CN106181610B - 硅棒多工位组合加工机 - Google Patents
硅棒多工位组合加工机 Download PDFInfo
- Publication number
- CN106181610B CN106181610B CN201610786297.8A CN201610786297A CN106181610B CN 106181610 B CN106181610 B CN 106181610B CN 201610786297 A CN201610786297 A CN 201610786297A CN 106181610 B CN106181610 B CN 106181610B
- Authority
- CN
- China
- Prior art keywords
- silicon rod
- pair
- grinding wheel
- silicon
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 745
- 239000010703 silicon Substances 0.000 title claims abstract description 745
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 744
- 238000012545 processing Methods 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 claims abstract description 73
- 230000008569 process Effects 0.000 claims abstract description 67
- 238000006243 chemical reaction Methods 0.000 claims abstract description 40
- 238000012546 transfer Methods 0.000 claims abstract description 33
- 230000007306 turnover Effects 0.000 claims abstract description 11
- 230000007246 mechanism Effects 0.000 claims description 53
- 238000005259 measurement Methods 0.000 claims description 21
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 18
- 230000000694 effects Effects 0.000 claims description 15
- 230000003028 elevating effect Effects 0.000 claims description 14
- 230000014759 maintenance of location Effects 0.000 claims description 13
- 238000007514 turning Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 238000000227 grinding Methods 0.000 description 291
- 238000005520 cutting process Methods 0.000 description 121
- 238000005498 polishing Methods 0.000 description 91
- 235000013312 flour Nutrition 0.000 description 25
- 238000003801 milling Methods 0.000 description 25
- 230000008859 change Effects 0.000 description 15
- 238000006073 displacement reaction Methods 0.000 description 15
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 12
- 230000004308 accommodation Effects 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 9
- 230000000007 visual effect Effects 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 230000008901 benefit Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 229910001651 emery Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 239000004576 sand Substances 0.000 description 4
- 238000009412 basement excavation Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000011112 process operation Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 238000009987 spinning Methods 0.000 description 2
- 239000013589 supplement Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- BVPWJMCABCPUQY-UHFFFAOYSA-N 4-amino-5-chloro-2-methoxy-N-[1-(phenylmethyl)-4-piperidinyl]benzamide Chemical compound COC1=CC(N)=C(Cl)C=C1C(=O)NC1CCN(CC=2C=CC=CC=2)CC1 BVPWJMCABCPUQY-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 235000013351 cheese Nutrition 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/36—Single-purpose machines or devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0023—Other grinding machines or devices grinding machines with a plurality of working posts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/065—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of thin, brittle parts, e.g. semiconductors, wafers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
Description
Claims (10)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610786297.8A CN106181610B (zh) | 2016-08-31 | 2016-08-31 | 硅棒多工位组合加工机 |
PCT/CN2017/085048 WO2017202245A1 (zh) | 2016-05-23 | 2017-05-19 | 硅棒多工位加工机及硅棒多工位加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610786297.8A CN106181610B (zh) | 2016-08-31 | 2016-08-31 | 硅棒多工位组合加工机 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106181610A CN106181610A (zh) | 2016-12-07 |
