CN102581753A - Cutting machine and cylinder locking device for electric spindle - Google Patents

Cutting machine and cylinder locking device for electric spindle Download PDF

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Publication number
CN102581753A
CN102581753A CN2011100028639A CN201110002863A CN102581753A CN 102581753 A CN102581753 A CN 102581753A CN 2011100028639 A CN2011100028639 A CN 2011100028639A CN 201110002863 A CN201110002863 A CN 201110002863A CN 102581753 A CN102581753 A CN 102581753A
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CN
China
Prior art keywords
cylinder
fixed block
main shaft
rod
electric main
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Pending
Application number
CN2011100028639A
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Chinese (zh)
Inventor
李战伟
王明权
贾月明
王兵锋
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CETC Beijing Electronic Equipment Co
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CETC Beijing Electronic Equipment Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by CETC Beijing Electronic Equipment Co filed Critical CETC Beijing Electronic Equipment Co
Priority to CN2011100028639A priority Critical patent/CN102581753A/en
Publication of CN102581753A publication Critical patent/CN102581753A/en
Pending legal-status Critical Current

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Abstract

The invention provides a cutting machine and a cylinder locking device for an electric spindle, which belong to the field of manufacturing of integrated circuit packaging equipment. The cylinder locking device for the electric spindle comprises a cylinder fixed block, a cylinder plug, a cylinder rod and a cylinder spring, wherein the cylinder plug is fixed on the cylinder fixed block, the cylinder rod is sleeved into the cylinder fixed block, the cylinder rod is capable of reciprocating inside a cylinder block along the cylinder fixed block, a cavity is formed among the cylinder fixed block, and the cylinder plug and the cylinder rod, the cylinder spring is sleeved on the cylinder rod. When pressure of air in the cavity is larger than elastic force of the cylinder spring, the cylinder rod moves towards the bottom of the cylinder block, and the tail end of the cylinder rod is allowed to enter a preset counter bore on a core of the electric spindle. By means of the cylinder block device for the electric spindle in an embodiment, the core of the electric cylinder can be locked to facilitate replacement of a tool on the electric spindle. The cylinder locking device for the electric spindle is applicable to cutting machines.

