JP6474139B2 - 容量性マイクロマシン超音波トランスデューサセル - Google Patents

容量性マイクロマシン超音波トランスデューサセル Download PDF

Info

Publication number
JP6474139B2
JP6474139B2 JP2016537216A JP2016537216A JP6474139B2 JP 6474139 B2 JP6474139 B2 JP 6474139B2 JP 2016537216 A JP2016537216 A JP 2016537216A JP 2016537216 A JP2016537216 A JP 2016537216A JP 6474139 B2 JP6474139 B2 JP 6474139B2
Authority
JP
Japan
Prior art keywords
layer
acoustic
cmut
cell
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2016537216A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016529835A (ja
JP2016529835A5 (enExample
Inventor
ジョージ アンソニー ブロック‐フィッシャー
ジョージ アンソニー ブロック‐フィッシャー
リチャード エドワード デイビッドセン
リチャード エドワード デイビッドセン
カール ディーン ヘリックホフ
カール ディーン ヘリックホフ
バウト マルセリス
バウト マルセリス
ウォイテック スドル
ウォイテック スドル
ジュンホ ソン
ジュンホ ソン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Publication of JP2016529835A publication Critical patent/JP2016529835A/ja
Publication of JP2016529835A5 publication Critical patent/JP2016529835A5/ja
Application granted granted Critical
Publication of JP6474139B2 publication Critical patent/JP6474139B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/002—Devices for damping, suppressing, obstructing or conducting sound in acoustic devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • Mechanical Engineering (AREA)
  • Pathology (AREA)
  • Medical Informatics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Gynecology & Obstetrics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Transducers For Ultrasonic Waves (AREA)
JP2016537216A 2013-08-30 2014-08-18 容量性マイクロマシン超音波トランスデューサセル Expired - Fee Related JP6474139B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361871926P 2013-08-30 2013-08-30
US61/871,926 2013-08-30
EP13187232.7 2013-10-03
EP13187232 2013-10-03
PCT/EP2014/067521 WO2015028325A1 (en) 2013-08-30 2014-08-18 Capacitive micro-machined ultrasound transducer cell

Publications (3)

Publication Number Publication Date
JP2016529835A JP2016529835A (ja) 2016-09-23
JP2016529835A5 JP2016529835A5 (enExample) 2017-09-14
JP6474139B2 true JP6474139B2 (ja) 2019-02-27

Family

ID=49274546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016537216A Expired - Fee Related JP6474139B2 (ja) 2013-08-30 2014-08-18 容量性マイクロマシン超音波トランスデューサセル

Country Status (5)

Country Link
US (1) US11278932B2 (enExample)
EP (1) EP3038763A1 (enExample)
JP (1) JP6474139B2 (enExample)
CN (1) CN105658343A (enExample)
WO (1) WO2015028325A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015112326A (ja) * 2013-12-12 2015-06-22 キヤノン株式会社 プローブ、被検体情報取得装置
CN108430651B (zh) * 2015-12-18 2020-09-01 皇家飞利浦有限公司 用于超声阵列的声学透镜
US10586109B1 (en) * 2016-04-26 2020-03-10 Shooter Detection Systems, LLC Indoor gunshot detection with video analytics
US10657800B1 (en) * 2016-04-26 2020-05-19 Shooter Detection Systems, LLC Gunshot detection within an indoor environment
WO2018041658A2 (en) * 2016-08-30 2018-03-08 Koninklijke Philips N.V. Imaging device with ultrasound transducer array
WO2018100015A1 (en) 2016-12-01 2018-06-07 Koninklijke Philips N.V. Cmut probe, system and method
AU2017376276A1 (en) * 2016-12-13 2019-05-23 Butterfly Network, Inc. Acoustic lens and applications thereof
CN106951887B (zh) * 2017-04-25 2020-07-03 太原科技大学 用于识别的微电容超声波换能器线性阵列装置
KR102031056B1 (ko) * 2017-07-20 2019-10-15 한국과학기술연구원 사용자 맞춤형 음향렌즈를 이용하는 집속 초음파 자극 장치
CN109124574B (zh) * 2018-06-26 2021-10-08 深圳迈瑞生物医疗电子股份有限公司 光声-超声探头、声透镜的制作方法、光声-超声成像设备
CN109433571B (zh) * 2018-09-25 2020-10-20 中国科学院电工研究所 柔性光致超声薄膜换能器及其制备方法
AU2019355553B2 (en) 2018-10-03 2025-07-03 Otonexus Medical Technologies, Inc. Methods and devices for membrane characterization with ultrasound and optical illumination
US20200256966A1 (en) * 2019-02-08 2020-08-13 Bae Systems Information And Electronic Systems Integration Inc. Thermally conductive and antifouling boot for marine applications
KR102357266B1 (ko) * 2019-03-13 2022-02-03 (주)무티 마이크로머시닝된 초음파 트랜스듀서 어레이를 포함하는 초음파 테라피 장치
CN114979931B (zh) * 2022-05-20 2025-12-05 上海商稀科技有限公司 一种具有聚焦功能的cmut封装结构及其制备方法
CN116078648B (zh) * 2023-03-08 2024-04-30 福州大学 一种超声波阵列板
CN116478482A (zh) * 2023-05-19 2023-07-25 深圳鲲为科技有限公司 非聚焦声透镜材料、声透镜及其制备方法、超声探头

