CN105700201A - Optical filter based on graphene - Google Patents

Optical filter based on graphene Download PDF

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Publication number
CN105700201A
CN105700201A CN201610062949.3A CN201610062949A CN105700201A CN 105700201 A CN105700201 A CN 105700201A CN 201610062949 A CN201610062949 A CN 201610062949A CN 105700201 A CN105700201 A CN 105700201A
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China
Prior art keywords
graphene
optical filter
metal
filter part
metal grating
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CN201610062949.3A
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CN105700201B (en
Inventor
贺梦冬
彭宇翔
王凯军
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Central South University of Forestry and Technology
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Central South University of Forestry and Technology
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/0009—Materials therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

An optical filter based on graphene comprises an optical coupling structure. The optical coupling structure comprises an electrolyte layer, a metal electrode, a graphene strip array, a dielectric layer, a metal optical grating and a substrate. The electrolyte layer and the metal electrode are provided with adjusting devices for top gate voltage. A Fabry-Perot microcavity array composed of the graphene strip array, the dielectric layer and the metal optical grating is located on the substrate, and the electrolyte layer and the metal electrode are located on the same plane above the Fabry-Perot microcavity. Based on the micro-nano etching process technology and the multiplayer film technology which are extremely mature at present, the technological process is not complex, and operation is easy. Compared with a traditional filter with the same frequency band, the optical filter has the advantage that the size of a coupled component is greatly reduced due to introduction of graphene. The optical filter frequency is regulated by adjusting the Fermi level of graphene through grid voltage, active control over light is achieved, the needed power consumption is small, the quality factor is large, the response speed is high, and very wide working frequency is achieved.

