CN105696083B - A kind of preparation method of solar battery pile face - Google Patents
A kind of preparation method of solar battery pile face Download PDFInfo
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- CN105696083B CN105696083B CN201610066750.8A CN201610066750A CN105696083B CN 105696083 B CN105696083 B CN 105696083B CN 201610066750 A CN201610066750 A CN 201610066750A CN 105696083 B CN105696083 B CN 105696083B
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Abstract
The invention discloses a kind of preparation method of solar battery pile face, comprise the following steps：(1) configuration corrosion mixed liquor：By volume by HNO3：HF：Deionized water=4:1:2.5~5:1:2.5 are mixed to get corrosion mixed liquor；(2) pending silicon chip is immersed in above-mentioned corrosion mixed liquor, and the spacing between the upper surface of silicon chip and corrosion mixed liquor liquid level is controlled in 5 ~ 10 mm；After corroding under negative pressure exhausting environment, you can suede structure is made on the lower surface of silicon chip；The pressure of the negative pressure exhausting environment is 50 ~ 100Pa.The present invention can realize polishing effect while the one side of silicon chip forms suede structure in another side.
Description
Technical field
The present invention relates to a kind of preparation method of solar battery pile face, belong to technical field of solar batteries.
Background technology
Conventional fossil fuel is increasingly depleted, and in existing sustainable energy, solar energy is undoubtedly a kind of most clear
Clean, most universal and most potential alternative energy source.Device of solar generating is also known as solar cell or photovoltaic cell, can incite somebody to action
Solar energy is directly changed into electric energy, and its electricity generating principle is the photovoltaic effect based on semiconductor PN.
In the fabrication of a solar cell, generally using acid solution or aqueous slkali to crystalline silicon in crystal orientation it is each to
Anisotropic etch characteristic, the matte similar to " inverted pyramid " structure is formed in silicon chip surface, by increasing irradiation light in silicon chip table
The order of reflection in face, the absorptivity of light is improved, so as to improve the conversion efficiency of monocrystaline silicon solar cell.
On the other hand, with the development of science and technology, there is localized contact back of the body passivation（PERC）Solar cell, this is newly to open
A kind of high performance solar batteries issued, have obtained the extensive concern of industry.Its core is the shady face oxidation in silicon chip
(5 ~ 100 nanometers) coverings of aluminium or silicon oxide film, to play passivated surface, improve the effect of long-wave response, so as to lift electricity
The conversion efficiency in pond.But aluminum oxide or silica are non-conductive, it is therefore desirable to the film local openings, in order to aluminium gold
Category contacts with silicon chip back surface, collected current.In addition, aluminum metal (being typically aluminium paste), in high-temperature sintering process, can destroy oxygen
Change the passivation of aluminium or silica, therefore generally to cover silicon nitride film again on aluminum oxide or silicon oxide film,
Play a protective role.The preparation method of existing PERC solar cells mainly comprises the following steps：Making herbs into wool, diffusion, the back of the body polishing,
Etching and decontamination glass, backside deposition aluminum oxide or silicon oxide film, deposited silicon nitride diaphragm, front deposited silicon nitride subtract
Reflecting layer, back side local openings, the positive back metal slurry of silk-screen printing, sintering, you can obtain solar cell.
Therefore, it is necessary to carry out single-sided polishing to cell backside in the preparation process of PERC back of the body passivation cells.In order to
In the polishing effect that crystal silicon solar battery back face has obtained, to reach preferably back of the body passivation effect, and increase long wave rings
Should, people have attempted many methods, and conventional method includes the polishing of chemical mask corrosion, physical grinding polishing etc..Wherein, it is chemical
Mask corrosion polishing method includes alkali polishing and acid polishing, can obtain preferable polishing effect, but this method technique is more
Complexity, cost is higher, so in the industrial production using less.For physical grinding polishing processes, its disadvantage is meeting pair
Cell piece surface produces more serious damage, it is impossible to is efficiently used for producing.
Therefore, a kind of new polishing method is developed, can realize cost-effective, and can realizes volume production, is still current sheet
One of research and development method of art personnel.
The content of the invention
The goal of the invention of the present invention is to provide a kind of preparation method of solar battery pile face.
To achieve the above object of the invention, the technical solution adopted by the present invention is：A kind of preparation side of solar battery pile face
Method, comprise the following steps：
(1) configuration corrosion mixed liquor：By volume by HNO3：HF：Deionized water=4:1:2.5~5:1:2.5 it is mixed to get
Corrode mixed liquor；
(2) pending silicon chip is immersed in above-mentioned corrosion mixed liquor, and makes upper surface and the corrosion mixed liquor liquid of silicon chip
Spacing between face is controlled in 5 ~ 10 mm；
After corroding under negative pressure exhausting environment, you can suede structure is made on the lower surface of silicon chip；
The pressure of the negative pressure exhausting environment is -50 ~ -100Pa.
