CN105658343A - 电容性微机械超声换能器单元 - Google Patents

电容性微机械超声换能器单元 Download PDF

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Publication number
CN105658343A
CN105658343A CN201480048522.7A CN201480048522A CN105658343A CN 105658343 A CN105658343 A CN 105658343A CN 201480048522 A CN201480048522 A CN 201480048522A CN 105658343 A CN105658343 A CN 105658343A
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CN
China
Prior art keywords
layer
cmut
lens
unit according
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201480048522.7A
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English (en)
Chinese (zh)
Inventor
G·A·布罗克费希尔
R·E·戴维森
C·D·黑瑞克霍夫
B·马赛利斯
W·苏多尔
J·宋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
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Koninklijke Philips Electronics NV
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Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of CN105658343A publication Critical patent/CN105658343A/zh
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Gynecology & Obstetrics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
CN201480048522.7A 2013-08-30 2014-08-18 电容性微机械超声换能器单元 Pending CN105658343A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361871926P 2013-08-30 2013-08-30
US61/871,926 2013-08-30
EP13187232.7 2013-10-03
EP13187232 2013-10-03
PCT/EP2014/067521 WO2015028325A1 (en) 2013-08-30 2014-08-18 Capacitive micro-machined ultrasound transducer cell

Publications (1)

Publication Number Publication Date
CN105658343A true CN105658343A (zh) 2016-06-08

Family

ID=49274546

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480048522.7A Pending CN105658343A (zh) 2013-08-30 2014-08-18 电容性微机械超声换能器单元

Country Status (5)

Country Link
US (1) US11278932B2 (enExample)
EP (1) EP3038763A1 (enExample)
JP (1) JP6474139B2 (enExample)
CN (1) CN105658343A (enExample)
WO (1) WO2015028325A1 (enExample)

Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN106951887A (zh) * 2017-04-25 2017-07-14 太原科技大学 用于识别的微电容超声波换能器线性阵列装置
CN109124574A (zh) * 2018-06-26 2019-01-04 深圳迈瑞生物医疗电子股份有限公司 光声-超声探头、声透镜的制作方法、光声-超声成像设备
CN109640832A (zh) * 2016-08-30 2019-04-16 皇家飞利浦有限公司 具有超声换能器阵列的成像设备
CN110049728A (zh) * 2016-12-13 2019-07-23 蝴蝶网络有限公司 声透镜及其应用
CN114979931A (zh) * 2022-05-20 2022-08-30 江苏大学 一种具有聚焦功能的cmut封装结构及其制备方法
CN116078648A (zh) * 2023-03-08 2023-05-09 福州大学 一种超声波阵列板
CN116478482A (zh) * 2023-05-19 2023-07-25 深圳鲲为科技有限公司 非聚焦声透镜材料、声透镜及其制备方法、超声探头

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JP2015112326A (ja) * 2013-12-12 2015-06-22 キヤノン株式会社 プローブ、被検体情報取得装置
CN108430651B (zh) * 2015-12-18 2020-09-01 皇家飞利浦有限公司 用于超声阵列的声学透镜
US10586109B1 (en) * 2016-04-26 2020-03-10 Shooter Detection Systems, LLC Indoor gunshot detection with video analytics
US10657800B1 (en) * 2016-04-26 2020-05-19 Shooter Detection Systems, LLC Gunshot detection within an indoor environment
WO2018100015A1 (en) 2016-12-01 2018-06-07 Koninklijke Philips N.V. Cmut probe, system and method
KR102031056B1 (ko) * 2017-07-20 2019-10-15 한국과학기술연구원 사용자 맞춤형 음향렌즈를 이용하는 집속 초음파 자극 장치
CN109433571B (zh) * 2018-09-25 2020-10-20 中国科学院电工研究所 柔性光致超声薄膜换能器及其制备方法
AU2019355553B2 (en) 2018-10-03 2025-07-03 Otonexus Medical Technologies, Inc. Methods and devices for membrane characterization with ultrasound and optical illumination
US20200256966A1 (en) * 2019-02-08 2020-08-13 Bae Systems Information And Electronic Systems Integration Inc. Thermally conductive and antifouling boot for marine applications
KR102357266B1 (ko) * 2019-03-13 2022-02-03 (주)무티 마이크로머시닝된 초음파 트랜스듀서 어레이를 포함하는 초음파 테라피 장치