Description

The cylinder locking device and the cutting machine of electricity main shaft
Technical field
The present invention relates to the integrated circuit sealed in unit and make the field, particularly relate to a kind of cylinder locking device and cutting machine of electric main shaft.
Background technology
Cutting machine is to encapsulate key equipment behind the semiconductor, and its effect is that wafer is divided into single circuit unit.The working mechanism of cutting machine is high-rate grinding, and electric main shaft is the execution unit of high-rate grinding.The electricity main shaft is with directly pack into the inside of spindle assemblies of stator, the rotor of motor, is also referred to as direct driving main shaft (Direct Drive Spindle) sometimes, is the built-in type electric machine main shaft.
In the cutting machine course of work, because the replacing of cutter is carried out in the change of tool wear or cutting material through regular meeting.Cutter is fixed on the electric main shaft, because electric main shaft can move in not stall, has brought inconvenience for the replacing cutter.
Summary of the invention
The technical problem that the present invention will solve provides a kind of cylinder locking device and cutting machine of electric main shaft, can realize the locking of electric main shaft axle core, is convenient to electric main axle cutter and changes.
For solving the problems of the technologies described above, embodiments of the invention provide technical scheme following:
On the one hand, a kind of cylinder locking device of electric main shaft is provided, comprises:
One cylinder fixed block; Be fixed on a cylinder plug and a cylinder rod that is sheathed in the said cylinder fixed block on the said cylinder fixed block; Said cylinder rod can move back and forth along the cylinder body in the said cylinder fixed block, forms a cavity between said cylinder fixed block, said cylinder plug and the said cylinder rod;
Be connected, be used in said cavity to import a joint of Compressed Gas with said cylinder fixed block;
Be sheathed on the cylinder spring on the said cylinder rod, said cylinder spring one end contacts with said cylinder base, and the other end contacts with the step place, top of said cylinder rod;
When gas pressure was greater than the elastic force of said cylinder spring in said cavity, said cylinder rod moved towards cylinder base, made the end of said cylinder rod get on the said electric main shaft axle core in the preset counterbore;
When gas pressure was less than the elastic force of said cylinder spring in said cavity, said cylinder rod made the end of said cylinder rod withdraw from said counterbore towards away from the motion of cylinder base direction.
Wherein, be provided with sealing ring between the housing of said cylinder fixed block and said electric main shaft.
The embodiment of the invention also provides a kind of cutting machine, comprises electric main shaft, comprises that also one is fixed on the cylinder locking device of the electric main shaft on the electric main shaft housing, and the cylinder locking device of said electric main shaft comprises:
One cylinder fixed block; Be fixed on a cylinder plug and a cylinder rod that is sheathed in the said cylinder fixed block on the said cylinder fixed block; Said cylinder rod can move back and forth along the cylinder body in the said cylinder fixed block, forms a cavity between said cylinder fixed block, said cylinder plug and the said cylinder rod;
Be connected, be used in said cavity to import a joint of Compressed Gas with said cylinder fixed block;
Be sheathed on the cylinder spring on the said cylinder rod, said cylinder spring one end contacts with said cylinder base, and the other end contacts with the step place, top of said cylinder rod;
When gas pressure was greater than the elastic force of said cylinder spring in said cavity, said cylinder rod moved towards cylinder base, made the end of said cylinder rod get on the said electric main shaft axle core in the preset counterbore;
When gas pressure was less than the elastic force of said cylinder spring in said cavity, said cylinder rod made the end of said cylinder rod withdraw from said counterbore towards away from the motion of cylinder base direction.
Wherein, be provided with sealing ring between the housing of said cylinder fixed block and said electric main shaft.
Embodiments of the invention have following beneficial effect:
In the such scheme, Compressed Gas gets into cavity through joint, when Compressed Gas reaches setting pressure; Gas pressure is greater than the elastic force of cylinder spring in the cavity; Compressed Gas will promote cylinder rod and move to electric main shaft axle core, and cylinder rod is got in the preset counterbore on the axle core, stop electric main shaft axle core to rotate; Realize the locking of electric main shaft axle core, be convenient to cutter changing.
Description of drawings
Fig. 1 is the cylinder locking device front view of the electric main shaft of the embodiment of the invention;
Fig. 2 is the cylinder locking device left side cutaway view of the electric main shaft of the embodiment of the invention.
The specific embodiment
For technical problem, technical scheme and advantage that embodiments of the invention will be solved is clearer, will combine accompanying drawing and specific embodiment to be described in detail below.
Embodiments of the invention provide a kind of cylinder locking device and cutting machine of electric main shaft to the problem of cutting machine cutter changing inconvenience in the prior art, can realize the locking of electric main shaft axle core, are convenient to electric main axle cutter and change.
Fig. 1 is the cylinder locking device front view of the electric main shaft of the embodiment of the invention, and is as shown in Figure 1, and the cylinder locking device 20 of electric main shaft is fixed on the housing 1 of electric main shaft through two screws 22.
Fig. 2 is the cylinder locking device left side cutaway view of the electric main shaft of the embodiment of the invention, and as shown in Figure 2, the cylinder locking device of electric main shaft comprises: cylinder fixed block 4 is fixed on the cylinder fixed block 4, is used to import the joint 3 of Compressed Gas; Be fixed on the cylinder plug 5 that is connected on the cylinder fixed block 4, with joint 3; Be sheathed in the cylinder fixed block 4, towards the cylinder rod 6 of electric main shaft axle core 9; Cylinder rod 6 can move back and forth along the cylinder body in the cylinder fixed block 4; Be sheathed on the cylinder spring 8 on the cylinder rod 6, cylinder spring 8 one ends contact with the cylinder base of cylinder fixed block, and the other end contacts with the step place, top of cylinder rod 6.
Wherein, as shown in Figure 2, form a cavity 11 between cylinder fixed block 4, cylinder plug 5 and the cylinder rod 6; Compressed Gas feeds in this cavity 11, when Compressed Gas reaches setting pressure, behind the elastic force of cavity 11 internal pressure values greater than cylinder spring 8 through joint 3; Cavity 11 interior Compressed Gas will promote cylinder rod 6 and move forward, and make cylinder rod 6 get on the electric main shaft axle core 9 and will preset in the counterbore 10, thereby stop 9 rotations of axle core; Realize lock shaft core 9, be convenient to the replacing that electric main shaft is fixed a cutting tool.
Further, do not spill, also be provided with sealing ring 7 between the housing 1 of cylinder fixed block 4 and electric main shaft from slit between housing 1 and the cylinder fixed block 4 in order to guarantee electric main shaft axle core 9 and 2 gases of bearing.
After changing cutter, close joint 3, make the force value of cavity 11 interior Compressed Gas diminish, cylinder rod 6 receives the 8 elastic force effects of cylinder spring, ejects the counterbore 10 of axle core 9, and cancellation is to the locking of axle core 9, and axle core 9 can freely rotate.
In the cylinder locking device of this electricity main shaft, Compressed Gas gets into cavity through joint, when Compressed Gas reaches setting pressure; Gas pressure is greater than the elastic force of cylinder spring in the cavity; Compressed Gas will promote cylinder rod and move to electric main shaft axle core, and cylinder rod is got in the preset counterbore on the axle core, stop electric main shaft axle core to rotate; Realize the locking of electric main shaft axle core, be convenient to cutter changing.
The embodiment of the invention also provides a kind of cutting machine; Comprise electric main shaft; The cylinder locking device that also comprises the electric main shaft that is connected with electric main shaft as depicted in figs. 1 and 2; The cylinder locking device of this electricity main shaft is fixed on the housing 1 of electric main shaft through two screws, comprising: cylinder fixed block 4 is fixed on the cylinder fixed block 4, is used to import the joint 3 of Compressed Gas; Be fixed on the cylinder plug 5 that is connected on the cylinder fixed block 4, with joint 3; Be sheathed in the cylinder fixed block 4, towards the cylinder rod 6 of electric main shaft axle core 9; Cylinder rod 6 can move back and forth along the cylinder body in the cylinder fixed block 4; Be sheathed on the cylinder spring 8 on the cylinder rod 6, cylinder spring 8 one ends contact with the cylinder base of cylinder fixed block, and the other end contacts with the step place, top of cylinder rod 6.
Wherein, as shown in Figure 2, form a cavity 11 between cylinder fixed block 4, cylinder plug 5 and the cylinder rod 6; Compressed Gas feeds in this cavity 11, when Compressed Gas reaches setting pressure, behind the elastic force of cavity 11 internal pressure values greater than cylinder spring 8 through joint 3; Cavity 11 interior Compressed Gas will promote cylinder rod 6 and move forward, and make cylinder rod 6 get on the electric main shaft axle core 9 and will preset in the counterbore 10, thereby stop 9 rotations of axle core; Realize lock shaft core 9, be convenient to the replacing that electric main shaft is fixed a cutting tool.
Further, do not spill, also be provided with sealing ring 7 between the housing 1 of cylinder fixed block 4 and electric main shaft from slit between housing 1 and the cylinder fixed block 4 in order to guarantee electric main shaft axle core 9 and 2 gases of bearing.
After changing cutter, close joint 3, make the force value of cavity 11 interior Compressed Gas diminish, cylinder rod 6 receives the 8 elastic force effects of cylinder spring, ejects the counterbore 10 of axle core 9, and cancellation is to the locking of axle core 9, and axle core 9 can freely rotate.
In this cutting machine, Compressed Gas gets into cavity through joint, when Compressed Gas reaches setting pressure; Gas pressure is greater than the elastic force of cylinder spring in the cavity; Compressed Gas will promote cylinder rod and move to electric main shaft axle core, and cylinder rod is got in the preset counterbore on the axle core, stop electric main shaft axle core to rotate; Realize the locking of electric main shaft axle core, be convenient to cutter changing.
The above is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from principle according to the invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.

