CN107450120A - Multi-band absorption filter based on symmetry-breaking graphene array structure - Google Patents

Multi-band absorption filter based on symmetry-breaking graphene array structure Download PDF

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Publication number
CN107450120A
CN107450120A CN201710714357.XA CN201710714357A CN107450120A CN 107450120 A CN107450120 A CN 107450120A CN 201710714357 A CN201710714357 A CN 201710714357A CN 107450120 A CN107450120 A CN 107450120A
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graphene
multiband
array structure
array
particles
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刘正奇
黄镇平
张后交
陈戬
刘桂强
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Jiangxi Normal University
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Jiangxi Normal University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/208Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

The invention discloses a multiband absorption type filter based on a symmetry-broken graphene array structure, and belongs to the field of photoelectric materials. The filter comprises a substrate and a graphene array structure layer from bottom to top in sequence, wherein the graphene array structure layer comprises a periodic array of graphene particles and an air slit composite structure. Based on the strong electromagnetic resonance effect of the graphene particles, the graphene particles are structurally cut by introducing the air slits, the positions of the slits deviate from the center positions of the particles, a particle pair structure which is separated in space and has broken symmetry is formed, electromagnetic resonance and hybrid coupling are generated, and therefore the multiband absorption type optical filtering effect is achieved. The multiband filter based on the graphene array structure layer is simple in structure, adjustable in infrared band spectral range, small in structural size, easy to integrate and capable of being widely applied to the field of composite material filters or radars.

