CN105887023A - TiCrN+MoS2/Cr/Ti组合润滑涂层刀具及其制备工艺 - Google Patents

TiCrN+MoS2/Cr/Ti组合润滑涂层刀具及其制备工艺 Download PDF

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CN105887023A
CN105887023A CN201610416767.1A CN201610416767A CN105887023A CN 105887023 A CN105887023 A CN 105887023A CN 201610416767 A CN201610416767 A CN 201610416767A CN 105887023 A CN105887023 A CN 105887023A
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宋文龙
邓建新
崔祥府
孙九瑞
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Dongguan Pilates nanoscale Technology Co., Ltd.
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Jining University
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Abstract

本发明属于机械制造金属切削刀具领域，特别是涉及一种TiCrN+MoS2/Cr/Ti组合润滑涂层刀具及其制备工艺。TiCrN+MoS2/Cr/Ti组合润滑涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，由基体到涂层表面依次为：Ti过渡层、Cr/Ti过渡层、TiCrN硬质涂层、Cr/Ti过渡层、MoS2/Cr/Ti润滑涂层。其综合了TiCrN多元硬质涂层刀具和MoS2/Cr/Ti润滑涂层刀具的优点，既具有较高的硬度，又具有润滑作用和较低的摩擦系数，使涂层刀具的切削性能有了显著地提高。

