CN104111565B - Micro-nano optical switch based on surface plasmon Fano resonance and cascade optical switch using same - Google Patents
Micro-nano optical switch based on surface plasmon Fano resonance and cascade optical switch using same Download PDFInfo
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- CN104111565B CN104111565B CN201410265615.7A CN201410265615A CN104111565B CN 104111565 B CN104111565 B CN 104111565B CN 201410265615 A CN201410265615 A CN 201410265615A CN 104111565 B CN104111565 B CN 104111565B
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Abstract
The invention discloses a micro-nano optical switch based on surface plasmon Fano resonance, which comprises a transparent substrate and is characterized in that a metal thin film layer, a nematic liquid crystal orientation conversion layer and a polarizer are sequentially stacked on the transparent substrate, wherein: the polarizer gives the transmitted light an initial polarization direction; a nematic liquid crystal orientation conversion layer for receiving the transmitted light having the initial polarization direction and controlling the polarization direction of the light transmitted therethrough; the metal film layer is etched with a single metal pore tetramer unit configuration or an array topological configuration formed by the unit through tetragonal arrangement or hexagonal arrangement, and the four pores in the metal pore tetramer unit configuration are D2hGroup symmetry with orthogonal minor and major axes; and when the polarization direction of the light transmitted by the nematic liquid crystal orientation conversion layer is parallel to the short axis, opening the light path, otherwise, exciting surface plasmon Fano resonance, and closing the light path. The invention not only has all the advantages of the liquid crystal optical switch, but also has the wavelength selection function which is not possessed by the traditional liquid crystal optical switch.
Description
Technical field
The present invention relates to a kind of micro-nano photoswitch based on surface phasmon method promise resonance and opened using its cascade light
Close.
Background technology
Information technology and human lives and produce closely related, its development experience artificial means, electromagnetic technique and electricity
Sub- technological phase, now towards photon technology stage development.Photon technology be with photon for carrier realize information transmission,
The modern technologies processing and storing.Because more than high 1000 times than electronics frequency of photon, support that multidimensional information spatially is processed,
And electromagnetism interference, so in information communication aspects photon, there is compared with electronics incomparable superiority：Information carries
Capacity is bigger, and faster, the confidentiality of information transfer is more preferable for information processing rate.In growing optical communication network, light chain
Road and optical node are key components；And the elementary cell of all routes, exchange and processing system in optical node is all light
Switch.Therefore photoswitch is core technology and the Primary Component of optical communication network.In terms of research tendency, photoswitch is faced with performance
Many challenges such as optimization, scale are expansible, functional diversities, and become the bottleneck building optical-fiber network of future generation.
Photoswitch strict difinition is：Under certain type of drive, certain parameter (intensity, wavelength, the direction of optical signal
Or polarization etc.) rapidly, reversibly, discontinuously it is changed into the process of another kind of state from a kind of state.Existing photoswitch
Main inclusion mechanical optical switch, magneto-optic shutter, acoustooptic switch, liquid crystal shutter, mems switch etc..Wherein, liquid crystal optical switch with
Other photoswitches are compared, and have the advantages that energy consumption is low, isolation is high, long service life, stability and good reliability, therefore closely several
Greatly developed over year.However, traditional photoswitch including liquid crystal optical switch is a kind of light intensity switch, there is no wavelength choosing
All wavelengths are all the switchings simultaneously realizing switching by selecting property.But the development of optic communication not only needs spatial domain and time
The swap status in domain, and need the exchange selection function of frequency domain.On the other hand, optical communication network is just towards integrated optical circuit direction
Development, the integrated Major Strategic Demand being the only way that information industry develops, being also country of optic communication.Integrated optical circuit
Gradually micro-nano is photochemical for the size of development inevitable requirement optical element (inclusion photoswitch), and therefore research and development novel micro nanometer light photoswitch is
The developing goal that integrated optical communication technology is urgently realized.
Method promise resonance is a kind of characteristic resonances phenomenon that continuous background field and discrete resonant fields interfere effect and produce,
It spectrally shows as asymmetrical resonance line style.This phenomenon electronics that is Ugo Fano in research atom system non-resilient
Find during scattering, be initially believed to be only limitted to quantum regime, be extended to numerous Scientific Engineering fields afterwards.People send out in recent years
Cash metal particles can model molecule configuration, and produce the surface phasmon of different mode under illumination drives, these are different
Concussion is interfered, thus realizing method promise resonance between pattern.Method promise resonance according to the present invention shows scattering spectrum line style
Asymmetric, live width is extremely narrow, scattering low ebb corresponds to dark pattern (Dark produced by the counteracting of surface phasmon phase coherence
mode).
Content of the invention
The present invention seeks to：There is provided a kind of micro-nano photoswitch based on surface phasmon method promise resonance, its device works
Principle is totally different from traditional liquid crystal photoswitch, make use of the birefringent characteristic of liquid crystal, not only has all of liquid crystal optical switch
Advantage, has the wavelength selection function that traditional liquid crystal photoswitch does not possess concurrently simultaneously.
The technical scheme is that：A kind of micro-nano photoswitch based on surface phasmon method promise resonance, including transparent
Substrate is it is characterised in that being sequentially stacked metal film layer, nematic liquid crystal orientation conversion layer and being polarized in described transparent substrates
Device, wherein：
The polarizer, gives through light with initial polarised direction；
Nematic liquid crystal be orientated conversion layer, for receiving the above-mentioned transmission light with initial polarization direction, and control via
The polarised direction of the light that its transmission is gone out；
Metal film layer, be etched with thereon single grommet tetramer unit configuration or by this unit through Square array or
The array topology configuration of Hexagonal array, four holes in described grommet tetramer unit configuration are in D2hGroup is symmetrical, just has
The short axle handed over and major axis；When the polarised direction of light that conversion layer transmission gets off and parallel with short axle is orientated by nematic liquid crystal
When, open light path；When the polarised direction of the light being got off by nematic liquid crystal orientation conversion layer transmission is with respect to initial polarization side
To changing, and during with longer axis parallel, then excitating surface phasmon method promise resonance, close light path.
Further, the thickness of heretofore described metal film layer is 20～100nm, grommet tetramer unit configuration
In the aperture Φ in four holes be 90～1000nm, pitch of holes s is 3～100nm.
Further, heretofore described nematic liquid crystal is orientated conversion layer, including being sequentially stacked on metal film layer
Lower liquid crystal aligning control clear layer, nematic liquid crystal layer, upper liquid crystal tropism control clear layer；Liquid crystal aligning is wherein descended to control thoroughly
The upper surface of bright layer is provided with some grooves of parallel interval distribution, and the lower surface of upper liquid crystal tropism control clear layer is then provided with friendship
Interdigitated electrodes extraction electrode line, the interdigital direction of described interdigitated electrodes is parallel with lower slots or vertical, corresponding,
After interdigitated electrodes are energized, the direction of an electric field that it produces is vertical with lower slots or parallel.
Further, heretofore described lower liquid crystal aligning controls clear layer is polyimide film layer, ITO or FTO,
And upper liquid crystal tropism control clear layer is glass cover layer.
Further, heretofore described nematic liquid crystal is orientated conversion layer, including being sequentially stacked on metal film layer
Lower liquid crystal aligning control clear layer, nematic liquid crystal layer, upper liquid crystal tropism control clear layer；Liquid crystal aligning is wherein descended to control thoroughly
The upper surface of bright layer is provided with some grooves of parallel interval distribution, and the lower surface of upper liquid crystal tropism control clear layer also is provided with putting down
Some grooves of between-line spacing distribution, these grooves control the groove vertical on clear layer with lower liquid crystal aligning；Also include connecting respectively
It is connected to the electrode wires on upper and lower liquid crystal aligning control clear layer, be used for being applied to nematic liquid crystal layer with vertical to electric field.
Further, heretofore described lower liquid crystal aligning controls clear layer is polyimide film layer, ITO or FTO,
And upper liquid crystal tropism control clear layer is ITO conductive film layer.
Further, one layer a diameter of 1 of the lower surface spin coating of heretofore described upper liquid crystal tropism control clear layer～
As pad, nematic liquid crystal is filled in described glass sphere gap and forms described nematic liquid crystal layer 10 microns of glass bead.
In fact, glass bead substrate clips controlling between clear layer in upper and lower liquid crystal aligning, the diameter dimension of glass bead and nematic phase liquid
The thickness of crystal layer is equal.
Further, the metal material of heretofore described metal film layer is Au, Ag or Al.
Heretofore described nematic liquid crystal is routine techniquess, for example, select n-pentyl biphenyl cyanogen.
Further, present invention additionally comprises the analyzer of lower section located at described transparent substrates.
, all using polaroid, the same with routine techniquess, the polarizer can be incidence for the polarizer in the present invention and analyzer
The natural light of composite polarizing become single line polarized light, and analyzer purposes is inspection and the polarization state of analysis light.
