CN105810585A - 半导体结构的制作方法 - Google Patents
半导体结构的制作方法 Download PDFInfo
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3081—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their composition, e.g. multilayer masks, materials
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/308—Chemical or electrical treatment, e.g. electrolytic etching using masks
- H01L21/3083—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/3086—Chemical or electrical treatment, e.g. electrolytic etching using masks characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66568—Lateral single gate silicon transistors
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Abstract
本发明公开一种半导体结构的制作方法,至少包含以下步骤:首先,提供一基底,基底上具有一鳍状结构,以及一栅极结构跨越该鳍状结构,且该栅极结构顶端包含有一第一掩模层,然后形成一介电层,覆盖该基底、该鳍状结构以及该栅极结构,接着形成一第二掩模层于该第一掩模层顶端,其中该第二掩模层的宽度大于该第一掩模层的宽度,且该第二掩模层的一底面与该第一掩模层的一顶面,以及该介电层的一顶面切齐,以及进行一蚀刻步骤,移除部分该介电层以及部分该鳍状结构。
Description
技术领域
本发明涉及半导体制作工艺领域,尤其是涉及一种提高鳍状场效晶体管元件(FinFET)的良率的制作流程。
背景技术
随着半导体元件尺寸的缩小,维持小尺寸半导体元件的效能是目前业界的主要目标。为了提高半导体元件的效能,目前已逐渐发展出各种鳍状场效晶体管元件(Fin-shapedfieldeffecttransistor,FinFET)。鳍状场效晶体管元件包含以下几项优点。首先,鳍状场效晶体管元件的制作工艺能与传统的逻辑元件制作工艺整合,因此具有相当的制作工艺相容性;其次,由于立体结构增加了栅极与基底的接触面积,因此可增加栅极对于通道区域电荷的控制,从而降低小尺寸元件带来的漏极引发的能带降低(DrainInducedBarrierLowering,DIBL)效应以及短通道效应(shortchanneleffect);此外,由于同样长度的栅极具有更大的通道宽度,因此也可增加源极与漏极间的电流量。
就此阶段的鳍状场效晶体管(FinFET)制作工艺而言,为了避免伤害栅极结构,因此当以蚀刻步骤蚀刻介电层,以形成栅极结构两旁的间隙壁时,在基底上容易残留剩余的介电层材质,将造成外延层施加于栅极结构下方的栅极通道应力不足,而限制外延层提升栅极通道的载流子迁移率的能力。
美国专利US7435683提出一种半导体结构的制作方法,主要特征如图1~图3所示,首先请参考图1,提供一基底10,基底10上有形成有一鳍状结构12,接着形成一栅极结构14于鳍状结构12上,还包含一掩模层16位于栅极结构14的顶端。然后全面性形成一介电层18,覆盖鳍状结构12、栅极结构14以及掩模层16。
接下来,如图2所示,进行一回蚀刻步骤,部分移除介电层18,并至少曝露出掩模层16的顶部以及部分侧壁。接着再次共形地(conformally)形成一掩模层20,覆盖于介电层18的表面以及掩模层16的顶部以及侧壁。