Claims (4)

1. the cylinder locking device of an electric main shaft is characterized in that, comprising:
One cylinder fixed block; Be fixed on a cylinder plug and a cylinder rod that is sheathed in the said cylinder fixed block on the said cylinder fixed block; Said cylinder rod can move back and forth along the cylinder body in the said cylinder fixed block, forms a cavity between said cylinder fixed block, said cylinder plug and the said cylinder rod;
Be connected, be used in said cavity to import a joint of Compressed Gas with said cylinder fixed block;
Be sheathed on the cylinder spring on the said cylinder rod, said cylinder spring one end contacts with said cylinder base, and the other end contacts with the step place, top of said cylinder rod;
When gas pressure was greater than the elastic force of said cylinder spring in said cavity, said cylinder rod moved towards cylinder base, made the end of said cylinder rod get on the said electric main shaft axle core in the preset counterbore;
When gas pressure was less than the elastic force of said cylinder spring in said cavity, said cylinder rod made the end of said cylinder rod withdraw from said counterbore towards away from the motion of cylinder base direction.
2. the cylinder locking device of electric main shaft according to claim 1 is characterized in that, is provided with sealing ring between the housing of said cylinder fixed block and said electric main shaft.
3. a cutting machine comprises electric main shaft, it is characterized in that, comprises that also one is fixed on the cylinder locking device of the electric main shaft on the electric main shaft housing, and the cylinder locking device of said electric main shaft comprises:
One cylinder fixed block; Be fixed on a cylinder plug and a cylinder rod that is sheathed in the said cylinder fixed block on the said cylinder fixed block; Said cylinder rod can move back and forth along the cylinder body in the said cylinder fixed block, forms a cavity between said cylinder fixed block, said cylinder plug and the said cylinder rod;
Be connected, be used in said cavity to import a joint of Compressed Gas with said cylinder fixed block;
Be sheathed on the cylinder spring on the said cylinder rod, said cylinder spring one end contacts with said cylinder base, and the other end contacts with the step place, top of said cylinder rod;
When gas pressure was greater than the elastic force of said cylinder spring in said cavity, said cylinder rod moved towards cylinder base, made the end of said cylinder rod get on the said electric main shaft axle core in the preset counterbore;
When gas pressure was less than the elastic force of said cylinder spring in said cavity, said cylinder rod made the end of said cylinder rod withdraw from said counterbore towards away from the motion of cylinder base direction.
4. cutting machine according to claim 3 is characterized in that, is provided with sealing ring between the housing of said cylinder fixed block and said electric main shaft.
CN2011100028639A 2011-01-07 2011-01-07 Cutting machine and cylinder locking device for electric spindle Pending CN102581753A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN2011100028639A CN102581753A (en) 2011-01-07 2011-01-07 Cutting machine and cylinder locking device for electric spindle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011100028639A CN102581753A (en) 2011-01-07 2011-01-07 Cutting machine and cylinder locking device for electric spindle

Publications (1)

Publication Number Publication Date
CN102581753A true CN102581753A (en) 2012-07-18

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Family Applications (1)

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CN2011100028639A Pending CN102581753A (en) 2011-01-07 2011-01-07 Cutting machine and cylinder locking device for electric spindle

Country Status (1)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110576197A (en) * 2019-09-14 2019-12-17 浙江能伟科技有限公司 Electric spindle

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103009A (en) * 1982-12-03 1984-06-14 Japan Raisensaa:Kk Neumatic cylinder with brake
JP2000190155A (en) * 1998-10-14 2000-07-11 Disco Abrasive Syst Ltd Hub blade
CN200991829Y (en) * 2006-12-30 2007-12-19 黄山市永丰机电制造有限公司 Pneumatic cutter-changing mechanism of machine tool
JP2009279662A (en) * 2008-05-19 2009-12-03 Disco Abrasive Syst Ltd Spindle unit and cutter
CN201696389U (en) * 2010-06-12 2011-01-05 泰安巨菱钻探装备有限责任公司 Braking air cylinder

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59103009A (en) * 1982-12-03 1984-06-14 Japan Raisensaa:Kk Neumatic cylinder with brake
JP2000190155A (en) * 1998-10-14 2000-07-11 Disco Abrasive Syst Ltd Hub blade
CN200991829Y (en) * 2006-12-30 2007-12-19 黄山市永丰机电制造有限公司 Pneumatic cutter-changing mechanism of machine tool
JP2009279662A (en) * 2008-05-19 2009-12-03 Disco Abrasive Syst Ltd Spindle unit and cutter
CN201696389U (en) * 2010-06-12 2011-01-05 泰安巨菱钻探装备有限责任公司 Braking air cylinder

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110576197A (en) * 2019-09-14 2019-12-17 浙江能伟科技有限公司 Electric spindle

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Application publication date: 20120718