JP5643729B2 - Spindle locking device in air spindle unit - Google Patents

Description

  The present invention relates to an improvement of a spindle locking device installed in an air spindle unit or the like.

As an example in which the air spindle unit is employed, there is a cutting apparatus for cutting a predetermined position of a workpiece such as a semiconductor wafer and dividing it into a minimum unit.
In addition, a blade (rotary cutting blade) used by attaching to the tip mounting portion of the spindle (high-speed rotating shaft) of this cutting apparatus is provided so as to be detachable from the tip mounting portion. This is attached or detached when the workpiece is changed due to a change or the like.

By the way, when the blade is mounted on the spindle of the cutting apparatus, for example, a configuration is known in which the blade is sandwiched between two flanges and the flange is fixed to the spindle tip mounting portion with a nut in this state. (For example, refer to Patent Document 1).
When the blade is attached to or detached from the spindle tip mounting portion, a spindle locking device is provided for locking the spindle so as not to rotate in order to prevent a so-called co-rotation phenomenon between the nut and the spindle. .

In addition, this locking device prevents the rotation of the spindle by fitting a locking member of the locking device provided outside the spindle housing into an engagement hole provided in the spindle peripheral surface inside the spindle housing. Is.
Further, it is disclosed that the fitting state of the locking member of the locking device and the engagement hole of the spindle peripheral surface and the non-fitting state of the both are appropriately switched and controlled.
Therefore, according to such a configuration, the joint rotation phenomenon between the nut and the spindle can be surely prevented, so that it can be expected that the operation of attaching and detaching the blade to the spindle tip mounting portion is improved.

However, according to the configuration of the lock device described above, switching control between the rotation state and the non-rotation state of the spindle can be performed, but the confirmation means is not provided.
For this reason, for example, there is a work risk that the motor is erroneously operated when the spindle is unlocked (when it is rotatable).
Further, there is a problem that the spindle is damaged by accidentally operating the motor when the spindle is locked (when rotation is impossible).
Further, in order to solve such a problem, it is necessary to manually and surely perform a confirmation operation of the spindle locking or unlocking each time.

Japanese Patent Laying-Open No. 2005-191096 (see FIG. 4, FIG. 11, etc.)

  The present invention not only enables reliable control of switching between the locked state and unlocked state of the spindle in the air spindle unit, but also automatically confirms whether the spindle is locked or unlocked. An object of the present invention is to provide a spindle locking device that can improve safety and work efficiency.

In order to solve the above-described problems, the present invention provides a spindle 5 provided with an attaching / detaching portion 5a for a rotating blade 9 at the tip, and the spindle 5 can be rotated via radial air bearings 2 and 3 and a thrust air bearing 4. A spindle locking device in an air spindle unit comprising: a spindle housing 1 to be supported; a motor unit 6 for rotationally driving the spindle 5; and a locking and unlocking mechanism B for the spindle 5.
The lock and unlock mechanism B includes a lock device body 10 installed outside the spindle housing 1, a lock pin member 11 fitted to the lock device body 10, and a position control pin member 12 for the lock pin member 11. And position detection sensors 13a and 13b of the lock pin member 11 and / or the position control pin member 12,
Further, the lock pin member 11 is provided so as to be able to advance and retract in the axial direction of the spindle 5, and at least one lock hole that fits with the front end engaging portion 11 a of the lock pin member 11 on the peripheral surface of the spindle 5. 5b,
Further, the position detection sensor 13b transmits a detection signal 16 of the locked state of the spindle 5 in which the tip engaging portion 11a of the lock pin member 11 and the lock hole 5b of the spindle 5 are fitted to the interlock mechanism side. In addition, the motor unit 6 can be started after the locked state of the spindle 5 is released via the interlock mechanism.

According to the present invention, not only can the switching control of the rotation state or the non-rotation state of the spindle 5 in the air spindle unit A be performed reliably, but also the spindle 5 can be locked and unlocked automatically. Therefore, it is possible to improve work safety and work efficiency.

FIG. 1 is a schematic longitudinal sectional view showing the main part of a cutting apparatus provided with a spindle locking device according to the present invention. 2 is an enlarged longitudinal sectional view of a main part corresponding to FIG. 1. FIG. 2 (1) shows a lock release state by the lock device, and FIG. 2 (2) shows a lock state by the lock device. FIG. 3 is a longitudinal sectional view showing the main part of another locking device. FIG. 3 (1) shows the unlocked state by the locking device, and FIG. 3 (2) shows the locked state by the locking device. .

  The first embodiment of the present invention shown in FIGS. 1 and 2 will be described below.

  FIG. 1 shows a cutting apparatus for a semiconductor wafer or the like equipped with a spindle locking device in an air spindle unit according to the present invention.

This air spindle unit A (cutting device) supports a spindle 5 rotatably inside a spindle housing 1 via radial air bearings 2 and 3 and a thrust air bearing 4.
A synchro motor 6 having a rotor 6a and a stator 6b is disposed at the upper end of the spindle 5 so that the spindle 5 can be driven to rotate.
A blade attaching / detaching portion 5a is provided at the lower end of the spindle 5, and the blade 9 is detachably attached to the blade attaching / detaching portion 5a via a pair of flange members 7 and 8.

  In addition, a lock device having a lock and unlock mechanism B for locking (unrotatable) and unlocking (rotatable) the air spindle unit A to the spindle 5 is installed outside the spindle housing 1. doing.

The lock and unlock mechanism B includes a lock device main body 10 installed outside the spindle housing 1, a lock pin member 11 fitted to the lock device main body 10, and a position control pin member 12 for the lock pin member 11. And position detection sensors 13a and 13b of the lock pin member 11 and / or the position control pin member 12.
In addition, the lock pin member 11 is disposed so as to be able to advance and retreat in the axial direction of the spindle 5, and at least one or more of the lock pin member 11 fitted to the tip engaging portion 11 a of the lock pin member 11 is fitted on the peripheral surface of the spindle 5. A lock hole 5b is provided.
In addition, when providing the some lock hole 5b in the surrounding surface of the spindle 5, it can arrange | position in the equally spaced position etc. on the virtual same circumference line, for example.
Further, when the position detection sensor 13b detects the locked state of the spindle 5 in which the tip engaging portion 11a of the lock pin member 11 and the lock hole 5b of the spindle 5 are fitted, the motor portion is released after the lock state is released. An interlock mechanism (not shown) that can start the operation of No. 6 is provided.

Further, as shown in FIG. 2, the lock pin member 11 is provided so as to be able to advance and retract in the axial direction of the spindle 5, and the tip engaging portion 11a is fitted into the lock hole 5b of the spindle 5 by receiving the elasticity of the elastic member 11b. It is set so as to move elastically in the direction of alignment (axial center direction of the spindle 5).
Further, an engagement circumferential groove 11c with the position control pin member 12 is provided at a substantially central portion of the lock pin member 11.
Further, the position control pin member 12 with respect to the lock pin member 11 is fitted in a direction orthogonal to the axial direction of the lock pin member 11. Further, the tip engaging portion 12a of the position control pin member 12 is set so as to elastically move in a direction in which the tip engaging portion 12a is engaged with the lock pin member 11 under the elasticity of the elastic member 12b. .
As will be described later, when the front end engaging portion 12a of the position control pin member 12 and the engaging circumferential groove 11c of the lock pin member 11 are fitted, the front end engaging portion 11a of the lock pin member 11 is connected to the spindle 5. The position control pin member 12 surely stops the movement of the lock pin member 11 at a position where it is in contact with the peripheral surface or moved to a position where it does not fit into the lock hole 5b. (See Fig. 2 (1)).

Further, as shown in FIG. 2 (1), the lock pin member 11 is moved to a position where the tip engaging portion 11a is completely detached from the lock hole 5b of the spindle 5 against the elasticity of the elastic member 11b. At this time, the tip engaging portion 12a of the position control pin member 12 is elastically moved in a direction to engage with the lock pin member 11 by the elastic pressing force of the elastic member 12b, and the tip engaging portion 12a is It is set so as to fit in the engagement circumferential groove 11c.
The movement of the lock pin member 11 can be performed manually (artificial means) such as grasping and pulling out the base end (right end) portion 11d of the lock pin member 11.
At this time, the base end portion 11d of the lock pin member 11 protrudes to the outside of the lock device main body 10, and the position of the lock pin member 11 can be detected by the position detection sensor 13a. The position detection of the lock pin member 11 by the position detection sensor 13a means that the unlocked state of the spindle 5 is detected. Further, the position detection signal 15 is transmitted to the interlock mechanism (not shown) side.
At this time, since the position control pin member 12 has moved to the lock pin member 11 side, the position detection pin 13 cannot be detected by the position detection sensor 13b. In this case, however, the position control pin member 12 is locked. This means that the pin 11 is engaged with the engagement circumferential groove 11c.
Therefore, this information can be used as a signal for detecting the unlocked state of the spindle 5 as in the case of detecting the position of the lock pin member 11 by the position detection sensor 13a.

Further, as shown in FIG. 2 (2), the distal end engaging portion of the position control pin member 12 is gripped and manually pulled down against the elasticity of the elastic member 12b, thereby pulling the distal end engaging portion. When the 12a is pulled out from the engagement circumferential groove 11c of the lock pin member 11, the fitting state between the position control pin member 12 and the lock pin member 11 can be released.
By releasing the fitting state of the two, the lock pin member 11 receives the elastic pushing force of the elastic member 11b and moves to the axial center side of the spindle 5 and is engaged with the lock hole 5b.
Therefore, when the base end portion 12c of the position control pin member 12 is pulled down, the fitting state between the lock pin member 11 and the position control pin member 12 can be released, and the lock pin member 11 and the spindle 5 can be fitted together. Thus, the spindle 5 can be locked so as not to rotate.
If the positions of the lock hole 5b of the spindle 5 and the tip engaging portion 11a of the lock pin member 11 do not coincide with each other, the spindle 5 can be manually rotated so that both can be aligned. The fitting operation between the two can be performed easily and reliably.
At this time, the base end portion 12c of the position control pin member 12 protrudes outside the lock device body 10, and the position of the position control pin member 12 can be detected by the position detection sensor 13b. The position detection of the position control pin member 12 by the position detection sensor 13b means that the locked state of the spindle 5 has been detected. Further, the position detection signal 16 is transmitted to the interlock mechanism (not shown) side.
At this time, the position of the lock pin member 11 cannot be detected by the position detection sensor 13a because the lock pin member 11 is moved to the spindle 5 side (to the left), but in this case, the lock pin member 11 is not connected to the spindle 5 This means that it is fitted with the lock hole 5b.
Therefore, this information can be used as a signal for detecting the locked state of the spindle 5 as in the case of position detection of the position control pin member 12 by the position detection sensor 13b.

When shifting from the locked state of the spindle 5 shown in FIG. 2 (2) to the unlocked state of the spindle 5 shown in FIG. 2 (1), the lock pin member 11 shown in FIG. 2 (2) is manually operated. Just pull it out.
That is, as described above, when the base end portion 11d of the lock pin member 11 shown in FIG. 2 (2) is grasped and pulled out, the tip engaging portion 11a is completely detached from the lock hole 5b of the spindle 5, The engaging circumferential groove 11c and the tip engaging portion 12a of the position control pin member 12 can be fitted.
For this reason, the locked state of the spindle 5 can be released and the unlocked state can be maintained.

In this embodiment, the lock pin member 11, the position control pin member 12, and the position detection sensors 13a and 13b of both members are shown, and the combination of the lock pin member 11 and the position detection sensor 13a is shown. The combination of the position control pin member 12 and the position detection sensor 13b will be described.
However, it may be a configuration that employs only one of these combinations.

According to the configuration of the first embodiment, the switching control between the locked state and the unlocked state of the spindle 5 is ensured by a simple manual operation in which the lock pin member 11 and the position control pin member 12 are grasped and pulled out. Not only can this be performed, but the switching control state can be reliably maintained.
Furthermore, by automatically performing a confirmation operation for locking or unlocking the spindle 5, work safety and work efficiency can be improved.

  Next, a second embodiment according to the present invention will be described with reference to FIG.

As shown in FIG. 3, the second embodiment includes an electromagnetic mechanism 14 such as an electromagnetic solenoid or a rotary solenoid, and a forward / backward means such as a motor as a drive source of the lock pin member 11 in the lock and unlock mechanism C. Thus, the engagement / disengagement operation between the tip engaging portion 11a of the lock pin member 11 and the lock hole 5b of the spindle 5 is automatically performed.
Other configurations are the same as those described in the previous embodiment.
That is, the lock and unlock mechanism C includes a lock device body 10 installed outside the spindle housing 1, a lock pin member 11 fitted to the lock device body 10, and a position detection sensor 13c of the lock pin member 11. including. In addition, the lock pin member 11 is provided so as to be able to advance and retract in the axial direction of the spindle 5, and at least one lock hole 5 b that fits the tip engaging portion 11 a of the lock pin member 11 is provided on the peripheral surface of the spindle 5. Further, an electromagnetic mechanism 14 (advance / retreat means) is provided for moving the lock pin member 11 forward and backward in the axial direction of the spindle 5 to engage and disengage the tip engaging portion 11a of the lock pin member 11 and the lock hole 5b of the spindle 5. ing.

