CN105699292A - Single grit scratching quick-stop test method using spherical grinding head for pre-finishing hard and brittle test piece - Google Patents
Single grit scratching quick-stop test method using spherical grinding head for pre-finishing hard and brittle test piece Download PDFInfo
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Abstract
The invention discloses a single grit scratching quick-stop test method using a spherical grinding head for a pre-finishing hard and brittle test piece and belongs to the fields of material performance test in machining and precision and ultra-precision machining.By the quick-stop test method, the hard and brittle test piece is fixed and subjected to online dynamic balance, and the spherical grinding head is used for finishing a disk to meet required end face run-out and roughness requirements; the test piece rotates at a specific rotation speed, a single grit tool head is fixedly connected at the top end of the test piece to feed radially and scratch according to specific knifing, a spiral scratch is formed in the end face of the test piece, and the tool head is separated from the test piece instantaneously during scratching to achieve 'frozen' grit and test piece contact state during single grit scratching.The single grit scratching quick-stop test method has the advantages that related mechanisms such as material deformation, machined surface forming and interfacial friction during material removal by grit can be better understood through three-dimensional shape measurement and microscopic observation, and further, means can be provided for intensive studies on material removal mechanisms in grit machining processes such as grinding.
Description
Technical field
The invention belongs to the material properties test in machining and precise and ultraprecise machining field, be specifically related to a kind of spherical mounted point and repair single abrasive particle scratching of hard crisp test specimen in advance and stop method of testing soon。
Background technology
Stop method of testing soon and be also quick roll setting method of testing, refer to that utilizing external force to make cutter or abrasive particle speed away cuts or grinding area, thus " freezing " exits the instantaneous contact condition with test specimen at cutter or abrasive particle, the state keeping material for test deformation moment is recorded, and is not destroyed by the follow-up course of processing。This deformation moment can by follow-up metallographic sample preparation and microexamination carry out deeper into analysis。This method can further investigate the Material Removal Mechanism in cutting or grinding process; have multiple quick-stop device in metal cutting field to be developed; corresponding test result also has been reported that in correlative theses; but in grinding field, the method for testing of stopping soon for single abrasive particle scratching have not been reported。
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art part; provide a kind of spherical mounted point to repair single abrasive particle scratching of hard crisp test specimen in advance and stop method of testing soon; by making the tool heads of installation abrasive particle depart from rapidly the contact area of abrasive particle and test specimen; realize " the freezing " of abrasive particle and test specimen contact condition in single abrasive scratching process; pass through microexamination; abrasive particle can be better understood by and remove the Related Mechanism such as the material deformation in materials process, machined surface formation, interface friction, and then the further investigation for abrasive machining process material cutting mechanisms such as grindings provides means。
The technical solution adopted for the present invention to solve the technical problems is:
A kind of spherical mounted point is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, including:
1) being fixed on electro spindle by hard crisp test specimen, test specimen can be rotated by electro spindle；This test specimen is carried out on-line dynamic balancing；
2) adopting spherical mounted point that this test specimen is repaiied dish, be better than IT1 level forming end face run-out amount in surface of test piece, what surface average roughness Ra was better than 10nm repaiies disk area, specifically comprises the following steps that
2-1) dish is repaiied in spherical mounted point roughing: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 10～50 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
2-2) dish is repaiied in spherical mounted point polish: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 2～10 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
3) spherical mounted point touching tool setting gauge, it is determined that repair disk area and the tool setting gauge difference in height h to cutter plane0；Spherical mounted point is replaced by top and is connected with the tool heads of single abrasive particle, the abrasive particle on tool heads top touching tool setting gauge, then shifting h on the axial direction that tool heads is rotated along test specimen0+ δ, so that the abrasive particle on tool heads top is positioned at test specimen and repaiies δ place above disk area, completes cutter；
4) tool heads level is moved to directly over the scratching point repairing disk area, and move down δ+apSo that the scratching degree of depth is ap；Scratching radius R according to the scratching speed v that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece；Test specimen rotates according to setting speed n, and tool heads radially feeding, so that abrasive particle is repairing disk area scratching formation spiral scratch, in scratching process, tool heads moment departs from test specimen, depart from the instantaneous linear velocity on moment tool heads top higher than test specimen rotational line speed, depart from the contact condition of moment abrasive particle and test specimen with " freezing "；By the data in the measurement system acquisition scratching process that is connected with tool heads in this process。