Description

TiCrN+MoS2/Cr/Ti组合润滑涂层刀具及其制备工艺
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种TiCrN+MoS2/Cr/Ti组合润滑涂层刀具及其制备工艺。
背景技术
根据涂层材料的性质，涂层刀具可分为两大类，即：“高硬度”涂层刀具和“润滑”涂层刀具。“高硬度”涂层刀具其主要优点是硬度高、耐磨性能好，典型的“高硬度”涂层材料有TiN、TiCN、TiAlN和类金刚石等。“润滑”涂层刀具追求的目标是低摩擦系数，典型的“润滑”涂层材料为具有低摩擦系数的固体润滑材料(如：MoS2、WS2、TaS2等硫化物)。当前刀具涂层的发展趋势是：涂层成分趋于多元化和复合化。复合涂层可综合单涂层的优点，复合多涂层及其相关技术的出现，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，使涂层刀具的性能显著提高。
中国专利(专利号ZL 2006 1 0068975.3)报道了“自润滑复合软涂层刀具及其制备方法”，它是采用中频磁控+多弧法镀膜方法制备的MoS2/Cr复合涂层刀具，刀具表面为MoS2层，MoS2层与刀具基体之间具有Ti过渡层。该刀具在无切削液冷却、润滑的切削过程中，能够在刀具表面能形成具有润滑作用的润滑膜，从而实现刀具自身的润滑功能，但是这种润滑涂层硬度较低而导致刀具涂层尤其是后刀面涂层的使用寿命不长。文献(Acta Materials.2011,59(1):68-74)报道了TiN硬涂层刀具切削加工时的作用机理及使用性能，但是这种硬涂层由于相对较高的摩擦系数，限制了其广泛使用。中国专利TiN+MoS2/Zr组合涂层刀具(专利号ZL201110081977.7)采用中频磁控溅射与电弧镀复合镀膜方法制备的TiN+MoS2/Zr组合涂层刀具，但该组合涂层在干切削超硬材料时刀具使用寿命仍无法满足实际使用需要。
发明内容
本发明的目的在于克服上述现有涂层刀具技术的不足，结合多元硬质涂层和润滑涂层的优点，提供一种TiCrN+MoS2/Cr/Ti组合润滑涂层刀具及其制备工艺。
本发明是通过以下方式实现的：
TiCrN+MoS2/Cr/Ti组合润滑涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，由基体到涂层表面依次为：Ti过渡层、Cr/Ti过渡层、TiCrN硬质涂层、Cr/Ti过渡层、MoS2/Cr/Ti润滑涂层。
TiCrN+MoS2/Cr/Ti组合润滑涂层刀具的制备工艺，沉积方式为采用电弧镀与中频磁控溅射复合镀膜方法制备组合涂层，包括1个Ti靶电弧靶，一个Cr靶电弧靶，2个MoS2中频溅射靶：电弧离子镀沉积Ti、Cr/Ti过渡层、TiCrN硬质涂层和Cr/Ti过渡层，中频磁控溅射MoS2及电弧离子镀Cr、Ti复合沉积MoS2/Cr/Ti润滑涂层。
具体包括以下步骤：
1)前处理：将刀具基体表面抛光，去除表面杂质，然后依次放入酒精和丙酮中，超声清洗，经干燥后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压700V，占空比0.2，辉光放电清洗15min；降低偏压至500V，开启离子源离子清洗15min，开启Ti靶的电弧源，偏压300V，靶电流50A，离子轰击Ti靶1min；
3)沉积Ti过渡层：Ar气压0.5～0.6Pa，偏压降至250V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层3～4min；
4)沉积Cr/Ti过渡层：Ar气压0.5～0.6Pa，偏压250V，Ti靶电流100A，Cr靶电流80A，电弧镀Cr/Ti过渡层4～5min；
5)沉积TiCrN硬质涂层：Ar气压0.5Pa，偏压220V，Ti靶的靶电流120A，Cr靶电流90A；开启N2，N2气压为1.2Pa，沉积温度250～260℃，电弧镀TiCrN硬质涂层50～60min；
6)沉积Cr/Ti过渡层：关闭N2，Ti靶电流100A，Cr靶电流80A，沉积Cr/Ti过渡层5min；
7)沉积MoS2/Cr/Ti润滑涂层：开启MoS2靶中频磁控溅射电源，电流1.5A，Ti靶电流80A，Cr靶电流70A，偏压调至230V，沉积温度280～300℃，复合沉积MoS2/Cr/Ti润滑涂层30～40min；
8)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明具有如下技术效果：
该刀具的涂层为TiCrN硬涂层和MoS2/Cr/Ti润滑涂层的组合，属于多层结构。该涂层采用电弧镀和中频磁控溅射复合镀膜方法制备的TiCrN+MoS2/Cr/Ti组合润滑涂层刀具。基体上的Ti和Cr/Ti过渡层主要是提高组合润滑涂层与刀具基体间的结合性能，MoS2/Cr/Ti润滑涂层与TiCrN涂层之间的Cr/Ti过渡层主要是减缓因涂层成分突变造成的层间应力。这种组合润滑涂层刀具综合了TiCrN多元硬质涂层刀具和MoS2/Cr/Ti润滑涂层刀具的优点，既具有较高的硬度，又具有润滑作用和较低的摩擦系数，使涂层刀具的切削性能有了显著地提高。用这种组合润滑涂层刀具进行干切削时，由于表面MoS2/Cr/Ti涂层本身具有润滑作用，可以减小刀具与切屑之间的摩擦，从而降低切削力和切削温度，比传统涂层刀具减小刀具磨损10-15％；同时，TiCrN高硬度涂层可提高MoS2/Cr/Ti润滑涂层的整体强度，减缓由于MoS2/Cr/Ti涂层本身硬度较低而造成的刀具涂层过早磨损，提高涂层使用寿命20％以上。该组合润滑涂层刀具可广泛应用于铝合金、钛合金等难加工有色金属材料的干切削加工。
附图说明
图1为本发明的TiCrN+MoS2/Cr/Ti组合润滑涂层刀具的涂层结构示意图。
图中：1为刀具基体、2为Ti过渡层、3为Cr/Ti过渡层、4为TiCrN硬质涂层、5为Cr/Ti过渡层、6为MoS2/Cr/Ti润滑涂层。
具体实施方式
下面给出本发明的最佳实施例：
实施例1
如图1所示，一种TiCrN+MoS2/Cr/Ti组合润滑涂层刀具，该刀具为普通的铣刀片，其基体材料为：硬质合金YT15；涂层材料为：TiCrN和MoS2/Cr/Ti。其沉积方式为采用电弧镀与中频磁控溅射复合镀膜方法制备组合涂层，包括1个Ti靶电弧靶，一个Cr靶电弧靶，2个MoS2中频溅射靶：电弧离子镀沉积Ti、Cr/Ti过渡层、TiCrN硬质涂层和Cr/Ti过渡层，中频磁控溅射(MoS2)及电弧离子镀(Cr、Ti)复合沉积MoS2/Cr/Ti润滑涂层，其制备工艺为：
1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压700V，占空比0.2，辉光放电清洗15min；降低偏压至500V，开启离子源离子清洗15min，开启Ti靶的电弧源，偏压300V，靶电流50A，离子轰击Ti靶1min；
3)沉积Ti过渡层：Ar气压0.5～0.6Pa，偏压降至250V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层3～4min；
4)沉积Cr/Ti过渡层：Ar气压0.5～0.6Pa，偏压250V，Ti靶电流100A，Cr靶电流80A，电弧镀Cr/Ti过渡层4～5min；
5)沉积TiCrN硬质涂层：Ar气压0.5Pa，偏压220V，Ti靶的靶电流120A，Cr靶电流90A；开启N2，N2气压为1.2Pa，沉积温度250～260℃，电弧镀TiCrN 50～60min；
6)沉积Cr/Ti过渡层：关闭N2，Ti靶电流100A，Cr靶电流80A，沉积Cr/Ti过渡层5min；
7)沉积MoS2/Cr/Ti润滑涂层：开启MoS2靶中频磁控溅射电源，电流1.5A，Ti靶电流80A，Cr靶电流70A，偏压调至230V，沉积温度280～300℃，复合沉积MoS2/Cr/Ti 30～40min；
8)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例2
如图1所示，一种TiCrN+MoS2/Cr/Ti组合润滑涂层刀具，该刀具为普通麻花钻，其刀具基体材料为：高速钢W18Cr4V；涂层材料为：TiCrN和MoS2/Cr/Ti。其沉积方式为采用电弧镀与中频磁控溅射复合镀膜方法制备组合涂层，包括1个Ti靶电弧靶，一个Cr靶电弧靶，2个MoS2中频溅射靶：电弧离子镀沉积Ti、Cr/Ti过渡层、TiCrN硬质涂层和Cr/Ti过渡层，中频磁控溅射(MoS2)及电弧离子镀(Cr、Ti)复合沉积MoS2/Cr/Ti润滑涂层，其制备工艺为：
1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压700V，占空比0.2，辉光放电清洗15min；降低偏压至500V，开启离子源离子清洗15min，开启Ti靶的电弧源，偏压300V，靶电流50A，离子轰击Ti靶1min；
3)沉积Ti过渡层：Ar气压0.5～0.6Pa，偏压降至250V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层3～4min；
4)沉积Cr/Ti过渡层：Ar气压0.5～0.6Pa，偏压250V，Ti靶电流100A，Cr靶电流80A，电弧镀Cr/Ti过渡层4～5min；
5)沉积TiCrN硬质涂层：Ar气压0.5Pa，偏压220V，Ti靶的靶电流120A，Cr靶电流90A；开启N2，N2气压为1.2Pa，沉积温度250～260℃，电弧镀TiCrN 50～60min；
6)沉积Cr/Ti过渡层：关闭N2，Ti靶电流100A，Cr靶电流80A，沉积Cr/Ti过渡层5min；
7)沉积MoS2/Cr/Ti润滑涂层：开启MoS2靶中频磁控溅射电源，电流1.5A，Ti靶电流80A，Cr靶电流70A，偏压调至230V，沉积温度280～300℃，复合沉积MoS2/Cr/Ti 30～40min；
8)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (3)

1.TiCrN+MoS2/Cr/Ti组合润滑涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，其特征在于，由基体到涂层表面依次为：Ti过渡层、Cr/Ti过渡层、TiCrN硬质涂层、Cr/Ti过渡层、MoS2/Cr/Ti润滑涂层。
2.如权利要求1所述TiCrN+MoS2/Cr/Ti组合润滑涂层刀具的制备工艺，其特征在于，沉积方式为采用电弧镀与中频磁控溅射复合镀膜方法制备组合涂层，包括1个Ti靶电弧靶，一个Cr靶电弧靶，2个MoS2中频溅射靶：电弧离子镀沉积Ti、Cr/Ti过渡层、TiCrN硬质涂层和Cr/Ti过渡层，中频磁控溅射MoS2及电弧离子镀Cr、Ti复合沉积MoS2/Cr/Ti润滑涂层。
3.根据权利要求2所述的TiCrN+MoS2/Cr/Ti组合润滑涂层刀具的制备工艺，其特征在于，具体包括以下步骤：
1)前处理：将刀具基体表面抛光，去除表面杂质，然后依次放入酒精和丙酮中，超声清洗，经干燥后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压700V，占空比0.2，辉光放电清洗15min；降低偏压至500V，开启离子源离子清洗15min，开启Ti靶的电弧源，偏压300V，靶电流50A，离子轰击Ti靶1min；
3)沉积Ti过渡层：Ar气压0.5～0.6Pa，偏压降至250V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层3～4min；
4)沉积Cr/Ti过渡层：Ar气压0.5～0.6Pa，偏压250V，Ti靶电流100A，Cr靶电流80A，电弧镀Cr/Ti过渡层4～5min；
5)沉积TiCrN硬质涂层：Ar气压0.5Pa，偏压220V，Ti靶的靶电流120A，Cr靶电流90A；开启N2，N2气压为1.2Pa，沉积温度250～260℃，电弧镀TiCrN硬质涂层50～60min；
6)沉积Cr/Ti过渡层：关闭N2，Ti靶电流100A，Cr靶电流80A，沉积Cr/Ti过渡层5min；
7)沉积MoS2/Cr/Ti润滑涂层：开启MoS2靶中频磁控溅射电源，电流1.5A，Ti靶电流80A，Cr靶电流70A，偏压调至230V，沉积温度280～300℃，复合沉积MoS2/Cr/Ti润滑涂层30～40min；
8)后处理：关闭各电源、离子源及气体源，涂层结束。
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CN102205674A (zh) * 2011-04-01 2011-10-05 山推工程机械股份有限公司 TiN+MoS2/Zr组合涂层刀具及其制备工艺

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