CN105742245A - Cutting apparatus and cutting method - Google Patents
Cutting apparatus and cutting method Download PDFInfo
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- CN105742245A CN105742245A CN201510726801.0A CN201510726801A CN105742245A CN 105742245 A CN105742245 A CN 105742245A CN 201510726801 A CN201510726801 A CN 201510726801A CN 105742245 A CN105742245 A CN 105742245A
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- displacement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/782—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, each consisting of a single circuit element
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Dicing (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention discloses a cutting apparatus and a cutting method. The cutting apparatus uses a displacement sensor to measure axial displacement amount and radial displacement amount of a rotary blade. A mandrel (1) is provided with a flange (6) which a conical part (5) which performs fixing by clamping the rotary blade (4) from two sides. The displacement sensor is arranged at a position corresponding to the conical part of the flange. The axial displacement amount and the radial displacement amount are determined through measuring the distance between a front end part of the displacement sensor to the conical part of the flange. The displacement generated by shrinkage of a rotary shaft (3) due to thermal expansion so as to enable the position of a central line of the rotary blade to be consistent with the position of a cutting line of a packaging substrate for performing cutting. The oscillation of the rotary blade is captured and serves as the displacement amount of the displacement of the distance between the front end part of the displacement sensor and the conical part so as to learn of the oscillation of the rotary blade.
Description
Technical field
The present invention relates to the shearing device and the cutting-off method that manufacture the multiple products after being singulated by cutting off cut-off thing.
Background technology
The substrate being made up of printed circuit board (PCB) and lead frame etc. is divided in virtual manner cancellate multiple region, and the element of mounting core lamellar is (such as in regional, semiconductor chip), afterwards substrate entirety is carried out resin-encapsulated, it is called base plate for packaging.By employing the shut-off mechanism rotating sword etc. to cut off base plate for packaging, monolithic becomes product after turning to regional unit.
In the past, in shearing device, use shut-off mechanism and cut off the regulation region of base plate for packaging by rotating the cutting units such as sword.First, base plate for packaging it is placed on cut-out workbench and adsorbs.Then, base plate for packaging is directed at (para-position).By being directed at, thus setting the position of virtual cutting line for dividing multiple region.It follows that make the cut-out workbench being adsorbed with base plate for packaging relatively move with shut-off mechanism.While the place of incision of base plate for packaging is sprayed cutting water, by shut-off mechanism along being set in the cutting line of base plate for packaging to cut off base plate for packaging.The product after being singulated is manufactured by cutting off base plate for packaging.
In shut-off mechanism, rotate sword and be connected via rotating shaft with motor.Rotation sword high-speed rotary is made to transfer cut-out base plate for packaging by motor.When the cut-out using shut-off mechanism to repeat base plate for packaging, rotating shaft is because carrying out high-speed rotary then heating.Due to heating, rotating shaft produces thermal expansion and above extends in the direction (axially) along rotating shaft.When rotating shaft extends in the axial direction, it is installed on the rotation sword also displacement in the axial direction of the leading section of rotating shaft.Therefore, the position of the cutting line of the position rotating sword in shut-off mechanism and base plate for packaging misplaces.If cutting off base plate for packaging when the position rotating sword misplaces from the position of cutting line, it is likely that breakage and the deterioration of product can be caused.
The condition of the structure according to base plate for packaging and cut-out base plate for packaging, cut-out load when cutting off increases sometimes.When cut-out load when cutting off increases, the vibration rotating sword can increase.If the vibration rotating sword is relatively big, then can rotate the breakage of sword, cause the quality of product to deteriorate.Additionally, the wear extent rotating sword can increase, the life-span rotating sword can shorten.Therefore, in shut-off mechanism, the cut-out condition amplitude size of the vibration in the flexible of rotating shaft when cutting off and cutting-off process being grasped and being fed back to the best just becomes important.
Cutter sweep as the location that can carry out off-position simply, it is proposed that a kind of " possess: cutter, be used for cutting off semiconductor wafer；Microscope, for confirming the off-position of semiconductor wafer；Determination unit, configures with predetermined position relationship relative to this microscope, the distance to cutter is measured untouchablely；And off-position control unit, according to the distance between this determination unit and microscope and the distance that determined by determination unit, off-position based on cutter is controlled " cutter sweep (for example, referring to the paragraph [0008] of patent documentation 1, Fig. 1, Fig. 2).
Patent documentation 1: Japanese Patent Laid-Open 6-310596 publication
But, in the cutter sweep disclosed in patent documentation 1, there are the following problems.As shown in Fig. 1 of patent documentation 1, in the visual field of microscope 13, datum line 18 occurs.The distance D of this datum line 18 previously known and the front end of optical displacement sensor 141.Optical displacement sensor 14 is configured in the position opposite with blade 11, to from its front end to the distance D of blade 112It is measured, and exports and this distance D2Corresponding analog voltage.Spindle motor 12 grade except Working table driving device 17, cutter sweep entirety are carried out numerical control by NC device 16.
In this device, owing to using optical displacement sensor 14, it is thus susceptible to the impact of water or the dirt etc. that are subject to being attached to blade 11.Therefore, to from optical displacement sensor 14 to the distance D of blade 112Mensuration likely produce error.Further, since do not possess the unit for the vibration of the radial direction (radially) of the blade 11 in cutting-off process is measured, therefore cannot judge whether to cut off efficiently.
Summary of the invention
This invention address that the problems referred to above, purpose is in that to provide a kind of shearing device and cutting-off method, in shearing device, by with towards the fixing parts for fixing rotation sword (such as, flange) the mode in regulation region determination unit is set, it is thus possible to the axial displacement rotating sword is measured with displacement radially, it is possible to grasp the correction of off-position and cut off efficiency.
