CN104111565A - Micro-nano optical switch based on surface plasmon fano resonance and cascading optical switch using same - Google Patents
Micro-nano optical switch based on surface plasmon fano resonance and cascading optical switch using same Download PDFInfo
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Abstract
The invention discloses a micro-nano optical switch based on surface plasmon fano resonance. The micro-nano optical switch based on the surface plasmon fano resonance comprises a transparent substrate and is characterized in that a metal film layer, a nematic phase liquid crystal orientation conversion layer and a polarizer are superposed on the transparent substrate in sequence. The polarizer gives an initial direction of polarization to transmitting light, and the nematic phase liquid crystal orientation conversion layer is used for receiving the transmitting light having the initial direction of polarization and controlling a direction of polarization of the light transmitted through the nematic phase liquid crystal orientation conversion layer. A separate metal hole tetramer unit configuration or an array topological configuration formed by performing square arrangement or hexagonal arrangement on metal hole tetramer units is etched on the metal film layer, and four holes in the metal hole tetramer unit configuration are symmetrical in a D2h cluster mode and have orthogonal short axes and long axes. When the direction of polarization of the light transmitted through the nematic phase liquid crystal orientation conversion layer is parallel to the short axes, an optical path is opened, otherwise, the surface plasmon fano resonance is excited, and the optical path is closed. The micro-nano optical switch based on the surface plasmon fano resonance has all the advantages of liquid crystal optical switches and a wavelength selection function, while the traditional liquid crystal optical switches do not have the wavelength selection function.
Description
Technical field
The present invention relates to a kind of micro-nano photoswitch based on surface phasmon method promise resonance and use its cascaded optical switch.
Background technology
Infotech and human lives and produce closely related, its development experience artificial means, electromagnetic technique and electronic technology stage, now towards photon technology stage development.Photon technology is the modern technologies that realize transmission, processing and the storage of information taking photon as carrier.Because photon is higher more than 1000 times than electronics frequency, multidimensional information processing on support space, and anti-electromagnetic interference (EMI), so aspect information communication, photon has incomparable superiority compared with electronics: it is larger that information is carried capacity, information processing rate is faster, and the confidentiality of communication is better.In growing optical communication network, optical link and optical node are chief components; And the elementary cell of all routes, exchange and disposal system in optical node is all photoswitch.Therefore photoswitch is core technology and the Primary Component of optical communication network.From research tendency, photoswitch is faced with many-sided challenges such as Performance optimization, scale can be expanded, functional diversities, and becomes the bottleneck of building optical-fiber network of future generation.
Photoswitch strict difinition is: under certain type of drive, certain parameter of light signal (intensity, wavelength, direction or polarization etc.) is changed rapidly, reversibly, discontinuously into the process of another kind of state from a kind of state.Existing photoswitch mainly comprises mechanical optical switch, magneto-optic shutter, acoustooptic switch, liquid crystal shutter, mems switch etc.Wherein, liquid crystal optical switch, compared with other photoswitches, has that energy consumption is low, isolation is high, an advantage such as long service life, stability and good reliability, is therefore greatly developed in recent years.But traditional photoswitch including liquid crystal optical switch is a kind of light intensity switch, does not have wavelength selectivity, be all the switching that simultaneously realizes switch to all wavelengths.But the development of optical communication not only needs the swap status of spatial domain and time domain, and need the exchange selection function of frequency domain.On the other hand, optical communication network is just towards integrated optical circuit future development, and the integrated of optical communication is the only way of information industry development, is also national Major Strategic Demand.Micro-nano is photochemical gradually for the size of the development inevitable requirement optical element (comprising photoswitch) of integrated optical circuit, and therefore researching and developing novel micro nanometer light photoswitch is the developing goal that integrated optical communication technology urgently realizes.
Method promise resonance is continuous background field and the mutual interference effect of discrete resonant fields and a kind of characteristic resonances phenomenon of producing, and it shows as asymmetrical resonance line style on spectrum.This phenomenon is that Ugo Fano finds in the time studying the inelastic scattering of electronics in atom system, is originally considered to only limit to quantum field, is extended to afterwards numerous Scientific Engineerings field.It is found that in recent years metallic particles can model molecule configuration, and under illumination drives, produce the surface phasmon of different mode, between these different modes, mutually interfere concussion, thereby realize method promise resonance.The method promise resonance the present invention relates to shows that scattering spectrum asymmetry of EIT, live width are extremely narrow, scattering low ebb is offset the dark pattern (Dark mode) producing corresponding to surface phasmon phase coherence.