The core parts being related in the present invention are the grommet tetramer unit configuration of model molecule configuration：It is by four hole groups
Become and in D2hGroup is symmetrical, when the E field polarization direction of light wave is parallel with the short axle of grommet tetramer unit configuration, transmitted light
Spectrum only one of which scattering peak；When the longer axis parallel of E field polarization direction and the grommet tetramer unit configuration of light wave, transmission
A narrow low ebb in peak, corresponding to the dark pattern of surface phasmon.Nematic liquid crystal can be controlled by voltage break-make
Orientation, and then regulate and control the light wave polarised direction incident through the polarizer, finally realize to light transmission intensity and wavelength effective control.
The light being related in system of the present invention can lead to the interaction of micro-nano structure (grommet tetramer unit configuration)
Cross solution Maxwell equation accurately to describe, method for solving includes the numerical methods such as finite time-domain, finite element and boundary element.Pass through
Time domain and the numerical simulation of frequency domain, it is possible to obtain typical spectral response curve.The inherent physical mechanism of spectral response is surface
The relevant concussion of phasmon pattern：When the phase place of each pattern is consistent, surface phasmon ripple coherent phase is long, scattering
Peak；When dark pattern (dark mode) occurs, and during with bright pattern (bright mode) reciprocal action, due to its opposite in phase,
, scattering paddy in surface phasmon ripple coherent subtraction.The bright pattern of surface phasmon tends to belong to dipole subpattern (dipole
Modes), because attenuation speed is big, scattering spectral line is relatively wide wide；On the contrary, dark pattern is due to can not directly and incident illumination
Coupling, attenuation speed very little, scattering spectral line is narrow.Exactly this narrow dark pattern makes the resonance of promise resonance of doing in the proper way
Live width only has tens nanometers, and therefore this resonance is very sensitive to wavelength, can apply to wavelength selecting device.
Tetramer Electromagnetism Characteristics in finite element numerical solution system, obtain typical geometric parameter to system transmittance light
The affecting laws of spectrum.The metal bore dia increase of grommet tetramer unit configuration enables to method promise formant red shift, simultaneously
Increase method promise resonance number；Metal film layer thickness and pitch of holes increase so that resonant wavelength blue shift.Geometry parameter is to ripple
So that method promise low ebb red shift or blue shift, this feature reflects the good resonant wavelength of the grommet tetramer and selects for long regulation and control
Ability.
In the present invention grommet tetramer unit configuration as core both can be four independent hole units it is also possible to
It is evolved into the array topology of Square array and Hexagonal array on the basis of this element.Topological structure size can be according to device need
Depending on wanting size, for Square array, there is cycle a and b of two vertical direction；For Hexagonal array, translation vector
There is non-90 degree angle between amount.
The present invention be another object is that offer is a kind of and opened based on the micro-nano light of surface phasmon method promise resonance by least two
Close the cascaded optical switch being in series.
The above-mentioned micro-nano photoswitch that i.e. present invention provides not only can work independently it is also possible to be together in series, and forms cascade
Photoswitch, a series of selection realizing wavelength is filtered.The operation wavelength of such as three micro-nano photoswitches corresponds to λ 3, λ 2 and λ 1,
When they are made simultaneously incident in the first micro-nano photoswitch, wherein λ 3 falls in the operation wavelength of the first micro-nano photoswitch, i.e. transmission paddy
In cannot pass through, now only λ 1, λ 2 pass through；λ 1 is only had to pass through the second micro-nano photoswitch, by that analogy in the same manner.
It is an advantage of the invention that：
1. this micro-nano photoswitch based on surface phasmon method promise resonance that the present invention provides, its device operation principle
It is totally different from traditional liquid crystal photoswitch, make use of the birefringent characteristic of liquid crystal, the institute not only with liquid crystal optical switch is advantageous,
Have the wavelength selection function that traditional liquid crystal photoswitch does not possess concurrently simultaneously.
2. grommet tetramer unit configuration according to the present invention, is unique knot of the model molecule configuration proposing first
Structure, either in structure, or is all clearly distinguishable from nearest state in exciting and being concerned with to use of surface plasmon mode
The similar metal grain structure proposing on border.Research shows, the grommet tetramer unit configuration in the present invention supports high order table
Face phasmon pattern, such as quadrapole, six types of severe debility disease and ends of the earth etc., and corresponding metal grain structure only supports dipole submodule
Formula；Compared with metallic particles, the grommet tetramer unit configuration in the present invention is prepared simpler, and geometric parameter is to spectral line
Regulation and control are more sensitive, and method promise resonance line is narrower.