In one embodiment: described abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, abrasive particle is shaped as spherical, conical or polygonal pyramid shape；This abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；Described tool heads is pressure head。
In one embodiment: described test specimen is disc；During due to test, end face radius smaller portions linear velocity is less, it is impossible to realize higher scratching speed, in order to improve efficiency, repaiies during dish spherical mounted point feeding distance less than test specimen radius so that described in repair disk area be annular。
In one embodiment: described measurement system is dynamometry and acoustic emission system, including dynamometer, acoustic emission system, data collecting card and signal amplifier that mutual signal connects；Described tool heads is connected with dynamometer and acoustic emission system。
In one embodiment: the natural frequency of described dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of described data collecting card is higher than 2M/s。
In one embodiment: described step 2) in, repair the direction of rotation of test specimen and the direction of rotation of spherical mounted point during dish contrary。
In one embodiment: described tool heads is superior to 0.1 μm in the positioning precision of the axial direction rotated along test specimen and radial direction。
In one embodiment: the positioning precision of described tool setting gauge is better than 0.1 μm。
In one embodiment: described step 4) in, tool heads was departed from test specimen by high rigid spring or pneumatic impact wrench moment。
In one embodiment: described tool heads axis is parallel to test specimen rotation axis；Described spherical mounted point axis is parallel to test specimen rotation axis。
Except having explanation, the connected mode between the single processing procedure of each device involved in the present invention and each device is this area routine techniques, is not described in detail at this。
The technical program is compared with background technology, and it has the advantage that
1. single the abrasive particle scratching of the present invention stops method of testing soon; in scratching process; the tool heads making installation abrasive particle departs from rapidly the contact area of abrasive particle and test specimen; realize single abrasive scratching process departs from " the freezing " of moment abrasive particle and test specimen contact condition; pass through microexamination; abrasive particle can be better understood by and remove the Related Mechanism such as the material deformation in materials process, machined surface formation, interface friction, and then the further investigation for abrasive machining process material cutting mechanisms such as grindings provides means。
2. main shaft-sample system is carried out on-line dynamic balancing by the present invention, it is to avoid significantly end face run-out in high-speed rotation or circular runout, thus keep the stable contact condition between abrasive particle and test specimen；Simultaneously, utilize spherical mounted point that test specimen is carried out on-line machining, improve form accuracy and the surface smoothness of test specimen simultaneously, improve test specimen rotating accuracy and grain motion precision, thus the relative motion precision that ensure that between abrasive particle and test specimen, coordinate dynamic balancing, further ensure and can contact continually and steadily in relatively dash wiping distance between abrasive particle and test specimen, thus realizing the high-speed, high precision scratching of abrasive particle, and then ensure to stop soon the accuracy of test。
3., according to the general knowledge of this area, the machined surface quality of test specimen must be better than the surface quality that relevant grinding process obtains, it is desirable to exceeding an order of magnitude, the cut test result obtained could be used for the analysis of grinding process cutting mechanisms；Owing to the present invention is greatly improved the quality of surface of test piece, therefore, it is possible to meet the requirement of the high accuracy analysis such as grinding process cutting mechanisms, can be used for the research of Material Removal Mechanism in process of friction and wear and grinding。
4. the abrasive particle scratching degree of depth is more than the stability of more than 5 times guarantee scratchings of surface of test piece fluctuating quantity; owing to the present invention is greatly improved the quality of surface of test piece; surface of test piece precision and fineness are good; even the abrasive particle of small grain size also can realize stable high accuracy scratching; therefore may be used for single abrasive particle scratching test of small grain size abrasive particle; expand the range of application of the present invention further, be also being greatly facilitated single abrasive particle scratching experimental technique of the industry。
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described。
Fig. 1 is the method for testing principle schematic of the present invention。
Fig. 2 be the present invention repair dish Principle of Process schematic diagram。
Fig. 3 be the present invention stop principle schematic soon, wherein Fig. 3 b is A place enlarged diagram in Fig. 3 a, also departs from moment schematic diagram for " freezing " abrasive particle and test specimen。
Fig. 4 repaiies the contrast of surface of test piece three-dimensional appearance before and after dish in the embodiment of the present invention, wherein Fig. 4 a for before repairing dish (through conventional planar accurate grinding processes), Fig. 4 b is for after repairing dish。