Summary of the invention
The present invention seeks to: a kind of micro-nano photoswitch based on surface phasmon method promise resonance is provided, its device principle of work is different from traditional liquid crystal optical switch completely, utilize the birefringent characteristic of liquid crystal, the institute not only with liquid crystal optical switch has superiority, and has the wavelength selection function that traditional liquid crystal optical switch does not possess concurrently simultaneously.
Technical scheme of the present invention is: a kind of micro-nano photoswitch based on surface phasmon method promise resonance, comprise transparent substrates, and it is characterized in that being stacked with successively metal film layer, nematic liquid crystal orientation conversion layer and the polarizer in described transparent substrates, wherein:
The polarizer, sees through light with initial polarised direction;
Nematic liquid crystal orientation conversion layer, for receiving the above-mentioned light that sees through with initial polarization direction, and controls the polarised direction of the light of going out via its transmission;
Metal film layer, the array topology configuration that on it, etching has independent metal aperture tetramer unit configuration or formed through Square array or Hexagonal array by this unit, four holes in described metal aperture tetramer unit configuration are D
2hgroup is symmetrical, has orthogonal minor axis and major axis; When being orientated the polarised direction of the light that conversion layer transmission gets off by nematic liquid crystal and when parallel with minor axis, opening light path; When the polarised direction that is orientated the light that conversion layer transmission gets off by nematic liquid crystal changes with respect to initial polarization direction, and when parallel with major axis, excitating surface phasmon method promise resonance, closes light path.
Further, the thickness of metal film layer described in the present invention is 20～100nm, and in metal aperture tetramer unit configuration, the aperture Φ in four holes is 90～1000nm, and pitch of holes s is 3～100nm.
Further, the orientation of nematic liquid crystal described in the present invention conversion layer, comprises the lower liquid crystal aligning control hyaline layer, nematic liquid crystal layer, the upper liquid crystal aligning control hyaline layer that are stacked and placed on successively on metal film layer; Wherein descend the upper surface of liquid crystal aligning control hyaline layer to be provided with some grooves that parallel interval distributes, the lower surface of upper liquid crystal aligning control hyaline layer is provided with interdigitated electrodes extraction electrode line, the interdigital direction of described interdigitated electrodes is parallel with below groove or vertical, corresponding, when after interdigitated electrodes energising, the direction of an electric field of its generation is vertical or parallel with below groove.
Further, described in the present invention, lower liquid crystal aligning control hyaline layer is polyimide film layer, ITO or FTO, and upper liquid crystal aligning control hyaline layer is glass cover lamella.
Further, the orientation of nematic liquid crystal described in the present invention conversion layer, comprises the lower liquid crystal aligning control hyaline layer, nematic liquid crystal layer, the upper liquid crystal aligning control hyaline layer that are stacked and placed on successively on metal film layer; Wherein descend the upper surface of liquid crystal aligning control hyaline layer to be provided with some grooves that parallel interval distributes, and the lower surface of upper liquid crystal aligning control hyaline layer is also provided with some grooves that parallel interval distributes, these grooves are vertical with the groove on lower liquid crystal aligning control hyaline layer; Also comprise the electrode wires being connected to respectively on upper and lower liquid crystal aligning control hyaline layer, for imposing on nematic liquid crystal layer with vertically to electric field.
Further, described in the present invention, lower liquid crystal aligning control hyaline layer is polyimide film layer, ITO or FTO, and upper liquid crystal aligning control hyaline layer is ITO conductive film layer.
Further, lower surface spin coating one deck diameter of upper liquid crystal aligning control hyaline layer described in the present invention be the glass bead of 1～10 micron as pad, nematic liquid crystal is filled in the described nematic liquid crystal layer of formation described glass bead gap in.In fact, glass bead substrate clips between upper and lower liquid crystal aligning control hyaline layer, and the diameter dimension of glass bead equates with the thickness of nematic liquid crystal layer.
Further, the metal material of metal film layer described in the present invention is Au, Ag or Al.