Description

The multiband of graphene array structure based on Broken Symmetry absorbs mode filter
Technical field
The present invention relates to the fields such as photoelectric material and photonic propulsion, and in particular to a kind of graphene battle array based on Broken Symmetry The multiband of array structure absorbs mode filter.
Background technology
Infrared frequency range in electromagnetic spectrum can be divided into near-infrared (0.76 μm~2.5 μm), in infrared (2.5 μm~25 μ And three frequency ranges of far infrared (25 μm~1000 μm) m).In nature all objects can infrared radiation, by using spy The infrared image that different Thermal Infra-Reds are formed can be obtained by surveying infrared ray difference of the instrument measurement target between background in itself.Air and Smoke, mists and clouds etc. can absorb visible ray and near infrared ray, but be transparent to 8~14 μm of Thermal Infra-Red (in infrared frequency range). Therefore, this frequency range is also referred to as " atmospheric window " of Thermal Infra-Red.It is in military affairs to carry out thermal infrared imaging using spectral technique Provide advanced night-vision equipment and round-the-clock preceding viewing system.
Graphene (Graphene) is a kind of cellular flat film formed by single layer of carbon atom, and it only has an atom The quasi- two-dimensional material of thickness degree, is called monoatomic layer graphite.Graphene have very good conduction, heat conduction, mechanical strength and Pliability and optical characteristics, length is obtained in the field such as physics, materialogy, electronic information and computer, Aero-Space The development of foot.The conduction electronics of graphene can interact to form couple electromagnetic mould (that is, phasmon is common with the photon of incidence Shake), traditional optical diffraction limit can be broken through, therefore the information that can include as optical transmission apparatus in LMDS Light Coupled Device carries Body.However, single-layer graphene structure is only 2.3% to the absorptivity of visible ray and infrared frequency range light.Current investigative technique How Effective Regulation graphene-structured to the spectral response characteristic of light wave or electromagnetic wave include graphene-structured in different frequency range The controllable operating of spectrum notch response etc. very big technical barrier all be present.Such as disclosed patent application [application in the recent period Numbers 201610062949.3, the A of application publication number CN 105700201], although providing a kind of optical filter based on graphene Part, but structure needs to be related to dielectric substrate, metal electrode, graphene band array, dielectric layer, metal grating and substrate in itself Etc. numerous structural detail and module, it is unfavorable for the simple preparation of device and integrated application.Recent invention disclosed patent application [application number 201611235973.9, the A of application publication number CN 106684510] discloses a kind of face of opening six based on graphene Annular Tunable dual band wave filter, although realizing the transmission filter response of double frequency-band, the base needed for structure in Terahertz frequency range Many construction units such as plate, opening positive six face rings shape paster, inverted U-shaped paster, reverse L-shaped paster, L-shaped paster and inverted T-shaped paster Substantially increase the structural complexity of such wave filter, inevitably limit its device prepare with it is integrated etc. Using.
In addition, the optical transmission structure of conventional art aspect all exists including optically filtering device, physical dimension is larger, spectrum The deficiencies of untunable.
The content of the invention
For above-mentioned deficiency, the present invention filters to provide a kind of multiband graphene array of infrared frequency range in be operated in Device, it is intended to introduce grapheme material, the electromagentic resonance characteristic using graphene particles, simplify construction unit and the increase of wave filter The controllable number of frequency bands of spectrum.
The present invention is achieved through the following technical solutions:
The multiband of graphene array structure based on Broken Symmetry absorbs mode filter, and it includes substrate, graphene Array structure layer, it is characterised in that:It is made up of successively substrate and graphene array structure sheaf from bottom to top, the graphene array Structure sheaf is made up of graphene particles and the cyclic array of air slots composite construction.The present invention is had based on graphene particles Some forceful electric power magnetic resonance effects, realized by introducing air slots to the cutting in graphene particles progress structure and the position of slit Skew granular center position is put, formation is spatially separating and the particle of Broken Symmetry is to structure, produces electromagentic resonance and hydridization coupling Close, so as to realize multiband absorption-type optically filtering effect.
The structural symmetry of the graphene particles and air slots composition breaks the periodicity battle array of scarce graphene particles pair Row pattern is arranged on substrate top surface.
The structure of the graphene particles is cylindrical structural.
The graphene array thickness degree is in 0.34nm~1nm scopes.
The material of the substrate is the materials such as glass, flexible material such as dimethyl silicone polymer and polymer.
