UA83514C2 - Gas-discharge electron gun - Google Patents

Abstract

A gas-discharge electron gun relates to electronic engineering. Its application can be particularly perspective for interested consumers of technological equipment with power gas-discharge electron guns used in special electrometallurgy, in particular for electron-beam melting metals and alloys. The gas-discharge electron guncomprises a metal casing, in which a high-voltage insulator, a cold cathode with concave surface having developed emission surfaces and a hollow anode being coaxial to the cathode are placed. The bottom-most part of the anode is made as a plate with cannels for cold water to pass and openings for electronic beam to pass as and also a laser wave guide that is coaxial to the anode . On the wave-guide it is located electromagnetic-deflection coils. Channels for passing water are located inside plate body neat to opening for electronic beam to pass as a united cooling system that provides uniform cooling for plate. In the best embodiment a cooling system is made from four channels linked one with another in the form of rectangular or square. To provide comfort for cannels cleaning, each channel is made with possibility to pass out of the sealed metal casing and equipped with a removable airtight plug. The invention provides simplification of production of high power gas-discharge electron guns and their services.

Description

- violation of the hermeticity of the bottom plate of the anodization of the plate and depressurization of the electronic gun - in vacuum conditions due to the presence of welds, which you. exposed to the cyclic effect of the temperature regime. In addition, the design flaw should include what is unacceptable for this type of product; the complexity of cleaning the cooling channels, which - economic impracticality due to the time-consuming - is carried out through the inlet fitting and the age and manufacturability of manufacturing the welded bottom cooling water. plates of the anode due to the additional operation of the channel a gas-discharge electron gun, in which - the need to control the bottom plate of the anode by changing the location of the channels for vacuum, which determines the need to maintain the passage of cooling water is achieved, as with the vacuum system. first, the possibility of timely heat removal

A gas-discharge electronic gun is also known, from the most stressed in terms of temperature, and with a cold cathode with a concave emission spot, secondly, avoiding the need for henna and a cylindrical hollow anode, which performs welds, which eliminates the possibility of connected with a cylindrical channel - radiant overheating of the plate and violation of its tightness. house for passing the electron beam after This increases the service life of the device. its exit from the hole of the welded bottom plate of the anode. To solve the problem, the proposed gas- see Spetom M.A. Tpe rowepts! podpuoMkade diom discharge electron gun, which includes hermed-dissnagde eiesigop dip apa rozheg pis op yv Brave, tic metal case in which high-

MEI, Vyvzia Rgoseedipud5 oi (She sopiegepse op kovolt insulator, cold concave cathode with eiIesigop reat teipd apa ge Yapipd-5iaie oi (pe agii, developed emission surface and co-axial with 1994, r. 259-268, Reed. 11). nim hollow anode, the bottom part of which is used

The design of the bottom plate of the anode in the form of a plate with channels for the passage of the electron gun causes its significant overheating with an opening for the passage of cooling water, which leads to a violation of the tightness of the electron beam, as well as the connected coaxial bottom plate of the anode in vacuum conditions. the anode of the radiation guide with the focal points placed on it

The closest in terms of technical essence and result, that by them and deflecting coils, in which, according to the claimed solution is achieved, is a gas invention, the channels for the passage of a cooling-discharge electron gun, which includes pressurized water, are made inside the body of the plate and connected tic metal case, in which a covolt insulator, a cold concave cathode with a hole for the passage of an electron beam are placed side-by-side into a single system. with a developed emission surface and coaxial with Thanks to new features, it became possible to create a hollow anode, the bottom part of which carries out the bottom part of the anode to the outside and is attached in the form of a plate, which is located inside it through vacuum seals directly to the anode and has channels for passing cooling - to the ray guide. This simplifies the design of the water cannon and the hole for passing the electronic and the method of its manufacture. of the beam, as well as the connected coaxial anode of the pro- The most practical and convenient for production is the system, which is made of four channels of oscillating coils with focusing and deflection placed on it. Channels for the passage of interconnected in the form of a square or direct cooling water are made in the form of annular water pipes. external grooves, and are located around the perimeter for the possibility of effective cleaning of channels, slabs. Hermeticity is ensured by vacuum, each of them is made with the possibility of exiting in a ring overlay, which covers the channels and the atmosphere, and to avoid the exit of the coolant, which is connected by a copper weld, as in the upper part of the water, they are equipped with removable hermetic parts of the bottom plate, and in the lower one (see Patent with corks.