CN106181610B true CN106181610B (zh) | 2019-01-29 |
Family
ID=58086329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610786297.8A Active CN106181610B (zh) | 2016-05-23 | 2016-08-31 | 硅棒多工位组合加工机 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN106181610B (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017202245A1 (zh) * | 2016-05-23 | 2017-11-30 | 上海日进机床有限公司 | 硅棒多工位加工机及硅棒多工位加工方法 |
CN106597801B (zh) * | 2017-01-17 | 2022-07-19 | 深圳市深立精机科技有限公司 | 一种摄像头自动调焦设备及调焦方法 |
CN106940178A (zh) * | 2017-03-22 | 2017-07-11 | 上海日进机床有限公司 | 硅晶体工件平整度检测装置和硅晶体工件平整度检测方法 |
CN108942572B (zh) * | 2017-05-19 | 2021-04-09 | 天通日进精密技术有限公司 | 单晶硅棒多工位加工方法及单晶硅棒多工位加工机 |
CN108942643A (zh) * | 2017-05-19 | 2018-12-07 | 浙江集英精密机器有限公司 | 硅棒装卸装置及硅棒多工位加工机 |
CN109421177B (zh) * | 2017-09-01 | 2023-11-28 | 隆基绿能科技股份有限公司 | 工件加工生产系统 |
CN107639493B (zh) * | 2017-10-16 | 2019-09-20 | 蔡银花 | 一种便于调整打磨方向的硅棒生产加工用打磨装置 |
CN109773641A (zh) * | 2019-03-22 | 2019-05-21 | 天通日进精密技术有限公司 | 半导体晶棒立式滚圆开槽机 |
CN111844490A (zh) * | 2019-04-30 | 2020-10-30 | 天通日进精密技术有限公司 | 多工位开方设备及其切割方法 |
CN112297264A (zh) * | 2019-08-02 | 2021-02-02 | 天通日进精密技术有限公司 | 硅棒切磨一体机及硅棒切磨方法 |
CN111515817B (zh) * | 2020-04-30 | 2021-07-16 | 青岛高测科技股份有限公司 | 一种硅棒开磨一体的加工方法 |
CN114643648A (zh) * | 2020-12-17 | 2022-06-21 | 上海日进机床有限公司 | 硅棒切磨一体机及硅棒切磨方法 |
CN117260450B (zh) * | 2023-11-22 | 2024-01-23 | 连云港弘鼎石英有限公司 | 一种具有防尘机构的石英制品加工用磨边设备 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2885270B2 (ja) * | 1995-06-01 | 1999-04-19 | 信越半導体株式会社 | ワイヤーソー装置及びワークの切断方法 |
CN201239777Y (zh) * | 2008-07-09 | 2009-05-20 | 天津市天锻压力机有限公司 | 钛电极棒成型液压机的自动翻转装置 |
CN105500541B (zh) * | 2015-12-31 | 2017-09-29 | 天津朗誉科技发展有限公司 | 一种硅棒晶体翻转系统 |
CN105835247B (zh) * | 2016-05-23 | 2018-12-11 | 天通日进精密技术有限公司 | 硅棒组合加工机 |
CN206029479U (zh) * | 2016-08-31 | 2017-03-22 | 上海日进机床有限公司 | 硅棒多工位组合加工机 |
-
2016
- 2016-08-31 CN CN201610786297.8A patent/CN106181610B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN106181610A (zh) | 2016-12-07 |
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C06 | Publication | ||
PB01 | Publication | ||
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TA01 | Transfer of patent application right |
Effective date of registration: 20180605 Address after: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang Applicant after: Haining Dijin science and Technology Co., Ltd. Address before: No. 1358, nine dry road, Si Jing Town, Songjiang District, Shanghai Applicant before: Shanghai Nissin Machine Tool Co., Ltd. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20180803 Address after: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant after: Zhejiang Ji Ying Precision Machinery Co., Ltd. Address before: 314400 4 buildings in No. 17, Shi Dai Road, Haining Economic Development Zone, Haining, Jiaxing, Zhejiang Applicant before: Haining Dijin science and Technology Co., Ltd. |
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CB02 | Change of applicant information |
Address after: 314400 6 Building 129, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant after: Tiantong Tijin Precision Technology Co., Ltd. Address before: 314400 6 Building 128, Shuang Lian Road, Haining Economic Development Zone, Jiaxing, Zhejiang Applicant before: Zhejiang Ji Ying Precision Machinery Co., Ltd. |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Multi station combined processing machine for silicon rod Effective date of registration: 20211126 Granted publication date: 20190129 Pledgee: Hangzhou United Rural Commercial Bank Co.,Ltd. Haining sub branch Pledgor: TIANTONG RIJIN PRECISION TECHNOLOGY Co.,Ltd. Registration number: Y2021330002258 |
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