JP5265964B2 - Cutting equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a cutting blade from coming off and getting damaged during replacement of the blade on a rotating spindle, to improve working efficiency. <P>SOLUTION: A second air supply path 218 communicating with an air sealing slot 217 and having high pressure air supplied from a high pressure air source 24 includes a branch path 219 branching to a locking device 23, and a change valve 25 is provided at the branch of the branch path 219. Thus, the valve 25 is controlled to switch over to change the high pressure air supplied from the high pressure air source 24 to the air sealing slot 217 to the locking device 23 via the branch path 219 during the replacement of the cutting blade 3 on the rotating spindle 20, thereby inhibiting air ejection from the slot 217 toward the cutting blade 3 from being replaced. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

The present invention relates to switching-cutting device.

  2. Description of the Related Art A dicing apparatus or the like that cuts a workpiece such as a semiconductor wafer is equipped with an air spindle and performs dicing. For example, as shown in the conventional examples in Patent Documents 1 and 2, the air spindle is provided with a rotating spindle serving as a rotating shaft through a radial air bearing and a thrust air bearing inside the spindle housing. The tip of the rotating spindle protrudes outward from the spindle housing, and a cutting blade is detachably attached to the protruding tip through a flange member. Then, for example, cutting of a semiconductor wafer or the like is performed by a cutting blade attached to the tip of the rotating spindle.

  An air supply path is provided in the spindle housing so that cutting waste generated in the cutting process, that is, contamination, does not enter between the spindle housing and the rotary spindle, and this air supply path is provided on the inner peripheral side of the tip end portion of the spindle housing. Connected to the ring-shaped air seal groove formed in the high-pressure air source, high-pressure air is supplied from the high-pressure air source, and air is ejected outward from the clearance between the spindle housing tip and the rotating spindle via the air supply path and air seal groove. As a result, an air seal is formed on the outer peripheral surface of the rotary spindle to prevent intrusion into the contamination (for example, see Patent Document 1).

JP 2000-46054 A JP 2000-130438 A

  However, when replacing a hubless thin cutting blade, the cutting blade that is not fixed to the rotating spindle is blown off from the flange member during the replacement due to the force of the air blown out from the air seal groove. Therefore, there are problems such as damage to the cutting blade and difficulty in mounting the cutting blade at a predetermined position.

The present invention was made in view of the above, aims to provide a avoid cutting blade off or breakage at the time of replacing the cutting blade with respect to the rotational spindle, cutting off that Hakare improving work efficiency device And

In order to solve the above-described problems and achieve the object, a cutting apparatus according to the present invention has a chuck table for holding a workpiece and a cutting blade for cutting the workpiece held on the chuck table at the tip. A rotary spindle to be mounted, a spindle housing that rotatably supports the rotary spindle by a radial air bearing and a thrust air bearing, a rotary drive unit that rotationally drives the rotary spindle, and a high pressure to the radial air bearing and the thrust air bearing A first air supply path for supplying air, and the spindle housing is locked in a non-rotatable state by the shaft lock pin when the air pressure is applied, and the air pressure is not applied when the air pressure is not applied. An unrotatable rotary spindle A locking device that is in a closed state, an air seal groove provided on the inner peripheral side of the tip of the spindle housing, and a second air supply path that communicates with the air seal groove and is supplied with high-pressure air from a high-pressure air source. The second air supply path has a branch path that branches to the lock device, and the high-pressure air is supplied to the air seal groove side at the branch point of the branch path or supplied to the lock device side. A cutting unit comprising a switching unit for switching whether or not to cut, a cutting means mounted on the spindle unit, and a branch path to the high-pressure air source in a normal state, and the high-pressure air The switching valve is controlled to be supplied to the air seal groove side, and the cutting blade with respect to the rotating spindle is controlled. At the time of replacement, the switching valve is configured to switch the high-pressure air supplied from the high-pressure air source to the air seal groove side through the second air supply path to the lock device side through the branch path. And a control means for switching and controlling .

Device cutting off that written in the present invention, the second air supply path which high pressure air is supplied from the high-pressure air source communicated with the air seal groove has a branching path that branches to the locking device, the branch path Since a switching valve is provided at the branch point, when the cutting blade is replaced with the rotating spindle, the switching valve is controlled to switch the high-pressure air supplied from the high-pressure air source to the air seal groove side to the lock device side via the branch path. By switching, it is possible to suppress air blowout from the air seal groove to the cutting blade in the middle of replacement, thereby avoiding disconnection and breakage of the cutting blade when replacing the cutting blade with respect to the rotating spindle, and improving work efficiency There is an effect that can be achieved.

  A spindle unit and a cutting apparatus that are the best mode for carrying out the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiment, and various modifications can be made without departing from the spirit of the present invention.