In order to solve the problems referred to above, shearing device involved in the present invention,
Possess: workbench, place cut-off thing；Shut-off mechanism, cuts off described cut-off thing；And travel mechanism, make described workbench and described shut-off mechanism relatively move, described shearing device is used when carrying out singualtion along the cutting line described cut-off thing of cut-out, it is characterised in that possess:
Rotating shaft, is arranged at described shut-off mechanism；
Rotate sword, be installed on the leading section of described rotating shaft；
Two fixing parts, are separately positioned in the side of both sides of described rotation sword, clip described rotation sword to be fixed；And
Determination unit, to be arranged at described shut-off mechanism in the way of the regulation region of described fixing parts,
Described determination unit is detected by the displacement in the described regulation region to described fixing parts, thus determining the displacement after described rotation sword displacement,
Described displacement includes:
First displacement, displacement that described rotation sword causes along the axial displacement of described rotating shaft and
Second displacement, the displacement that described rotation sword causes along described displacement radially of the axis of rotation.
Shearing device involved in the present invention has following embodiment:
By correcting the relative position relationship of described rotation sword and described cut-off thing according to described first displacement, so that the position of described rotation sword matches with the position of described cutting line.
It addition, shearing device involved in the present invention has following embodiment:
The characteristic relevant with the vibration of described rotation sword is measured according to described second displacement.
It addition, shearing device involved in the present invention has following embodiment:
Described regulation region has the tapered portion formed in the way of the thickness of central side and the thickness of perimeter sides are different.
It addition, shearing device involved in the present invention has following embodiment:
Described regulation region includes the end being vertically formed in the peripheral part of described fixing parts relative to the face of described rotation sword.
It addition, shearing device involved in the present invention has following embodiment:
Described regulation region is made up of the material with electric conductivity.
It addition, shearing device involved in the present invention has following embodiment:
Described determination unit includes eddy current type displacement transducer.
It addition, shearing device involved in the present invention has following embodiment:
Described cut-off thing is base plate for packaging.
It addition, shearing device involved in the present invention has following embodiment:
Described cut-off thing is the substrate making and having function element corresponding with multiple regions respectively.
In order to solve the problems referred to above, cutting-off method involved in the present invention,
Including: in the operation of the cut-off thing of workbench mounting；Make the operation that the shut-off mechanism with rotation sword and described workbench relatively move；And by making described shut-off mechanism and described workbench relatively move so that cut off the operation of described cut-off thing along cutting line with described shut-off mechanism, it is characterised in that including:
Making the operation that described rotation sword rotates, described rotation sword, in being arranged at the leading section of rotating shaft of described shut-off mechanism, is fixed by two fixing parts arranging in the side of the both sides of described rotation sword；
Make the operation that the determination unit being arranged at described shut-off mechanism is opposite with the regulation region of described fixing parts；And
Described determination unit is detected by the displacement in the described regulation region to described fixing parts, thus determining the operation of the displacement after described rotation sword displacement,
The operation measuring described displacement includes:
The operation that the first displacement that described rotation sword is caused along the axial displacement of described rotating shaft is measured；And
The operation that the second displacement that described rotation sword is caused along described displacement radially of the axis of rotation is measured.
Cutting-off method involved in the present invention has following embodiment:
Including the relative position relationship by correcting described rotation sword and described cut-off thing according to described first displacement, so that the operation that the position of described rotation sword matches with the position of described cutting line.
It addition, cutting-off method involved in the present invention has following embodiment:
Including the operation measuring the characteristic relevant with the vibration of described rotation sword according to described second displacement.
It addition, cutting-off method involved in the present invention has following embodiment:
Described regulation region has the tapered portion formed in the way of the thickness of central side and the thickness of perimeter sides are different.
It addition, cutting-off method involved in the present invention has following embodiment:
Described regulation region includes the end being vertically formed in the peripheral part of described fixing parts relative to the face of described rotation sword.
It addition, cutting-off method involved in the present invention has following embodiment:
Described regulation region is made up of the material with electric conductivity.
It addition, cutting-off method involved in the present invention has following embodiment:
Described determination unit includes eddy current type displacement transducer.
It addition, cutting-off method involved in the present invention has following embodiment:
Described cut-off thing is base plate for packaging.
It addition, cutting-off method involved in the present invention has following embodiment:
Described cut-off thing is the substrate making and having function element corresponding with multiple regions respectively.
According to the present invention, in shearing device, possess: workbench, place cut-off thing；Shut-off mechanism, cuts off cut-off thing；And travel mechanism, make workbench and shut-off mechanism relatively move.Shut-off mechanism is provided with the rotation sword installed in the leading section of rotating shaft and in order to two fixing parts of fixing rotation sword in rotating the side of both sides of sword.In shut-off mechanism, determination unit is set in the way of opposite with the regulation region of fixing parts.Determination unit is detected by the displacement in the regulation region to fixing parts such that it is able to determines the first displacement rotating sword axially displacement and rotates the sword the second displacement along radial displacement.Therefore, a determination unit is used, it becomes possible to test any one in axial displacement and displacement radially.
Accompanying drawing explanation
Structure that (a) of Fig. 1～(c) is the axle that is shown respectively in the embodiment 1 of shearing device involved in the present invention and rotate the skeleton diagram of displacement of sword, (a) be illustrate rotate the initial skeleton diagram of state of sword, (b) illustrates the skeleton diagram that the rotation skeleton diagram of state of sword displacement in the axial direction, (c) they are the state illustrating rotation sword displacement diametrically.
(a) of Fig. 2～(c) rotates, shown in Fig. 1, the skeleton diagram of state that sword moves up and down for being shown respectively, (a) be illustrate rotate the initial skeleton diagram of state of sword, (b) illustrates that rotation sword moves to the skeleton diagram of state of topmost, (c) illustrates that rotation sword moves to the skeleton diagram of the state of foot.
Fig. 3 is the skeleton diagram of the structure illustrating the eddy current type displacement transducer used by the present embodiment.
Fig. 4 is the relevant figure being shown through distance that eddy current type displacement transducer determines to the relation of output voltage and time.
The skeleton diagram of the installation site that (a), (b) is the displacement transducer being shown respectively in the embodiment 2 of shearing device involved in the present invention of Fig. 5, (a) illustrates that skeleton diagram when displacement transducer is installed in horizontal direction, (b) are illustrate skeleton diagram when displacement transducer is installed in vertical direction.