For example in a kind of instantiation of the present invention, the aperture Φ (diameter) of grommet tetramer unit configuration is 100nm, hole
Distance s (the equidistant gap in hole) are 6nm, and metal material selects Au, and metal film layer thickness is 30nm.When the conditions are satisfied, right
For the polarised direction of parallel long axis and short axle, in 700nm about wave band, light and shade photoresponse difference be much larger than 5 times, there is pole
Good contrast.
3. grommet tetramer unit configuration according to the present invention and its derived structure can be interacted with light, excite table
Face phasmon；The dark pattern (dark mode) of surface phasmon and bright pattern (bright mode) relevant concussion formation method
Promise is resonated, and this resonance shows as strong polarization sensitive and extremely narrow scattering peak valley, therefore can be used to effectively adjust
The break-make of control pattern, accurately identify incident wave band simultaneously.
Brief description
Below in conjunction with the accompanying drawings and embodiment the invention will be further described：
Fig. 1 is one of micro-nano light shutter device structure that the present invention is resonated based on surface phasmon method promise；
Fig. 2 is the two of the micro-nano light shutter device structure that the present invention is resonated based on surface phasmon method promise；
Fig. 3 is that independent have " D2hThe schematic diagram of the grommet tetramer unit configuration of tetramer molecular configuration "；
Fig. 4 is that typical back scattering spectrum under voltage break-make situation for the grommet tetramer unit configuration (or claims transmitted light
Spectrum)；
Fig. 5 is the periodic array topological structure derived from grommet tetramer unit configuration in Square array；
Fig. 6 is the periodic array topological structure derived from grommet tetramer unit configuration in Hexagonal array；
Fig. 7 is the fundamental diagram based on Fig. 1 device architecture；
Fig. 8 is the fundamental diagram based on Fig. 2 device architecture；
Fig. 9 is that three geometric parameters of grommet tetramer unit configuration are illustrated side by side to the affecting laws of transmitted spectrum
Figure；
Figure 10 is that the cascaded optical switch that the wavelength tunability according to grommet tetramer unit configuration of the present invention proposes is illustrated
Figure.
Wherein：1st, transparent substrates；2nd, metal film layer；3rd, polyimide film layer；4th, nematic liquid crystal layer；5th, glass cover
Lamella；6th, electrode wires；7th, the polarizer；8th, interdigitated electrodes；9th, groove；10th, ITO conductive film layer；11st, analyzer.
Specific embodiment
Embodiment 1：It is illustrated in figure 1 a kind of of present invention offer to open based on the micro-nano light of surface phasmon method promise resonance
Close specific embodiment, it adopts glass transparent substrate, described glass transparent substrate 1 has been sequentially stacked metal film layer 2, nematic
Phase liquid crystal aligning conversion layer and the polarizer 7, the nematic liquid crystal orientation conversion layer in the present invention is by being sequentially stacked in metallic film
Polyimide film layer 3 on layer 2, nematic liquid crystal layer 4 and glass cover layer 5 are constituted.The upper surface of polyimide film layer 3
It is provided with some grooves 9 of parallel interval distribution, and the lower surface of glass cover layer 5 is then provided with interdigitated electrodes 8 and draws electricity
Polar curve 6, the interdigital direction of described interdigitated electrodes 8 is parallel with lower slots 9.In the lower section of described transparent substrates in the present invention
It is provided with analyzer 11.The described polarizer 7 in the present embodiment and analyzer 11 are polaroid.
In conjunction with shown in Fig. 3, metal film layer 2 in the present invention, it is etched with single grommet tetramer unit structure thereon
Type, four holes in this unit configuration are in D2hGroup is symmetrical, has orthogonal short axle and major axis.The aperture Φ of grommet in the present embodiment
(diameter) is 100nm, and pitch of holes s (equidistant gap) is 6nm, and Au selected by metal material, and the thickness of metal film layer is 30nm.
In conjunction with shown in Fig. 4, when the E field polarization direction of light wave is parallel with the short axle of grommet tetramer unit configuration, thoroughly
Penetrate spectrum only one of which scattering peak；When the longer axis parallel of E field polarization direction and the grommet tetramer unit configuration of light wave,
A narrow low ebb in transmission peaks, corresponding to the dark pattern of surface phasmon.Nematic phase can be controlled by voltage break-make
Liquid crystal aligning, and then regulate and control the light wave polarised direction incident through the polarizer, final realization is effectively controlled to light transmission intensity and wavelength
System.
