CN103887131A - 600kw gas discharge electronic gun and application method thereof - Google Patents
600kw gas discharge electronic gun and application method thereof Download PDFInfo
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- CN103887131A CN103887131A CN201210555434.9A CN201210555434A CN103887131A CN 103887131 A CN103887131 A CN 103887131A CN 201210555434 A CN201210555434 A CN 201210555434A CN 103887131 A CN103887131 A CN 103887131A
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Abstract
The invention provides a 600kw gas discharge electronic gun comprising an upper gun cover, a middle gun body and a bottom gun base. An electronic gun core and an anode are arranged in the gun body. A focusing coil and a deflection scanning coil are arranged under the anode, and a focusing magnetic lens is provided. The electronic gun core, the anode, the focusing coil and the deflection scanning coil are all provided with a cooling water path. An electronic gun core which is composed of cathode blocks is arranged in a cold cathode cylinder. The electronic gun core is externally connected with a control system through a cable. A closed air chamber is formed around the electronic gun core and the anode. An open-loop control type inflation system is provided. The inflation system can be used to inflate hydrogen and oxygen into the closed air chamber. According to the invention, the manufacturing and using cost can be greatly reduced, and advantages of easy operation, low working strength and high working efficiency can be realized.
Description
Technical field
The present invention relates to a kind of electron beam furnace electron gun, espespecially a kind of maximum power of drawing bundle by glow discharge principle can reach 600kw gas discharge electron gun and using method.
Background technology
Electron gun is a kind of device that accelerates electronics bombardment target, it launch there is certain energy, the electron beam of certain line and speed and angle, after focusing, deflection and the scanning of this electron beam by electronics light path system, form predefined figure.Powerful electron gun is used for smelting equipment, is mainly used in the purification of polysilicon dephosphorization of the refractory metals such as W, Mo, Ta, Nb and photovoltaic industry.
Traditional electron-beam melting gun adopts hot-cathode electric rifle, and its structure forms generally: 1. first need to have negative electrode, anode and filament, need to arrange three automatically controlled cable and corresponding control system thereof used for this reason; 2. for ensureing condition of high vacuum degree, configure separately two cover vacuum systems of molecular pump+sliding vane rotary pump unit; 3. interior at least two covers of placing of vacuum chamber focus on magnetic lens and focus on magnetic lens coil and deflection scanning coils, and are all equipped with cooling jacket.Its operation principle and method of operation are: while reaching high vacuum state in rifle chamber, first electron gun filament is heated to a certain temperature, then by adding certain electrostatic field between the negative electrode to electron gun and filament, cause the electronics on filament to overflow the negative electrode heating to electron gun; Same reason, in the time that gun cathode is heated to a certain temperature, high-voltage electrostatic field in addition between the negative electrode of electron gun and anode, the rifle core of electron gun will be drawn the high-power electron beam that melting needs, then electron beam passes through directly to bombard to material after the control and management of electronics light path system, and then completes the melting to material.The watt level of electron beam need to regulate according to actual melting situation, and the size adjusting method of hot-cathode electric rifle power is all generally first to regulate main high pressure, and then regulates secondary high pressure, finally regulates heater current; Or the adjusting of former three order is exchanged, these three parameters of adjusting that often will be are repeatedly to meet the requirement of required watt level.
From the adjusting of the operation principle power of hot-cathode electric rifle, can find out, this electron gun is wanted following several the conditions of normal need of work, the one, high vacuum; The 2nd, need filament supply, secondary high voltage source and main high voltage source; The 3rd, need operative employee to have higher experimental technology.Above three basic preconditions have determined that electron gun system need to configure fine pumping system, the appliance arrangements such as power-supply system such as filament transformer, secondary high-tension transformer and more experienced operative employee.Therefore, hot-cathode electric rifle complex structure, the accuracy of manufacture is had relatively high expectations, and preparation auxiliary equipment is more, and the technical ability to operating personnel, experience require high, and corresponding manufacturing cost and use cost is higher.
Along with industrial fast development, the competitiveness of the product that the equipment of the hot-cathode electric of configuration use at present rifle is produced glides to some extent, for this situation, the inventor is being devoted to development always and is developing the gas discharge cold-cathode gun of the small volume that can save manufacturing cost and use cost.
Summary of the invention
The object of this invention is to provide a kind of 600kw gas discharge electron gun, it can reduce manufacturing cost and use cost greatly, simple to operate, and working strength is low and operating efficiency is high.