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US6831876B1 (en) * 2003-07-09 2004-12-14 Goodrich Corporation Acoustic window
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
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CN102170938A (zh) * 2008-09-30 2011-08-31 皇家飞利浦电子股份有限公司 用于超声治疗处置的系统和方法
CN102770078A (zh) * 2010-02-26 2012-11-07 株式会社日立医疗器械 超声波探针和使用超声波探针的超声波摄像装置

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US5834687A (en) * 1995-06-07 1998-11-10 Acuson Corporation Coupling of acoustic window and lens for medical ultrasound transducers
US6831876B1 (en) * 2003-07-09 2004-12-14 Goodrich Corporation Acoustic window
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
US20050165312A1 (en) * 2004-01-26 2005-07-28 Knowles Heather B. Acoustic window for ultrasound probes
CN1942144A (zh) * 2004-04-14 2007-04-04 皇家飞利浦电子股份有限公司 具有宽视场特征的超声成像探头
CN1820712A (zh) * 2005-01-19 2006-08-23 美国西门子医疗解决公司 利用制冷系统来去除超声换能器中的废热的方法
WO2006121765A2 (en) * 2005-05-09 2006-11-16 Salutron, Inc. An ultrasonic monitor with a biocompatible oil based transmission medium
CN101506871A (zh) * 2006-08-23 2009-08-12 皇家飞利浦电子股份有限公司 用于可变地折射超声和/或光的系统
CN102170938A (zh) * 2008-09-30 2011-08-31 皇家飞利浦电子股份有限公司 用于超声治疗处置的系统和方法
CN102770078A (zh) * 2010-02-26 2012-11-07 株式会社日立医疗器械 超声波探针和使用超声波探针的超声波摄像装置

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109640832A (zh) * 2016-08-30 2019-04-16 皇家飞利浦有限公司 具有超声换能器阵列的成像设备
CN110049728A (zh) * 2016-12-13 2019-07-23 蝴蝶网络有限公司 声透镜及其应用
US11475870B2 (en) 2016-12-13 2022-10-18 Bfly Operations, Inc. Acoustic lens and applications thereof
CN106951887A (zh) * 2017-04-25 2017-07-14 太原科技大学 用于识别的微电容超声波换能器线性阵列装置
CN106951887B (zh) * 2017-04-25 2020-07-03 太原科技大学 用于识别的微电容超声波换能器线性阵列装置
CN109124574A (zh) * 2018-06-26 2019-01-04 深圳迈瑞生物医疗电子股份有限公司 光声-超声探头、声透镜的制作方法、光声-超声成像设备
CN109124574B (zh) * 2018-06-26 2021-10-08 深圳迈瑞生物医疗电子股份有限公司 光声-超声探头、声透镜的制作方法、光声-超声成像设备
CN114979931A (zh) * 2022-05-20 2022-08-30 江苏大学 一种具有聚焦功能的cmut封装结构及其制备方法
CN116078648A (zh) * 2023-03-08 2023-05-09 福州大学 一种超声波阵列板
CN116078648B (zh) * 2023-03-08 2024-04-30 福州大学 一种超声波阵列板
CN116478482A (zh) * 2023-05-19 2023-07-25 深圳鲲为科技有限公司 非聚焦声透镜材料、声透镜及其制备方法、超声探头

Also Published As

Publication number Publication date
US20160203809A1 (en) 2016-07-14
JP2016529835A (ja) 2016-09-23
WO2015028325A1 (en) 2015-03-05
JP6474139B2 (ja) 2019-02-27
EP3038763A1 (en) 2016-07-06
US11278932B2 (en) 2022-03-22

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