The multiband absorption-type filter construction of the graphene array structure based on Broken Symmetry can pass through physics Sedimentation, which includes ion sputtering process and magnetron sputtering method and lithographic technique, includes electron beam and laser etching techniques etc. to prepare.
The multiband of the graphene array structure based on Broken Symmetry of the present invention absorbs mode filter with following excellent Point:
1st, by using resonance coupling unit of the graphene array structure as mid-infrared light, the graphene of Broken Symmetry is utilized Particle provides structure strong optical scattering and forms different resonance hybrid patterns, realizes multiband filter effect.
2nd, by using graphene array structure, it is achieved thereby that the optically filtering response on nanoscale thickness, fundamentally Overcome that the physical dimension that conventional optical setup faced is big, is unfavorable for the built in problems such as High Density Integration.
3rd, infrared graphene array filtering spectrum scope generation infrared frequency range in multiband of the invention, i.e. Thermal Infra-Red " atmospheric window ", be advantageous to the application for including thermal infrared imaging etc. in spectral technique.
4th, it is simple in construction, it is easy to prepare, is easy to carry out the system integration with other photoelectric devices.
5th, the optical resonance characteristic based on graphene array structure, it is easy to carry out the tuning of spectrum, produces in that infrared frequency range can The optical filtration characteristic of tuning, all have in fields such as infrared acquisition, opto-electronic conversion, infrared imaging and heat radiators extensive Application prospect.
Brief description of the drawings
Present disclosure is further described below in conjunction with the accompanying drawings.But the following drawings is only the ideal of the present invention Change the schematic diagram of embodiment, wherein in order to clearly show the structure of device involved by the present invention, to wherein selected graphene battle array The thickness and air slots width in array structure layer region have carried out appropriate amplification, but it should not be considered as sternly as schematic diagram Lattice reflect the proportionate relationship of physical dimension.In addition, the embodiment shown in the present invention also should not be considered limited to institute in figure The given shape in the region shown.In general, the following drawings is schematical that should not be considered as limiting the scope of the invention.
Fig. 1 is that the multiband of the graphene array structure based on Broken Symmetry in the present invention absorbs the structure of mode filter Schematic diagram;
Fig. 2 is in the multiband absorption-type filter construction of the graphene array structure based on Broken Symmetry in the present invention Air slots carry out structure cutting in graphene particles and the position skew granular center position of slit is divided so as to form space From and Broken Symmetry particle to the schematic diagram of structure;
Fig. 3 is that the multiband of the graphene array structure based on Broken Symmetry in an optional embodiment of the invention absorbs The light absorbs figure of mode filter.Graphene array thickness degree is 1nm, and graphene particles are cylindrical structural, a diameter of 400nm, Thickness is 1nm, and array period size is 600nm, and the width of air slots is 40nm, length 400nm, the array of air slots Cycle size is 600nm, slit location skew granular center position δ=60nm.Substrate is PDMS membrane layer, thickness For 500nm.
Fig. 4 is that the multiband of the graphene array structure based on Broken Symmetry in an optional embodiment of the invention absorbs The light absorbs figure of mode filter.Graphene array thickness degree is 1nm, and graphene particles are cylindrical structural, a diameter of 400nm, Thickness is 1nm, and array period size is 600nm, and the width of air slots is 20nm, length 400nm, the array of air slots Cycle size is 600nm, slit location skew granular center position δ=60nm.Substrate is polystyrene film layer, and thickness is 500nm。
Fig. 5 is that the multiband of the graphene array structure based on Broken Symmetry in an optional embodiment of the invention absorbs The light absorbs figure of mode filter.Graphene array thickness degree is 1nm, and graphene particles are cylindrical structural, a diameter of 400nm, Thickness is 1nm, and array period size is 600nm, and the width of air slots is 10nm, length 400nm, the array of air slots Cycle size is 600nm, slit location skew granular center position δ=60nm.Substrate is poly- silica coating, and thickness is 500nm。
Marked in figure:1st, graphene particles, 2, air slots, 3, substrate.
Embodiment
Technical scheme is described further with reference to embodiment, but is not limited thereto, it is every to this Inventive technique scheme is modified or equivalent substitution, without departing from the spirit and scope of technical solution of the present invention, all should cover In protection scope of the present invention.