Fig. 6 is the top view of the summary of the shearing device being shown in the embodiment 3 of shearing device involved in the present invention.
Detailed description of the invention
As it is shown in figure 1, in shearing device, axle 1 arranges rotating shaft 3, rotating sword 4 and having the flange (fixing parts) 6 clipping the rotation sword 4 tapered portion 5 to be fixed from both sides in the installation of the leading section of rotating shaft 3.In mandrel body 2, displacement transducer 7 is set in the position opposite with the tapered portion 5 of flange 6.Eddy current type displacement transducer is used to be used as displacement transducer 7.By the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 is measured such that it is able to determine axial displacement and displacement radially.The displacement of the rotating shaft 3 flexible because of thermal expansion can be corrected, so that the position of the position of centrage rotating sword 4 cutting line that is accurately fit to base plate for packaging cuts off.By catching the vibration rotating sword 4 displacement in order to be subjected to displacement as the distance from the leading section of displacement transducer 7 to tapered portion 5 such that it is able to grasp the size of the amplitude of the vibration rotating sword 4.
(embodiment 1)
With reference to Fig. 1～Fig. 4, the embodiment 1 of shearing device involved in the present invention is illustrated.For any accompanying drawing in present specification, for ease of understanding, all suitably omit or schematically describe turgidly.Identical accompanying drawing labelling is marked for identical structural element and suitably omits the description.
As shown in (a) of Fig. 1, the axle 1 as shut-off mechanism possesses: rotating shaft 3 that mandrel body portion 2 is connected with spindle motor (not shown) and the rotation sword 4 installed in the leading section of rotating shaft 3.Rotate sword 4 and be such as fixed on rotating shaft 3 by being clipped two sides (rotating the side of the both sides of sword 4) by two flanges 6 with tapered portion 5.Flange 6 has the shape (curved surface annular) of annular.The tapered portion 5 of flange 6 has the angle of 30～50 degree relative to rotating sword 4.It is particularly preferred that have the angle of 40 degree.The material (such as, metal) that flange 6 is such as had electric conductivity by rustless steel or chromium steel etc. is formed.Tapered portion 5 can be arranged on any one flange 6 among two flanges 6.Preferably, the flange 6 of the side close to mandrel body portion 2 arranges tapered portion 5.In FIG, the thickness of the central side of tapered portion 5 is formed to be larger than the thickness of perimeter sides.On the contrary, the thickness of the central side of tapered portion 5 might be less that the thickness of perimeter sides.
In axle 1, as to the unit being measured to the distance rotating sword 4 from the leading section in mandrel body portion 2, the leading section in mandrel body portion 2 is provided with displacement transducer 7.Displacement transducer 7 is arranged on the position opposite with the tapered portion 5 of flange 6.The distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 is measured by displacement transducer 7.As displacement transducer 7, for instance, it is preferred to use by detecting the eddy current type displacement transducer that the distance after displacement is measured by eddy current.
In axle 1, by using eddy current type displacement transducer to be used as displacement transducer 7, thus non-contactly the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 being measured.Such as, under original state before the cut-out proceeding by base plate for packaging, the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 is set to d0, the distance of centrage on from the leading section in mandrel body portion 2 to the thickness direction rotating sword 4 is set to L0.In an initial condition, being in the relation of L0=d0+ α, the value of α can be obtained in advance according to the thickness etc. of the position of the tapered portion 5 in the size of displacement transducer 7, flange 6 and angle, rotation sword 4.The value of α shows as the fixed value of the impact being heated hardly.Therefore, even if rotating shaft 3 extends in the axial direction because of thermal expansion after the cut-out proceeding by base plate for packaging, by the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 is measured, it is also possible to obtain the distance from mandrel body portion 2 to the centrage rotating sword 4.
Base plate for packaging is by by driving spindle motor (not shown), the rotation sword 4 of high speed rotating cuts off.As shown in (b) of Fig. 1, when proceeding the cut-out of base plate for packaging, the rotating shaft 3 in high speed rotating generates heat, and extends gradually on axially (in the drawings for +X direction) because of thermal expansion.Owing to rotating shaft 3 extends in the+x direction, therefore rotate degree that sword 4 extends with rotating shaft 3 in the+x direction to carry out displacement.At certain time point after the cut-out proceeding by base plate for packaging, if the mensuration distance from the leading section of displacement transducer 7 to tapered portion 5 is set to dX, then it is LX=dX+ α from the leading section in mandrel body portion 2 to rotating the distance LX of centrage of sword 4.Rotating shaft 3, because of thermal expansion, causes that rotating shaft 3 extends with (dX-d0) in the X direction.Therefore, when cutting off base plate for packaging, the degree (dX-d0) extended by this rotating shaft 3 corrects the position rotating sword 4 such that it is able to make the position of rotation sword 4 accurately be fit to the position of cutting line of base plate for packaging to cut off base plate for packaging.
As shown in (c) of Fig. 1, rotate sword 4 because being subject to cut-out load in the process cutting off base plate for packaging, thus can be subjected to displacement diametrically.Because receiving displacement radially, cause that rotate sword 4 vibrates on the above-below direction (Z-direction) of figure.When cutting off load and being big, the vibration rotating sword 4 increases, and the load applied to product also can increase, and causes that quality deteriorates.And then, when the vibration rotating sword 4 increases, rotate sword 4 and breakage can occur, cause the quality of product to deteriorate.Therefore, when cutting off base plate for packaging, as reduced cut-out load, so that the amplitude rotating the vibration of sword 4 diminishes, such cut-out condition just becomes important in setting.