Fig. 5 repaiies the contrast of surface of test piece end face run-out amount before and after dish in the embodiment of the present invention, wherein Fig. 5 a for before repairing dish (through conventional planar accurate grinding processes), its end face run-out amount maximum is up to 29.1 μm；Fig. 5 b is for after repairing dish, and its end face run-out amount maximum is 9.1 μm。
Fig. 6 is SEM photograph and the three-dimensional appearance schematic diagram of cut in the embodiment of the present invention。
Fig. 7 is the three-dimensional appearance schematic diagram that in the embodiment of the present invention, abrasive particle and test specimen disengaging moment and cut are " frozen " region foremost。
Fig. 8 is the two-dimensional section pattern schematic diagram that in the embodiment of the present invention, abrasive particle and test specimen disengaging moment and cut are " frozen " region foremost。
Accompanying drawing labelling: test specimen 1, vacuum cup 2, tool heads 3, repair disk area 4, tool setting gauge 5, spherical mounted point 6。
Detailed description of the invention
Illustrate present disclosure by the examples below:
A kind of spherical mounted point repaiies the continuous scratching method of testing of single abrasive particle of hard crisp test specimen in advance, and the device adopted includes:
Lathe, the hard crisp test specimen 1 of disc is installed on the electro spindle of lathe by vacuum cup 2, and test specimen 1 can be rotated by electro spindle；
Dynamic balance instrument, for carrying out on-line dynamic balancing to test specimen 1；
Spherical mounted point 6, for repairing dish to test specimen 1 end face；This spherical mounted point 6 is installed in support dismantledly, and is installed in lathe movably by support；Spherical mounted point 6 axis is parallel to test specimen 1 rotation axis；
Tool heads 3, is used for carrying out scratching test；This tool heads 3 top is connected with the abrasive particle of single；This tool heads 3 can replace mounting or dismounting mutually with spherical mounted point be installed in support, and is installed in lathe movably by support；Tool heads 3 is connected with high rigid spring or pneumatic impact wrench, is departed from by the moment of high rigid spring or pneumatic impact wrench implementation tool head 3 with test specimen 1；Tool heads 3 axis is parallel to test specimen 1 rotation axis, and tool heads 3 at the axial direction that test specimen 1 rotates with move in the radial direction, and can be superior to 0.1 μm in the positioning precision of both direction；
Tool setting gauge 5, for carrying out cutter to spherical mounted point 6 and tool heads 3, positioning precision is better than 0.1 μm；Be installed in lathe, and and relative position between test specimen 1 keep fixing；
Measurement system, for dynamometry and acoustic emission system, including dynamometer, acoustic emission system, data collecting card and signal amplifier that mutual signal connects；This tool heads 3 is connected with dynamometer and acoustic emission system；Data acquisition card signal connects computer。
Air-cooler: be used for the spherical mounted point repaiied in dish process and test specimen, and tool heads and the test specimen in scratching process blows cooling。
Concrete method of testing is as follows:
1) being fixed on the electro spindle of lathe by the sapphire wafer of 6 inches (diameter is about 150mm) and test specimen 1 vacuum cup 2 clamping, test specimen 1 can be rotated by electro spindle；With dynamic balance instrument, this test specimen 1 is carried out on-line dynamic balancing, to reduce the test specimen 1 vibration when high speed rotating, thus ensureing that in scratching process, abrasive particle can stably contact with test specimen 1；
2) adopt spherical mounted point 6 that this test specimen 1 is repaiied dish, first carry out roughing, carry out polish again, to form end face run-out amount 3 μm on test specimen 1 surface, the annular of surface average roughness Ra 10nm repaiies disk area 4, to reduce test specimen 1 end face run-out amount, improving surface quality, being further ensured that in scratching process, abrasive particle can stably contact with test specimen 1；Specifically comprise the following steps that
2-1) dish is repaiied in spherical mounted point roughing: repair open cold blower fan while dish, cold wind alignment spherical mounted point 6 and test specimen 1 is made to cool down, repairing the rotating speed of test specimen 1 during dish is 3000rpm, spherical mounted point 6 is with the rotating speed rotation of 10000rpm, simultaneously outside test specimen 1, cutting-in with 10 μm carries out single-point grinding along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is 50mm；
2-2) dish is repaiied in spherical mounted point polish: repair open cold blower fan while dish, cold wind alignment spherical mounted point 6 and test specimen 1 is made to cool down, repairing the rotating speed of test specimen 1 during dish is 3000rpm, spherical mounted point 6 is with the rotating speed rotation of 10000rpm, outside test specimen, carry out single-point grinding with the cutting-in of 2 μm along test specimen radial feed simultaneously, feed speed ranges for 0.1～0.3mm/s, and feeding distance is 50mm；
Repair the contrast of test specimen 1 three-dimensional surface shape and end face run-out amount before and after dish and see Fig. 4 and Fig. 5 respectively；
