CN216956212U - Split anode device for hollow cathode vacuum arc test - Google Patents

Split anode device for hollow cathode vacuum arc test Download PDF

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Publication number
CN216956212U
CN216956212U CN202220231183.8U CN202220231183U CN216956212U CN 216956212 U CN216956212 U CN 216956212U CN 202220231183 U CN202220231183 U CN 202220231183U CN 216956212 U CN216956212 U CN 216956212U
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China
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anode
vacuum
electrode
positive pole
hollow cathode
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CN202220231183.8U
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Chinese (zh)
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许建平
陈晶
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Heilongjiang Haizhen Technology Co ltd
Heilongjiang Institute of Technology
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Heilongjiang Haizhen Technology Co ltd
Heilongjiang Institute of Technology
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Abstract

A split anode device for hollow cathode vacuum arc testing. The utility model aims at the problem of testing the energy density of the hollow cathode vacuum arc. The utility model comprises a left anode, a right anode, an insulating sheet, a left anode water-cooling cavity, a right anode water-cooling cavity, a mobile platform, a hollow cathode and the like, wherein the insulating sheet is adopted between the left anode and the right anode to realize the insulation, close, detachable and fixed installation, and the mobile platform is used for testing the current of vacuum arcs at different positions and calculating the energy density. The utility model has the characteristics of accurate and convenient energy density test.