Nematic liquid crystal described in the present invention is routine techniques, for example, select n-pentyl biphenyl cyanogen.
Further, the present invention also comprises the analyzer of the below of being located at described transparent substrates.
The polarizer in the present invention and analyzer all adopt polaroid, the same with routine techniques, and the polarizer can become single linearly polarized light the natural light of the composite polarizing of incident, and analyzer purposes is inspection and analyzes polarized state of light.
The core parts that relate in the present invention are the metal aperture tetramer unit configuration of model molecule configuration: it forms and be D by four holes
2hgroup is symmetrical, and when the E field polarization direction of light wave and the minor axis of metal aperture tetramer unit configuration are when parallel, transmitted spectrum only has a scattering peak; When the E field polarization direction of light wave and the major axis of metal aperture tetramer unit configuration are when parallel, there is a narrow low ebb in transmission peaks, corresponding to the dark pattern of surface phasmon.Can control nematic liquid crystal orientation by voltage break-make, and then regulation and control are through the light wave polarised direction of polarizer incident, finally realize light intensity in transmission and wavelength are effectively controlled.
The interaction of the light relating in system of the present invention and micro-nano structure (metal aperture tetramer unit configuration) can accurately be described by solving Maxwell equation, and method for solving comprises the numerical methods such as finite time-domain, finite element and boundary element.By the numerical simulation of time domain and frequency domain, can obtain typical spectral response curve.The inherent physical mechanism of spectral response is the relevant concussion of surface phasmon pattern: in the time that the phase place of each pattern is consistent, surface phasmon ripple coherent phase is long, occurs scattering peak; When dark pattern (dark mode) occurs, and during with bright pattern (bright mode) reciprocation, due to its single spin-echo,, there is scattering paddy in surface phasmon ripple coherent subtraction.The bright pattern of surface phasmon often belongs to dipole pattern (dipole modes), and because attenuation speed is large, scattering spectral line is broader; On the contrary, dark pattern due to can not be directly and incident light be coupled, attenuation speed is very little, scattering spectral line is narrow.This narrow dark pattern make to do in the proper way the resonance line width of promise resonance only has tens nanometers just, and therefore this resonance is very responsive to wavelength, can be applied to wavelength selector part.
Solve tetramer Electromagnetism Characteristics in system through finite element numerical, obtain the affect rule of typical geometric parameter on system transmitted spectrum.The metal aperture diameter of metal aperture tetramer unit configuration increases the promise resonance peak red shift that can make to do in the proper way, increases method promise resonance number simultaneously; Metallic film layer thickness and pitch of holes increase can make resonant wavelength blue shift.The regulation and control of geometry parameter to wavelength, make to do in the proper way the red shift of promise low ebb or blue shift, this feature has reflected the resonant wavelength selective power that the metal aperture tetramer is good.
In the present invention, can be both four unit, hole independently as the metal aperture tetramer unit configuration of core, also can on this element basis, be evolved into the array topology of Square array and Hexagonal array.Topological structure size can need size to determine according to device, for Square array, has cycle a and the b of two vertical direction; For Hexagonal array, between translation vector, there are non-90 degree angles.
Another object of the present invention is to provide a kind of cascaded optical switch being in series by least two micro-nano photoswitches based on surface phasmon method promise resonance.
Be that above-mentioned micro-nano photoswitch provided by the invention not only can work independently, also can be together in series, form cascaded optical switch, realize the selection of a series of wavelength and filter.For example the operation wavelength of three micro-nano photoswitches is corresponding to λ 3, and λ 2 and λ 1 incide in the first micro-nano photoswitch when them simultaneously, and wherein λ 3 drops on the operation wavelength of the first micro-nano photoswitch, in transmission paddy, cannot pass through, and now only has λ 1, and λ 2 sees through; In like manner only has λ 1 by the second micro-nano photoswitch, by that analogy.
Advantage of the present invention is:
1. this micro-nano photoswitch based on surface phasmon method promise resonance provided by the invention, its device principle of work is different from traditional liquid crystal optical switch completely, utilize the birefringent characteristic of liquid crystal, the institute not only with liquid crystal optical switch has superiority, and has the wavelength selection function that traditional liquid crystal optical switch does not possess concurrently simultaneously.
