CN106945187B - 线切割设备 - Google Patents
线切割设备 Download PDFInfo
- Publication number
- CN106945187B CN106945187B CN201710214804.5A CN201710214804A CN106945187B CN 106945187 B CN106945187 B CN 106945187B CN 201710214804 A CN201710214804 A CN 201710214804A CN 106945187 B CN106945187 B CN 106945187B
- Authority
- CN
- China
- Prior art keywords
- workpiece
- cutting
- station
- silicon rod
- evolution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 282
- 238000012546 transfer Methods 0.000 claims abstract description 89
- 238000000034 method Methods 0.000 claims abstract description 70
- 230000007246 mechanism Effects 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 35
- 238000003860 storage Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 abstract description 22
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 204
- 229910052710 silicon Inorganic materials 0.000 description 204
- 239000010703 silicon Substances 0.000 description 204
- 229910003460 diamond Inorganic materials 0.000 description 18
- 239000010432 diamond Substances 0.000 description 18
- 230000033001 locomotion Effects 0.000 description 17
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 8
- 230000003028 elevating effect Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000007599 discharging Methods 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 238000003825 pressing Methods 0.000 description 5
- 229910000831 Steel Inorganic materials 0.000 description 4
- 229910021419 crystalline silicon Inorganic materials 0.000 description 4
- 238000013461 design Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 230000000007 visual effect Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000012937 correction Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 238000012797 qualification Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 241000254032 Acrididae Species 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000011435 rock Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
- B28D5/045—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
- B28D5/0017—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools
- B28D5/0023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing using moving tools rectilinearly
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D7/00—Accessories specially adapted for use with machines or devices of the preceding groups
- B28D7/04—Accessories specially adapted for use with machines or devices of the preceding groups for supporting or holding work or conveying or discharging work
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
Description
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710214804.5A CN106945187B (zh) | 2017-04-01 | 2017-04-01 | 线切割设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710214804.5A CN106945187B (zh) | 2017-04-01 | 2017-04-01 | 线切割设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106945187A CN106945187A (zh) | 2017-07-14 |
CN106945187B true CN106945187B (zh) | 2019-06-21 |
Family
ID=59475633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710214804.5A Active CN106945187B (zh) | 2017-04-01 | 2017-04-01 | 线切割设备 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106945187B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110625832A (zh) * | 2019-09-16 | 2019-12-31 | 武汉新芯集成电路制造有限公司 | 一种晶圆切割装置及晶圆切割方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103921360A (zh) * | 2014-04-24 | 2014-07-16 | 上海日进机床有限公司 | 一种金刚线开方机 |
CN104708719A (zh) * | 2013-12-13 | 2015-06-17 | 无锡斯达新能源科技股份有限公司 | 一种双头摇摆式蓝宝石晶圆开方机 |
CN105946126A (zh) * | 2016-05-23 | 2016-09-21 | 上海日进机床有限公司 | 硅棒流水作业系统及硅棒流水作业方法 |
CN206967756U (zh) * | 2017-04-01 | 2018-02-06 | 上海日进机床有限公司 | 线切割设备 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000153519A (ja) * | 1998-11-18 | 2000-06-06 | Sumitomo Metal Mining Co Ltd | プリズム材料の製造方法及びその方法により得られた材料 |
-
2017
- 2017-04-01 CN CN201710214804.5A patent/CN106945187B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104708719A (zh) * | 2013-12-13 | 2015-06-17 | 无锡斯达新能源科技股份有限公司 | 一种双头摇摆式蓝宝石晶圆开方机 |
CN103921360A (zh) * | 2014-04-24 | 2014-07-16 | 上海日进机床有限公司 | 一种金刚线开方机 |
CN105946126A (zh) * | 2016-05-23 | 2016-09-21 | 上海日进机床有限公司 | 硅棒流水作业系统及硅棒流水作业方法 |
CN206967756U (zh) * | 2017-04-01 | 2018-02-06 | 上海日进机床有限公司 | 线切割设备 |
Also Published As
Publication number | Publication date |
---|---|
CN106945187A (zh) | 2017-07-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180522 Address after: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang Applicant after: Haining Dijin science and Technology Co., Ltd. Address before: No. 1358, nine dry road, Si Jing Town, Songjiang District, Shanghai Applicant before: Shanghai Nissin Machine Tool Co., Ltd. |
|
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180806 Address after: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant after: Zhejiang Ji Ying Precision Machinery Co., Ltd. Address before: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang Applicant before: Haining Dijin science and Technology Co., Ltd. |
|
CB02 | Change of applicant information |
Address after: 314400 6 Building 129, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant after: Tiantong Tijin Precision Technology Co., Ltd. Address before: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant before: Zhejiang Ji Ying Precision Machinery Co., Ltd. |
|
CB02 | Change of applicant information | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Wire cutting equipment Effective date of registration: 20211126 Granted publication date: 20190621 Pledgee: Hangzhou United Rural Commercial Bank Co.,Ltd. Haining sub branch Pledgor: TIANTONG RIJIN PRECISION TECHNOLOGY Co.,Ltd. Registration number: Y2021330002258 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right |