The light being related in system of the present invention can lead to the interaction of micro-nano structure (grommet tetramer unit configuration)
Cross solution Maxwell equation accurately to describe, method for solving includes the numerical methods such as finite time-domain, finite element and boundary element.Pass through
Time domain and the numerical simulation of frequency domain, it is possible to obtain typical spectral response curve.The inherent physical mechanism of spectral response is surface
The relevant concussion of phasmon pattern：When the phase place of each pattern is consistent, surface phasmon ripple coherent phase is long, scattering
Peak；When dark pattern (dark mode) occurs, and during with bright pattern (bright mode) reciprocal action, due to its opposite in phase,
, scattering paddy in surface phasmon ripple coherent subtraction.The bright pattern of surface phasmon tends to belong to dipole subpattern (dipole
Modes), because attenuation speed is big, scattering spectral line is relatively wide wide；On the contrary, dark pattern is due to can not directly and incident illumination
Coupling, attenuation speed very little, scattering spectral line is narrow.Exactly this narrow dark pattern makes the resonance of promise resonance of doing in the proper way
Live width only has tens nanometers, and therefore this resonance is very sensitive to wavelength, can apply to wavelength selecting device.Specifically divided by Fig. 4
Analysis can draw：For the polarised direction of parallel long axis and short axle, in 700nm about wave band, light and shade photoresponse difference long-range
In 5 times, there is splendid contrast.
The concrete preparation method of the above-mentioned micro-nano photoswitch of the present embodiment is as follows：
1) on glass transparent substrate 1, Au thin film, thickness 30nm are prepared.
2) etching techniques such as electron beam preparation grommet tetramer unit configuration, its aperture are utilized on metal film layer 2
Φ is 100nm, and pitch of holes s is 6nm.
3) utilize spin coating instrument spin-on polyimide thin layer 3, in 200 degrees Celsius of constant temperature 1 hour, then natural cooling completed
Annealing heat-treats；Along same direction mechanical grinding polyimide film layer 3, form cocurrent and parallel microchannels 9 arranged side by side.
4) photoetching process is utilized to prepare Au interdigitated electrodes in glass cover layer 5, finger-type bar width is 50 nanometers, highly
For 70 nanometers, the spacing between finger-type bar is 8 microns, using scolding tin link simultaneously extraction electrode line 6.
5) the one layer of size of one side spin coating arranging interdigitated electrodes in glass cover layer 5, in 5 microns of glass bead, is made
For gasket material (in figure is not illustrated).
6) under an optical microscope, by step 5) glass cover layer 5 prepared is placed into step 3) polyimides prepared
On the thin layer 3 it is ensured that interdigital direction of interdigitated electrodes 8 is consistent (i.e. mutual with the polishing direction in polyimide film layer 3
Parallel).
7) in the gap of glass bead filling nematic liquid crystal n-pentyl biphenyl cyanogen so that between liquid crystal entered by capillary force
In gap, heating liquid crystal becomes homogeneous phase until liquid crystal simultaneously, that is, form nematic liquid crystal layer 4, then naturally cool to room temperature.
8) stick the polarizer 7 (bottom is sticked analyzer 11 and is used for detecting) in top device, using epoxide-resin glue fabric width
Fill this device.
In conjunction with shown in Fig. 3 and Fig. 7, the concrete action principle of the present embodiment above-mentioned micro-nano photoswitch is summarized as follows：
In the present embodiment, (polarization direction is P direction to initial electric field polarised direction such as Fig. 1 of the polarizer 7, horizontal arrow thereon
Head represents horizontal direction) and Fig. 7 shown in, short axle perpendicular to paper and parallel to grommet tetramer unit configuration.Incident illumination
For 700nm natural light.
1) situation (i.e. interdigitated electrodes 8 no power) that voltage disconnects.The lower surface groove that contacted by liquid crystal and
The orientation of upper surface interdigitated electrodes is consistent, liquid crystal aligning in the presence of Van der Waals for, in consistent nematic phase state；
Therefore it is polarized the polarized light that device 7 filters down and directly through liquid crystal, and original polarised direction can be kept；In conjunction with Fig. 4 and gold
The description belonging to hole tetramer unit configuration principle understands, when this gathers parallel to grommet four perpendicular to the E field polarization direction of paper
It is impossible to genetic method promise resonance during the short axle of body unit configuration, it is presented without method Nuo Toushegu and has transmission peaks, therefore at light path
In conducting, analyzer 11 (polarization direction is A direction) obtains highlighted optical signal.
2) voltage closure (i.e. interdigitated electrodes 8 are energized).3V voltage-drop loading, on interdigitated electrodes, forms between referring to and hangs down
Straight in the electric field in interdigital direction, in the presence of electric field force near liquid crystal torsion be field parallel direction；Also due to model moral
The effect of wals force, liquid crystal from top to bottom, gradually by vertical orientated towards parallel-oriented transition, i.e. twisted nematic；Turning round
Under bent nematic waveguide effect, polarised direction after liquid crystal for the incident illumination inverts, originally parallel to grommet four
The polarised direction of the short axle of polymer unit configuration is reversed to parallel to major axis, therefore excitation method promise resonance, occurs corresponding to dark mould
Method Nuo Toushegu of formula, light path is closed.From the foregoing, it will be observed that voltage break-make lead to liquid crystal aligning invert, then lead to method promise resonance from
No to having, finally realize light path and open and close.
In above-mentioned principle summary, when being disconnected due to voltage, photoswitch is in opening state, therefore claims normal white mode.And it is actual
Any one takes above to pass through orientation of change polarizer orientation, liquid crystal initial orientation and grommet tetramer unit configuration major and minor axis etc.
To it becomes possible to make photoswitch enter normally black mode by normal white mode, when that is, voltage disconnects, light path is in closed mode.
Embodiment 2：It is illustrated in figure 2 a kind of of present invention offer to open based on the micro-nano light of surface phasmon method promise resonance
Close specific embodiment, it adopts glass transparent substrate, described glass transparent substrate 1 has been sequentially stacked metal film layer 2, nematic
Phase liquid crystal aligning conversion layer and the polarizer 7, the nematic liquid crystal orientation conversion layer in the present invention is by being sequentially stacked in metallic film
Polyimide film layer 3 on layer 2, nematic liquid crystal layer 4 and ITO conductive film layer 10 are constituted.Wherein polyimide film layer 3
Upper surface is provided with some grooves 9 of parallel interval distribution, and the lower surface of ITO conductive film layer 10 also is provided with parallel interval distribution
Some grooves 9, these grooves 9 are vertical with the groove 9 in polyimide film layer 3；In nematic liquid crystal layer 4 in the present embodiment
Upper and lower side is provided with electrode wires, for applying vertically to electric field.
In conjunction with shown in Fig. 5, Fig. 6, metal film layer 2 in the present invention, etch thereon by single metal as shown in Figure 3
Hole tetramer unit configuration is through Square array (Fig. 5), or the array topology configuration of Hexagonal array (Fig. 6).Individually single
Four holes in first configuration are in D2hGroup is symmetrical, has orthogonal short axle and major axis, the aperture Φ (diameter) of grommet is 90nm, Kong Jian
It is 3nm away from s (equidistant gap), Au selected by metal material, and the thickness of metal film layer is 50nm.The big I of array topology
Depending on size is actually needed according to the device of whole micro-nano photoswitch, for Square array, there are two vertical direction
Cycle a=500nm and b=500nm；For Hexagonal array, there is non-90 degree angle between translation vector, be specifically shown in Fig. 5
With shown in Fig. 6.
The concrete preparation method of the above-mentioned micro-nano photoswitch of the present embodiment is as follows：
1) on glass transparent substrate 1, Au thin film, thickness 30nm are prepared.
2) etching techniques such as electron beam preparation grommet tetramer unit configuration, its aperture are utilized on metal film layer 2
Φ is 100nm, and pitch of holes s is 6nm.
3) utilize spin coating instrument spin-on polyimide thin layer 3, in 200 degrees Celsius of constant temperature 1 hour, then natural cooling completed
Annealing heat-treats；Along same direction mechanical grinding polyimide film layer 3, form cocurrent and parallel microchannels 9 arranged side by side.
4) on ITO conductive film layer 10, make the ditch that parallel side-by-side and uniformity occur using Mechanical Method grinding process
Groove；Again in the one side of groove one layer of size of spin coating in 10 microns of glass bead, as gasket material (in figure is not illustrated).
5) under an optical microscope, by step 4) the ITO conductive film layer 10 for preparing is placed into step 3) prepare poly-
It is ensured that being hung down with the polishing direction in polyimide film layer 3 in groove 9 direction on ITO conductive film on imide membrane layer 3
Directly.