2. the metal aperture tetramer unit configuration the present invention relates to, it is the unique texture of the model molecule configuration that proposes first, no matter be structurally, or be all obviously different from exciting and being concerned with to use of surface phasmon pattern the similar metallic particles structure proposing in recent international.Research shows, the metal aperture tetramer unit configuration support high order surface phasmon pattern in the present invention, and such as quadrapole, sextupole and ends of the earth etc., and corresponding metallic particles structure is only supported dipole pattern; Compared with metallic particles, the metal aperture tetramer unit configuration preparation in the present invention is simpler, and geometric parameter is more responsive to the regulation and control of spectral line, and method promise resonance line is narrower.
For example, in a kind of instantiation of the present invention, the aperture Φ (diameter) of metal aperture tetramer unit configuration is 100nm, and pitch of holes s (equidistant gap, hole) is 6nm, and metal material selects Au, and metallic film layer thickness is 30nm.In the time meeting above-mentioned condition, for the polarised direction of parallel long axis and minor axis, at 700nm left and right wave band, occulting light response differs much larger than 5 times, has splendid contrast.
3. the metal aperture tetramer unit configuration and the derived structure thereof that the present invention relates to can interact with light, excitating surface phasmon; The relevant concussion of the dark pattern (dark mode) of surface phasmon and bright pattern (bright mode) forming method promise resonance, this resonance shows as strong polarization sensitive and extremely narrow scattering peak valley, therefore can be used for regulation and control model effectively break-make, accurately identify incident wave band simultaneously.
Brief description of the drawings
Below in conjunction with drawings and Examples, the invention will be further described:
Fig. 1 is one of micro-nano light shutter device structure the present invention is based on surface phasmon method promise resonance;
Fig. 2 be the present invention is based on surface phasmon method promise resonance micro-nano light shutter device structure two;
Fig. 3 independently has " D
2htetramer molecular configuration " the schematic diagram of metal aperture tetramer unit configuration;
Fig. 4 is the typical backward scattering spectrum (or claim transmitted spectrum) of metal aperture tetramer unit configuration in voltage break-make situation;
Fig. 5 is the periodic array topological structure that is Square array derivative by metal aperture tetramer unit configuration;
Fig. 6 is the periodic array topological structure that is Hexagonal array derivative by metal aperture tetramer unit configuration;
Fig. 7 is the fundamental diagram based on Fig. 1 device architecture;
Fig. 8 is the fundamental diagram based on Fig. 2 device architecture;
Fig. 9 is that three geometric parameters of metal aperture tetramer unit configuration affect rule schematic diagram arranged side by side to transmitted spectrum;
Figure 10 is the cascaded optical switch schematic diagram that the wavelength tunability of the metal aperture tetramer unit configuration according to the present invention proposes.
Wherein: 1, transparent substrates; 2, metal film layer; 3, polyimide film layer; 4, nematic liquid crystal layer; 5, glass cover lamella; 6, electrode wires; 7, the polarizer; 8, interdigitated electrodes; 9, groove; 10, ITO conductive film layer; 11, analyzer.
Embodiment
Embodiment 1: be illustrated in figure 1 a kind of micro-nano photoswitch specific embodiment based on surface phasmon method promise resonance provided by the invention, it adopts glass transparent substrate, on described glass transparent substrate 1, be stacked with successively metal film layer 2, nematic liquid crystal orientation conversion layer and the polarizer 7, the nematic liquid crystal orientation conversion layer in the present invention is made up of the polyimide film layer 3, nematic liquid crystal layer 4 and the glass cover lamella 5 that are stacked and placed on successively on metal film layer 2.The upper surface of polyimide film layer 3 is provided with some grooves 9 that parallel interval distributes, and the lower surface of glass cover lamella 5 is provided with interdigitated electrodes 8 extraction electrode line 6, and the interdigital direction of described interdigitated electrodes 8 is parallel with below groove 9.In the present invention, below described transparent substrates, be provided with analyzer 11.The described polarizer 7 and analyzer 11 in the present embodiment are polaroid.
Shown in Fig. 3, the metal film layer 2 in the present invention, on it, etching has independent metal aperture tetramer unit configuration, and four holes in this unit configuration are D
2hgroup is symmetrical, has orthogonal minor axis and major axis.In the present embodiment, the aperture Φ (diameter) of metal aperture is 100nm, and pitch of holes s (equidistant gap) is 6nm, and metal material is selected Au, and the thickness of metal film layer is 30nm.