In the configuration of the second embodiment, the tip pin engaging portion 11a of the lock pin member 11 is moved to the position completely disengaged from the lock hole 5b of the spindle 5 through the electromagnetic mechanism 14, thereby The lock of the spindle 5 can be released (see FIG. 3 (1)).
At this time, the base end portion 11d of the lock pin member 11 protrudes outside the lock device body 10, and the position detection sensor 13c can detect the position of the lock pin member 11. The position detection of the lock pin member 11 by the position detection sensor 13c means that the unlocked state of the spindle 5 has been detected. Further, the position detection signal 17 is transmitted to the interlock mechanism (not shown) side.

Further, as shown in FIG. 3 (2), the spindle 5 is rotated by moving the tip engaging portion 11a of the lock pin member 11 to a position where it is fitted into the lock hole 5b of the spindle 5 via the electromagnetic mechanism 14. Can be locked to not.
At this time, since the lock pin member 11 has moved to the spindle 5 side (leftward), the position of the lock pin member 11 cannot be detected by the position detection sensor 13c. This means that it is fitted with the lock hole 5b.
Therefore, this information is transmitted to the interlock mechanism (not shown) side as a signal 18 for detecting the locked state of the spindle 5.

In the second embodiment, the case where an electromagnetic mechanism 14 such as a rotary solenoid is used as a drive source of the lock pin member 11 is shown. However, when a rotary solenoid is used, it is at a position corresponding to the rotation angle of the rotary shaft. Appropriate signal display such as control state display such as “lock” and “lock release” can be performed.
As described above, if the operator can confirm the control state by visual observation at the same time in accordance with the control state of the spindle 5, further safety in operation can be achieved.

According to the configuration of the second embodiment, the electromagnetic mechanism 14 is provided as a drive source for the lock pin member 11, thereby automatically engaging / disengaging the tip engaging portion 11a of the lock pin member 11 and the lock hole 5b of the spindle 5. Therefore, the switching control of the locked state or the unlocked state of the spindle 5 can be more reliably performed, and the switching control state can be reliably maintained.
Furthermore, by automatically performing a confirmation operation for locking or unlocking the spindle 5, work safety and work efficiency can be improved.

A Air spindle unit B Lock and unlock mechanism C Lock and unlock mechanism 1 Spindle housing 2 Radial air bearing 3 Radial air bearing 4 Thrust air bearing 5 Spindle 5a Blade attaching / detaching part 5b Lock hole 6 Synchro motor 6a Rotor 6b Stator 7 Flange member 8 Flange member 9 Rotating blade
10 Locking device body
11 Lock pin member
11a Tip engagement part
11b Elastic member
11c engagement circumferential groove
11d Base end (right end)
12 Position control pin member
12a Tip engagement part
12b Elastic member
12c Base end (lower end)
13a Position detection sensor
13b Position detection sensor
13c Position detection sensor
14 Electromagnetic mechanism
15 Position detection signal
16 Position detection signal
17 Position detection signal
18 signals

Claims (1)

A spindle provided with a detachable part for a rotating blade at the tip;
A spindle housing for rotatably supporting the spindle via a radial air bearing and a thrust air bearing;
A motor unit for rotating the spindle;
A spindle locking device in an air spindle unit comprising the spindle locking and unlocking mechanism,
The lock and unlock mechanism is
A locking device body installed outside the spindle housing;
A lock pin member fitted to the lock device body and a position control pin member for the lock pin member;
A position detection sensor of the lock pin member and / or position control pin member,
Further, the lock pin member is provided so as to be able to advance and retreat in the axial direction of the spindle, and at least one lock hole is provided on the peripheral surface of the spindle to be fitted with a tip engagement portion of the lock pin member.
Furthermore, the position detection sensor transmits a detection signal of the locked state of the spindle in which the tip engaging portion of the lock pin member and the lock hole of the spindle are fitted to the interlock mechanism side, and the interlock mechanism Thus, the spindle locking device in the air spindle unit is configured so that the operation of the motor unit can be started after releasing the locked state of the spindle.

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