As shown in figure 1, a kind of multiband of graphene array structure based on Broken Symmetry absorbs mode filter, under Substrate 3, graphene array structure sheaf are set gradually on and, the graphene array structure sheaf is narrow by graphene particles 1 and air The composition of seam 2;The graphene particles 1 have forceful electric power magnetic resonance effect, realize to enter graphene particles 1 by introducing air slots The position skew granular center position of cutting and slit in row structure, formation is spatially separating and the particle of Broken Symmetry is to knot Structure, produce electromagentic resonance and coupled with hydridization, so as to realize multiband absorption-type optically filtering effect.The present invention is based on graphene Forceful electric power magnetic resonance effect possessed by grain, as shown in fig.2, being realized by introducing air slots to graphene particles progress structure On cutting and slit position skew granular center position, formation is spatially separating and the particle of Broken Symmetry is to structure.Stone Black alkene particle is cylindrical structural, and array arranges to be square.
Aforesaid substrate 3 can be selected but be not limited to the hard such as glass, or the flexible substrate such as plastics, polymer, for supporting stone Black alkene array.
As one of preferred embodiment, foregoing graphites alkene particle 1 is arranged and formed by cylindrical graphite alkene resonating member Periodic lattice structure.
Technical scheme is described in detail with reference to some preferred embodiments and relevant drawings:
Embodiment 1:It is the multifrequency of graphene array structure of the present embodiment based on Broken Symmetry shown in Fig. 3 refering to Fig. 3 With the light absorbs figure for absorbing mode filter.Graphene array thickness degree is 1nm, and graphene particles are cylindrical structural, a diameter of 400nm, thickness 1nm, array period size are 600nm, and the width of air slots is 40nm, length 400nm, air slots Array period size be 600nm, slit location skew granular center position δ=60nm.Substrate is PDMS membrane Layer, thickness 500nm.It can be drawn from figure, three absworption peaks occurs in infrared frequency range in.It it is 10.512 microns in wavelength Place presents the absorption-type filter effect of first frequency band, and absorptivity has reached 0.437.This explanation is in technical solution of the present invention In, although wave filter only has the thick graphene layer structures of 1nm, realize the absorption-type spectroscopy filter of the mid-infrared light more than 43% Ripple.The absworption peak of second frequency band, absorptivity 0.452 are presented at wavelength is 12.042 micron.It is 13.148 in wavelength The absworption peak of the 3rd frequency band, absorptivity 0.460 are presented at micron.Illustrate in technical solution of the present invention, pair thick 1nm The broken scarce graphene layer structure of title property realizes the absorption-type spectroscopy filtering of the mid-infrared light of multiband simultaneously.
Embodiment 2:It is the multifrequency of graphene array structure of the present embodiment based on Broken Symmetry shown in Fig. 4 refering to Fig. 4 With the light absorbs figure for absorbing mode filter.Graphene array thickness degree is 1nm, and graphene particles are cylindrical structural, a diameter of 400nm, thickness 1nm, array period size are 600nm, and the width of air slots is 20nm, length 400nm, air slots Array period size be 600nm, slit location skew granular center position δ=60nm.Substrate is polystyrene film layer, thickness For 500nm.It is upper it can be found that three absworption peaks occurs in infrared frequency range in from figure.It is to be presented at 10.604 microns in wavelength The absorption-type filter effect of first frequency band, absorptivity have reached 0.379.It is to present second at 12.312 microns in wavelength The absworption peak of individual frequency band, absorptivity 0.494.It is the absworption peak that the 3rd frequency band is presented at 13.740 microns in wavelength, inhales Yield is 0.441.Illustrate in technical solution of the present invention, Broken Symmetry graphene layer structure thick 1nm realizes more simultaneously The absorption-type spectroscopy filtering of the mid-infrared light of frequency band.Comparative example 1, it is found that by an easy structure regulating, Air slots width in filter construction is reduced to 20nm, realizes multiband absorption-type filter response in middle infra-red range Spectral tuning.
Embodiment 3:It is the multifrequency of graphene array structure of the present embodiment based on Broken Symmetry shown in Fig. 5 refering to Fig. 5 With the light absorbs figure for absorbing mode filter.Graphene array thickness degree is 1nm, and graphene particles are cylindrical structural, a diameter of 400nm, thickness 1nm, array period size are 600nm, and the width of air slots is 10nm, length 400nm, air slots Array period size be 600nm, slit location skew granular center position δ=60nm.Substrate is poly- silica coating, thick Spend for 500nm.It is upper it can be found that three absworption peaks occurs in infrared frequency range in from figure.It is to be at 10.534 microns in wavelength The absorption-type filter effect of first frequency band is showed, absorptivity has reached 0.316.It is that the is presented at 12.629 microns in wavelength The absworption peak of two frequency bands, absorptivity 0.477.It is the absworption peak that the 3rd frequency band is presented at 14.325 microns in wavelength, Absorptivity is 0.349.Illustrate in technical solution of the present invention, Broken Symmetry graphene layer structure thick 1nm realizes simultaneously The absorption-type spectroscopy filtering of the mid-infrared light of multiband.Comparative example 2, it is found that by the sky in filter construction Gas slit width is reduced to 10nm, realizes spectral tuning of the multiband absorption-type filter response in middle infra-red range.