  FIG. 1 is a perspective view showing a configuration example of a part of a cutting apparatus including a spindle unit according to the present embodiment. The cutting apparatus 1 according to the present embodiment includes a chuck table 10 that holds a workpiece such as a wafer to be cut and can move in the X-axis direction, a cutting means 11 that cuts the workpiece, and a chuck table 10. X-axis feed means 12 for machining and feeding in the X-axis direction, Y-axis feed means 13 for indexing and feeding the cutting means 11 in the Y-axis direction, and Z-axis feed means 14 for cutting and feeding the cutting means 11 in the Z-axis direction; It has.

  The cutting means 11 includes a spindle unit 2 and a cutting blade 3 that is mounted on the spindle unit 2 and cuts a workpiece that is held on the chuck table 10. Further, the cutting means 11 is fixed with an alignment means 15 for detecting the position of the workpiece to be cut and aligning with the cutting blade 3, and the alignment means 15 is interlocked with the cutting means 11. It has become. The alignment unit 15 includes an imaging unit 15a that is positioned on an extension line of the cutting blade 3 in the X-axis direction, and performs cutting by matching an image captured by the imaging unit 15a with an image of a workpiece that is stored in advance. The power position can be detected.

  The X-axis feed unit 12, the Y-axis feed unit 13, and the Z-axis feed unit 14 include, for example, a ball screw and a pulse motor that rotates the ball screw, and each of the chuck table 10 and the cutting unit to be moved in a desired direction. 11 is a well-known structure for moving 11 and will not be described in detail.

  Next, the configuration around the cutting blade 3 in the cutting means 11 will be described. FIG. 2 is a perspective view showing a configuration example near the cutting portion of the cutting means 11, and FIG. 3 is a perspective view showing a part thereof exploded. First, the cutting blade 3 used in the present embodiment is a thin hubless blade of about 5 to 300 μm formed in a ring shape as shown in FIG. The spindle unit 2 constituting the cutting means 11 is configured such that a rotary spindle 20 having an axis in the Y-axis direction is rotatably supported by a spindle housing 21. The rotary spindle 20 has a front end portion 200 that protrudes from the front side of the spindle housing 21 to which the cutting blade 3 is mounted, and a female screw 201 that is formed on the front end portion 200 and into which the fixing bolt 32 is screwed. The cutting blade 3 is attached to the tip of the rotary spindle 20 while being sandwiched from both sides by the flange 33.

  Here, the flange 33 includes, for example, a first flange 33a and a second flange 33b as a flange assembly, and the cutting blade 3 is clamped from both sides by combining both. The first flange 33 a is formed with a flange male thread portion 33 c that is screwed with the flange nut 34. Further, the first flange 33a is formed with a center hole 33d through which the tip end portion 200 of the rotary spindle 20 is inserted partway.

  Therefore, when the cutting blade 3 is attached to the rotary spindle 20, the tip portion 200 of the rotary spindle 20 is inserted into the center hole 33d of the first flange 33a. Thereafter, the first flange 33 a is attached to the rotary spindle 20 by screwing the fixing bolt 32 into the female thread portion 201 of the rotary spindle 20 and tightening. Next, the hubless type cutting blade 3 is fitted into the first flange 33a, and the second flange 33b is fitted into the first flange 33a to sandwich the cutting blade 3. Furthermore, the cutting blade 3 is mounted and fixed to the rotary spindle 20 by screwing the flange 34 to the flange male screw portion 33c of the first flange 33a and tightening.

  In this way, the cutting blade 3 is mounted on the tip of the rotary spindle 20, and when the blade cover 35 is fixed to the end of the spindle housing 21 as shown in FIG. It will be in the state covered by. The blade cover 35 is provided with a pair of cutting water nozzles 36 that discharge cutting water toward a contact portion between the cutting blade 3 and the workpiece.

  When replacing the mounted cutting blade 3, the detachable cutting blade 3 is replaced with the flange nut 34 loosened and the second flange 33b removed from the first flange 33a, and the second flange 33b is again replaced. And the flange nut 34 may be tightened.

  Next, the configuration of the spindle unit 2 having the rotary spindle 20 to which the cutting blade 3 is mounted at the tip end will be described. FIG. 4 is a longitudinal side view showing a configuration example of the spindle unit 2. First, a disc-shaped thrust plate 202 having a plane perpendicular to the axial direction is formed on the front side (the side on which the cutting blade 3 is mounted) of the rotary spindle 20. Further, a rotor 22a is connected to the rear side of the rotary spindle 20, and a rotation drive unit 22 is constituted by the rotor 22a and a stator 22b that rotates the rotor 22a. The rotation drive unit 22 is located in a space on the rear side of the spindle unit 2 surrounded by the inner peripheral surface 21 a and the rear wall 21 b of the spindle housing 21.

