CN105758867B - 一种高速的显微缺陷复查方法 - Google Patents
一种高速的显微缺陷复查方法 Download PDFInfo
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- CN105758867B CN105758867B CN201610141241.7A CN201610141241A CN105758867B CN 105758867 B CN105758867 B CN 105758867B CN 201610141241 A CN201610141241 A CN 201610141241A CN 105758867 B CN105758867 B CN 105758867B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
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CN201610141241.7A CN105758867B (zh) | 2016-03-11 | 2016-03-11 | 一种高速的显微缺陷复查方法 |
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CN201610141241.7A CN105758867B (zh) | 2016-03-11 | 2016-03-11 | 一种高速的显微缺陷复查方法 |
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CN105758867A CN105758867A (zh) | 2016-07-13 |
CN105758867B true CN105758867B (zh) | 2019-11-05 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1954204A (zh) * | 2004-05-14 | 2007-04-25 | 光子动力学公司 | 使用按需自动光学检查子系统的改进的tft液晶显示器面板检查方法 |
CN101571493A (zh) * | 2008-04-29 | 2009-11-04 | 台达电子工业股份有限公司 | 光学检测缺陷后的路径规划方法 |
CN102890090A (zh) * | 2012-09-29 | 2013-01-23 | 肇庆中导光电设备有限公司 | 动态拍照装置、检测装置及检测方法 |
CN103592754A (zh) * | 2013-11-07 | 2014-02-19 | 麦克奥迪实业集团有限公司 | 一种数字切片实时扫描自动聚焦跟踪方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101477291B (zh) * | 2008-12-17 | 2010-12-29 | 杭州海康威视数字技术股份有限公司 | 摄像快速自动聚焦方法及其摄像装置 |
CN102506830B (zh) * | 2011-11-21 | 2014-03-12 | 奇瑞汽车股份有限公司 | 视觉定位方法及装置 |
CN103426182B (zh) * | 2013-07-09 | 2016-01-06 | 西安电子科技大学 | 基于视觉注意机制的电子稳像方法 |
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2016
- 2016-03-11 CN CN201610141241.7A patent/CN105758867B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1954204A (zh) * | 2004-05-14 | 2007-04-25 | 光子动力学公司 | 使用按需自动光学检查子系统的改进的tft液晶显示器面板检查方法 |
CN101571493A (zh) * | 2008-04-29 | 2009-11-04 | 台达电子工业股份有限公司 | 光学检测缺陷后的路径规划方法 |
CN102890090A (zh) * | 2012-09-29 | 2013-01-23 | 肇庆中导光电设备有限公司 | 动态拍照装置、检测装置及检测方法 |
CN103592754A (zh) * | 2013-11-07 | 2014-02-19 | 麦克奥迪实业集团有限公司 | 一种数字切片实时扫描自动聚焦跟踪方法 |
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Effective date of registration: 20180911 Address after: 215000 room 411-1, 2 building, 8 Jinfeng Road, Suzhou High-tech Zone, Jiangsu. Applicant after: Suzhou Rui Qian Medical Technology Co., Ltd. Address before: 241000 small and medium enterprises Park in Jiangbei industrial concentration area, Wuhu, Anhui Applicant before: Wu Xiangchen |
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Address after: 215000 3rd floor, building 1, No. 6, Yuping Road, science and Technology City, Suzhou high tech Zone, Jiangsu Province Patentee after: Suzhou Ruiqian Technology Co., Ltd Address before: 215000 room 411-1, 2 building, 8 Jinfeng Road, Suzhou High-tech Zone, Jiangsu. Patentee before: SUZHOU RUIQIAN MEDICAL TECHNOLOGY Co.,Ltd. |
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