Because rotating sword 4 in the upper vibration of above-below direction (Z-direction), cause that the position (in the drawings for the position of Z-direction) of the tapered portion 5 that displacement transducer 7 measures is subjected to displacement.Therefore, it is possible to measure the displacement of the radial direction rotating sword 4 in order to as the displacement after from the leading section of displacement transducer 7 to the distance displacement of tapered portion 5.Namely, it is possible to obtain the size of amplitude of the vibration rotating sword 4 using as the displacement from the leading section of displacement transducer 7 to the distance of tapered portion 5.By displacement transducer 7 to until the distance periodically carrying out the tapered portion 5 of the flange 6 of displacement is measured such that it is able to grasp the state of the vibration rotating sword 4.In the present embodiment, by arranging tapered portion 5 at flange 6 such that it is able to by a displacement transducer 7, measure any one in axial displacement and displacement radially.
With reference to Fig. 2, the state that rotation sword 4 is moved up and down because of vibration illustrates.As shown in (a) of Fig. 2, in an initial condition, from the leading section of displacement transducer 7 to the distance of the tapered portion 5 of flange 6 be d0.When cutting off base plate for packaging, generally make rotation sword 4 with 20000～40000rpm high speed rotating, cut off base plate for packaging accordingly.If in this case, the rotation rotating sword 4 becomes 3～1.5msec cycle turnover, then the cycle of the vibration rotating sword 4 also becomes equal extent.Accordingly, because the cycle of vibration rotating sword 4 is the short time, therefore within the period of this short time, it is possible to ignore rotating shaft 3 to axial extension.In other words, when rotate sword 4 move in z-direction within the period of short time because of vibration, be fixing from the leading section in mandrel body portion 2 to rotating the distance L0 of centrage of sword 4.
As shown in (b) of Fig. 2, when rotating sword 4 and vibration occurring and moves to the topmost of figure, the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 becomes d1.Being measured owing to the thickness of tapered portion 5 is become the thickest position, therefore rotate sword 4 when moving to the topmost of figure, d1 becomes minima.It is integrally forming additionally, rotate sword 4 with rotating shaft 3 and moves in z-direction.In the drawings, for the ease of explanation, it is shown that the rotating shaft 3 for being only fixed with the part rotating sword 4 moves in z-direction.
As shown in (c) of Fig. 2, when rotating sword 4 and vibration occurring and moves to the foot of figure, the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 becomes d2.Being measured owing to the thickness of tapered portion 5 is become the thinnest position, therefore rotate sword 4 when moving to the foot of figure, d2 becomes maximum value.
Rotate sword 4 to move in z-direction because of vibration, thus that displacement transducer 7 measures until the distance farthest of tapered portion 5 is d2, it is d1 the most nearby.Therefore, the tapered portion 5 of flange 6 moves in z-direction, accordingly, and the scope that distance is (d2-d1) that displacement transducer 7 measures.The distance that the tapered portion 5 of flange 6 indirectly moves (in appearance) in the X direction becomes (d2-d1).Therefore, corresponding with the cycle rotating sword 4 vibration, displacement transducer 7 periodically measures distance from d1 to d2 using as until the distance of tapered portion 5.Proportional to the amplitude rotating sword 4 to the difference of the distance of tapered portion 5 from the leading section of displacement transducer 7.Therefore, by the distance from the leading section of displacement transducer 7 to tapered portion 5 being measured by displacement transducer 7 such that it is able to grasp the state rotating sword 4 vibration.
With reference to Fig. 3, structure and action to the eddy current type displacement transducer used as displacement transducer 7 illustrate.Eddy current type displacement transducer 7 such as possesses: have the sensor part 9 of cell winding 8 in leading section, by carrying out vibrating and transducer (driver) 10 that the electronic circuit of detection etc. is constituted and the coaxial cable 11 that connects sensor part 9 and transducer 10.Transducer 10 is made up of oscillating circuit, resonance circuit, detecting circuit, amplifying circuit, output circuit (linearizer) etc..
The method using eddy current type displacement transducer 7 that the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 is measured is illustrated.First, high-frequency signal is supplied to from the oscillating circuit in transducer 10 cell winding 8 of sensor part 9.Accordingly, cell winding 8 high frequency magnetic field 12 is produced.Time in this magnetic field 12 close to target (being equivalent to the tapered portion 5 of flange 6 in embodiment 1) being made up of metal, produce eddy current 13 on target surface.The size of eddy current 13 changes according to the distance of cell winding 8 and target.Change according to eddy current 13, the impedance of the cell winding 8 of target including seeing from transducer 10 side can change.Therefore, it is possible to the change of capture sensor portion 9 and the distance of target (tapered portion 5) is using the change of the impedance as cell winding 8.
Obtain the change of impedance of cell winding 8 using as the change of output voltage in the resonance circuit at transducer 10.By this voltage change by detecting circuit be converted to apart from corresponding DC voltage.And then, amplify signal by amplifying circuit, by output circuit (linearizer) carry out linearization(-sation) and export using as to apart from proportional voltage.Output characteristics 14 be with transverse axis for the distance measured and obtain with the longitudinal axis for output voltage using as to apart from proportional linear output.By using eddy current type displacement transducer 7 to read the output voltage of target such that it is able to obtain the distance until target.Hereby it is possible to obtain the distance of tapered portion 5 from the leading section of eddy current type displacement transducer 7 to flange 6.Obtaining due to the change according to impedance until the distance of target, therefore eddy current type displacement transducer 7 is difficult to be subject to the impact of water or dirt etc. compared with optical displacement sensor.
With reference to Fig. 4, the method for the size that use eddy current type displacement transducer 7 is grasped the amplitude of the vibration rotating sword 4 illustrates.As shown in (a) of Fig. 4, the output characteristics of eddy current type displacement transducer 7 be export to apart from proportional voltage.As shown in (b) of Fig. 4, it is d0 in an initial condition from the leading section of eddy current type displacement transducer 7 to the distance of the tapered portion 5 of flange 6, vibrates because rotating sword 4, and in the scope periodically displacement (with reference to Fig. 2) of distance d1 to d2.Therefore, the output voltage V1 of the output characteristics shown in (a) of Fig. 4 can with from V1 to V2 migrate accordingly, the offset table of the distance of the tapered portion 5 from the leading section of eddy current type displacement transducer 7 to flange 6 is shown as Fig. 4 (b) from distance d1 to the displacement of d2.As shown in (c) of Fig. 4, the displacement (amplitude) of the voltage waveform of time can be expressed as from output voltage V1 to the migration of V2.Therefore, it is possible to grasp the amplitude 15 size using the amplitude as the vibration rotating sword 4 of the change as this voltage waveform.The amplitude 15 (=V2-V1) of voltage waveform is more little, and the amplitude of vibration is more little.In other words, the displacement (=d1-d2) until the distance of tapered portion 5 that eddy current type displacement transducer 7 measures is more little, then the vibration rotating sword 4 is more little.
