーハスライスベース剥離装置 |
CN203266964U (zh) * | 2013-01-18 | 2013-11-06 | 大连连城数控机器股份有限公司 | 多线切割机单晶硅托盘输送升降装置 |
CN103806106A (zh) * | 2014-02-25 | 2014-05-21 | 英利能源(中国)有限公司 | 单晶晶棒粘接装置 |
CN105196433B (zh) * | 2015-09-24 | 2017-04-12 | 上海日进机床有限公司 | 一种单晶硅棒截断机及单晶硅棒截断方法 |
CN105538112B (zh) * | 2016-02-02 | 2018-12-11 | 天通日进精密技术有限公司 | 多工位组合式晶棒加工设备 |
CN205631054U (zh) * | 2016-05-23 | 2016-10-12 | 上海日进机床有限公司 | 硅棒流水作业系统 |
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Patent Citations (1)
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CN105583958A (zh) * | 2016-03-03 | 2016-05-18 | 青岛高测科技股份有限公司 | 一种单晶硅立式单棒开方机 |
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TA01 | Transfer of patent application right |
Effective date of registration: 20180517 Address after: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Zhejiang. Applicant after: Haining Dijin science and Technology Co., Ltd. Address before: No. 1358, nine dry road, Si Jing Town, Songjiang District, Shanghai Applicant before: Shanghai Nissin Machine Tool Co., Ltd. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20180803 Address after: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Zhejiang Applicant after: Zhejiang Ji Ying Precision Machinery Co., Ltd. Address before: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Zhejiang. Applicant before: Haining Dijin science and Technology Co., Ltd. |
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CB02 | Change of applicant information |
Address after: 314400 6 Building 129, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant after: Tiantong Tijin Precision Technology Co., Ltd. Address before: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Zhejiang Applicant before: Zhejiang Ji Ying Precision Machinery Co., Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Silicon rod flow operation system and silicon rod flow operation method Effective date of registration: 20211126 Granted publication date: 20190129 Pledgee: Hangzhou United Rural Commercial Bank Co.,Ltd. Haining sub branch Pledgor: TIANTONG RIJIN PRECISION TECHNOLOGY Co.,Ltd. Registration number: Y2021330002258 |