Claims (6)

1. a kind of multiband of graphene array structure based on Broken Symmetry absorbs mode filter, it includes substrate and graphite Alkene array structure layer, it is characterised in that:It is made up of successively substrate and graphene array structure sheaf from bottom to top, the graphene battle array Array structure layer is made up of graphene particles and the cyclic array of air slots composite construction;Based on possessed by graphene particles Forceful electric power magnetic resonance effect, realize that the position of the cutting and slit that are carried out to graphene particles in structure is inclined by introducing air slots Granular center position is moved, formation is spatially separating and the particle of Broken Symmetry couples to structure, generation electromagentic resonance with hydridization, from And realize multiband absorption-type optically filtering effect.
2. the multiband of the graphene array structure according to claim 1 based on Broken Symmetry absorbs mode filter, It is characterized in that:The cyclic array pattern of the graphene particles composition is arranged on substrate top surface.
3. the multiband of the graphene array structure according to claim 1 based on Broken Symmetry absorbs mode filter, It is characterized in that:The graphene particles are made up of to structure graphene particles and air slots composite construction.
4. the multiband of the graphene array structure according to claim 1 based on Broken Symmetry absorbs mode filter, It is characterized in that:The structure of the graphene particles is cylindrical structure.
5. the multiband of the graphene array structure according to claim 1 based on Broken Symmetry absorbs mode filter, It is characterized in that:The graphene array is tetragonal lattice.
6. the multiband of the graphene array structure according to claim 1 based on Broken Symmetry absorbs mode filter, It is characterized in that:The material of the substrate is glass or flexible material.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108227060A (en) * 2018-01-26 2018-06-29 厦门大学 A kind of method of the enhancing without nano-patterning graphene UV Absorption
CN110703371A (en) * 2019-10-14 2020-01-17 江西师范大学 Semiconductor super-surface electromagnetic wave absorber and preparation method thereof
CN112255716A (en) * 2020-11-24 2021-01-22 江南大学 Efficient light absorption device based on structural symmetry defect and preparation method and application thereof

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CN105338798A (en) * 2015-11-24 2016-02-17 黄山学院 Infrared band adjustable dual-frequency/tri-frequency graphene metamaterial absorption device and application method thereof
CN105700201A (en) * 2016-01-30 2016-06-22 中南林业科技大学 Optical filter based on graphene
CN106711271A (en) * 2017-02-03 2017-05-24 江西师范大学 Three-band near-infrared absorber based on semiconductor super-surface structure
CN106784030A (en) * 2017-02-03 2017-05-31 江西师范大学 Multi-band perfect light absorber based on metal film layer-semiconductor resonant cavity composite structure

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014152509A1 (en) * 2013-03-15 2014-09-25 Solan, LLC Plasmonic device enhancements
CN104916885A (en) * 2015-04-24 2015-09-16 天津理工大学 Device generating terahertz radiation based on excitation, by electronic beam, of graphene
CN105338798A (en) * 2015-11-24 2016-02-17 黄山学院 Infrared band adjustable dual-frequency/tri-frequency graphene metamaterial absorption device and application method thereof
CN105700201A (en) * 2016-01-30 2016-06-22 中南林业科技大学 Optical filter based on graphene
CN106711271A (en) * 2017-02-03 2017-05-24 江西师范大学 Three-band near-infrared absorber based on semiconductor super-surface structure
CN106784030A (en) * 2017-02-03 2017-05-31 江西师范大学 Multi-band perfect light absorber based on metal film layer-semiconductor resonant cavity composite structure

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108227060A (en) * 2018-01-26 2018-06-29 厦门大学 A kind of method of the enhancing without nano-patterning graphene UV Absorption
CN110703371A (en) * 2019-10-14 2020-01-17 江西师范大学 Semiconductor super-surface electromagnetic wave absorber and preparation method thereof
CN112255716A (en) * 2020-11-24 2021-01-22 江南大学 Efficient light absorption device based on structural symmetry defect and preparation method and application thereof
CN112255716B (en) * 2020-11-24 2021-12-28 江南大学 Efficient light absorption device based on structural symmetry defect and preparation method and application thereof

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