  Further, the spindle housing 21 is formed in a substantially cylindrical shape, and an inner diameter at a position where the thrust plate 202 is accommodated is increased in accordance with an outer diameter of the thrust plate 202. Further, in the spindle housing 21, a position facing both planes of the thrust plate 202 includes a plurality of jet outlets for jetting air toward the respective planes of the thrust plate 202, and supports the rotary spindle 20 in the thrust direction. A thrust air bearing 212 is provided.

  Further, the inner peripheral surface 21 a of the spindle housing 21, that is, the surface facing the side surface of the rotary spindle 20 is composed of a plurality of jet outlets for jetting air toward the axial center of the rotary spindle 20. A radial air bearing 214 is provided for support.

  Here, the thrust air bearing 212 and the radial air bearing 214 communicate with the air supply port 216 via a first air supply path 215 formed inside the spindle housing 21. The air supply port 216 is connected to a high-pressure air source (not shown) via a high-pressure air supply tube or the like. In this way, the high pressure air from the high pressure air source is supplied to the thrust air bearing 212 and the radial air bearing 214 via the air supply port 216 and the first air supply path 215 to be ejected. The rotary spindle 20 is rotatably supported in a non-contact state.

  The rear wall 21b of the spindle housing 21 is formed with an opening 21c through which a cord 22c made of a power line connected to the spindle unit 2 and supplied to the rotation driving unit 22 is passed.

  The spindle housing 21 includes a lock device 23 that restricts the rotation of the rotary spindle 20. The locking device 23 may have the same configuration as the locking device disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-235250, and a detailed configuration is omitted, but a plurality of (on the same circumference at a predetermined position of the rotary spindle 20 ( For example, a shaft lock pin 231 provided in the spindle housing 21 is provided so as to be detachably engaged with three engagement holes 203. The shaft lock pin 231 has an air cylinder structure that presses the shaft lock pin 231 in the direction of engaging the engagement hole 203 with air pressure. Further, the locking device 23 includes a coil spring 232 that is an elastic member that applies an elastic force to the shaft lock pin 231 in a direction away from the engagement hole 203.

  In such a lock device 23, only the elastic force from the coil spring 232 acts on the shaft lock pin 231 when the air pressure is not acting. In this case, since the shaft lock pin 231 does not engage with the engagement hole 203, the rotation spindle 20 is not restricted in rotation and is in an unlocked state in which it can freely rotate. On the other hand, when the air pressure is applied to the lock device 23, an inward pressing force acts against the elastic force from the coil spring 232 against the shaft lock pin 231. As a result, the shaft lock pin 231 engages with the engagement hole 203, and the rotary spindle 20 enters a locked state where it cannot rotate.

  Further, an air seal groove 217 is formed in an annular shape on the inner peripheral surface 21 a at the tip of the spindle housing 21. Further, a second air supply path 218 communicating with the air seal groove 217 is provided in the spindle housing 21. The second air supply path 218 is formed in the spindle housing 21 from the air seal groove 217 to the vicinity of the lock device 23, and is drawn out of the spindle housing 21 in the vicinity of the lock device 23 and connected to the high-pressure air source 24. Has been. Here, the second air supply path 218 has a branch path 219 that branches to the shaft lock pin 231 side of the locking device 23, and a switching valve 25 is provided at the branch point of the branch path 219. The switching valve 25 supplies the high-pressure air from the high-pressure air source 24 to the air seal groove 217 side via the second air supply path 218, or via the second air supply path 218 and the branch path 219. It is a valve for switching whether to supply to the lock device 23 side. The cutting apparatus 1 includes control means 4 for performing such switching control of the switching valve 25.

  In such a configuration, the control means 4 switches and controls the switching valve 25 so that the branch path 219 is blocked from the high-pressure air source 24 as shown in FIG. As a result, high-pressure air is not supplied to the locking device 23 side, and the locking device 23 is unlocked, and the rotary spindle 20 is allowed to rotate. On the other hand, high-pressure air from the high-pressure air source 24 is supplied to the air seal groove 217 side via the second air supply path 218. Therefore, based on the high-pressure air supplied to the air seal groove 217, air as shown by the arrow in FIG. 5 is ejected from the clearance between the spindle housing 21 and the rotary spindle 20 on the tip side, and the tip of the rotary spindle 21. An air seal is formed on the outer peripheral surface on the part side. Therefore, contamination can be prevented from entering through the gap between the spindle housing 21 and the rotary spindle 20 during cutting by the cutting blade 3 accompanying the rotation of the rotary spindle 20.