Description

Split anode device for hollow cathode vacuum arc test
Technical Field
The utility model relates to a split anode device for hollow cathode vacuum arc testing, and belongs to the field of vacuum arc characteristic testing.
Background
Unlike the arc in the atmospheric environment, the cathode shape of the vacuum arc requires a hollow structure to ensure stable combustion of the arc, and is also called hollow cathode vacuum arc. The hollow cathode vacuum arc is plasma which can be stably combusted in a vacuum state, the influence of gases such as O2, N2, water vapor and the like on the plasma in an atmospheric environment is avoided, and the vacuum protection endows the hollow cathode vacuum arc with good application in the fields of material processing, surface modification and energy sources in an outer space environment.
The hollow cathode vacuum arc is used as a concentrated energy source, and the physical characteristics of plasma distribution, energy density and the like influence the application of the vacuum arc. Therefore, the testing of the plasma energy density characteristic of the hollow cathode vacuum arc is of great significance.
SUMMERY OF THE UTILITY MODEL
The utility model provides a split anode device for a hollow cathode vacuum arc test, aiming at the problem of the hollow cathode vacuum arc energy density test. The utility model discloses a split anode structure, which is constructed, the position of an anode is regulated and controlled, the current value of a hollow cathode vacuum arc at different positions is tested, and the energy density is calculated.
The technical scheme adopted by the utility model for solving the problems is as follows:
the utility model discloses a split anode device for hollow cathode vacuum arc test, which comprises a left anode 1, a right anode 2, an insulating sheet 3, a left anode water-cooling cavity 4, a right anode water-cooling cavity 5, a moving platform 6, a hollow cathode 7, a cathode flange 8, a cathode insulating ring 9, an arc power supply 10, an electrode flange 11, an electrode insulating ring 12, an upper vacuum electrode 13, a lower vacuum electrode 14, a vacuum chamber 15, a vacuum pump 16, a left anode ammeter 17 and a right anode ammeter 18,
the left anode 1 and the right anode 2 are of water cooling structures, the left anode 1 is welded on a left anode water-cooling cavity 4 in a sealing mode, the right anode 2 is welded on a right anode water-cooling cavity 5 in a sealing mode, circulating cooling water is respectively introduced into the left anode water-cooling cavity 4 and the right anode water-cooling cavity 5 for cooling treatment, the left anode water-cooling cavity 4 and the right anode water-cooling cavity 5 are detachably and fixedly installed on a moving platform 6, an insulating sheet 3 is adopted between the left anode 1 and the right anode 2 to realize insulation tight detachable and fixed installation, a hollow cathode 7 is detachably and fixedly installed on a cathode flange 8, the cathode flange 8 is detachably and fixedly installed on the top wall of a vacuum chamber 15 through a cathode insulating ring 9, an electrode flange 11 is detachably and fixedly installed on the left side wall of the vacuum chamber 15 through an electrode insulating ring 12 in a sealing mode, an upper vacuum electrode 13 and a lower vacuum electrode 14 are welded on the electrode flange 11 in an insulation and sealing mode, go up vacuum electrode 13 one end and pass through copper wire connection to left positive pole 1, go up vacuum electrode 13 other end and pass through copper wire connection to arc power supply 10's positive pole, down pass through vacuum electrode 14 one end and pass through copper wire connection to right positive pole 2, down pass through vacuum electrode 14 other end and pass through copper wire connection to arc power supply 10's positive pole, arc power supply 10's negative pole is connected to on the hollow cathode 7, left positive pole 1 and right positive pole 2 realize the displacement control motion for hollow cathode 7 through moving platform 6, left positive pole ammeter 17 tests left positive pole 1 electric current, right positive pole ammeter 18 tests right positive pole 2 electric current.
Further, the thickness of the insulating sheet 3 is 0.1 mm-5 mm.
The beneficial effects of the utility model are: the utility model provides a split anode device for testing a hollow cathode vacuum arc, which is used for constructing a split anode structure, regulating and controlling the position of an anode, testing the current values of the hollow cathode vacuum arc at different positions and finally calculating the energy density.
Drawings
Fig. 1 is a schematic structural view of the present invention.
The names and reference numbers of the components involved in the figures are as follows:
the device comprises a left anode 1, a right anode 2, an insulating sheet 3, a left anode water-cooling cavity 4, a right anode water-cooling cavity 5, a movable platform 6, a hollow cathode 7, a cathode flange 8, a cathode insulating ring 9, an arc power supply 10, an electrode flange 11, an electrode insulating ring 12, an upper over-vacuum electrode 13, a lower over-vacuum electrode 14, a vacuum chamber 15, a vacuum pump 16, a left anode ammeter 17 and a right anode ammeter 18.
Detailed Description
The first embodiment is as follows: the embodiment is described with reference to fig. 1, the split anode device for hollow cathode vacuum arc test in the embodiment comprises a left anode 1, a right anode 2, an insulating sheet 3, a left anode water-cooling cavity 4, a right anode water-cooling cavity 5, a movable platform 6, a hollow cathode 7, a cathode flange 8, a cathode insulating ring 9, an arc power supply 10, an electrode flange 11, an electrode insulating ring 12, an upper over-vacuum electrode 13, a lower over-vacuum electrode 14, a vacuum chamber 15, a vacuum pump 16, a left anode ammeter 17, and a right anode ammeter 18,
the left anode 1 and the right anode 2 are of water cooling structures, the left anode 1 is welded on a left anode water-cooling cavity 4 in a sealing mode, the right anode 2 is welded on a right anode water-cooling cavity 5 in a sealing mode, circulating cooling water is respectively introduced into the left anode water-cooling cavity 4 and the right anode water-cooling cavity 5 for cooling treatment, the left anode water-cooling cavity 4 and the right anode water-cooling cavity 5 are detachably and fixedly installed on a moving platform 6, an insulating sheet 3 is adopted between the left anode 1 and the right anode 2 to realize insulation tight detachable and fixed installation, a hollow cathode 7 is detachably and fixedly installed on a cathode flange 8, the cathode flange 8 is detachably and fixedly installed on the top wall of a vacuum chamber 15 through a cathode insulating ring 9, an electrode flange 11 is detachably and fixedly installed on the left side wall of the vacuum chamber 15 through an electrode insulating ring 12 in a sealing mode, an upper vacuum electrode 13 and a lower vacuum electrode 14 are welded on the electrode flange 11 in an insulation and sealing mode, go up vacuum electrode 13 one end and pass through copper wire connection to left positive pole 1, go up vacuum electrode 13 other end and pass through copper wire connection to arc power supply 10's positive pole, down pass through vacuum electrode 14 one end and pass through copper wire connection to right positive pole 2, down pass through vacuum electrode 14 other end and pass through copper wire connection to arc power supply 10's positive pole, arc power supply 10's negative pole is connected to on the hollow cathode 7, left positive pole 1 and right positive pole 2 realize the displacement control motion for hollow cathode 7 through moving platform 6, left positive pole ammeter 17 tests left positive pole 1 electric current, right positive pole ammeter 18 tests right positive pole 2 electric current.
The second embodiment is as follows: the present embodiment will be described with reference to fig. 1, and the thickness of the insulating sheet 3 of the split anode apparatus for hollow cathode vacuum arc test according to the present embodiment is 0.1mm to 5 mm. Other components and connections are the same as those in the first embodiment.
The working process of the utility model is as follows:
step one, fixedly mounting a left anode 1, a right anode 2 and an insulating sheet 3 on a mobile platform 6;
connecting the cathode of an arc power supply 10 to the hollow cathode 7, and connecting the anode of the arc power supply 10 to the left anode 1 and the right anode 2;
and step three, starting the arc power supply 10 to firstly realize arc discharge between the hollow cathode 7 and the left anode 1, realizing the transition movement of the arc discharge from the left anode 1 to the right anode 2 by utilizing the mobile platform 6, and testing the relation between the displacement and the arc current through the left anode ammeter 17 and the right anode ammeter 18.
Although the present invention has been described with reference to a preferred embodiment, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the utility model as defined by the appended claims.