Above, corrosion mixed liquor can be mixed in the making herbs into wool Tank grooves of chain type texturing machine, then will corrodes mixed liquor
With circular flow（100~180L/min）Get in making herbs into wool Bath grooves, and ensure the liquid level in Bath grooves and silicon chip difference in height 5 ~
10mm。
In above-mentioned technical proposal, after corroding 1.5 ~ 2.5min under negative pressure exhausting environment in the step (2), continue through
Suede structure is can obtain after cleaning, drying.
In above-mentioned technical proposal, in the step (2), while suede structure is made on the lower surface of silicon chip, in silicon
The upper surface of piece forms single-sided polishing.
Preferably, the solar cell is PERC solar cells.
Preferably, the pressure of the negative pressure exhausting environment is -60 ~ -80Pa.
The mechanism of the present invention is as follows：In HNO3On the basis of-HF system making herbs into wool, appropriate solution ratio is selected, it is ensured that following table
Face corrosion is in isotropism unification；Then the distance for adjusting upper surface and liquid level reaches 5 ~ 10mm, during the course of the reaction it is anti-
The gas NOx answered, in appropriate exhausting environment（-50~-100Pa）In, a part is pumped, and a part can be redissolved in liquid
Generate HNO2Oxidation reaction is continued to participate in, when silicon chip upper surface and liquid level are closer to the distance, corrosive liquid that upper surface is contacted
Concentration can be much larger than lower surface, and lateral encroaching speed is much larger than longitudinal corrosion rate in the corrosive liquid that is contacted of upper surface, from
And reach polishing effect in silicon chip upper surface, while form suede structure in silicon chip lower surface；So as to realize matte and polishing one
Step is completed；In addition, the matte is more smooth, PERC back of the body passivation technologies are more beneficial for, increase long-wave response, so as to effectively improve electricity
Pond piece transformation efficiency.
Because above-mentioned technical proposal is used, the present invention has following advantages compared with prior art：
1st, the present invention develops a kind of preparation method of solar battery pile face, can form matte knot in the one side of silicon chip
Polishing effect is realized in another side while structure, experiment proves：The solar cell surface obtained using the method for the present invention
Reflectivity improves 5 ~ 6% compared with prior art, achieves significant polishing effect；
2nd, preparation method of the invention is simple and easy, and without mask, cost is relatively low, suitable for popularization and application.
Brief description of the drawings
Fig. 1 is the schematic diagram after the making herbs into wool of silicon chip lower surface in the embodiment of the present invention one.
Fig. 2 is the schematic diagram after silicon chip upper table mirror polish in the embodiment of the present invention one.
Embodiment
The present invention is further described with reference to embodiment.
Embodiment one：
Referring to shown in Fig. 1 ~ 2, a kind of preparation method of solar battery pile face, comprise the following steps：
(1) it is HNO chain equipment texturing slot to be made into concentration3：HF：Deionized water=4:1:2.5（Volume ratio）Corrosion is mixed
Close liquid；
(2) the corrosion mixed liquor for obtaining step (1) is with circular flow（100~180L/min）Get to making herbs into wool Bath grooves
In；
By pending silicon chip（Using the polycrystalline P156 silicon chips of conventional identical crystal orientation）Immerse in above-mentioned corrosion mixed liquor, adjust
Whole Bath grooves both sides overflow baffle, it is ensured that the difference in height of liquid level and silicon chip upper surface in Bath grooves is in 5 ~ 10mm；
(3) between the exhausting in Bath grooves being adjusted into -50 ~ -100Pa, 1.5 ~ 2.5min is corroded, by the silicon after corrosion
Piece passes through a series of cleaning and drying, you can suede structure is made on the lower surface of silicon chip, while in the upper surface of silicon chip
Form single-sided polishing.
By silicon chip upper surface obtained above（That is the shady face of cell piece）It is measured by D8 reflectance test instrument, 3
Point Weighted Average Method, it is as a result as follows：
| Sampling | Center | Corner 1 | Corner 2 | Average value |
| 1 | 31.80% | 31.10% | 32.10% | 31.67% |
| 2 | 31.50% | 31.90% | 32.00% | 31.80% |
| 3 | 31.90% | 31.40% | 32.40% | 31.90% |
| It is average | 31.73% | 31.47% | 32.17% | 31.79% |
By silicon chip lower surface obtained above（That is the smooth surface of cell piece）It is measured by D8 reflectance test instrument, 3
Point Weighted Average Method, it is as a result as follows：
| Sampling | Center | Corner 1 | Corner 2 | Average value |
| 1 | 24.50% | 24.10% | 25.10% | 24.57% |
| 2 | 24.50% | 24.90% | 24.00% | 24.47% |
| 3 | 24.30% | 24.40% | 25.00% | 24.57% |
| It is average | 24.43% | 24.47% | 24.70% | 24.53% |
Referring to shown in attached Fig. 1 and 2, as seen from the figure, the upper surface of silicon chip forms polishing effect.