3) spherical mounted point 6 touches tool setting gauge 5, it is determined that repair disk area 4 and the tool setting gauge 5 difference in height h to cutter plane0；Spherical mounted point 6 is taken off from support, it is replaced by the tool heads 3 that top plating is connected with the spherical wear particles of single radius 0.1mm, tool heads 3 top moves closer to tool setting gauge 5, when measuring system data and producing sudden change, the abrasive particle on representational tool head 3 top just touches tool setting gauge 5 to cutter plane, then shifting h on axial direction tool heads 3 rotated along test specimen0+ δ, so that the abrasive particle on tool heads 3 top is positioned at test specimen 1 and repaiies δ place above disk area 4, completes cutter, thus can accurately control the scratching degree of depth when ensureing follow-up test；
4) tool heads 3 level is moved to directly over the scratching point repairing disk area 4, and move down δ+apSo that the scratching degree of depth is ap；Scratching radius R according to the scratching speed v that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece 1；Among the present embodiment, n=10000rpm, scratching speed v is 52m/s～78m/s (scratching speed changes with scratching radius change), scratching degree of depth apIt is set as 6 μm；Test specimen 1 rotates according to above-mentioned setting speed n, and tool heads 3 is radially with the speed feeding of 1m/s, so that abrasive particle forms the continuous helical shape cut that spacing is 100 μm repairing disk area 4, the cut number of turns is more than 3；This process gathers the data in scratching process by the dynamometer being connected with tool heads 3 and acoustic emission system, and is transmitted to data collecting card by signal amplifier, then transmit and be calculated to computer, the physical quantitys such as scratching power, acoustic emission signal can be obtained；In scratching process; when single the abrasive particle scratching on tool heads 3 top is to (scratching speed is 52m/s) on the circumference that diameter is 100mm; tool heads 3 was departed from test specimen 1 by high rigid spring or pneumatic impact wrench moment; and the instantaneous linear velocity departing from moment tool heads 3 top is higher than test specimen 1 rotational line speed, so that " freezing " abrasive particle scratching process to depart from the contact condition of moment abrasive particle and test specimen 1；
It should be noted that, commonly used in the art makes in the mode that tool heads departs from test specimen by high rigid spring or pneumatic impact wrench, tool heads is fixed on high rigid spring or pneumatic impact wrench, depart from along circular arc under the drive of high rigid spring or pneumatic impact wrench during disengaging, therefore the instantaneous linear velocity on above-mentioned disengaging moment tool heads top refers to the tangential velocity departing from moment tool heads along circular motion, and the direction of motion now is parallel to test specimen rotation axis and away from test specimen。
5) cut is carried out microexamination and measuring three-dimensional morphology, as shown in Figure 6；Cut is " frozen " the three-dimensional appearance in region and two-dimensional section pattern thereof as shown in Figure 7 and Figure 8 foremost。
Among the present embodiment, the natural frequency of described dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of described data collecting card is higher than 2M/s。
As required, described hard brittle material can also be pottery, silicon chip；Described abrasive particle can be diamond, CBN (cubic boron nitride), oxide ceramics or nitride ceramics；Abrasive particle shape can also be cone or polygonal pyramid shape；This abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；Described tool heads can be pressure head or other fixed grain form。
As required, repairing the parameter of dish and adjust in following scope and carry out one or many and repair dish, can form end face run-out amount in surface of test piece and be better than IT1 level, what surface average roughness Ra was better than 10nm repaiies disk area:
2-1) dish is repaiied in spherical mounted point roughing: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 10～50 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；Repair during dish the direction of rotation of test specimen and the direction of rotation of spherical mounted point can identical can also be contrary, speed of related movement can be increased on the contrary, improve crudy；
2-2) dish is repaiied in spherical mounted point polish: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 2～10 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；Repair during dish the direction of rotation of test specimen and the direction of rotation of spherical mounted point can identical can also be contrary, speed of related movement can be increased on the contrary, improve crudy。
Comparative example
Take hard crisp test specimen, after conventional planar accurate grinding processes, surface of test piece is divided into two regions, one of them region carries out repairing dish according to the dish step of repairing of the present invention, making its surface quality reach end face run-out amount and be better than IT1 level, surface average roughness Ra is better than 10nm, is designated as and repaiies disk area；Another region does not carry out repairing dish, is designated as and does not repair disk area。
Above-mentioned test specimen adopts the method for testing of the present invention carry out single the continuous scratching of abrasive particle and stops test soon, repairing disk area and do not repairing formation cut in disk area under same test parameter, scratch depth is only small, micron order can be reached, result shows, when scratch depth is only small, the cut repairing disk area forms coherent spiral type, it is distributed in uniform intervals, detect its depth direction error less than 1 μm/1mm, show that abrasive particle all can contact in the relatively dash wiping distance repairing in disk area continually and steadily with test specimen, such that it is able to the high-speed, high precision scratching realizing abrasive particle stops test soon；And the cut not repairing disk area can not form coherent spiral type, differ in cut interval, the cut depth, scratch width are respectively provided with macroscopic diversity, it was shown that cannot contact continually and steadily between abrasive particle and test specimen, and the high-speed, high precision scratching being more not used to abrasive particle stops test soon。