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03188830A (ja) 1989-12-20 1991-08-16 Hitachi Medical Corp 核磁気共鳴イメージング装置
US5396207A (en) 1994-08-05 1995-03-07 General Electric Company On-shoulder MRI magnet for human brain imaging
JPH0884716A (ja) 1994-09-16 1996-04-02 Toshiba Corp 勾配磁場コイル
US5488957A (en) * 1994-11-21 1996-02-06 General Electric Company System and method for promoting adhesion between lens and matching layer of ultrasonic transducer
US5834687A (en) 1995-06-07 1998-11-10 Acuson Corporation Coupling of acoustic window and lens for medical ultrasound transducers
DE60138247D1 (de) * 2000-07-13 2009-05-20 Panasonic Corp Akustische Linse und zugehöriges Herstellungsverfahren
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
JP4088554B2 (ja) 2003-05-13 2008-05-21 三菱電機株式会社 磁気共鳴画像診断用の電磁石装置
US6831876B1 (en) * 2003-07-09 2004-12-14 Goodrich Corporation Acoustic window
US20050075572A1 (en) * 2003-10-01 2005-04-07 Mills David M. Focusing micromachined ultrasonic transducer arrays and related methods of manufacture
US7285897B2 (en) * 2003-12-31 2007-10-23 General Electric Company Curved micromachined ultrasonic transducer arrays and related methods of manufacture
US20050165312A1 (en) 2004-01-26 2005-07-28 Knowles Heather B. Acoustic window for ultrasound probes
CN1942144A (zh) * 2004-04-14 2007-04-04 皇家飞利浦电子股份有限公司 具有宽视场特征的超声成像探头
JP4523328B2 (ja) * 2004-04-28 2010-08-11 日本電波工業株式会社 超音波探触子
US20060173344A1 (en) 2005-01-19 2006-08-03 Siemens Medical Solutions Usa, Inc. Method for using a refrigeration system to remove waste heat from an ultrasound transducer
US7815575B2 (en) * 2005-05-09 2010-10-19 Salutron, Inc. Ultrasonic monitor with a biocompatible oil based transmission medium
JP2009500061A (ja) * 2005-06-29 2009-01-08 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 超音波振動子における最適化された温度測定
JP5064721B2 (ja) 2006-05-15 2012-10-31 株式会社日立メディコ 磁気共鳴イメージング装置
EP2057623A2 (en) * 2006-08-23 2009-05-13 Koninklijke Philips Electronics N.V. System for variably refracting ultrasound and/or light
US7888847B2 (en) 2006-10-24 2011-02-15 Dennis Raymond Dietz Apodizing ultrasonic lens
WO2008135896A1 (en) 2007-05-03 2008-11-13 Koninklijke Philips Electronics N.V. Methods and apparatuses of aperture control and multiplexing with adjustable fluid lenses
WO2010097729A1 (en) * 2009-02-27 2010-09-02 Koninklijke Philips Electronics, N.V. Pre-collapsed cmut with mechanical collapse retention
JP2009213785A (ja) 2008-03-12 2009-09-24 Olympus Corp 超音波プローブ
JP2012504011A (ja) 2008-09-30 2012-02-16 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 超音波療法治療のためのシステム及び方法
JPWO2011105269A1 (ja) 2010-02-26 2013-06-20 株式会社日立メディコ 超音波探触子とそれを用いた超音波撮像装置
US20130109950A1 (en) * 2011-11-02 2013-05-02 Seno Medical Instruments, Inc. Handheld optoacoustic probe
RU2599404C2 (ru) * 2011-09-26 2016-10-10 Конинклейке Филипс Н.В. Ультразвуковой датчик с акустической линзой
RU2609917C2 (ru) * 2011-11-17 2017-02-07 Конинклейке Филипс Н.В. Предварительно прижатая ячейка емкостного преобразователя, получаемого путем микрообработки, с прижатой областью кольцевой формы
US9221077B2 (en) * 2012-05-09 2015-12-29 Kolo Technologies, Inc. CMUT assembly with acoustic window
WO2014005155A1 (en) * 2012-06-30 2014-01-03 Cibiem, Inc. Carotid body ablation via directed energy
US9601103B2 (en) * 2012-10-19 2017-03-21 The Regents Of The University Of Michigan Methods and devices for generating high-amplitude and high-frequency focused ultrasound with light-absorbing materials
US9035532B2 (en) * 2012-11-02 2015-05-19 University Of Windsor Ultrasonic sensor microarray and method of manufacturing same
EP2783758A1 (en) * 2013-03-28 2014-10-01 Samsung Medison Co., Ltd. Ultrasonic Probe and Manufacturing Method Thereof