Claims (2)

1. A split anode device for hollow cathode vacuum arc test is characterized in that: the split anode device for the hollow cathode vacuum arc test comprises a left anode (1), a right anode (2), an insulating sheet (3), a left anode water-cooling cavity (4), a right anode water-cooling cavity (5), a mobile platform (6), a hollow cathode (7), a cathode flange (8), a cathode insulating ring (9), an arc power supply (10), an electrode flange (11), an electrode insulating ring (12), an upper over-vacuum electrode (13), a lower over-vacuum electrode (14), a vacuum chamber (15), a vacuum pump (16), a left anode ammeter (17) and a right anode ammeter (18);
the left anode (1) and the right anode (2) are of water cooling structures, the left anode (1) is hermetically welded on a left anode water-cooling cavity (4), the right anode (2) is hermetically welded on a right anode water-cooling cavity (5), circulating cooling water is respectively introduced into the left anode water-cooling cavity (4) and the right anode water-cooling cavity (5) for cooling treatment, the left anode water-cooling cavity (4) and the right anode water-cooling cavity (5) are detachably and fixedly arranged on a movable platform (6), an insulating sheet (3) is adopted between the left anode (1) and the right anode (2) to realize insulating close detachable and fixed installation, the hollow cathode (7) is detachably, hermetically and fixedly arranged on a cathode flange (8), the cathode flange (8) is detachably, hermetically and fixedly arranged on the top wall of a vacuum chamber (15) through a cathode insulating ring (9), the electrode flange (11) is detachably, hermetically and fixedly arranged on the left side wall of the vacuum chamber (15) through an electrode insulating ring (12), go up and cross vacuum electrode (13) and cross vacuum electrode (14) insulating seal welding down on electrode ring flange (11), go up vacuum electrode (13) one end and pass through copper line connection to left positive pole (1), go up vacuum electrode (13) other end and pass through the positive pole of copper line connection to arc power supply (10), cross vacuum electrode (14) one end down and pass through copper line connection to right positive pole (2), cross vacuum electrode (14) other end down and pass through the positive pole of copper line connection to arc power supply (10), the negative pole of arc power supply (10) is connected to hollow cathode (7), left positive pole (1) and right positive pole (2) realize the displacement control motion for hollow cathode (7) through moving platform (6), left positive pole ampere meter (17) test left positive pole (1) electric current, right positive pole ampere meter (18) test right positive pole (2) electric current.
2. The split anode assembly for hollow cathode vacuum arc testing according to claim 1, characterized in that the insulating sheet (3) has a thickness of 0.1mm to 5 mm.
CN202220231183.8U 2022-01-27 2022-01-27 Split anode device for hollow cathode vacuum arc test Active CN216956212U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202220231183.8U CN216956212U (en) 2022-01-27 2022-01-27 Split anode device for hollow cathode vacuum arc test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202220231183.8U CN216956212U (en) 2022-01-27 2022-01-27 Split anode device for hollow cathode vacuum arc test

Publications (1)

Publication Number Publication Date
CN216956212U true CN216956212U (en) 2022-07-12

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ID=82317709

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202220231183.8U Active CN216956212U (en) 2022-01-27 2022-01-27 Split anode device for hollow cathode vacuum arc test

Country Status (1)

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CN (1) CN216956212U (en)

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