Held by the displacement (=d2-d1) until the distance of tapered portion 5 that the amplitude 15 (=V2-V1) of voltage waveform or eddy current type displacement transducer 7 are measured such that it is able to grasp the size of the amplitude of the vibration rotating sword 4.When the displacement until the distance of tapered portion 5 that amplitude 15 or the eddy current type displacement transducer 7 of voltage waveform measure is less, cuts off load reduction cut-out efficiency and improve.Therefore, by grasping the size of the amplitude of the vibration rotating sword 4 such that it is able to set cut-out condition to reduce the vibration of cutting edge 4.Cut off load hereby it is possible to reduce and improve cut-out efficiency and cut off quality.Additionally, when the vibration rotating sword 4 is measured by reality, the amplitude of vibration and the change at the center of vibration are obtained in the impact caused by eliminating the bias etc. of flange 6.
According to the present embodiment, in shearing device, axle 1 arranges rotating shaft 3 and the rotation sword 4 of the first end being installed on rotating shaft 3.Arrange clip from both sides rotate sword 4 with that be fixed, there are two flanges 6 of tapered portion 5.In mandrel body portion 2, displacement transducer 7 is set in the position opposite with the tapered portion 5 of flange 6.Use eddy current type displacement transducer to be used as displacement transducer 7, the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 is measured.Hereby it is possible to obtain the displacement (distance of the centrage from the leading section in mandrel body portion 2 to the thickness direction rotating sword 4) rotating sword 4 axially.Therefore, it is possible to the displacement of the rotating shaft 3 flexible because of thermal expansion is corrected, and the position of cutting line that the position of the centrage of rotation sword 4 is accurately fit to base plate for packaging is made to cut off.It is prevented from when rotating the position of centrage of sword 4 and misplacing from the cutting line of base plate for packaging to cut off, thus realizing the raising of yield rate and the raising of quality.
It addition, according to the present embodiment, rotate sword 4 clipping from both sides tapered portion 5 is set with on the flange 6 that is fixed.Rotating sword 4 because being subject to cut-out load in the process cutting off base plate for packaging, so being subjected to displacement diametrically, the Z-direction of Fig. 1 being vibrated.By arranging tapered portion 5 at flange 6 such that it is able to catch the vibration that rotates sword 4 using as the displacement after from the leading section of displacement transducer 7 to the distance displacement of the tapered portion 5 of flange 6.Cycle using the cycle as the displacement after from the leading section of displacement transducer 7 to the distance displacement of tapered portion 5 of the vibration rotating sword 4 can be caught.The size of amplitude of the vibration rotating sword 4 can be caught using as the size from the leading section of displacement transducer 7 to the displacement of the distance of tapered portion 5.Therefore, by using displacement transducer 7 to measure the distance of the tapered portion 5 from the leading section of displacement transducer 7 to flange 6 such that it is able to grasp rotates the change that the change at the center of the size of amplitude of vibration of sword 4, vibration etc. rotates the state of sword 4.By grasping the size of the amplitude of the vibration rotating sword 4 such that it is able to set cut-out condition to reduce the amplitude of the vibration of cutting edge 4.Cut off load therefore, it is possible to reduce and improve cut-out efficiency and cut off quality.
It addition, according to the present embodiment, by arranging tapered portion 5 at flange 6 such that it is able to use a displacement transducer 7 to measure any one in axial displacement and displacement radially.Therefore, it is possible to suppress the expense of shearing device and hold dissengaged positions, it is possible to implement to effectively cut off.Therefore, it is possible to the raising of yield rate, the raising of quality, productivity ratio raising etc. make contributions.
Additionally, in the present embodiment, in mandrel body portion 2, displacement transducer 10 is set in the position opposite with the tapered portion 5 of the flange 6 of the side close to mandrel body portion 2.It is not limited to this, it is also possible to use the installing plate of suitable shape, displacement transducer 10 is set in the position opposite with the tapered portion 5 of the flange 6 of the side away from mandrel body portion 2.
(embodiment 2)
With reference to Fig. 5, the embodiment 2 of shearing device involved in the present invention is illustrated.The shape changing flange and the installation site of displacement transducer 7 it is different in that with embodiment 1.Structure in addition is identical with embodiment 1, therefore omits the description.Clipped two sides as it is shown in figure 5, rotate sword 4 by two discoideus flanges 16 and be fixed on rotating shaft 3.Flange 16 is formed discoideus, and its peripheral part end face has vertical shape relative to the mask rotating sword 4.The flange of the side close to mandrel body portion 2 is set to 16a, the flange of opposition side is set to 16b.Above-mentioned so-called " shape vertical relative to face " is except the situation of exact vertical, it is also possible to for being capable of detecting when the shape of the range tilt of the displacement of its peripheral part end at displacement transducer described later.
As shown in (a) of Fig. 5, (the +X direction in figure in the way of the peripheral part end 16c (in the drawings the left end of uppermost position in fig-ure) of the flange 16a towards the side close to mandrel body portion 2, that is, towards horizontal direction) leading section in mandrel body portion 2 is provided with displacement transducer 7.Eddy current type displacement transducer is used to be used as displacement transducer 7.In (a) of Fig. 5, the central part of displacement transducer 7 is by mounted in the way of the peripheral part end 16c of flange 16a.It is not limited to this, as long as the position of installation position displacement sensor 7 then can be at an arbitrary position towards the position of the peripheral part end of flange 16a.Such as, in (a) of Fig. 5, it is also possible to towards flange 16a under position shown in peripheral part end 16d carry out installation position displacement sensor 7.