Shown in Fig. 4, when the E field polarization direction of light wave and the minor axis of metal aperture tetramer unit configuration are when parallel, transmitted spectrum only has a scattering peak; When the E field polarization direction of light wave and the major axis of metal aperture tetramer unit configuration are when parallel, there is a narrow low ebb in transmission peaks, corresponding to the dark pattern of surface phasmon.Can control nematic liquid crystal orientation by voltage break-make, and then regulation and control are through the light wave polarised direction of polarizer incident, finally realize light intensity in transmission and wavelength are effectively controlled.
The interaction of the light relating in system of the present invention and micro-nano structure (metal aperture tetramer unit configuration) can accurately be described by solving Maxwell equation, and method for solving comprises the numerical methods such as finite time-domain, finite element and boundary element.By the numerical simulation of time domain and frequency domain, can obtain typical spectral response curve.The inherent physical mechanism of spectral response is the relevant concussion of surface phasmon pattern: in the time that the phase place of each pattern is consistent, surface phasmon ripple coherent phase is long, occurs scattering peak; When dark pattern (dark mode) occurs, and during with bright pattern (bright mode) reciprocation, due to its single spin-echo,, there is scattering paddy in surface phasmon ripple coherent subtraction.The bright pattern of surface phasmon often belongs to dipole pattern (dipole modes), and because attenuation speed is large, scattering spectral line is broader; On the contrary, dark pattern due to can not be directly and incident light be coupled, attenuation speed is very little, scattering spectral line is narrow.This narrow dark pattern make to do in the proper way the resonance line width of promise resonance only has tens nanometers just, and therefore this resonance is very responsive to wavelength, can be applied to wavelength selector part.Specifically can be drawn by Fig. 4 analysis: for the polarised direction of parallel long axis and minor axis, at 700nm left and right wave band, occulting light response differs much larger than 5 times, has splendid contrast.
The concrete preparation method of the above-mentioned micro-nano photoswitch of the present embodiment is as follows:
1) on glass transparent substrate 1, preparation Au film, thickness 30nm.
2) on metal film layer 2, utilize the etching techniques such as electron beam to prepare metal aperture tetramer unit configuration, its aperture Φ is 100nm, and pitch of holes s is 6nm.
3) utilize spin coating instrument spin-on polyimide thin layer 3,200 degrees Celsius of constant temperature 1 hour, then naturally coolingly complete annealing thermal treatment; Along same direction mechanical grinding polyimide film layer 3, form cocurrent and parallel microchannels 9 arranged side by side.
4) on glass cover lamella 5, utilizing photoetching process to prepare Au interdigitated electrodes, refer to that type bar width is 50 nanometers, is highly 70 nanometers, refers to that the spacing between type bar is 8 microns, utilizes scolding tin link extraction electrode line 6.
5) the one side spin coating one deck size that interdigitated electrodes is set on glass cover lamella 5 is at the glass bead of 5 microns, as gasket material (meaning not shown in the figures).
6) under optical microscope, by step 5) the glass cover lamella 5 prepared is placed into step 3) in the polyimide film layer 3 prepared, guarantee the interdigital direction of interdigitated electrodes 8 and polishing direction consistent (being parallel to each other) in polyimide film layer 3.
7) in the gap of glass bead, fill nematic liquid crystal n-pentyl biphenyl cyanogen, liquid crystal is entered in gap by capillary force, heat liquid crystal until liquid crystal becomes homogeneous phase simultaneously, form nematic liquid crystal layer 4, then naturally cool to room temperature.
8) stick the polarizer 7 (bottom stick analyzer 11 for detection of) in top device, utilize epoxide-resin glue cloth to encapsulate this device.
Shown in Fig. 3 and Fig. 7, the concrete action principle of the above-mentioned micro-nano photoswitch of the present embodiment is summarized as follows:
In the present embodiment, the initial electric field polarised direction of the polarizer 7 is shown in Fig. 1 (polarization direction is P direction, and the horizontal arrow on it represents horizontal direction) and Fig. 7, perpendicular to paper and be parallel to the minor axis of metal aperture tetramer unit configuration.Incident light is 700nm natural light.