Comparative example one
A kind of preparation method of crystal silicon solar energy battery single-sided polishing, comprises the following steps：
(1) it is HNO chain equipment texturing slot to be made into concentration3：HF：Deionized water=3.5：1：2.5（Volume ratio）Corrosion
Mixed liquor；
(2) the corrosion mixed liquor for obtaining step (1) is with circular flow（100~180L/min）Get to making herbs into wool Bath grooves
In；
By pending silicon chip（Using with embodiment identical polycrystalline P156 silicon chips）Immerse in above-mentioned corrosion mixed liquor, adjust
Whole Bath grooves both sides overflow baffle, it is ensured that the difference in height of liquid level and silicon chip upper surface in Bath grooves is in 20 mm；
(3) exhausting in Bath grooves is adjusted to -200Pa or so, corrodes 1.5 ~ 2.5min, the silicon chip after corrosion is passed through
Cross a series of cleaning and drying, you can suede structure is made on the lower surface of silicon chip.
Silicon chip upper surface obtained above is measured by D8 reflectance test instrument, 3 Weighted Average Methods, tied
Fruit is as follows：
| Sampling | Center | Corner 1 | Corner 2 | Average value |
| 1 | 26.20% | 25.70% | 25.10% | 25.67% |
| 2 | 25.50% | 25.10% | 25.30% | 25.30% |
| 3 | 25.30% | 25.40% | 25.10% | 25.27% |
| It is average | 25.67% | 25.40% | 25.17% | 25.41% |
By silicon chip lower surface obtained above（Smooth surface）It is measured by D8 reflectance test instrument, 3 weighted averages
Reflectivity, it is as a result as follows：
| Sampling | Center | Corner 1 | Corner 2 | Average value |
| 1 | 24.70% | 23.70% | 24.10% | 24.17% |
| 2 | 25.20% | 24.40% | 24.30% | 24.63% |
| 3 | 24.30% | 23.80% | 24.10% | 24.07% |
| It is average | 24.73% | 23.97% | 24.17% | 24.29% |
Embodiment upper surface reflectivity, which is can be seen that, from above-described embodiment and comparative example reaches 31.79%, and traditional making herbs into wool
Upper surface reflectivity afterwards only has 25.41%, and the reflectivity of embodiment is apparently higher than comparative example.In addition, after measured, embodiment
Short circuit current is higher by 0.3 mA/cm compared with the short circuit current of comparative example3, the open-circuit voltage of embodiment is high compared with the open-circuit voltage of comparative example
Go out 2mV, the transformation efficiency of embodiment is higher by 0.1 ~ 0.3% for the transformation efficiency than comparative example.
As can be seen here, technique of the invention can greatly improve silicon chip back surface reflectivity, make the back side more smooth, back surface field
Contact is more abundant, improves back surface field passivation effect to a certain degree, and adds long-wave response, also improves battery to a certain degree
Transformation efficiency.
Claims (5)
1. a kind of preparation method of solar battery pile face, it is characterised in that comprise the following steps：
(1) configuration corrosion mixed liquor：By volume by HNO3：HF：Deionized water=4:1:2.5~5:1:2.5 are mixed to get corrosion
Mixed liquor；
(2) pending silicon chip is immersed in above-mentioned corrosion mixed liquor, and make silicon chip upper surface and corrosion mixed liquor liquid level it
Between spacing control in 5 ~ 10 mm；
After corroding under negative pressure exhausting environment, you can suede structure is made on the lower surface of silicon chip；
The pressure of the negative pressure exhausting environment is -50 ~ -100Pa.
2. the preparation method of solar battery pile face according to claim 1, it is characterised in that：In the step (2)
After corroding 1.5 ~ 2.5min under negative pressure exhausting environment, suede structure is can obtain after continuing through cleaning, drying.
3. the preparation method of solar battery pile face according to claim 1, it is characterised in that：In the step (2),
While suede structure is made on the lower surface of silicon chip, single-sided polishing is formed in the upper surface of silicon chip.
4. the preparation method of solar battery pile face according to claim 1, it is characterised in that：The solar cell is
PERC solar cells.
5. the preparation method of solar battery pile face according to claim 1, it is characterised in that：The negative pressure exhausting environment
Pressure be -60 ~ -80Pa.
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| CN109360870B (en) * | 2018-11-23 | 2020-07-31 | 浙江昱辉阳光能源江苏有限公司 | Low-cost solar cell back polishing process |
| CN111261496B (en) * | 2018-11-30 | 2022-10-14 | 有研半导体硅材料股份公司 | Acid corrosion processing method of large-diameter substrate wafer suitable for single-side polishing |
| CN110034211B (en) * | 2019-04-23 | 2021-03-12 | 苏州阿特斯阳光电力科技有限公司 | Method for reducing consumption of chain type texturing chemicals |
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