The variation of (a) that (b) of Fig. 5 is Fig. 5, changes the installation site of displacement transducer 7.Such as, the installing plate 17 being set to letter " L " shape is used, to arrange displacement transducer 7 in the way of vertical direction (-Z direction).Will be equivalent to the part of the perpendicular rod 17a of installing plate 17, be arranged on the end face (in figure right-hand member) in mandrel body portion 2, in the part of the horizontal bar 17b being equivalent to installing plate, towards vertical direction installation position displacement sensor 7.The displacement transducer 7 being made up of eddy current type displacement transducer is by mounted in the way of the peripheral part end 16e (in figure the upper left of uppermost position) of flange 16a.It is not limited to this, as long as the position of installation position displacement sensor 7 then can be at an arbitrary position towards the position of the peripheral part end of flange 16a or flange 16b.Such as, in (b) of Fig. 5, it is also possible to carry out installation position displacement sensor 7 towards the peripheral part end 16f shown in the position of the top of flange 16b.
As shown in (a), (b) of Fig. 5, displacement transducer 7 to be installed in mandrel body portion 2 in the way of horizontal direction or vertical direction.Towards the peripheral part end of flange 16a or flange 16b, displacement transducer 7 is set.Because rotating shaft 3 is subjected to displacement on axially or radially, cause that the area near from displacement transducer 7 to the distance of flange outer periphery portion end or flange outer periphery portion end changes.Because producing these changes, make displacement transducer 7 that the change of eddy current to be measured.Hereby it is possible to use displacement transducer 7 to measure axial displacement and displacement radially.
According to the present embodiment, in shearing device, clip rotation sword 4 from both sides by being formed as discoideus flange 16a, 16b and be fixed on rotating shaft 3.In mandrel body portion 2, the displacement transducer 7 being made up of eddy current type displacement transducer is arranged towards the peripheral part end of flange 16a or flange 16b.Use displacement transducer 7, the area change near from displacement transducer 7 to the distance of flange outer periphery portion end or flange outer periphery portion end is measured.Rotate sword 4 displacement in the axial direction hereby it is possible to grasp or rotate the size of amplitude of vibration of sword 4.
By measuring the displacement of rotating shaft 3 axially such that it is able to the displacement of the flexible rotating shaft 3 caused because of thermal expansion is corrected, and the position of cutting line that the position of the centrage of rotation sword 4 is accurately fit to base plate for packaging is made to cut off.Therefore, it is possible to prevent from cutting off when rotating the position of centrage of sword 4 and misplacing from the cutting line of base plate for packaging, thus realizing the raising of yield rate and the raising of quality.
The cycle of the cycle of vibration rotating sword 4 variable quantity to change can be caught as the area near flange outer periphery portion end.The size of the size of amplitude of the vibration rotating sword 4 variable quantity of area to detect can be caught as displacement transducer 7.Therefore, displacement transducer 7 is used, it is possible to grasp the size of the amplitude of the vibration rotating sword 4.By grasping the size of amplitude of the vibration rotating sword 4 such that it is able to set cut-out condition so that the amplitude of vibration of cutting edge 4 reduces.Cut off load therefore, it is possible to reduce and improve cut-out efficiency and cut off quality.
(embodiment 3)
With reference to Fig. 6, the embodiment 3 of shearing device involved in the present invention is illustrated.As shown in Figure 6, shearing device 18 is the device making cut-off thing turn to multiple product through monolithic.Shearing device 18 possesses respectively as the substrate feed unit A of structural element, substrate cutting unit B and inspection unit C.Each structural element (each unit A～C) can be respectively relative to the handling of other structural elements and can exchange.
Substrate feed unit A is provided with substrate feed mechanism 19.The base plate for packaging 20 of the element of shaped like chips that be equivalent to cut-off thing, that include semiconductor chip etc. takes out of from substrate feed mechanism 19, and is shifted in substrate cutting unit B by transfer mechanism (not shown).Being provided with control portion CTL in substrate feed unit A, the action and cut-out condition etc. of shearing device 18 are set and are controlled by this control portion CTL.
Shearing device 18 shown in Fig. 6 is the shearing device of single cutting work station platform mode.Therefore, substrate cutting unit B is provided with a cut-out workbench 21.Cut-out workbench 21 can be moved along the Y-direction in figure by travel mechanism 22, and can be rotated along θ direction by rotating mechanism 23.Cut-out workbench 21 is placed with base plate for packaging 20 and is adsorbed.
Substrate cutting unit B is provided with axle 1 as shut-off mechanism.Shearing device 18 is the shearing device of the holocentric axle construction being provided with an axle 1.Axle 1 can move independently along X-direction and Z-direction.Axle 1 is such as provided with the rotation sword 4 (with reference to Fig. 1) clipped by two flanges 6 with tapered portion 5.Eddy current type displacement transducer is set oppositely with the tapered portion 5 of flange 6 in axle 1 using as displacement transducer 7.By making, cut-out workbench 22 and axle 1 are relatively mobile cuts off base plate for packaging 20.Rotate sword 4 to rotate comprising in the face of Y-direction and Z-direction, cut off base plate for packaging 20 accordingly.
Inspection unit C is provided with inspection workbench 24.Inspection workbench 24 is placed be made up of the multiple product P cutting off base plate for packaging 20 singualtion aggregation, namely cut off metacoxal plate 25.Multiple product P check with photographing unit (not shown) by checking, and screen as certified products and substandard products.Certified products are housed in pallet 26.
In the present embodiment, the shearing device 18 of single cutting work station platform mode and holocentric axle construction is illustrated.It is not limited to this, in the shearing device etc. of the shearing device of single cutting work station platform mode and diplocardia axle construction or double; two cutting work station platform mode and diplocardia axle construction, also is able to be suitable for the axle 1 of the present invention.It addition, employ eddy current type displacement transducer to be used as displacement transducer 7.It is not limited to this, it is also possible to use the displacement transducer that other are contactless.
In embodiments, as rotating sword 4, it is shown that use the washer type with annular shape (curved surface annular) to rotate the situation of sword.It is not limited to this, it is also possible to the bush type being used in floor installation blade tip portion rotates sword.As fixing parts, replace the combination of two flanges, it is also possible to use the combination etc. of flange and nut.As fixing parts, it is also possible to use the parts with the flat shape except annular shape.
In the above description, it is shown that cut-out is as the situation of the base plate for packaging 20 of the element including shaped like chips of cut-off thing.Be not limited to this, when cut off carry out singualtion as the following cut-off thing of the cut-off thing except base plate for packaging 20, it is possible to the applicable present invention.First for carrying out the situation of singualtion to the semiconductor wafer (semiconductorwafer) being constituted and being made the function element such as component, MEMS (MEMS, MicroElectroMechanicalSystems) by silicon, compound semiconductor.Second for having the ceramic substrate of function element, the glass substrates etc. such as resistance, capacitor, sensor, surface elasticity wave device to carry out singualtion to manufacture the situation of chip-resistance, chip capacitor and the product such as chip-shaped sensor, surface elasticity wave device to making.In both cases, semiconductor wafer, ceramic substrate etc. are equivalent to make the substrate of function element corresponding with multiple regions respectively.3rd for carry out singualtion to manufacture the situation of the opticses such as lens, optical module, light guide plate to synthetic resin.4th is synthetic resin carries out singualtion to manufacture the situation of general shaped article.5th is the situation of the glass plate manufacturing the lid being used as various electronic equipment.In the various situations including above-mentioned five kinds of situations, content described above can both be suitable for.
The present invention is not limited to above-mentioned each embodiment, without departing from the scope of the subject in the invention, can as required, arbitrarily and be properly carried out combination, change or optionally adopt.
Description of reference numerals
1 axle (shut-off mechanism)
2 mandrel body portions
3 rotating shafts
4 rotate sword
5 tapered portion (regulation region)
6 flanges (fixing parts)
7 displacement transducers (determination unit)
8 cell windings
9 sensor part
10 transducers
11 coaxial cables
12 high frequency magnetic fields
13 eddy current
14 output characteristics
The amplitude of 15 voltage waveforms
16a, 16b flange (fixing parts)
16c, 16d, 16e, 16f peripheral part end (regulation region)
17 installing plates
17a is equivalent to the part of perpendicular rod
17b is equivalent to the part of horizontal bar
18 shearing devices
19 substrate feed mechanisms
20 base plate for packaging (cut-off thing)
21 cut off with workbench (workbench)
22 travel mechanisms
23 rotating mechanisms
24 inspection workbench
25 cut off metacoxal plate
26 pallets
D0, dX, d1, d2 mensuration distance from the leading section of displacement transducer to tapered portion
L0, LX from the leading section of mandrel body to the thickness direction rotating sword the distance of centrage
α fixed value
V1, V2, V3 output voltage
A substrate feed unit
B substrate cutting unit
C inspection unit
CTL control portion
P product
Claims (18)
1. a shearing device, possesses: workbench, places cut-off thing；Shut-off mechanism, cuts off described cut-off thing；And travel mechanism, make described workbench and described shut-off mechanism relatively move, described shearing device is used when carrying out singualtion along the cutting line described cut-off thing of cut-out, it is characterised in that possess:
Rotating shaft, is arranged at described shut-off mechanism；
Rotate sword, be installed on the leading section of described rotating shaft；
Two fixing parts, are separately positioned in the side of both sides of described rotation sword, clip described rotation sword to be fixed；And
Determination unit, to be arranged at described shut-off mechanism in the way of the regulation region of described fixing parts,
Described determination unit is detected by the displacement in the described regulation region to described fixing parts, thus determining the displacement after described rotation sword displacement,
Described displacement includes:
First displacement, displacement that described rotation sword causes along the axial displacement of described rotating shaft and
Second displacement, the displacement that described rotation sword causes along described displacement radially of the axis of rotation.
2. shearing device according to claim 1, it is characterised in that
By correcting the relative position relationship of described rotation sword and described cut-off thing according to described first displacement, so that the position of described rotation sword matches with the position of described cutting line.
3. shearing device according to claim 1, it is characterised in that
The characteristic relevant with the vibration of described rotation sword is measured according to described second displacement.
4. shearing device according to claim 1, it is characterised in that
Described regulation region has the tapered portion formed in the way of the thickness of central side and the thickness of perimeter sides are different.
5. shearing device according to claim 1, it is characterised in that
Described regulation region includes the end being vertically formed in the peripheral part of described fixing parts relative to the face of described rotation sword.
6. shearing device according to claim 1, it is characterised in that
Described regulation region is made up of the material with electric conductivity.
7. shearing device according to claim 6, it is characterised in that
Described determination unit includes eddy current type displacement transducer.
8. the shearing device according to any one of claim 1～7, it is characterised in that
Described cut-off thing is base plate for packaging.
9. the shearing device according to any one of claim 1～7, it is characterised in that
Described cut-off thing is the substrate making and having function element corresponding with multiple regions respectively.
10. a cutting-off method, including: in the operation of the cut-off thing of workbench mounting；Make the operation that the shut-off mechanism with rotation sword and described workbench relatively move；And by making described shut-off mechanism and described workbench relatively move so that cut off the operation of described cut-off thing along cutting line with described shut-off mechanism, it is characterised in that including:
Making the operation that described rotation sword rotates, described rotation sword, in being arranged at the leading section of rotating shaft of described shut-off mechanism, is fixed by two fixing parts arranging in the side of the both sides of described rotation sword；
Make the operation that the determination unit being arranged at described shut-off mechanism is opposite with the regulation region of described fixing parts；And
Described determination unit is detected by the displacement in the described regulation region to described fixing parts, thus determining the operation of the displacement after described rotation sword displacement,
The operation measuring described displacement includes:
The operation that the first displacement that described rotation sword is caused along the axial displacement of described rotating shaft is measured；And
The operation that the second displacement that described rotation sword is caused along described displacement radially of the axis of rotation is measured.