1) situation (being interdigitated electrodes 8 no powers) that voltage disconnects.Because the lower surface groove that liquid crystal contacts is consistent with the orientation of upper surface interdigitated electrodes, liquid crystal aligning, under the effect of Van der Waals for, is consistent nematic phase state; Therefore be polarized the polarized light that device 7 filters down and can directly pass liquid crystal, and keep original polarised direction; Description in conjunction with Fig. 4 and metal aperture tetramer unit configuration principle is known, in the time that this E field polarization direction perpendicular to paper is parallel to the minor axis of metal aperture tetramer unit configuration, can not genetic method promise resonate, show as and there is no method Nuo Toushegu and have transmission peaks, therefore light path is in conducting, and analyzer 11 (polarization direction is A direction) obtains high-brightness light signal.
2) voltage closure (being that interdigitated electrodes 8 is switched on).3V voltage-drop loading, on interdigitated electrodes, forms between referring to perpendicular to the electric field of interdigital direction, and it is electric field parallel direction that near the liquid crystal under the effect of electric field force reverses; Equally due to the effect of Van der Waals for, liquid crystal from top to bottom, gradually by vertical orientated towards parallel-oriented transition, i.e. twisted nematic; Under the waveguide effect of twisted nematic, incident light reverses through the polarised direction after liquid crystal, originally the polarised direction that was parallel to the minor axis of metal aperture tetramer unit configuration is reversed to and is parallel to major axis, therefore excite method promise resonance, occur that light path is closed corresponding to the method Nuo Toushegu of dark pattern.As from the foregoing, voltage break-make causes liquid crystal aligning reversion, then causes method promise resonance to be grown out of nothing, and finally realizes light path and opens and close.
In above-mentioned principle summary, while disconnection due to voltage, photoswitch is opening state, therefore claims normal white mode.And in fact by changing any orientation such as orientation of polarizer orientation, liquid crystal initial orientation and metal aperture tetramer unit configuration major and minor axis, just can make photoswitch enter normal black pattern by normal white mode, i.e. when voltage disconnection, light path is closed condition.
Embodiment 2: be illustrated in figure 2 a kind of micro-nano photoswitch specific embodiment based on surface phasmon method promise resonance provided by the invention, it adopts glass transparent substrate, on described glass transparent substrate 1, be stacked with successively metal film layer 2, nematic liquid crystal orientation conversion layer and the polarizer 7, the nematic liquid crystal orientation conversion layer in the present invention is made up of the polyimide film layer 3, nematic liquid crystal layer 4 and the ITO conductive film layer 10 that are stacked and placed on successively on metal film layer 2.Wherein the upper surface of polyimide film layer 3 is provided with some grooves 9 that parallel interval distributes, and the lower surface of ITO conductive film layer 10 is also provided with some grooves 9 that parallel interval distributes, and these grooves 9 are vertical with the groove 9 in polyimide film layer 3; In the present embodiment, be provided with electrode wires at the upper and lower side of nematic liquid crystal layer 4, for applying vertically to electric field.
Shown in Fig. 5, Fig. 6, the metal film layer 2 in the present invention, on it etching by independent metal aperture tetramer unit configuration as shown in Figure 3 through Square array (Fig. 5), or the array topology configuration that forms of Hexagonal array (Fig. 6).Four holes in independent unit configuration are D
2hgroup is symmetrical, has orthogonal minor axis and major axis, and the aperture Φ (diameter) of metal aperture is 90nm, and pitch of holes s (equidistant gap) is 3nm, and metal material is selected Au, and the thickness of metal film layer is 50nm.The size of array topology can be determined according to the device actual needs size of whole micro-nano photoswitch, for Square array, has cycle a=500nm and the b=500nm of two vertical direction; For Hexagonal array, between translation vector, there are non-90 degree angles, specifically see shown in Fig. 5 and Fig. 6.
The concrete preparation method of the above-mentioned micro-nano photoswitch of the present embodiment is as follows:
1) on glass transparent substrate 1, preparation Au film, thickness 30nm.
2) on metal film layer 2, utilize the etching techniques such as electron beam to prepare metal aperture tetramer unit configuration, its aperture Φ is 100nm, and pitch of holes s is 6nm.