of Ukraine Me38451, IPC 7 НО1237/06, Byul. Me1, The essence of the invention is explained by drawings. 2004 |. Figure 1 shows a schematic section

The disadvantage of the prototype is the significant overheating of the gas-discharge electronic gun; plate, which leads to the formation of cracks in the wall. Fig. 2 - view A Fig. 1; seams, as well as overheating of vacuum seals - Fig. 3 - section B-B of Fig. 2. nen that causes the depressurization of the prop, the gas-discharge electron gun is equipped with a vacuum violation. high-voltage insulator 1 in a sealed cor-

This drawback is due to the fact that the channels of the hollow, water-soaked cathode 2 with a spherical emission surface are located for the passage of cooling water. With the help of a cylinder, along the perimeter of the plate, along its periphery, and the most common body, the cathode 2 is installed coaxially on the temperature-stressed area of the plate - this is part of the hollow anode 3, in which drilled channels are made inside its end around the hole for the passage of the electron bottom plate 4 5th bundle. During the passage of the electron beam in (Fig. 2, C) for the passage of cooling water from the hole, the so-called its "pushing", and the electron exits into the atmosphere and through hole 6 for the passage of the electron beam, hitting the inner surface of the hole. Drilled channels 5 for cause the occurrence of "interception current" due to the passage of cooling water that exits into the hole, which this place heats up the most. The atmosphere is equipped with removable hermetic water, going along the perimeter of the plate, not plugs 7 that communicate with the atmosphere. Don- can effectively counteract this heating, plate 4 has grooves 8 for a vacuum seal, so overheating is often observed in the prototype between the hollow anode C and the ray guide

9, as well as fitting 10 of the supply of cooling When adjusting the power of the electronic beam of water and fitting 11 of its discharge. pressure change (working gas consumption) bottom flow

Correspondingly to the anode Z, the attached beam guide 9 z and 4 anode Z works in the conditions of a loaded cycle with the focusing coils 12 placed on it and a personal temperature regime. At the same time, it is possible with deflecting coils 13. The lower end of the cyli- ability of timely removal of heat from the nuclear beam 9 is equipped with a flange, the most stressed in terms of the temperature regime, with the help of which the gun is installed on the place, (the opening for the passage of the electronic technological chamber of the electron beam beam) eliminates the possibility of overheating the stove. noOvkKy The absence of welds excludes the possibility

For the operation of the proposed gas-discharge elec- violation of the hermeticity of the plate not only during the racutron gun during its continuous pumping of overheating, but also under any other circumstances. through a fitting in the wall of the cathode-anode cavity. The proposed gas-discharge electronic gun supplies working gas (Fig. 1), consisting of a mat, mainly intended for electron-hydrogen activated with a small addition of oxygen, radiant melting of metals and alloys, where a on the cathode 2 - through the high-voltage current supply, a large power of the electron beam. At the same time (not shown in the drawing), the accelerating voltage of the proposed design guarantees its stability of 25...30KV. In the pressure range of units to tens of Pa, it works with an electron beam power of 750 kW. a high-voltage smoldering discharge occurs, the force of which determines its use in the electronic current, which is regulated by a change in pressure (large-beam installations for smelting ingots by the flow of working gas, which enters the furnace up to 16 tons and more directly into the crystallization) . sliding, for melting with the use of intermediate

With the help of focusing coils 12 of the electronic capacity and melting of flat ingots in the melting pot, the beam is output through the beam guide 9 in techno-rectangular or square section, as well as the logical camera and is focused on the surface of the object of receiving hollow ingots. 14, which is heated. If necessary, with the help of the design feature of the gas-discharge elec- 13 deflection coils and the corresponding program of the ktron gun, it is possible to reduce the cost of its scanning of the electron beam. At the same time, the gun has a high hundred- different types of sweeps for processing the object 14 that the strength of the energy parameters of the electronic heats up (melting of the metal into a crystal- bundle, is distinguished by the ease of assembly and vacuum tori, an intermediate container, a flat container, etc.). tests, reliable in operation.

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Ministry of Education and Science of Ukraine

State Department of Intellectual Property, str. Urytskogo, 45, Kyiv, MSP, 03680, Ukraine

SE "Ukrainian Institute of Industrial Property", str. Glazunova, 1, Kyiv - 42, 01601