11. cutting-off method according to claim 10, it is characterised in that
Including the relative position relationship by correcting described rotation sword and described cut-off thing according to described first displacement, so that the operation that the position of described rotation sword matches with the position of described cutting line.
12. cutting-off method according to claim 10, it is characterised in that
Including the operation measuring the characteristic relevant with the amplitude of the vibration of described rotation sword according to described second displacement.
13. cutting-off method according to claim 10, it is characterised in that
Described regulation region has the tapered portion formed in the way of the thickness of central side and the thickness of perimeter sides are different.
14. cutting-off method according to claim 10, it is characterised in that
Described regulation region includes the end being vertically formed in the peripheral part of described fixing parts relative to the face of described rotation sword.
15. cutting-off method according to claim 10, it is characterised in that
Described regulation region is made up of the material with electric conductivity.
16. cutting-off method according to claim 15, it is characterised in that
Described determination unit includes eddy current type displacement transducer.
17. the cutting-off method according to any one of claim 10～16, it is characterised in that
Described cut-off thing is base plate for packaging.
18. the cutting-off method according to any one of claim 10～16, it is characterised in that
Described cut-off thing is the substrate making and having function element corresponding with multiple regions respectively.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-259909 | 2014-12-24 | ||
| JP2014259909A JP6235453B2 (en) | 2014-12-24 | 2014-12-24 | Cutting apparatus and cutting method |
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| Publication Number | Publication Date |
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| CN105742245A true CN105742245A (en) | 2016-07-06 |
| CN105742245B CN105742245B (en) | 2018-12-07 |
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| CN201510726801.0A Active CN105742245B (en) | 2014-12-24 | 2015-10-30 | Disconnecting device and cutting-off method |
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| Country | Link |
|---|---|
| JP (1) | JP6235453B2 (en) |
| KR (1) | KR101749422B1 (en) |
| CN (1) | CN105742245B (en) |
| TW (1) | TWI602641B (en) |
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| JP6846657B2 (en) * | 2017-01-20 | 2021-03-24 | 株式会社ディスコ | Cutting equipment |
| JP7051205B2 (en) * | 2017-12-27 | 2022-04-11 | 株式会社ディスコ | Cutting equipment |
| TWI690385B (en) * | 2019-06-28 | 2020-04-11 | 鼎朋企業股份有限公司 | Grinding machine tool with random eccentric orbit motion speed detection |
| KR102279726B1 (en) * | 2019-09-26 | 2021-07-20 | 한국광기술원 | Wafer Lens Array Dicing Apparatus Including Dicing Blade for Cutting Wafer Lens Array and Method Using the Same |
| JP7394712B2 (en) * | 2020-06-24 | 2023-12-08 | Ｔｏｗａ株式会社 | Cutting device and method for manufacturing cut products |
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| US6576531B2 (en) * | 2001-08-24 | 2003-06-10 | Micron Technology, Inc. | Method for cutting semiconductor wafers |
| CN1773680A (en) * | 2004-11-10 | 2006-05-17 | 株式会社迪斯科 | Cutting device |
| CN202278449U (en) * | 2011-08-16 | 2012-06-20 | 北京工业大学 | Device for testing displacement of machine tool combining part relative to tool nose point |
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| JPH06310596A (en) | 1993-04-23 | 1994-11-04 | Seiko Seiki Co Ltd | Dicing apparatus |
| JP3049464B2 (en) * | 1993-11-26 | 2000-06-05 | セイコー精機株式会社 | Dicing equipment |
| JP2003203885A (en) * | 2002-01-08 | 2003-07-18 | Disco Abrasive Syst Ltd | Process machine |
| JP4559094B2 (en) * | 2004-02-16 | 2010-10-06 | 株式会社ディスコ | Cutting blade mounting device, cutting device |
| ITMI20041269A1 (en) * | 2004-06-24 | 2004-09-24 | Paper Converting Machine Co | CUTTING BLADE CONTROL SYSTEM PARTICULARLY FOR CUTTING MACHINES FOR LOG CUTTING OF SHEET MATERIAL |
| JP4311686B2 (en) * | 2006-09-27 | 2009-08-12 | 日立ビアメカニクス株式会社 | Method for processing printed circuit boards |
| JP2009206362A (en) * | 2008-02-28 | 2009-09-10 | Disco Abrasive Syst Ltd | Method of cutting plate-like material |
| JP5248250B2 (en) * | 2008-09-26 | 2013-07-31 | 株式会社ディスコ | Cutting device and method for adjusting rotational balance of cutting blade |
| JP5643729B2 (en) * | 2011-09-02 | 2014-12-17 | Ｔｏｗａ株式会社 | Spindle locking device in air spindle unit |
| CN102554780A (en) * | 2012-02-17 | 2012-07-11 | 上海理工大学 | Measuring device for grinding radial run-out of metal-bonded grinding wheels |
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2014
- 2014-12-24 JP JP2014259909A patent/JP6235453B2/en active Active
-
2015
- 2015-10-30 CN CN201510726801.0A patent/CN105742245B/en active Active
- 2015-11-02 TW TW104135969A patent/TWI602641B/en active
- 2015-11-03 KR KR1020150153623A patent/KR101749422B1/en active IP Right Grant
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6576531B2 (en) * | 2001-08-24 | 2003-06-10 | Micron Technology, Inc. | Method for cutting semiconductor wafers |
| CN1773680A (en) * | 2004-11-10 | 2006-05-17 | 株式会社迪斯科 | Cutting device |
| CN202278449U (en) * | 2011-08-16 | 2012-06-20 | 北京工业大学 | Device for testing displacement of machine tool combining part relative to tool nose point |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI602641B (en) | 2017-10-21 |
| JP6235453B2 (en) | 2017-11-22 |
| CN105742245B (en) | 2018-12-07 |
| JP2016122673A (en) | 2016-07-07 |
| KR101749422B1 (en) | 2017-06-20 |
| TW201622879A (en) | 2016-07-01 |
| KR20160078227A (en) | 2016-07-04 |
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