For achieving the above object, the present invention takes following design:
A gas discharge electron gun of 600kw, includes rifle cover, the rifle body at middle part and the rifle base of bottom on top; In the rifle body at middle part, there is an electron gun core and work together with rifle core and form the anode of electron beam; Anode below is focusing coil and the deflection scanning coil being contained in successively on rifle base, and is equipped with focusing magnetic lens; Described electron gun rifle core, anode, focusing coil and deflection scanning coil all arrange cooling water channel;
The rifle body at described middle part is contained in the large cylinder under rifle cover by one and is built in the cold cathode cylinder that can form glow discharge in large cylinder and constitutes, cold cathode cylinder is built-in with cathode electron gun core, this cold-cathode gun core is made up of monomer cathode block, this monomer cathode block, by the outer connected control system of a cable, is formed with a sealed gas chamber around electron gun core and anode; Arrange the gas charging system of an open loop control, this gas charging system can be filled with hydrogen and oxygen in sealed gas chamber; The sealing fixture of sealing cooling water cell arrangement and the fixing cold-cathode gun core of cathode block is housed above cold cathode cylinder.
In the gas discharge electron gun of described 600kw, the cooling water channel of described anode is close to this sealed gas chamber, in this cooling water channel, arrange one can monitor this open loop control gas charging system aeration quantity and inflation ratio thermocouple.
In the gas discharge electron gun of described 600kw, in the hydrogen and oxygen passing in described sealed gas chamber, hydrogen is at least 95%, and all the other are oxygen.
In the gas discharge electron gun of described 600kw, keeping the ambient pressure in cold cathode cylinder is 0.1～15Pa.
In the gas discharge electron gun of described 600kw, be the thin cylinder of vacuum at the center of focusing and deflection scanning coil, the thin cylinder of this vacuum is equipped with simultaneously and can carries out cooling water to focusing coil and deflection scanning coil.
In the gas discharge electron gun of described 600kw, anti-discharge stainless steel ring is housed around cold cathode cylinder.
In the gas discharge electron gun of described 600kw, the sealing cooling water cell arrangement of described cathode block is that dish is located at the some circle cooling water pipes in rifle cover.
In the gas discharge electron gun of described 600kw, only arrange a set of focusing magnetic lens and supporting one group and focus on magnetic lens coil and deflection scanning coil.
Focusing magnetic lens coil and the deflection scanning coil of the gas discharge electron gun of described 600kw are all placed on outside vacuum, and are added with water jacket.
Another object of the present invention is to provide a kind of using method of 600kw gas discharge electron gun, and its operating power maximum under the condition of simple in structure, low cost of manufacture still can reach 600kw, and can steady operation.
For achieving the above object, the present invention takes following design:
A kind of using method of above-mentioned 600kw gas discharge electron gun, before the gas discharge electron gun work of 600kw, first by gas flowmeter, hydrogen and oxygen are filled in electron gun rifle chamber (sealed gas chamber), adjust the vacuum degree control of rifle chamber between 0.1～15Pa, grasp the content of hydrogen more than 95%, in the gas discharge electron gun work of 600kw, in the time of the indoor excess Temperature of rifle, rifle chamber is filled with to oxygen, reduce rifle room temperature reach require (the highest do not surpass 80 DEG C) till.
The gas discharge electron gun of 600kw of the present invention has great advantage place with respect to current electron gun both domestic and external (hot cathode rifle), it can reduce manufacturing cost and use cost greatly, simple to operate, solve current electron gun and operated the drawbacks such as lengthy and tedious complexity, working strength are large, inefficiency in regulating power when size, thereby use value and the scope of application of electron beam furnace are greatly improved, to promoting industrial development and improving industrial level and can make significant contribution.
Advantage of the present invention is:
1. can greatly save manufacturing cost and use cost;
2. structure is both simple, and operation is convenient again;
3. working stability and use cost are lower;
4. wider (can work under the lower state of vacuum degree) of relative hot-cathode electric rifle range of application;
5. owing to only adopting a set of focusing magnetic lens and supporting one group to focus on magnetic lens coil and deflection scanning coil, so volume is little, increased an electron beam furnace with many feasibility of the global design of electron gun, energy savings, with low cost.
Brief description of the drawings
Fig. 1 is the gas discharge electron gun structure schematic diagram of 600kw of the present invention.
In figure: 1-rifle cover; 2-water pipe; 3-high tension shackle insulator; 4-sealing fixture; 5-cold cathode cylinder; The stainless steel ring that 6-is anti-discharge; 7-large cylinder; 8-gas charging system; 9-anode; 10-thermocouple; 11-focusing coil; 12-deflection scanning coil; The thin cylinder of 13-vacuum; 14-rifle chamber.
Embodiment
As shown in Figure 1, the present invention is the 600kw gas discharge electron gun that draws bundle by glow discharge principle, it comprises: be topmost rifle cover 1, rifle cover 1 inner disc has the sealing cooling water cell arrangement of multi-turn water pipe 2(as cathode block), to increase water pipe resistance, large cylinder 7 is housed under rifle cover, the gas charging system 8 of open loop control is housed on large cylinder, it is mainly for adjusting electron gun watt level and regulating rifle room temperature.On large cylinder, be located high tension shackle insulator 3, the in-built vital part cold cathode cylinder 5 that has formation glow discharge of large cylinder, the sealing fixture 4 of sealing cooling water and fixing cold cathode is housed on cold cathode cylinder 5, two water pipes of one-in-and-one-out are housed in sealing fixture 4, the multi-turn water pipe 2 that these two water pipes and rifle cover 1 inner disc have forms the chilled(cooling) water return (CWR) of circulation, anti-discharge stainless steel ring 6 is housed around cold cathode cylinder 5, anode 9 is housed under large cylinder, and the top end of this anode 9 and cold cathode cylinder 5 are just right; On anode 9, there is the independent cooling backwater water route of using, the thermocouple 10 of thermometric is housed on this backwater water route further aeration quantity and inflation ratio thereof are controlled, in the situation that high pressure is certain, for guaranteeing that power reaches 600kw, should adjust rifle chamber vacuum degree control between 0.1～15Pa, wherein hydrogen content is more than 95%, in the time of the indoor excess Temperature of rifle, rifle chamber is filled with to appropriate oxygen, can reduces rifle room temperature.Focusing coil 11 is equipped with in anode below, and deflection scanning coil 12 is housed below focusing coil 11, puts the thin cylinder of vacuum at the center of focusing coil and deflection scanning coil.
The described focusing coil 11 and the deflection scanning coil 12 that are contained in outside the thin cylinder of electronics light path vacuum are all located at outside vacuum chamber, are undertaken coil to carry out cooling by the water in the thin cylinder of vacuum.
Inventive point of the present invention is: open loop control gas charging system 8 is housed, it is to inputting hydrogen and oxygen in the sealed gas chamber 14 of cold-cathode gun core work, control watt level and the stability of electron gun by adjusting the aeration quantity of two kinds of gases and ratio, according to glow discharge principle, in the situation that high pressure is certain, by passing into the power of adjusting at most electron gun with ratio of gas, this operation is open loop control, the watt level showing on binding operation panel and smelting technology require to two kinds of gases at most and ratio adjust, with practical requirement, in the situation that high pressure is certain, for guaranteeing that power reaches 600kw, should adjust rifle chamber vacuum degree control between 0.1～15Pa, in the time of the indoor excess Temperature of rifle, rifle chamber is filled with to appropriate oxygen, to reduce rifle room temperature.
Another inventive point of the present invention is: kind and the using method of two kinds of gases that pass into.Two kinds of gases that pass into while adjusting electron gun watt level are hydrogen and oxygen, and wherein the content proportion of hydrogen is more than 95, and oxygen is used for adjusting stability and the watt level of electron gun.
Another inventive point of the present invention is: design in the operational environment that this electron gun can be operated in 0.1-15Pa.According to the test simulation of glow discharge principle and our reality, draw electron gun can be within the scope of this steady operation.This specific character of cold-cathode gun can save the original two cover molecular pump+sliding vane rotary pump unit vacuum systems that configure separately on hot-cathode electric rifle completely, has greatly saved manufacturing cost and use cost.Electron gun is worked under this pressure, its inner pressure will be far away higher than the vacuum degree of body of heater (generally in 5 × E-3Pa left and right), therefore the volatile matter in body of heater can not fly in electron gun under this pressure differential, ensure the cleanliness factor of electron gun rifle chamber, thereby ensure the difficult electric discharge of electron gun etc., guaranteed job stability.
An other inventive point of the present invention is: adopt a set of focusing magnetic lens.Compared with hot-cathode electric rifle, the working vacuum degree of cold-cathode gun is lower, there is no need to adopt two covers of hot-cathode electric rifle use or the mode of three cover magnetic lens, every electron gun is saved at least a set of magnetic lens and focusing power supply, and on electron gun, save observation window structure, saved video camera, LCDs and process of signal transmission system etc. simultaneously, greatly reduced again cost at this, operation is also more simple, convenient, and outward appearance is more attractive in appearance.
An other inventive point of the present invention is: focus on magnetic lens coil deflection scanning coil and be placed on outside vacuum, and be added with water jacket.Avoided coil high-temperature outgassing in vacuum chamber, the drawbacks such as class of insulation reduction, have extended useful life of coil.
Another inventive point of the present invention is: cold-cathode gun only has a cathode block, without filament cathode structure.The cathode block of cold cathode rifle can make of common electric conducting material, the expensive occupation mode of having avoided the cathode block of hot cathode rifle to manufacture with noble metal, and emission electron sources operating ambient temperature around can reduce greatly, water cooled seal is required greatly to reduce, more easily realize seal request.Without filamentray structure, thereby save filament transformer and secondary high-tension transformer and corresponding control system thereof, greatly saved again cost at this.
An other inventive point of the present invention is: only use a cable.Due to the advantage of the principle of cold-cathode gun, on electron gun, only need to connect a cable, (wherein heater current is larger to compare three cables of hot-cathode electric rifle needs, so the cable that required cable needs is thicker), the cost of cable reduces greatly, and workman's labour intensity also obviously declines.
An other inventive point of the present invention is: at cathode block, anti-discharge ring is housed outward.Anti-discharge ring is outside adopts suitable radian and fineness preferably, and anti-discharge ring structure is simple, but anti-discharge effect is extremely obvious, has avoided not using the break phenomenon of high-tension porcelain insulator of frequent electric discharge in the situation of anti-discharge ring.
An other inventive point of the present invention is: the mode that the helical disk of cathode block cooling water pipe in rifle cover established.The negative electrode of cold-cathode gun need to carry out water-cooled, is the high pressure of 50,000 volts but cold cathode connects, need to lengthen cooling water pipe resistance, and spirality multilayer water pipe is housed in rifle cover, and compact conformation, has reached both artistic and practical object.Wire leading method is convenient, has reduced workman's labour intensity, the more important thing is electrion phenomenon and stops because of the architecture advances of rifle cover.
The present invention utilizes glow discharge principle successfully to develop the cold-cathode gun that power is 600kw.By rigorous calculating l-G simulation test in large quantities and repeatedly after demonstration, electron emissive system according to the operation principle of glow discharge to electron gun (focusing system, deflection and scanning system and cooling system etc. design, be successfully developed into can steady operation at the smelting cold cathode electron gun of 600kw power capability.Greatly reduce use cost, the equipment cost of this costliness of electron beam furnace is obviously reduced, along with the reduction of cost, its scope of application also expands rapidly, to promoting industrial modernization development to make significant contribution.
The various embodiments described above can some variations in addition under not departing from the scope of the present invention, thus above explanation comprises and accompanying drawing shown in structure should be considered as exemplary, but not in order to limit claim of the present invention.
Claims (10)
1. a gas discharge electron gun of 600kw, includes rifle cover, the rifle body at middle part and the rifle base of bottom on top; In the rifle body at middle part, there is an electron gun core and work together with rifle core and form the anode of electron beam; Anode below is focusing coil and the deflection scanning coil being contained in successively on rifle base, and is equipped with focusing magnetic lens; Described electron gun rifle core, anode, focusing coil and deflection scanning coil all arrange cooling water channel; It is characterized in that:
The rifle body at described middle part is contained in the large cylinder under rifle cover by one and is built in the cold cathode cylinder that can form glow discharge in large cylinder and constitutes, cold cathode cylinder is built-in with cathode electron gun core, this cold-cathode gun core is made up of monomer cathode block, this monomer cathode block, by the outer connected control system of a cable, is formed with a sealed gas chamber around electron gun core and anode; Arrange the gas charging system of an open loop control, this gas charging system can be filled with hydrogen and oxygen in sealed gas chamber; The sealing fixture of sealing cooling water cell arrangement and the fixing cold-cathode gun core of cathode block is housed above cold cathode cylinder.
2. the gas discharge electron gun of 600kw according to claim 1, it is characterized in that: the cooling water channel of described anode is close to this sealed gas chamber, in this cooling water channel, arrange one can monitor this open loop control gas charging system aeration quantity and inflation ratio thermocouple.
3. the gas discharge electron gun of 600kw according to claim 2, is characterized in that: in the hydrogen and oxygen passing in described sealed gas chamber, hydrogen is at least 95%, and all the other are oxygen.
4. the gas discharge electron gun of 600kw according to claim 1, is characterized in that: keeping the ambient pressure in cold cathode cylinder is 0.1～15Pa.
5. the gas discharge electron gun of 600kw according to claim 1, is characterized in that: put the thin cylinder of vacuum at the center of focusing and deflection scanning coil, in the thin cylinder of this vacuum, be equipped with and can carry out cooling water to focusing coil and deflection scanning coil.
6. the gas discharge electron gun of 600kw according to claim 1, is characterized in that: anti-discharge stainless steel ring is housed around cold cathode cylinder.
7. the gas discharge electron gun of 600kw according to claim 1, is characterized in that: the sealing cooling water cell arrangement of described cathode block is that helical disk is located at the some circle cooling water pipes in rifle cover.
8. the gas discharge electron gun of 600kw according to claim 1, is characterized in that: only adopt a set of focusing magnetic lens and supporting one group to focus on magnetic lens coil and deflection scanning coil.
9. the gas discharge electron gun of 600kw according to claim 1, is characterized in that: described focusing magnetic lens coil and deflection scanning coil are all placed on outside vacuum.
10. the using method of a 600kw gas discharge electron gun claimed in claim 1, it is characterized in that: before the gas discharge electron gun work of 600kw, first by gas flowmeter, hydrogen is filled in electron gun rifle chamber, adjust the vacuum degree control of rifle chamber between 0.1～15Pa, grasp the content of hydrogen more than 95%, in the gas discharge electron gun work of 600kw, in the time of the indoor excess Temperature of rifle, rifle chamber is filled with to oxygen, reduce rifle room temperature reach require till.
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| CN201210555434.9A CN103887131B (en) | 2012-12-19 | 2012-12-19 | A kind of 600kw gas discharge electron gun and using method thereof |
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| CN103887131B CN103887131B (en) | 2016-08-17 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104505325A (en) * | 2014-12-15 | 2015-04-08 | 中国航空工业集团公司北京航空制造工程研究所 | Electronic gun device for high-voltage gas discharge |
| CN104538273A (en) * | 2014-12-19 | 2015-04-22 | 中国航空工业集团公司北京航空制造工程研究所 | Power supply device of high-voltage cold cathode gas discharging electronic gun and control method of power supply device |
| CN104635617A (en) * | 2014-12-19 | 2015-05-20 | 中国航空工业集团公司北京航空制造工程研究所 | Cold cathode electronic gun electromagnetic control system and control method thereof |
| CN105590816A (en) * | 2016-02-02 | 2016-05-18 | 赵文天 | Cold-cathode large-power electron beam gun |
| LV15213B (en) * | 2016-10-21 | 2017-04-20 | Kepp Eu, Sia | Gaseous-discharge electron-beam gun |
| CN109065421A (en) * | 2018-08-07 | 2018-12-21 | 核工业理化工程研究院 | Built-in water route formula electron gun gun body and cooling means |
| CN109202071A (en) * | 2018-03-21 | 2019-01-15 | 中国航空制造技术研究院 | A kind of electron gun arrangements |
| CN110468286A (en) * | 2019-08-09 | 2019-11-19 | 云南昆钢电子信息科技有限公司 | A kind of cold-cathode gun melting furnace control system and ingot smelting process |
| CN110592390A (en) * | 2019-08-08 | 2019-12-20 | 云南昆钢电子信息科技有限公司 | Cold cathode electron gun control system and control method |
| CN114334587A (en) * | 2021-12-31 | 2022-04-12 | 广州赛隆增材制造有限责任公司 | Electron gun |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104635617A (en) * | 2014-12-19 | 2015-05-20 | 中国航空工业集团公司北京航空制造工程研究所 | Cold cathode electronic gun electromagnetic control system and control method thereof |
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| CN109202071A (en) * | 2018-03-21 | 2019-01-15 | 中国航空制造技术研究院 | A kind of electron gun arrangements |
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| CN109065421A (en) * | 2018-08-07 | 2018-12-21 | 核工业理化工程研究院 | Built-in water route formula electron gun gun body and cooling means |
| CN109065421B (en) * | 2018-08-07 | 2023-12-26 | 核工业理化工程研究院 | Built-in waterway type electron gun body and cooling method |
| CN110592390A (en) * | 2019-08-08 | 2019-12-20 | 云南昆钢电子信息科技有限公司 | Cold cathode electron gun control system and control method |
| CN110468286A (en) * | 2019-08-09 | 2019-11-19 | 云南昆钢电子信息科技有限公司 | A kind of cold-cathode gun melting furnace control system and ingot smelting process |
| CN110468286B (en) * | 2019-08-09 | 2021-02-05 | 云南昆钢电子信息科技有限公司 | Cold cathode electron gun smelting furnace control system and metal ingot smelting method |
| CN114334587A (en) * | 2021-12-31 | 2022-04-12 | 广州赛隆增材制造有限责任公司 | Electron gun |
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