3) utilize spin coating instrument spin-on polyimide thin layer 3,200 degrees Celsius of constant temperature 1 hour, then naturally coolingly complete annealing thermal treatment; Along same direction mechanical grinding polyimide film layer 3, form cocurrent and parallel microchannels 9 arranged side by side.
4) on ITO conductive film layer 10, utilize Mechanical Method grinding process make to occur parallel side by side and the groove of uniformity; Again in the one side of groove spin coating one deck size at the glass bead of 10 microns, as gasket material (meaning not shown in the figures).
5) under optical microscope, by step 4) the ITO conductive film layer 10 for preparing is placed into step 3) in the polyimide film layer 3 prepared, guarantee that groove 9 directions on ITO conductive film are vertical with the polishing direction in polyimide film layer 3.
6) in the gap of glass bead, fill nematic liquid crystal n-pentyl biphenyl cyanogen, liquid crystal is entered in gap by capillary force, heat liquid crystal until liquid crystal becomes homogeneous phase simultaneously, form nematic liquid crystal layer 4, then naturally cool to room temperature.
7) stick polarization 7 (bottom stick analyzer 11 for detection of) in top device, utilize epoxide-resin glue cloth to encapsulate this device.
Shown in Fig. 3 and Fig. 8, the concrete action principle of the above-mentioned micro-nano photoswitch of the present embodiment is summarized as follows:
Embodiment 1 shown in embodiment principle and Fig. 1 based on shown in Fig. 2 is roughly the same, for the purpose of more clear, specifically sketches for the normal black pattern of embodiment device.Embodiment 2, compared with embodiment 1, lacks interdigitated electrodes 8, and voltage is not to be added on interdigitated electrodes, but is carried in the upper and lower surface of nematic liquid crystal.Therefore the liquid crystal prima facies of this device is generally twisted nematic, and it is mainly by making the orthogonal groove of liquid crystal upper and lower surface or realizing with opposed orientation agent.
In the present embodiment, as Fig. 2, (polarization direction is P direction to the initial electric field polarised direction of the polarizer 7, horizontal arrow on it represents horizontal direction) and Fig. 8 shown in, the same with the situation of embodiment 1, be also perpendicular to paper and be parallel to the minor axis of metal aperture tetramer unit configuration.Incident light is 700nm natural light.
1) when voltage disconnects (liquid crystal does not power up up and down), natural light filters through the polarizer 7, only have the polarized light of vertical paper to enter liquid crystal, through the guiding of twisted nematic, polarised direction is reversed to parallel tetrameric long axis direction, according to the characteristic of metal aperture tetramer unit configuration, excite method promise resonance, light path is closed;
2) (liquid crystal powers up up and down) when voltage-drop loading, liquid crystal aligning is parallel to direction of an electric field, distortion changes consistent phase mutually into, polarised direction perpendicular to paper remains unchanged through after liquid crystal, now be parallel to the short-axis direction of metal aperture tetramer unit configuration, according to the characteristic of metal aperture tetramer unit configuration, light path is open-minded.In this device, changing that the polarizer 7 is orientated or 90 degree rotating metallic holes are tetrameric axially, can be normal white mode normal black mode tuning.
Solve tetramer Electromagnetism Characteristics in system through finite element numerical, obtain the affect rule of typical geometric parameter on system transmitted spectrum.As shown in Figure 9, metal aperture diameter increases the promise resonance peak red shift that can make to do in the proper way, increases method promise resonance number simultaneously; Thickness of metal film and pitch of holes increase can make resonant wavelength blue shift.The regulation and control of geometry parameter to wavelength, make to do in the proper way the red shift of promise low ebb or blue shift, this feature has reflected the resonant wavelength selective power that the metal aperture tetramer is good.According to this principle, can be for different Wavelength designs corresponding metal aperture tetramer unit configuration, then form a series of micro-nano photoswitches.These micro-nano photoswitches not only can work independently, and also can be together in series, and form cascaded optical switch, realize the selection of a series of wavelength and filter.Its structure and principle are as shown in figure 10.For example the operation wavelength of three photoswitches 1,2,3 is corresponding to λ 3, and λ 2 and λ 1 incide in photoswitch 1 when them simultaneously, and wherein λ 3 drops on the operation wavelength of switch 1, in transmission paddy, cannot pass through, and now only has λ 1, and λ 2 sees through; In like manner only has λ 1 by photoswitch 2, by that analogy.