Description

A kind of optical filter part based on Graphene
Technical field
The present invention relates to a kind of filtering device, particularly relate to a kind of optical filter part based on Graphene。
Background technology
The two dimensional crystal of only one layer of atomic thickness that Graphene is made up of carbon atom, it has the optic response of ultra broadband to compose, extremely strong nonlinear optical properties and the compatibility with silicon-based semiconductor technique so that it is have advantageous advantage at novel optical and field of photoelectric devices。Under certain condition, graphenic surface conduction electronics interacts with photon and forms couple electromagnetic mould (that is, surface phasmon)。Couple electromagnetic mould locality is very strong, it is possible to breaks through diffraction limit, can make the information carrier in LMDS Light Coupled Device。The maximum advantage of couple electromagnetic mould is in that its propagation constant can be adjusted by the mode of external electrical field (or magnetic field) or chemical doping。
There is the weak points such as loss height, quality factor are little, larger in size, untunable in traditional optical filter part。
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, it is provided that a kind of loss is low, quality factor big and can actively control the optical filter part based on Graphene of optical signal frequency。
For solving above-mentioned technical problem, the technical scheme that the present invention proposes is: a kind of optical filter part based on Graphene, including optical coupling structure, described optical coupling structure includes dielectric substrate, metal electrode, graphene band array, silica dioxide medium layer, metal grating and substrate, is provided with the adjustment device of top-gated voltage between described dielectric substrate and metal electrode；Described silica dioxide medium layer is between graphene band array and metal grating, described graphene band array, silica dioxide medium layer, metal grating form Fabry-Perot microcavity array, it is positioned on substrate, described dielectric substrate and metal electrode lay respectively on the same plane of the top of Fabry-Perot microcavity, described metal grating is positioned on substrate, and described dielectric substrate and metal electrode and graphene band array are oppositely arranged。
The above-mentioned optical filter part based on Graphene, it is preferred that described metal grating is golden light grid or silver grating。
The above-mentioned optical filter part based on Graphene, it is preferred that graphene band and metal grating interval in described graphene band array are arranged。
The above-mentioned optical filter part based on Graphene, it is preferred that in described graphene band array, the width of graphene band is 200-900 nanometer；In described metal grating, the seam width of adjacent two metals is 20-90 nanometer, and in described metal grating, the thickness of metal is 40-100 nanometer。
The above-mentioned optical filter part based on Graphene, it is preferred that in described graphene band array, the wide of graphene band is 720 nanometers；In described metal grating, the seam of adjacent two metals wide is 40 nanometers, and in described metal grating, the thickness of metal is 80 nanometers。
The above-mentioned optical filter part based on Graphene, it is preferred that the cycle of described graphene band array is 2-9 micron；The cycle of metal grating is 2-9 micron。
The above-mentioned optical filter part based on Graphene, it is preferred that the described cycle of graphene band array and the cycle of metal grating are 8 microns。
The above-mentioned optical filter part based on Graphene, it is preferred that the thickness of described silica dioxide medium layer is 10-90 nanometer；Described substrate is silicon carbide layer, and the thickness of described silicon carbide layer is 200-900 nanometer。
The above-mentioned optical filter part based on Graphene, it is preferred that the thickness of described silica dioxide medium layer is 20 nanometers；Described substrate is silicon carbide layer, and the thickness of silicon carbide layer is 500 nanometers。
The optical filter part based on Graphene of the present invention in use, a branch of TM polarization electromagnetic wave vertical irradiation dielectric substrate, in Fabry-Perot microcavity (being made up of graphene band, silica dioxide medium layer, metal), form a standing wave。Under characteristic frequency, Fabry-Perot microcavity is in responsive state, can catch more energy。When the slit of metal grating is positioned at antinodal points (magnetic field maximum) place of standing wave, the energy in Fabry-Perot microcavity can be gone over by slit transmission。If incident illumination is non-response frequency, then Fabry-Perot microcavity is in non-responsive state, and the energy through slit will be few, thus achieve the purpose of filtering。Dielectric substrate above graphene band array constitutes top-gated electrode structure with metal electrode。Change top-gated voltage scalable Graphene fermi level, the change of Graphene fermi level affects the propagation constant (effective refractive index) of couple electromagnetic mould in Fabry-Perot microcavity, therefore the response frequency of Fabry-Perot microcavity changes, and therefore light filtration frequencies can realize active control。
Compared with prior art, it is an advantage of the current invention that: (1) present invention is based on micro-nano etching processing techniques extremely ripe at present and multilayer technique, and technological process is not numerous and diverse, simple to operate。With traditional with compared with frequency band filter part, the introducing of Graphene is greatly reduced the size of coupled apparatus。(2) fermi level that the present invention regulates Graphene by grid voltage regulates and controls light filtration frequencies, it is achieved that the active of light is controlled, and required power consumption is less, and quality factor are big, fast response time, has very wide work frequency。
Accompanying drawing explanation
In order to be illustrated more clearly that the technical scheme of the embodiment of the present invention, below the accompanying drawing used required during embodiment is described is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the premise not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings。
Fig. 1 is the present invention structural representation based on the optical filter part of Graphene。
Fig. 2 uses the present invention based on the transmission spectrum of the optical filter part of Graphene in embodiment 1。
Fig. 3 uses the present invention based on the transmission spectrum of the optical filter part of Graphene in embodiment 2 under different fermi levels。
Marginal data
1, dielectric substrate；2, metal electrode；3, the adjustment device of top-gated voltage；4, graphene band array；5, silica dioxide medium layer；6, metal grating；7, substrate。
Detailed description of the invention
For the ease of understanding the present invention, below in conjunction with preferred embodiment, the present invention is made more comprehensively, describes meticulously, but protection scope of the present invention is not limited to embodiment in detail below。
It should be noted that, when a certain element is described as on " be fixed on, be fixed in, be connected to or be communicated in " another element, it can be directly fixing, affixed, connect or connection is on another element, it is also possible to be by fixing, affixed, the connection indirectly of other intermediate connectors or connect on another element。
Unless otherwise defined, the implication that all technical term used hereinafter is generally understood that with those skilled in the art is identical。Technical term used herein is intended merely to the purpose describing specific embodiment, is not intended to limit the scope of the invention。
Embodiment
A kind of optical filter part based on Graphene as shown in Figure 1, including optical coupling structure, optical coupling structure includes dielectric substrate 1, metal electrode 2, graphene band array 4, silica dioxide medium layer 5, metal grating 6 and substrate 7, is provided with the adjustment device 3 of top-gated voltage between dielectric substrate 1 and metal electrode 2；Silica dioxide medium layer 5 is between graphene band array 4 and metal grating 6, graphene band array 4, silica dioxide medium layer 5, metal grating constitute Fabry-Perot microcavity array, it is positioned on substrate 7, dielectric substrate 1 and metal electrode 2 lay respectively on the same plane of top of Fabry-Perot microcavity, and dielectric substrate 1 and metal electrode 2 are oppositely arranged with graphene band array 4。Metal grating 6 is golden light grid or silver grating。Graphene band and metal grating 6 interval in graphene band array 4 are arranged。
Dielectric substrate 1, metal electrode 2 thickness are hundreds of nanometer, graphene band array 4 and metal grating 6 cycle are several microns, the seam width respectively hundreds of nanometer of adjacent two graphene band in graphene band array, in metal grating, the seam between adjacent two bonding jumpers is wide respectively tens nanometers, the thickness of metal grating 6 and silica dioxide medium layer 5 only needs tens nanometers, substrate 7 is carborundum, and its thickness is hundreds of nanometer。Change top-gated voltage and can control Graphene fermi level。
Embodiment 1
A branch of wavelength is positioned at the directional light vertical incidence dielectric substrate of infrared band, and incident illumination is TM mould (magnetic-field component is perpendicular to the plane of incidence)。The thickness of dielectric substrate and metal electrode is 300nm, graphene band array and metal grating cycle are 8000nm that is 8 micron, in graphene band array, graphene strips bandwidth is 720nm, in metal grating, the seam width of adjacent two bonding jumpers is 40nm, the thickness of silica dioxide medium, metal grating and substrate silicon carbide silicon respectively 20,80 and 500nm。The carrier mobility of Graphene and Fermi velocity respectively 20000cm2/ (Vs) and 106M/s, in the present embodiment, metal grating is golden light grid, can adopt silver grating in other embodiments。Regulate top-gated voltage VgThe fermi level making Graphene is 0.6eV。Transmission spectrum as shown in Figure 2 can be obtained under the above parameters。As in figure 2 it is shown, occur in that two narrow transmission peaks in spectral line, they lay respectively at 6.26 and 13.26THz, and quality factor (Q) respectively reach 20 and 51, it was shown that filter effect is good。The Distribution of Magnetic Field figure, Distribution of Magnetic Field figure of left and right subgraph corresponding two transmission peaks respectively can illustrate the formation of transmission peaks。Graphene band, silicon dioxide and metal constitute a Fabry-Perot microcavity。Under light illumination, a standing wave is formed in Fabry-Perot microcavity。When frequency is 6.26 and 13.26THz, F-P microcavity is in responsive state, and single order and three rank of the corresponding microcavity of they difference respond mould。The microcavity being in responsive state can catch more luminous energy。Metallic slit is on the antinodal points of standing wave, and the energy in microcavity can be gone over by slit transmission。
The present embodiment is based on micro-nano etching processing techniques extremely ripe at present and multilayer technique, and technological process is not numerous and diverse, simple to operate。With traditional with compared with frequency band filter part, the introducing of Graphene is greatly reduced the size of coupled apparatus。The fermi level that the present embodiment regulates Graphene by grid voltage regulates and controls light filtration frequencies, it is achieved that the active of light is controlled, and required power consumption is less, and quality factor are big, fast response time, has very wide work frequency。
Embodiment 2
The fermi level of Graphene can pass through top-gated voltage VgIt is adjusted。The change of the fermi level of Graphene causes that the couple electromagnetic mode propagation constant (effective refractive index) of Fabry-Perot microcavity changes, from the response frequency changing microcavity。Fig. 3 is the transmission spectrum (other parameter is identical with embodiment 1) under different fermi level。When Graphene fermi level increases to 0.8eV process from 0.4eV, left and right two transmission peaks blue shift, the amplitude of blue shift respectively 2.1 and 4.5THz, the speed of blue shift respectively 0.53 and 1.12THz/EV。Two transmission peaks increase along with fermi level and raise, and therefore quality factor improve。When fermi level reaches 0.8 electron-volt, the quality factor of left and right two transmission peaks respectively reach 28 and 89。