  On the other hand, when the blade replacement mode is set through the operation panel or the like, the control means 4 switches and controls the switching valve 25 so that the branch path 219 side communicates with the high-pressure air source 24 as shown in FIG. . Thereby, high pressure air is supplied with respect to the shaft lock pin 231 of the locking device 23, and supply of the high pressure air to the air seal groove 217 side is interrupted. As a result, the lock device 23 enters a locked state in which the shaft lock pin 231 engages with one engagement hole 203 and locks the rotation of the rotary spindle 20. When the blade is replaced, the rotation of the rotary spindle 20 is locked, so that the replacement work of the cutting blade 3 is facilitated. On the other hand, the supply of high-pressure air to the air seal groove 217 side is cut off, so that high-pressure air is not ejected from the air seal groove 217 portion. Therefore, even when the cutting blade 3 is replaced, the flange nut 34 is loosened and the second flange 33b is removed from the first flange 33a. High-pressure air is not blown against the blade 3 from the air seal groove 217 side. Therefore, the cutting blade 3 is not detached or damaged by the high-pressure air. Further, it is not necessary to perform the work while pressing the cutting blade 3 against high-pressure air, and the cutting blade 3 can be reliably mounted at a desired position, so that work efficiency and mounting accuracy can be improved. . Furthermore, the high-pressure air source 24 is shared without impairing the functions of preventing entry of contamination by the air seal groove 217 and locking of the lock device 23, which is effective in reducing the size and size of the unit.

  When the blade is replaced, the supply of high-pressure air to the air seal groove 217 side is cut off. However, the rotary spindle 20 and the spindle housing 21 are not hermetically sealed, and the air from the air bearings 212 and 214 and the locking device Since some leakage air from 23 flows to the outside through the gap on the tip end side, entry of contamination and the like is prevented.

  Of course, the switching valve 25 is a variable valve, and in the normal state, the high pressure air source 24 communicates only with the air seal groove 217 via the second air supply path 218. Most of the high-pressure air (for example, 70% or more) is supplied to the locking device 23 side via the branch path 219, but a part (for example, 30% or less) of the high-pressure air from the high-pressure air source 24 is supplied to the second air. Distribution may be performed so that the air seal groove 217 is also supplied via the path 218. According to this, even when the blade is replaced, it is possible to positively prevent contamination and the like from entering. In short, at the time of blade replacement, it is sufficient that air necessary for locking can be secured on the locking device 23 side, and a state in which excessive air is not blown from the air seal groove 217 side to the cutting blade 3 being replaced can be secured. .

It is a perspective view showing some examples of composition of a cutting device provided with a spindle unit of an embodiment of the invention. It is a perspective view which shows the structural example of the cutting part vicinity of the cutting means. It is a perspective view which decomposes | disassembles and shows a part of FIG. It is a vertical side view which shows the structural example of a spindle unit. It is a vertical side view which shows the example of a state of the spindle unit at the normal time. It is a vertical side view which shows the example of a state of the spindle unit at the time of blade replacement | exchange.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cutting device 2 Spindle unit 3 Cutting blade 4 Control means 10 Chuck table 11 Cutting means 20 Rotating spindle 21 Spindle housing 22 Rotation drive part 23 Locking device 24 High pressure air source 25 Switching valve 212 Thrust air bearing 214 Radial air bearing 215 1st Air supply path 217 Air seal groove 218 Second air supply path 219 Branch path

Claims (1)

A chuck table for holding the workpiece;
A rotating spindle that mounts a cutting blade for cutting a workpiece held on the chuck table at the tip, a spindle housing that rotatably supports the rotating spindle by a radial air bearing and a thrust air bearing, and the rotating spindle. A rotary drive section for driving, and a first air supply path for supplying high-pressure air to the radial air bearing and the thrust air bearing, and the spindle housing is rotated by a shaft lock pin when air pressure is applied. And a lock device that is in an unlocked state in which the rotating spindle can be rotated when the air pressure is not applied, and an air seal groove provided on the inner peripheral side of the tip of the spindle housing, The air sea A second air supply path that communicates with the groove and that is supplied with high-pressure air from a high-pressure air source, and the second air supply path has a branch path that branches to the lock device. a spindle unit with a switching switch valve for switching whether the high pressure air to a point to supply to said lock device side or to supply to the airtight seal groove side, and cutting means comprising a cutting blade mounted on the spindle unit,
In normal times, the switching valve is controlled to be switched so that the branch path is blocked with respect to the high pressure air source, and the high pressure air is supplied to the air seal groove side,
Wherein at the time of replacement of the cutting blade to the previous SL rotating spindle, said high-pressure air to the second air supply path from the high pressure air source being supplied to the air seal groove side, through a pre-Symbol branch path to the normal the Control means for switching and controlling the switching valve so as to switch to the locking device side;
A cutting apparatus comprising:

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