Above-mentioned example is only explanation technical conceive of the present invention and feature, and its object is to allow person skilled in the art can understand content of the present invention and implement according to this, can not limit the scope of the invention with this.All equivalent transformations that Spirit Essence does according to the present invention or modification, within all should being encompassed in protection scope of the present invention.
Claims (10)
1. the micro-nano photoswitch based on surface phasmon method promise resonance, comprise transparent substrates, it is characterized in that being stacked with successively metal film layer (2), nematic liquid crystal orientation conversion layer and the polarizer (7) in described transparent substrates (1), wherein:
The polarizer (7), sees through light with initial polarised direction;
Nematic liquid crystal orientation conversion layer, for receiving the above-mentioned light that sees through with initial polarization direction, and controls the polarised direction of the light of going out via its transmission;
Metal film layer (2), the array topology configuration that on it, etching has independent metal aperture tetramer unit configuration or formed through Square array or Hexagonal array by this unit, four holes in described metal aperture tetramer unit configuration are D
2hgroup is symmetrical, has orthogonal minor axis and major axis; When being orientated the polarised direction of the light that conversion layer transmission gets off by nematic liquid crystal when parallel with minor axis, open light path; When the polarised direction that is orientated the light that conversion layer transmission gets off by nematic liquid crystal changes with respect to initial polarization direction, and when parallel with major axis, excitating surface phasmon method promise resonance, closes light path.
2. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 1, the thickness that it is characterized in that described metal film layer (2) is 20～100nm, in metal aperture tetramer unit configuration, the aperture Φ in four holes is 90～1000nm, and pitch of holes s is 3～100nm.
3. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 1, it is characterized in that described nematic liquid crystal orientation conversion layer, comprise the lower liquid crystal aligning control hyaline layer, nematic liquid crystal layer (4), the upper liquid crystal aligning control hyaline layer that are stacked and placed on successively on metal film layer (2); Wherein descend the upper surface of liquid crystal aligning control hyaline layer to be provided with some grooves (9) that parallel interval distributes, the lower surface of upper liquid crystal aligning control hyaline layer is provided with interdigitated electrodes (8) extraction electrode line (6), the interdigital direction of described interdigitated electrodes (8) is parallel or vertical with below groove (9), corresponding, when after interdigitated electrodes (8) energising, the direction of an electric field of its generation is vertical or parallel with below groove (9).
4. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 1, it is characterized in that described lower liquid crystal aligning control hyaline layer is polyimide film layer (3), ITO or FTO, and upper liquid crystal aligning control hyaline layer is glass cover lamella (5).
5. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 1, it is characterized in that described nematic liquid crystal orientation conversion layer, comprise the lower liquid crystal aligning control hyaline layer, nematic liquid crystal layer (4), the upper liquid crystal aligning control hyaline layer that are stacked and placed on successively on metal film layer; Wherein descend the upper surface of liquid crystal aligning control hyaline layer to be provided with some grooves (9) that parallel interval distributes, and the lower surface of upper liquid crystal aligning control hyaline layer is also provided with some grooves (9) that parallel interval distributes, these grooves (9) are vertical with the groove (9) on lower liquid crystal aligning control hyaline layer; Also comprise the electrode wires being connected to respectively on upper and lower liquid crystal aligning control hyaline layer, for imposing on nematic liquid crystal layer (4) with vertically to electric field.
6. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 5, it is characterized in that described lower liquid crystal aligning control hyaline layer is polyimide film layer (3), ITO or FTO, and upper liquid crystal aligning control hyaline layer is ITO conductive film layer (10).
7. according to a kind of micro-nano photoswitch based on surface phasmon method promise resonance described in claim 3 or 5, the lower surface spin coating one deck diameter that it is characterized in that described upper liquid crystal aligning control hyaline layer be the glass bead of 1～10 micron as pad, nematic liquid crystal is filled in and in described glass bead gap, forms described nematic liquid crystal layer (4).
8. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 1, the metal material that it is characterized in that described metal film layer is Au, Ag or Al.
9. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 1, is characterized in that the below of described transparent substrates is provided with analyzer (11).
10. one kind by least two cascaded optical switches that micro-nano photoswitch is in series as described in any one in claim 1～9.
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