Claims (9)

1. the optical filter part based on Graphene, it is characterized in that: include optical coupling structure, described optical coupling structure includes dielectric substrate, metal electrode, graphene band array, silica dioxide medium layer, metal grating and substrate, is provided with the adjustment device of top-gated voltage between described dielectric substrate and metal electrode；Described silica dioxide medium layer is between graphene band array and metal grating, described graphene band array, silica dioxide medium layer, metal grating constitute Fabry-Perot microcavity array, it is positioned on substrate, described dielectric substrate and metal electrode lay respectively on the same plane of the top of Fabry-Perot microcavity, described metal grating is positioned on substrate, and described dielectric substrate and metal electrode and graphene band array are oppositely arranged。
2. the optical filter part based on Graphene according to claim 1, it is characterised in that: described metal grating is golden light grid or silver grating。
3. the optical filter part based on Graphene according to claim 1, it is characterised in that: graphene band and metal grating interval in described graphene band array are arranged。
4. the optical filter part based on Graphene according to claim 3, it is characterised in that: in described graphene band array, the width of graphene band is 200-900 nanometer；In described metal grating, the seam width of adjacent two metals is 20-90 nanometer, and in described metal grating, the thickness of metal is 40-100 nanometer。
5. the optical filter part based on Graphene according to claim 4, it is characterised in that: in described graphene band array, the wide of graphene band is 720 nanometers；In described metal grating, the seam of adjacent two metals wide is 40 nanometers, and in described metal grating, the thickness of metal is 80 nanometers。
6. the optical filter part based on Graphene according to claim 5, it is characterised in that: the cycle of described graphene band array is 2-9 micron；The cycle of metal grating is 2-9 micron。
7. the optical filter part based on Graphene according to claim 6, it is characterised in that: the described cycle of graphene band array and the cycle of metal grating are 8 microns。
8. the optical filter part based on Graphene according to claim 1, it is characterised in that: the thickness of described silica dioxide medium layer is 10-900 nanometer；Described substrate is silicon carbide layer, and the thickness of described silicon carbide layer is 200-1000 nanometer。
9. the optical filter part based on Graphene according to claim 8, it is characterised in that: the thickness of described silica dioxide medium layer is 20 nanometers；The thickness of silicon carbide layer is 500 nanometers。
CN201610062949.3A 2016-01-30 2016-01-30 A kind of optical filter part based on graphene Expired - Fee Related CN105700201B (en)