Also Published As

Publication number Publication date
US20160203809A1 (en) 2016-07-14
CN105658343A (zh) 2016-06-08
JP2016529835A (ja) 2016-09-23
WO2015028325A1 (en) 2015-03-05
EP3038763A1 (en) 2016-07-06
US11278932B2 (en) 2022-03-22

Similar Documents

Publication Publication Date Title
JP6474139B2 (ja) 容量性マイクロマシン超音波トランスデューサセル
JP5961246B2 (ja) 基板に対して抑制された音響結合を持つ超音波ｃｍｕｔ
CN102333485B (zh) 具有机械塌陷保持的预塌陷cmut
US8617078B2 (en) Ultrasonic transducer and ultrasonic diagnostic device using same
Wang et al. A piezoelectric micromachined ultrasonic transducer using piston-like membrane motion
WO2008056643A1 (fr) Sonde ultrasonore et dispositif ultrasonographique utilisant celle-ci
KR20140005780A (ko) 정전용량형 트랜스듀서, 정전용량형 트랜스듀서 제조 방법 및 피검체 정보취득장치
US8727994B2 (en) Cell and channel of ultrasonic transducer, and ultrasonic transducer including the same
CN107405649B (zh) 一种包括声学窗口层的cmut阵列
JP2019504547A (ja) 超音波アレイのための音響レンズ
CN108348958B (zh) 超声阵列的声窗层
CN107405648B (zh) 一种包括声学窗口层的cmut阵列
JP2008099036A (ja) 超音波トランスデューサ、超音波探触子及び超音波診断装置
JP2018520547A (ja) 金属性保護構造を有する超音波トランスデューサのためのインピーダンス整合層
CN106659463A (zh) 声透镜和超声换能器探头
JP2023504383A (ja) グラフェン変換器
CN109069107B (zh) 超声设备接触
JP2013175847A (ja) 振動検出装置
JP7127554B2 (ja) 超音波プローブ、及び超音波診断装置
JP4519330B2 (ja) 超音波探触子
WO2007086180A1 (ja) 超音波探触子
JP2008119318A (ja) 超音波探触子及び超音波診断装置
US7923893B2 (en) 3-1 mode capacitive membrane ultrasound transducer
US20230129012A1 (en) Ultrasound systems and devices with improved acoustic properties

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170801

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20170801

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20180312

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180315

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20180612

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180904

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190124

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190125

R150 Certificate of patent or registration of utility model

Ref document number: 6474139

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees