CN105590816A - Cold-cathode large-power electron beam gun - Google Patents
Cold-cathode large-power electron beam gun Download PDFInfo
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- CN105590816A CN105590816A CN201610074263.6A CN201610074263A CN105590816A CN 105590816 A CN105590816 A CN 105590816A CN 201610074263 A CN201610074263 A CN 201610074263A CN 105590816 A CN105590816 A CN 105590816A
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- water
- cooled
- line pipe
- anode
- cold cathode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
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Abstract
The invention discloses a cold-cathode large-power electron beam gun which is characterized in that the cold-cathode large-power electron beam gun comprises an electrode access assembly, a gas ionization assembly, an anode gate hole tube and a beam deflection guiding assembly enabling deflection of emitted electron beams, which are successively arranged from top to bottom. The electrode access assembly is fixed with the gas ionization assembly in a sealed manner through an insulating sleeve. The gas ionization assembly, the anode gate hole tube and the beam deflection guiding assembly are successively fixed in the sealed manner. The electrode access assembly, the gas ionization assembly, the anode gate hole tube and the beam deflection guiding assembly are respectively provided with a water cooling mechanism. The cold-cathode large-power electron beam gun has the advantages that the beam deflection guiding assembly enabling deflection of the emitted electron beams are arranged, the emitted electron beams are deflected through deflection coils in a working process, the interference and influences of heating material heat radiation on a cold cathode and a gas ionization chamber are fundamentally avoided, accident discharging of micro-particles such as splashes, smoke and dust is eliminated, and the work stability of the cold-cathode electron beam gun is substantially improved.
Description
Technical field
The present invention relates to the generating means of electron beam, relate in particular to a kind of cold cathode great-power electronic bundle rifle.
Background technology
Electron beam gun is a kind of high energy thermal source, it is the high end advanced technology that is related to state aviation space flight, national defence, tip materials manufacture etc., there is great strategic value, there is original advantage in fields such as the heating of high temperature resistant and rare your material, evaporation, welding, melting, purifications.
At present electron beam gun on the market mainly contains two kinds, hot-cathode electric bundle rifle and cold cathode electron beam rifle, hot-cathode electric bundle rifle adopts tungsten filament structure, device in the course of work in electron beam gun need to be heated to more than 2000 DEG C mostly, and rifle chamber must maintain high vacuum environment, its fault is many, energy consumption is high, manufacture and working service cost high; And cold cathode electron beam rifle adopts straight barrel type structure, electronics is direct under the acceleration of high voltage electric field after being produced by negative electrode, line focus scanning directive material, due to the directly positive target of heat radiation of material high temperature generation, cause cathode surface temperature to raise, electron emission is unstable, the splash of atmosphere and generation very easily affects greatly rifle body simultaneously, cause job insecurity, when serious, even can damage negative electrode, and the working vacuum scope of current cold cathode electron beam rifle is also narrower, has limited the application of cold cathode electron beam rifle.
Summary of the invention
Technical problem to be solved by this invention is to provide one and can avoids material heat radiation target to exert an influence, and greatly improves electron beam gun job stability, and the wider cold cathode great-power electronic bundle rifle of application.
The present invention solves the problems of the technologies described above adopted technical scheme: a kind of cold cathode great-power electronic bundle rifle, comprise the electrode access assembly setting gradually from top to bottom, gas ionization assembly, anode grid hole pipe and the beam bending arrangement for guiding that outgoing electron line is deflected, described electrode access assembly is fixed by insulation sleeve and described gas ionization component sealing, described gas ionization assembly, described anode grid hole pipe and described beam bending arrangement for guiding seal fixing successively, described electrode access assembly, described gas ionization assembly, on described anode grid hole pipe and described beam bending arrangement for guiding, be provided with magnetism servo-electric motor water-cooling.
Described electrode access assembly comprises electrode Connection Block and high-field electrode joint, described high-field electrode joint is fixedly connected on the upper end of described electrode Connection Block, described insulation sleeve is fixedly connected with described electrode Connection Block, magnetism servo-electric motor water-cooling on described electrode access assembly comprises the first water-cooled import and the outlet of the first water-cooled that are fixedly installed on described electrode Connection Block, in described electrode Connection Block, be provided with axial water-cooled through hole, the first described water-cooled import and the first described water-cooled outlet are all connected with described water-cooled through hole.
Described gas ionization assembly comprises cold cathode and shell-like anode, in described shell-like anode, be provided with gas ionization chamber, described cold cathode is arranged in described gas ionization chamber and coaxially arranges with described shell-like anode, described cold cathode sealing is fixed on the lower end of described electrode Connection Block, the lower surface of described cold cathode is the arc of indent, the upper end sealing of described insulation sleeve and described shell-like anode is fixing, the lower end of described shell-like anode and described anode grid hole pipe co-axial seal are fixed, on described shell-like anode, be fixedly installed the working gas access port being connected with described gas ionization chamber, magnetism servo-electric motor water-cooling on described gas ionization assembly comprises the second water-cooled import and the outlet of the second water-cooled that are fixedly installed on described shell-like anode, in described shell-like anode, be provided with the first water-cooled annular groove, the second described water-cooled import and the second described water-cooled outlet are all connected with the first described water-cooled annular groove.
Described cold cathode is arranged with negative electrode sheath outward, can reduce the electric discharge between cold cathode and shell-like anode inwall, improves the stability of cold cathode electron beam rifle work.
Described working gas is hydrogen or hydrogen and oxygen mixture, and the quality accounting of described hydrogen is more than or equal to 90%, and this working gas is supplied by the independent air distribution system in outside.
On described shell-like anode, be fixedly installed the vacuum measurement interface being connected with described gas ionization chamber, described vacuum measurement interface is connected with vacuum measuring gauge, and the vacuum ranges of controlling the work atmosphere of electron beam gun is 0.0001Pa～10Pa.
Described shell-like anode be shaped as tubular.
Magnetism servo-electric motor water-cooling on described anode grid hole pipe comprises the 3rd water-cooled import and the outlet of the 3rd water-cooled that are fixedly installed on described anode grid hole pipe, in described anode grid hole pipe, be provided with the second water-cooled annular groove, the 3rd described water-cooled import and the 3rd described water-cooled outlet are all connected with the second described water-cooled annular groove.
Described beam bending arrangement for guiding comprises focus deflection part and sweep test, described focus deflection part comprises epimere line pipe, upper focus coil and deflection coil, described anode grid hole pipe is fixed with described epimere line pipe co-axial seal, described upper focus coil and described deflection coil respectively fixed cover are located on described epimere line pipe, described sweep test comprises hypomere line pipe and scanning coil, described hypomere line pipe is fixedly connected with described epimere line pipe, the angle of the central axis of the central axis of described epimere line pipe and described hypomere line pipe is 5～30 °, the junction of the lower end of the epimere line pipe described in described deflection coil is positioned at and described hypomere line pipe, the angle angle of the central axis of the central axis of the epimere line pipe described in the deflection angle of described deflection coil equals and described hypomere line pipe, described scanning coil fixed cover is located on described hypomere line pipe, magnetism servo-electric motor water-cooling on described beam bending arrangement for guiding comprises the 4th water-cooled import and the outlet of the 4th water-cooled that are fixedly installed on described epimere line pipe or described hypomere line pipe, in described epimere line pipe and described hypomere line pipe, be provided with the 3rd water-cooled annular groove, the 4th described water-cooled import and the 4th described water-cooled outlet are connected with the 3rd described water-cooled annular groove.
On described hypomere line pipe, fixed cover is provided with lower focus coil, and described lower focus coil is positioned at the top of described scanning coil.
Compared with prior art, advantage of the present invention is the beam bending arrangement for guiding that outgoing electron line is deflected owing to being provided with, by deflection coil, outgoing electron line is deflected in the course of the work, fundamentally avoid adding interference and the impact of thermal material heat radiation on cold cathode and gas ionization chamber, eliminate splash, flue gas, the accidental discharge of the fine particles such as dust, greatly increase the job stability of cold cathode electron beam rifle, and because the central axis of epimere line pipe and the central axis of hypomere line pipe exist angle, extend to a certain extent the distance of electronic beam current in rifle, increase the independence of environment in rifle, again owing to being fixedly installed the vacuum measurement interface being connected with gas ionization chamber on shell-like anode, vacuum measurement interface is connected with vacuum measuring gauge, make the vacuum ranges of the work atmosphere of electron beam gun can reach 0.0001Pa～10Pa, and can control by controlling the flow of working gas the watt level of electron beam gun, make this cold cathode electron beam rifle that the output of stable, the continuous wave high power of 0～500kW and applied range can be provided, in addition little, the low cost of manufacture of whole cold cathode electron beam rifle compact conformation, volume.
Brief description of the drawings
Fig. 1 is the structural representation of the embodiment of the present invention one;
Fig. 2 is the structural representation of the embodiment of the present invention two.
Detailed description of the invention
Below in conjunction with accompanying drawing, embodiment is described in further detail the present invention.
Embodiment mono-: as shown in the figure, a kind of cold cathode great-power electronic bundle rifle, comprise the electrode access assembly setting gradually from top to bottom, gas ionization assembly, anode grid hole pipe 1 and the beam bending arrangement for guiding that outgoing electron line is deflected, electrode access assembly comprises electrode Connection Block 2 and high-field electrode joint 3, high-field electrode joint 3 is fixedly connected on the upper end of electrode Connection Block 2, in electrode Connection Block 2, be provided with axial water-cooled through hole 21, on electrode Connection Block 2, be fixedly installed the first water-cooled import 22 and the first water-cooled outlet 23 that are connected with water-cooled through hole 21, on electrode Connection Block 2, be fixedly installed insulation sleeve 24, gas ionization assembly comprises cold cathode 4 and tubular anode 5, in tubular anode 5, be provided with gas ionization chamber 51, cold cathode 4 is arranged in gas ionization chamber 51 and coaxially arranges with tubular anode 5, cold cathode 4 sealings are fixed on the lower end of electrode Connection Block 2, the lower surface of cold cathode 4 is the arc of indent, the outer negative electrode sheath 41 that is arranged with of cold cathode 4, insulation sleeve 24 is fixing with the upper end sealing of tubular anode 5, the lower end of tubular anode 5 and anode grid hole are managed 1 co-axial seal and are fixed, on tubular anode 5, be fixedly installed the working gas access port 52 and the vacuum measurement interface 53 that are connected with gas ionization chamber 51 respectively, working gas is hydrogen or hydrogen and oxygen mixture, the quality accounting of hydrogen is more than or equal to 90%, vacuum measurement interface 53 is connected with vacuum measuring gauge (not shown), and the vacuum ranges of controlling the work atmosphere of electron beam gun is 0.0001Pa～10Pa, in tubular anode 5, be provided with the first water-cooled annular groove 54, on tubular anode 5, be fixedly installed the second water-cooled import 55 and the second water-cooled outlet 56 that are connected with the first water-cooled annular groove 54, in anode grid hole pipe 1, be provided with the second water-cooled annular groove 11, on anode grid hole pipe 1, be fixedly installed the 3rd water-cooled import 12 and the 3rd water-cooled outlet 13 that are connected with the second water-cooled annular groove 11,
Beam bending arrangement for guiding comprises focus deflection part and sweep test, focus deflection part comprises epimere line pipe 6, upper focus coil 61 and deflection coil 62, anode grid hole pipe 1 is fixed with epimere line pipe 6 co-axial seals, upper focus coil 61 and deflection coil 62 respectively fixed cover are located on epimere line pipe 6, sweep test comprises hypomere line pipe 7, lower focus coil 71 and scanning coil 72, hypomere line pipe 7 is connected with epimere line pipe 6 one, the angle α of the central axis of the central axis of epimere line pipe 6 and hypomere line pipe 7 is 15 °, deflection coil 62 is positioned at the lower end of epimere line pipe 6 and the junction of hypomere line pipe 7, the deflection angle of deflection coil 62 is 15 °, lower focus coil 71 and scanning coil 72 respectively fixed cover are located on hypomere line pipe 7, lower focus coil 71 is positioned at the top of scanning coil 72, in epimere line pipe 6 and hypomere line pipe 7, be provided with the 3rd water-cooled annular groove 8, on epimere line pipe 6 or hypomere line pipe 7, be fixedly installed the 4th water-cooled import 81 and the 4th water-cooled outlet 82 that are connected with the 3rd water-cooled annular groove 8.
Embodiment bis-: as shown in the figure, a kind of cold cathode great-power electronic bundle rifle, comprise the electrode access assembly setting gradually from top to bottom, gas ionization assembly, anode grid hole pipe 1 and the beam bending arrangement for guiding that outgoing electron line is deflected, electrode access assembly comprises electrode Connection Block 2 and high-field electrode joint 3, high-field electrode joint 3 is fixedly connected on the upper end of electrode Connection Block 2, in electrode Connection Block 2, be provided with axial water-cooled through hole 21, on electrode Connection Block 2, be fixedly installed the first water-cooled import 22 and the first water-cooled outlet 23 that are connected with water-cooled through hole 21, on electrode Connection Block 2, be fixedly installed insulation sleeve 24, gas ionization assembly comprises cold cathode 4 and tubular anode 5, in tubular anode 5, be provided with gas ionization chamber 51, cold cathode 4 is arranged in gas ionization chamber 51 and coaxially arranges with tubular anode 5, cold cathode 4 sealings are fixed on the lower end of electrode Connection Block 2, the lower surface of cold cathode 4 is the arc of indent, the outer negative electrode sheath 41 that is arranged with of cold cathode 4, insulation sleeve 24 is fixing with the upper end sealing of tubular anode 5, the lower end of tubular anode 5 and anode grid hole are managed 1 co-axial seal and are fixed, on tubular anode 5, be fixedly installed the working gas access port 52 being connected with gas ionization chamber 51 respectively, working gas is hydrogen or hydrogen and oxygen mixture, the quality accounting of hydrogen is more than or equal to 90%, in tubular anode 5, be provided with the first water-cooled annular groove 54, on tubular anode 5, be fixedly installed the second water-cooled import 55 and the second water-cooled outlet 56 that are connected with the first water-cooled annular groove 54, in anode grid hole pipe 1, be provided with the second water-cooled annular groove 11, on anode grid hole pipe 1, be fixedly installed the 3rd water-cooled import 12 and the 3rd water-cooled outlet 13 that are connected with the second water-cooled annular groove 11,
Beam bending arrangement for guiding comprises focus deflection part and sweep test, focus deflection part comprises epimere line pipe 6, upper focus coil 61 and deflection coil 62, anode grid hole pipe 1 is fixed with epimere line pipe 6 co-axial seals, upper focus coil 61 and deflection coil 62 respectively fixed cover are located on epimere line pipe 6, sweep test comprises hypomere line pipe 7 and scanning coil 72, hypomere line pipe 7 is connected with epimere line pipe 6 one, the angle α of the central axis of the central axis of epimere line pipe 6 and hypomere line pipe 7 is 15 °, deflection coil 62 is positioned at the lower end of epimere line pipe 6 and the junction of hypomere line pipe 7, the deflection angle of deflection coil 62 is 15 °, scanning coil 72 fixed covers are located on hypomere line pipe 7, in epimere line pipe 6 and hypomere line pipe 7, be provided with the 3rd water-cooled annular groove 8, on epimere line pipe 6 or hypomere line pipe 7, be fixedly installed the 4th water-cooled import 81 and the 4th water-cooled outlet 82 that are connected with the 3rd water-cooled annular groove 8.
Claims (10)
1. a cold cathode great-power electronic bundle rifle, it is characterized in that comprising the electrode access assembly setting gradually from top to bottom, gas ionization assembly, anode grid hole pipe and the beam bending arrangement for guiding that outgoing electron line is deflected, described electrode access assembly is fixed by insulation sleeve and described gas ionization component sealing, described gas ionization assembly, described anode grid hole pipe and described beam bending arrangement for guiding seal fixing successively, described electrode access assembly, described gas ionization assembly, on described anode grid hole pipe and described beam bending arrangement for guiding, be provided with magnetism servo-electric motor water-cooling.
2. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 1, it is characterized in that described electrode access assembly comprises electrode Connection Block and high-field electrode joint, described high-field electrode joint is fixedly connected on the upper end of described electrode Connection Block, described insulation sleeve is fixedly connected with described electrode Connection Block, magnetism servo-electric motor water-cooling on described electrode access assembly comprises the first water-cooled import and the outlet of the first water-cooled that are fixedly installed on described electrode Connection Block, in described electrode Connection Block, be provided with axial water-cooled through hole, the first described water-cooled import and the first described water-cooled outlet are all connected with described water-cooled through hole.
3. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 2, it is characterized in that described gas ionization assembly comprises cold cathode and shell-like anode, in described shell-like anode, be provided with gas ionization chamber, described cold cathode is arranged in described gas ionization chamber and coaxially arranges with described shell-like anode, described cold cathode sealing is fixed on the lower end of described electrode Connection Block, the lower surface of described cold cathode is the arc of indent, the upper end sealing of described insulation sleeve and described shell-like anode is fixing, the lower end of described shell-like anode and described anode grid hole pipe co-axial seal are fixed, on described shell-like anode, be fixedly installed the working gas access port being connected with described gas ionization chamber, magnetism servo-electric motor water-cooling on described gas ionization assembly comprises the second water-cooled import and the outlet of the second water-cooled that are fixedly installed on described shell-like anode, in described shell-like anode, be provided with the first water-cooled annular groove, the second described water-cooled import and the second described water-cooled outlet are all connected with the first described water-cooled annular groove.
4. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 3, is characterized in that described cold cathode is arranged with negative electrode sheath outward.
5. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 3, is characterized in that described working gas is hydrogen or hydrogen and oxygen mixture, and the quality accounting of described hydrogen is more than or equal to 90%.
6. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 3, it is characterized in that being fixedly installed the vacuum measurement interface being connected with described gas ionization chamber on described shell-like anode, described vacuum measurement interface is connected with vacuum measuring gauge, and the vacuum ranges of controlling the work atmosphere of electron beam gun is 0.0001Pa～10Pa.
7. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 3, is characterized in that the tubular that is shaped as of described shell-like anode.
8. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 1, it is characterized in that the magnetism servo-electric motor water-cooling on described anode grid hole pipe comprises the 3rd water-cooled import and the outlet of the 3rd water-cooled that are fixedly installed on described anode grid hole pipe, in described anode grid hole pipe, be provided with the second water-cooled annular groove, the 3rd described water-cooled import and the 3rd described water-cooled outlet are all connected with the second described water-cooled annular groove.
9. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 1, it is characterized in that described beam bending arrangement for guiding comprises focus deflection part and sweep test, described focus deflection part comprises epimere line pipe, upper focus coil and deflection coil, described anode grid hole pipe is fixed with described epimere line pipe co-axial seal, described upper focus coil and described deflection coil respectively fixed cover are located on described epimere line pipe, described sweep test comprises hypomere line pipe and scanning coil, described hypomere line pipe is fixedly connected with described epimere line pipe, the angle of the central axis of the central axis of described epimere line pipe and described hypomere line pipe is 5～30 °, the junction of the lower end of the epimere line pipe described in described deflection coil is positioned at and described hypomere line pipe, the angle angle of the central axis of the central axis of the epimere line pipe described in the deflection angle of described deflection coil equals and described hypomere line pipe, described scanning coil fixed cover is located on described hypomere line pipe, magnetism servo-electric motor water-cooling on described beam bending arrangement for guiding comprises the 4th water-cooled import and the outlet of the 4th water-cooled that are fixedly installed on described epimere line pipe or described hypomere line pipe, in described epimere line pipe and described hypomere line pipe, be provided with the 3rd water-cooled annular groove, the 4th described water-cooled import and the 4th described water-cooled outlet are connected with the 3rd described water-cooled annular groove.
10. a kind of cold cathode great-power electronic bundle rifle as claimed in claim 9, is characterized in that on described hypomere line pipe, fixed cover is provided with lower focus coil, and described lower focus coil is positioned at the top of described scanning coil.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610074263.6A CN105590816B (en) | 2016-02-02 | 2016-02-02 | A kind of cold cathode great-power electronic beam rifle |
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| CN201610074263.6A CN105590816B (en) | 2016-02-02 | 2016-02-02 | A kind of cold cathode great-power electronic beam rifle |
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| CN105590816B CN105590816B (en) | 2018-01-19 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106683957A (en) * | 2017-01-10 | 2017-05-17 | 王殿儒 | Gas discharging electronic gun of panel type electronic beam and strip continuous coating production line |
| CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
| CN107432992A (en) * | 2016-05-26 | 2017-12-05 | 和鑫生技开发股份有限公司 | Proximal treatment apparatus and its radioactive source |
| CN107622932A (en) * | 2017-09-14 | 2018-01-23 | 宁波鑫利成真空科技有限公司 | A kind of electron beams rifle deflected joint and its application method |
| EP3333878A1 (en) * | 2016-12-09 | 2018-06-13 | Sia "Kepp Eu" | Gas-discharge electron gun |
| CN110797242A (en) * | 2019-11-04 | 2020-02-14 | 中国航空制造技术研究院 | Cold cathode electron gun device for coating film |
| CN110838427A (en) * | 2019-11-20 | 2020-02-25 | 中国航空制造技术研究院 | Electronic gun device for fuse wire additive manufacturing |
| CN114334587A (en) * | 2021-12-31 | 2022-04-12 | 广州赛隆增材制造有限责任公司 | Electron gun |
| CN114801173A (en) * | 2022-04-27 | 2022-07-29 | 广州赛隆增材制造有限责任公司 | 3D prints electron gun device and 3D printing apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107432992A (en) * | 2016-05-26 | 2017-12-05 | 和鑫生技开发股份有限公司 | Proximal treatment apparatus and its radioactive source |
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| CN107622932A (en) * | 2017-09-14 | 2018-01-23 | 宁波鑫利成真空科技有限公司 | A kind of electron beams rifle deflected joint and its application method |
| CN110797242A (en) * | 2019-11-04 | 2020-02-14 | 中国航空制造技术研究院 | Cold cathode electron gun device for coating film |
| CN110797242B (en) * | 2019-11-04 | 2022-06-10 | 中国航空制造技术研究院 | Cold cathode electron gun device for coating film |
| CN110838427A (en) * | 2019-11-20 | 2020-02-25 | 中国航空制造技术研究院 | Electronic gun device for fuse wire additive manufacturing |
| CN110838427B (en) * | 2019-11-20 | 2022-04-29 | 中国航空制造技术研究院 | Electronic gun device for fuse wire additive manufacturing |
| CN114334587A (en) * | 2021-12-31 | 2022-04-12 | 广州赛隆增材制造有限责任公司 | Electron gun |
| CN114801173A (en) * | 2022-04-27 | 2022-07-29 | 广州赛隆增材制造有限责任公司 | 3D prints electron gun device and 3D printing apparatus |
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