之后,如图3所示,进行一蚀刻步骤,例如为一各向异性干蚀刻,将掩模层20部分移除,以形成一帆状(sailshaped)的间隙壁22于介电层18上,间隙壁22可达到保护底下元件的作用,尤其是避免栅极结构14在接下来的蚀刻步骤中受到破坏。接下来,以间隙壁22作为掩模层,再次进行另外一蚀刻步骤,以移除部分介电层18,至少在栅极结构14两侧形成间隙壁24,值得注意的是,间隙壁24通常也具有一截角的帆状(truncated-sailshaped),后续则在栅极结构两旁进行外延层的制作,在此不另外赘述。
上述方法虽然可以有效将外延层旁残留的介电层材质清除干净,但是栅极结构两旁的间隙壁24厚度主要受到掩模层两旁的间隙壁22厚度影响,而无法精准控制。因此上述方法仍有改善空间。
发明内容
为解决上述问题,本发明提供一种半导体结构的制作方法,至少包含以下步骤:首先,提供一基底,基底上具有一鳍状结构,以及一栅极结构跨越该鳍状结构,且该栅极结构顶端包含有一第一掩模层,然后形成一介电层,覆盖该基底、该鳍状结构以及该栅极结构,接着形成一第二掩模层于该第一掩模层顶端,其中该第二掩模层的宽度大于该第一掩模层的宽度,以及进行一蚀刻步骤,移除部分该介电层以及部分该鳍状结构。
本发明的重要特征在于,在栅极结构顶端除了现有的掩模层之外,还额外制作一宽度较大的第二掩模层。第二掩模层除了可以有效保护底下的栅极结构,并确保后续的蚀刻步骤可有效清除残留于基底上的介电层材质,同时还可通过改变第二掩模层的宽度,来控制位于栅极结构两侧的间隙壁的厚度。
附图说明
图1~图3为美国专利US7435683所述的半导体结构制作流程的剖面示意图;
图4~图9为制作本发明的半导体结构制作流程的剖面示意图。
主要元件符号说明
10基底
12鳍状结构
14栅极结构
16掩模层
18介电层
20掩模层
22间隙壁
24间隙壁
100半导体结构
110基底
112鳍状结构
114栅极结构
114A栅极介电层
114B导电层
116第一掩模层
118介电层
120第二掩模层
122外延层
H1、H2高度
W1、W2宽度
E1、E2蚀刻步骤
E3外延制作工艺
R凹槽
S间隙壁
T1、T2顶面
B1底面
具体实施方式
为使熟悉本发明所属技术领域的一般技术者能更进一步了解本发明,下文特列举本发明的优选实施例,并配合所附的附图,详细说明本发明的构成内容及所欲达成的功效。
为了方便说明,本发明的各附图仅为示意以更容易了解本发明,其详细的比例可依照设计的需求进行调整。在文中所描述对于图形中相对元件的上下关系,在本领域之人都应能理解其是指物件的相对位置而言,因此都可以翻转而呈现相同的构件,此都应同属本说明书所揭露的范围,在此容先叙明。
图4~图9为制作本发明的半导体结构的剖面示意图。如图4所示,本发明的半导体结构100制作流程至少包含:首先,提供一基底110,基底110上有至少形成有一鳍状结构112,接着形成一栅极结构114跨越鳍状结构112上,且一第一掩模层116位于栅极结构114的顶端,其中栅极结构114主要包含有一导电层114B,以及还包含一栅极介电层114A。然后全面性形成一介电层118,覆盖鳍状结构112、栅极结构114以及第一掩模层116。其中,上述基材110材质可包含一硅基底、含硅基底、或硅覆绝缘(silicon-on-insulator,SOI)基底,而鳍状结构112的材质主要包含硅。栅极结构114的导电层114B例如为一掺杂或是未掺杂的多晶硅、或是金属,例如为钨、钽、钛/氮化物以及其合金,或是同时在其他实施例中,可能同时包含有多晶硅以及金属材质。而栅极介电层114A材质则包含有一氧化层或是一高介电常数层(high-klayer),其中高介电常数层可以是一层或多层的结构,其介电常数大致大于20,例如是氧化铪(hafniumoxide,HfO2)、硅酸铪氧化合物(hafniumsiliconoxide,HfSiO)、硅酸铪氮氧化合物(hafniumsiliconoxynitride,HfSiON)、氧化铝(aluminumoxide,AlO)、氧化镧(lanthanumoxide,La2O3)、铝酸镧(lanthanumaluminumoxide,LaAlO)、氧化钽(tantalumoxide,Ta2O3)、氧化锆(zirconiumoxide,ZrO2)、硅酸锆氧化合物(zirconiumsiliconoxide,ZrSiO)或锆酸铪(hafniumzirconiumoxide,HfZrO)等,第一掩模层116可能包含有氧化硅或是氮化硅,在本优选实施例中,第一掩模层116为氧化硅。介电层118材质可能包含有氧化硅、氮化硅、氧氮化硅、氧化铪或氧化钛等,本优选实施例中,介电层118为氮化硅。此外,介电层118可通过数种本领域的技术人员所熟知的方法形成,例如等离子体增强化学气相沉积(plasmaenhancedchemicalvapordeposition,PECVD)、高密度化学气相沉积(highdensitychemicalvapordeposition,HDCVD)或溅射(sputtering)等。
另外,本发明中,第一掩模层的高度与栅极结构的高度的比值优选小于一特定数值,以本实施例为例,如图4所示,第一掩模层116的高度H1优选介于100~300埃,而栅极结构114的高度H2优选介于300~900埃,因此本实施例中,第一掩模层116的高度H1与栅极结构114的高度H2的比值优选小于/等于0.3,但不限于此,也可依照实际需求而调整。
接着,如图5所示,对介电层118进行一平坦化步骤,例如一化学机械研磨(chemicalmechanicalplanarization,CMP),以部分移除介电层118,并至少曝露第一掩模层116的顶端,值得注意的是,此时介电层118的表面与第一掩模层116的顶面切齐。
如图6所示,在平坦化后的第一掩模层116以及介电层118上形成一第二掩模层120,因此,第二掩模层120的一底面B1与第一掩模层116的一顶面T1,以及介电层118的一顶面T2切齐。其中第二掩模层120的形成方法可能包括:先全面性覆盖一第二掩模材料层(图未示)于第一掩模层116以及介电层118表面,接着通过一曝光显影与蚀刻步骤,移除部分的第二掩模材料层,以形成第二掩模层120。值得注意的是,如图6所示,第二掩模层120的宽度W2需大于第一掩模层116宽度W1,此外第二掩模层120的面积也需大于第一掩模层116的面积。此外,第二掩模层120与第一掩模层116为不同的材质,并具有不同的蚀刻选择速率,优选地,当后续蚀刻步骤进行时,第二掩模层120较第一掩模层116的被蚀刻速率慢。以本实施例来说,第二掩模层120优选为氮碳化硅(SiCN),且第一掩模层116的材质(例如为氧化硅)与第二掩模层120的材质(例如为氮碳化硅)的蚀刻选择比优选大于5,如此可确保后续的蚀刻步骤中,第二掩模层120不会被过度蚀刻,而具有保护位于其正下方其他元件的功能。
接着如图7所示,以第二掩模层120为保护层,进行一蚀刻步骤E1,以部分移除介电层118,并且曝露栅极结构114两侧的鳍状结构112表面。值得注意的是,蚀刻步骤E1进行之后,未被移除的剩余介电层定义为一间隙壁S(如图7所示),其中间隙壁S位于第二掩模层120正下方,且直接接触栅极结构114两侧壁,且间隙壁S优选具有一与鳍状结构112的表面垂直的侧壁。除了间隙壁S之外,其余的介电层118被完全移除,包括残留于基材110上鳍状结构112两侧的介电层也将被完全移除。另外,上述蚀刻步骤E1选用的蚀刻剂,对介电层118蚀刻速率较高,但对第二掩模层120的蚀刻速率较低,因此蚀刻步骤E1进行后,并不会破坏第二掩模层120,也因此第二掩模层120仍覆盖于第一掩模层116的顶端。
如图8所示,进行一蚀刻步骤E2,蚀刻栅极结构114两侧边的部分鳍状结构112,而于栅极结构114两侧的鳍状结构112中分别蚀刻出一凹槽R。在本发明中,蚀刻步骤E2可包含一干蚀刻步骤及/或一湿蚀刻步骤。在一优选实施态样中,蚀刻步骤E2可包含一干蚀刻步骤及一湿蚀刻步骤或者仅进行湿蚀刻步骤。在一实施例中,湿蚀刻步骤包含以含氨气、过氧化氢及水的蚀刻液蚀刻,其是利用鳍状结构112内各结晶面不同蚀刻速率的特性,进行至少一蚀刻步骤以形成凹槽R。更进一步而言,可通过调整含氨气、过氧化氢及水的蚀刻液的氨气、过氧化氢及水的比例,以达到更精确的所需的凹槽R的形状。在本发明的一实施例中,可形成具有一六角形的剖面结构的凹槽R。
最后,如图9所示,进行一外延制作工艺E3,以于凹槽R中形成一具有六角形剖面结构的外延层122。视多栅极场效晶体管(Multi-gateMOSFET)的电性而定,外延层122可包含一硅锗外延层(Silicongermanium,SiGe),而适用于一PMOS晶体管,或者外延层122可包含一硅碳(SiliconCarbide,SiC)外延层,而适用于一NMOS晶体管。接着再进行一离子注入制作工艺以注入适当的掺杂,或者于进行外延制作工艺E3时,同时掺杂适当的掺杂,如此,外延层122便可用以作为一源/漏极区。在形成外延层122之后,可再进行一金属硅化物制作工艺(未绘示),以在源/漏极中形成金属硅化物,其中金属硅化物制作工艺可包含前清洗制作工艺、金属沉积制作工艺、退火制作工艺、选择性蚀刻步骤及测试制作工艺等。当然,在进行金属硅化物制作工艺之后,可再进行其他后续制作工艺,例如形成介电层之后,再形成接触结构等。
现有技术中,形成栅极结构两旁的间隙壁时,过度蚀刻容易伤害栅极结构,但若是减少蚀刻时间,又可能造成基底上残留剩余的介电层材质。为了解决上述问题,常用的解决方法之一是增加位于栅极结构顶端的掩模层厚度,如此一来就可增加蚀刻的时间,虽然可更有效地清除残留的介电层材质,但是也同时增加了制作工艺上的难度并降低良率。本发明的重要特征在于,在栅极结构顶端除了现有的掩模层之外,还额外制作一宽度较大的第二掩模层。第二掩模层除了可以有效保护底下的栅极结构,确保后续的蚀刻步骤可有效清除残留于基底上的介电层材质,同时还可通过改变第二掩模层的宽度,来控制位于栅极结构两侧的间隙壁的厚度。如此一来,与现有技术相比,即使不需要增加掩模层的厚度,也可以有效清除基底上的残留介电层材质。
以上所述仅为本发明的优选实施例,凡依本发明权利要求所做的均等变化与修饰,都应属本发明的涵盖范围。
Claims (14)
1.一种半导体结构的制作方法,至少包含以下步骤:
提供一基底,基底上具有一鳍状结构,以及一栅极结构跨越该鳍状结构,且该栅极结构顶端包含有一第一掩模层;
形成一介电层,覆盖该基底、该鳍状结构以及该栅极结构;
形成一第二掩模层于该第一掩模层顶端,其中该第二掩模层的宽度大于该第一掩模层的宽度,且该第二掩模层的一底面与该第一掩模层的一顶面,以及该介电层的一顶面切齐;以及
进行一蚀刻步骤,移除部分该介电层以及部分该鳍状结构。
2.如权利要求1所述的制作方法,其中该蚀刻步骤进行之后,除了位于该第二掩模层正下方,且位于该栅极结构两侧的该介电层之外,其余的该介电层被完全移除。
3.如权利要求2所述的制作方法,其中该蚀刻步骤进行之后,未被移除的部分介电层定义为至少一间隙壁。
4.如权利要求3所述的制作方法,其中该间隙壁具有一垂直侧壁。
5.如权利要求1所述的制作方法,其中移除部分该鳍状结构之后,在该栅极结构两侧的鳍状结构中分别形成至少一凹槽。
6.如权利要求5所述的制作方法,还包括进行一外延步骤,以形成至少一外延层于各该凹槽中。
7.如权利要求6所述的制作方法,其中该外延层材质包括SiGe或是SiC。
8.如权利要求1所述的制作方法,其中该蚀刻步骤进行之后,该第二掩模层仍位于该第一掩模层的顶端。
9.如权利要求1所述的制作方法,其中该介电层形成后,覆盖该第一掩模层的顶端。
10.如权利要求9所述的制作方法,还包括进行一平坦化步骤,以移除部分该介电层,并曝露出该第一掩模层的顶端,之后该第二掩模层形成于该第一掩模层的顶端。
11.如权利要求1所述的制作方法,其中该第一掩模层的材质与该第二掩模层的材质的蚀刻选择比大于5。
12.如权利要求1所述的制作方法,其中该第一掩模层的材质包括氧化硅。
13.如权利要求1所述的制作方法,其中该第二掩模层的材质包括氮碳化硅。
14.如权利要求1所述的制作方法,其中该第一掩模层具有一第一高度,该栅极结构具有一第二高度,且该第一高度与该第二高度的比值优选小于/等于0.3。
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