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106547121A (en) * 2017-01-19 2017-03-29 中南林业科技大学 A kind of light polarization transducer based on Graphene
CN106654852A (en) * 2016-12-19 2017-05-10 电子科技大学 Tunable laser based on graphene FP cavity
CN106684510A (en) * 2016-12-28 2017-05-17 中国计量大学 Open hexahedral annular adjustable dual-band filter based on graphene
CN107340610A (en) * 2017-08-18 2017-11-10 江西师范大学 Polarization-controlled graphene array multiband filter
CN107450120A (en) * 2017-08-18 2017-12-08 江西师范大学 Multi-band absorption filter based on symmetry-breaking graphene array structure
CN108363221A (en) * 2018-01-22 2018-08-03 北京大学 Adjustable long wave flow-through optical filter based on graphene
CN108490540A (en) * 2018-04-11 2018-09-04 电子科技大学 A kind of adjustable broadband infrared isolation element of frequency
CN109061909A (en) * 2018-08-03 2018-12-21 中国计量大学 Double grating is tunable, and Terahertz switchs
CN115020948A (en) * 2022-05-14 2022-09-06 河南工业大学 Graphene-based broadband tunable terahertz band-stop filter

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110300338A1 (en) * 2010-06-04 2011-12-08 Samsung Electronics Co., Ltd. Graphene nano ribbons and methods of preparing the same
WO2014089454A2 (en) * 2012-12-07 2014-06-12 The Trustees Of Columbia University In The City Of New York Systems and methods for graphene photodetectors
CN103941345A (en) * 2014-05-06 2014-07-23 苏州大学 SOI-based micro-ring filter based on two-dimensional layered material
CN105116496A (en) * 2015-10-08 2015-12-02 中南林业科技大学 Light directional coupler based on graphene

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110300338A1 (en) * 2010-06-04 2011-12-08 Samsung Electronics Co., Ltd. Graphene nano ribbons and methods of preparing the same
WO2014089454A2 (en) * 2012-12-07 2014-06-12 The Trustees Of Columbia University In The City Of New York Systems and methods for graphene photodetectors
CN103941345A (en) * 2014-05-06 2014-07-23 苏州大学 SOI-based micro-ring filter based on two-dimensional layered material
CN105116496A (en) * 2015-10-08 2015-12-02 中南林业科技大学 Light directional coupler based on graphene

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BO ZHAO等: "Strong Plasmonic Coupling between Graphene Ribbon Array and Metal Gratings", 《ACS PHOTONICS》 *
WEILU GAO等: "Excitation of Plasmonic Waves in Graphene by Guided-Mode Resonances", 《ACSNANO》 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106654852A (en) * 2016-12-19 2017-05-10 电子科技大学 Tunable laser based on graphene FP cavity
CN106684510A (en) * 2016-12-28 2017-05-17 中国计量大学 Open hexahedral annular adjustable dual-band filter based on graphene
CN106547121B (en) * 2017-01-19 2019-05-17 中南林业科技大学 A kind of light polarization converter based on graphene
CN106547121A (en) * 2017-01-19 2017-03-29 中南林业科技大学 A kind of light polarization transducer based on Graphene
CN107340610A (en) * 2017-08-18 2017-11-10 江西师范大学 Polarization-controlled graphene array multiband filter
CN107450120A (en) * 2017-08-18 2017-12-08 江西师范大学 Multi-band absorption filter based on symmetry-breaking graphene array structure
CN108363221A (en) * 2018-01-22 2018-08-03 北京大学 Adjustable long wave flow-through optical filter based on graphene
CN108363221B (en) * 2018-01-22 2020-04-03 北京大学 Adjustable long-wave-pass filter based on graphene
CN108490540A (en) * 2018-04-11 2018-09-04 电子科技大学 A kind of adjustable broadband infrared isolation element of frequency
CN108490540B (en) * 2018-04-11 2020-02-14 电子科技大学 Frequency-adjustable broadband infrared isolation element
CN109061909A (en) * 2018-08-03 2018-12-21 中国计量大学 Double grating is tunable, and Terahertz switchs
CN115020948A (en) * 2022-05-14 2022-09-06 河南工业大学 Graphene-based broadband tunable terahertz band-stop filter
CN115020948B (en) * 2022-05-14 2024-05-10 河南工业大学 Graphene-based broadband tunable terahertz band-reject filter

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