6) in the gap of glass bead filling nematic liquid crystal n-pentyl biphenyl cyanogen so that between liquid crystal entered by capillary force
In gap, heating liquid crystal becomes homogeneous phase until liquid crystal simultaneously, that is, form nematic liquid crystal layer 4, then naturally cool to room temperature.
7) stick polarization 7 (bottom is sticked analyzer 11 and is used for detecting) in top device, using the encapsulation of epoxide-resin glue cloth
This device.
In conjunction with shown in Fig. 3 and Fig. 8, the concrete action principle of the present embodiment above-mentioned micro-nano photoswitch is summarized as follows：
Roughly the same with the embodiment 1 shown in Fig. 1 based on the embodiment principle shown in Fig. 2, for the sake of becoming apparent from, for
The normally black mode of embodiment device is specifically sketched.Embodiment 2 compared with Example 1, lacks interdigitated electrodes 8, voltage
It is not to be added on interdigitated electrodes, but be carried in the upper and lower surface of nematic liquid crystal.The liquid crystal of therefore this device is initial
Mutually it is generally twisted nematic, it is mainly by making the orthogonal groove of liquid crystal upper and lower surface or using opposed orientation agent
To realize.
In the present embodiment, (polarization direction is P direction to initial electric field polarised direction such as Fig. 2 of the polarizer 7, horizontal arrow thereon
Head represents horizontal direction) and Fig. 8 shown in, as the situation of embodiment 1, be also perpendicular to paper and poly- parallel to grommet four
The short axle of body unit configuration.Incident illumination is 700nm natural light.
1) when voltage disconnects (liquid crystal is not powered up and down), natural light filters through the polarizer 7, the polarization of only vertical paper
Light enters liquid crystal, and through the guiding of twisted nematic, polarised direction is reversed to parallel tetrameric long axis direction, according to grommet
The characteristic of tetramer unit configuration, excitation method promise is resonated, and light path is closed；
2) (liquid crystal powers up up and down) during voltage-drop loading, parallel to direction of an electric field, distortion phase in version is consistent phase to liquid crystal aligning,
Keep constant after liquid crystal perpendicular to the polarised direction of paper, now parallel to the short axle of grommet tetramer unit configuration
Direction, according to the characteristic of grommet tetramer unit configuration, light path is open-minded.In this device, change the polarizer 7 and be orientated or 90 degree
The tetrameric axial direction in rotating metallic hole, you can normally black mode is adjusted to normal white mode.
Tetramer Electromagnetism Characteristics in finite element numerical solution system, obtain typical geometric parameter to system transmittance light
The affecting laws of spectrum.As shown in figure 9, metal bore dia increases enables to method promise formant red shift, increase method promise resonance simultaneously
Number；Thickness of metal film and pitch of holes increase so that resonant wavelength blue shift.Geometry parameter is to the regulation and control of wavelength so that method
Promise low ebb red shift or blue shift, this feature reflects the good resonant wavelength selective power of the grommet tetramer.Former according to this
Then reason, can constitute a series of micro-nano photoswitches for different Wavelength design corresponding grommet tetramer unit configurations.
These micro-nano photoswitches not only can work independently it is also possible to be together in series, and form cascaded optical switch, realize a series of wavelength
Select to filter.Its structure and principle are as shown in Figure 10.The operation wavelength of such as three photoswitches 1,2,3 corresponds to λ 3, λ 2 and λ 1,
When they are made simultaneously incident in photoswitch 1, wherein λ 3 falls in the operation wavelength of switch 1, cannot pass through in transmission paddy, now only
λ 1, λ 2 is had to pass through；λ 1 is only had to pass through photoswitch 2, by that analogy in the same manner.
Examples detailed above only technology design to illustrate the invention and feature, its object is to allow the person skilled in the art be
Will appreciate that present disclosure and implement according to this, can not be limited the scope of the invention with this.All smart according to the present invention
Equivalent transformation or modification that god's essence is done, all should be included within the scope of the present invention.