The above, be only present pre-ferred embodiments, therefore can not limit scope of the invention process according to this, and the equivalence namely made according to the scope of the claims of the present invention and description changes and modifies, and all should still belong in the scope that the present invention contains。
Claims (10)
1. single the abrasive particle scratching that a spherical mounted point repaiies hard crisp test specimen in advance stops method of testing soon, it is characterised in that: including:
1) being fixed on electro spindle by hard crisp test specimen, test specimen can be rotated by electro spindle；This test specimen is carried out on-line dynamic balancing；
2) adopting spherical mounted point that this test specimen is repaiied dish, be better than IT1 level forming end face run-out amount in surface of test piece, what surface average roughness Ra was better than 10nm repaiies disk area, specifically comprises the following steps that
2-1) dish is repaiied in spherical mounted point roughing: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 10～50 μm along test specimen radial feed, feed speed ranges for 0.4～1.2mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
2-2) dish is repaiied in spherical mounted point polish: while repairing dish, spherical mounted point and test specimen are cooled down, repairing the range of speeds of test specimen during dish is 3000～10000rpm, spherical mounted point is with the rotating speed rotation of 8000～20000rpm, simultaneously outside test specimen with the cutting-in of 2～10 μm along test specimen radial feed, feed speed ranges for 0.1～0.3mm/s, and feeding distance is the 1/4～1/2 of test specimen diameter；
3) spherical mounted point touching tool setting gauge, it is determined that repair disk area and the tool setting gauge difference in height h to cutter plane0；Spherical mounted point is replaced by top and is connected with the tool heads of single abrasive particle, the abrasive particle on tool heads top touching tool setting gauge, then shifting h on the axial direction that tool heads is rotated along test specimen0+ δ, so that the abrasive particle on tool heads top is positioned at test specimen and repaiies δ place above disk area, completes cutter；
4) tool heads level is moved to directly over the scratching point repairing disk area, and move down δ+apSo that the scratching degree of depth is ap；Scratching radius R according to the scratching speed v that need to test and scratching point place, passes throughThe setting speed n of calculation testing piece；Test specimen rotates according to setting speed n, and tool heads radially feeding, so that abrasive particle is repairing disk area scratching formation spiral scratch, in scratching process, tool heads moment departs from test specimen, depart from the instantaneous linear velocity on moment tool heads top higher than test specimen rotational line speed, depart from the contact condition of moment abrasive particle and test specimen with " freezing "；By the data in the measurement system acquisition scratching process that is connected with tool heads in this process。
2. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon; it is characterized in that: described abrasive particle is diamond, CBN, oxide ceramics or nitride ceramics, abrasive particle is shaped as spherical, conical or polygonal pyramid shape；This abrasive particle is fixed in tool heads top by mechanical grip, plating or soldering；Described tool heads is pressure head。
3. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: described test specimen is disc；Repairing during dish that spherical mounted point feeding distance is less than test specimen radius, repairing disk area is annular。
4. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon; it is characterized in that: described measurement system is dynamometry and acoustic emission system, including dynamometer, acoustic emission system, data collecting card and signal amplifier that mutual signal connects；Described tool heads is connected with dynamometer and acoustic emission system。
5. a kind of spherical mounted point according to claim 4 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: the natural frequency of described dynamometer is higher than 4KHz, and dynamometry precision is better than 0.01N；The sample rate of described data collecting card is higher than 2M/s。
6. a kind of spherical mounted point according to claim 3 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: described step 2) in, repair the direction of rotation of test specimen and the direction of rotation of spherical mounted point during dish contrary。
7. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: described tool heads is superior to 0.1 μm in the positioning precision of the axial direction rotated along test specimen and radial direction。
8. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: the positioning precision of described tool setting gauge is better than 0.1 μm。
9. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: described step 4) in, tool heads was departed from test specimen by high rigid spring or pneumatic impact wrench moment。
10. a kind of spherical mounted point according to claim 1 is repaiied single abrasive particle scratching of hard crisp test specimen in advance and is stopped method of testing soon, it is characterised in that: described tool heads axis is parallel to test specimen rotation axis；Described spherical mounted point axis is parallel to test specimen rotation axis。
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