Claims (10)
1. a kind of micro-nano photoswitch based on surface phasmon method promise resonance, including transparent substrates it is characterised in that described
Metal film layer (2), nematic liquid crystal orientation conversion layer and the polarizer (7) are sequentially stacked on bright substrate (1), wherein：
The polarizer (7), gives through light with initial polarised direction；
Nematic liquid crystal is orientated conversion layer, for receiving the above-mentioned transmission light with initial polarization direction, and controls saturating via it
The polarised direction of the light being shot out；
Metal film layer (2), be etched with thereon single grommet tetramer unit configuration or by this unit through Square array or
The array topology configuration of Hexagonal array, four holes in described grommet tetramer unit configuration are in D2hGroup is symmetrical, just has
The short axle handed over and major axis；When the polarised direction being orientated the light that conversion layer transmission is got off by nematic liquid crystal is parallel with short axle,
Open light path；When the polarised direction being orientated the light that conversion layer transmission is got off by nematic liquid crystal is sent out with respect to initial polarization direction
Raw transformation, and during with longer axis parallel, then excitating surface phasmon method promise resonance, close light path.
2. according to claim 1 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
The thickness of described metal film layer (2) is 20～100nm, in the grommet tetramer unit configuration aperture Φ in four holes be 90～
1000nm, pitch of holes s is 3～100nm.
3. according to claim 1 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
Described nematic liquid crystal is orientated conversion layer, the lower liquid crystal aligning control clear layer that includes being sequentially stacked on metal film layer (2),
Nematic liquid crystal layer (4), upper liquid crystal tropism control clear layer；Liquid crystal aligning is wherein descended to control the upper surface of clear layer to be provided with parallel
Some grooves (9) spaced apart, and the lower surface of upper liquid crystal tropism control clear layer is then provided with interdigitated electrodes (8) and draws
Go out electrode wires (6), the interdigital direction of described interdigitated electrodes (8) is parallel or vertical with lower slots (9), corresponding, works as friendship
After interdigitated electrodes (8) energising, the direction of an electric field that it produces is vertical or parallel with lower slots (9).
4. according to claim 3 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
It is polyimide film layer (3), ITO or FTO that described lower liquid crystal aligning controls clear layer, and upper liquid crystal tropism control clear layer is
Glass cover layer (5).
5. according to claim 1 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
Described nematic liquid crystal is orientated conversion layer, the lower liquid crystal aligning control clear layer that includes being sequentially stacked on metal film layer, to
Row phase liquid crystal layer (4), upper liquid crystal tropism control clear layer；Liquid crystal aligning is wherein descended to control the upper surface of clear layer to be provided with parallel
Every some grooves (9) of distribution, and if the lower surface of upper liquid crystal tropism control clear layer also is provided with the hondo of parallel interval distribution
Groove (9), these grooves (9) control the groove (9) on clear layer vertical with lower liquid crystal aligning；Also include being respectively connecting to upper and lower
Liquid crystal aligning controls the electrode wires on clear layer, is used for being applied to nematic liquid crystal layer (4) with vertical to electric field.
6. according to claim 5 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
It is polyimide film layer (3), ITO or FTO that described lower liquid crystal aligning controls clear layer, and upper liquid crystal tropism control clear layer is
ITO conductive film layer (10).
7. a kind of micro-nano photoswitch based on surface phasmon method promise resonance according to claim 3 or 5, its feature exists
In described upper liquid crystal tropism control clear layer a diameter of 1～10 micron of the glass bead of one layer of lower surface spin coating as pad, to
Row phase liquid crystal is filled in described glass sphere gap and forms described nematic liquid crystal layer (4).
8. according to claim 1 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
The metal material of described metal film layer is Au, Ag or Al.
9. according to claim 1 a kind of based on surface phasmon method promise resonance micro-nano photoswitch it is characterised in that
The lower section of described transparent substrates is provided with analyzer (11).
10. a kind of opened by the cascade light that micro-nano photoswitch as described in any one at least two such as claim 1～9 is in series
Close.
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| CN105652487A (en) * | 2016-04-20 | 2016-06-08 | 中国工程物理研究院上海激光等离子体研究所 | Metal nano-particle doped liquid crystal optical switch as well as preparation method and application method thereof |
| CN108593624B (en) * | 2018-04-13 | 2021-03-19 | 东南大学 | Multi-wavelength metal plasma resonance structure with enhanced selectivity and preparation method thereof |
| CN108983457B (en) * | 2018-08-10 | 2021-12-03 | 南方科技大学 | Color tunable liquid crystal color filter |
| CN109059971B (en) * | 2018-09-25 | 2024-04-30 | 桂林电子科技大学 | Sensor with three-hole seam structure |
| CN109307659A (en) * | 2018-10-16 | 2019-02-05 | 深圳大学 | A kind of method promise resonance super surface high sensitivity background index sensor of MDM |
| CN110412668B (en) * | 2019-08-07 | 2021-10-19 | 太原理工大学 | Structure for generating multiple surface lattice resonance and application thereof |
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