CN104635617A - Cold cathode electronic gun electromagnetic control system and control method thereof - Google Patents
Cold cathode electronic gun electromagnetic control system and control method thereof Download PDFInfo
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- CN104635617A CN104635617A CN201410804403.1A CN201410804403A CN104635617A CN 104635617 A CN104635617 A CN 104635617A CN 201410804403 A CN201410804403 A CN 201410804403A CN 104635617 A CN104635617 A CN 104635617A
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
Abstract
The invention provides a cold cathode electronic gun electromagnetic control system and a control method thereof. The system comprises a first aberration eliminating coil, an upper focusing coil, a second eliminating coil, a lower focusing coil and a deflection scanning coil which are mounted in sequence from top to bottom along the axis of an electronic gun, and further comprises a first aberration eliminating coil driving power supply, an upper focusing coil power supply, a second eliminating coil power supply, a lower focusing coil power supply, a deflection scanning coil power supply and an electronic beam energy distribution control circuit. According to the technical scheme, electronic beam energy densities of scanning points with different positions in a set scanning region can keep consistent for scanning, so that the quality of electronic beam flow is improved and an electronic gun can stably work for a long period; the technical effects that the electronic beam energy is precisely controlled and rapid powder paving and molding are precisely controlled are realized.
Description
Technical field
The present invention relates to electron beam process equipment field, be specifically related to a kind of cold-cathode gun electromagnetic control system and control method thereof.
Background technology
Technology that electron beam manufactures fast (EBM) adopts electromagnetic system to control the increasing material manufacturing technology of electron beam according to a kind of advanced person of predetermined track while scan successively deposite metal powder formation functional part.There is the feature of short period, low cost, response fast, EBM technology is a dual-use technology, in some occasion, there is irreplaceable superiority, in fields such as Aero-Space, auto industry, petrochemical complex, nuclear industry, marine ships, all potential huge application prospect.Electron beam quickly shaping device gordian technique comprises the electron-optical system etc. of electronic beam current generation systems, electron gun.
At present, electron beam quickly shaping device adopts hot-cathode electric rifle to produce electronic beam current mostly, and burn-out life is shorter, and the general work time also only has dozens of hour, if machining large part, needs frequently to change filament.Not only affect job schedule, but also can crudy be affected.
Cold cathode electron line generation technique utilizes high voltage to be drawn by the secondary electron that the electronics in gas discharge plasma and positive ion collision negative electrode produce, a kind of advanced electron Beam Machining that can work long hours of electron beam is formed through electromagnetism collecting system, because negative electrode have employed cooling technology, general cathode life reaches more than 1000 hours.
At present, the operating voltage of conventional cold-cathode gun is general all at below 40kV, after analysing in depth hot-cathode electric rifle and conventional cold cathode electron gun structure feature, invent a kind of high-voltage cold-cathode electron gun operating voltage can being brought up to more than 60kV.Burn-out life is significantly improved, but still can not meet the demand of EBM technology to high-quality electronic beam current.EBM technical requirement Electron Beam spot diameter, and can rapid scanning at below 0.1mm, and this redesigns the electron-optical system power supply of the high voltage cold-cathode gun affecting quality of beam and control system thereof with regard to needing.
Except forming except the various solenoid of electron-optical system and the intrinsic electrical quantity of driving circuit thereof have an impact to Electron Beam Quality, accelerating potential V or
also be the important parameter affecting quality of beam.
The topological circuit of two inversions of AC-DC-AC-DC-AC-DC is have employed due to high-voltage power supply, make to export high-pressure microwave very little, scope range of the fluctuation of voltage is within ± 0.5%, therefore in the electron-optical system of invented cold-cathode gun, when calculating focal length and the deflection of a beam of electrons distance of cold-cathode gun electromagnetic focusing system, due to voltage fluctuation to accelerating potential V or
impact very little, the impact of corresponding voltage fluctuation on electron beam focal length and deflection distance can be ignored, therefore, the control method of the electron-optical system of the cold-cathode gun for EBM invented do not need V or
feedback quantity maintain the stable of focal length and deflection distance as control signal.
Therefore, the principal element affecting quality of beam comprises: the focal position of electron beam spot and bundle shape of spot.The Electron Beam Quality of existing cold-cathode gun is low, and sweep velocity is slow.
Summary of the invention
The invention provides a kind of cold-cathode gun electromagnetic control system, in order to improve Electron Beam Quality, make it be applicable to electron beam and manufacture field fast, this electromagnetic control system comprises:
That installs successively from top to bottom along electron gun axis first disappears and to disappear picture coil, lower focusing coil and deflection scanning coil as coil, upper focusing coil, second;
First disappears picture coil drive power supply, is connected with the first picture coil that disappears, and disappearing for giving first provides steady current as coil, makes first to disappear as coil generation stabilizing magnetic field;
Upper focusing coil driving power, is connected with upper focusing coil, for providing steady current to upper focusing coil, makes focusing coil carry out an electromagnetic focusing to the electron beam penetrated from electron gun anode;
Second disappears picture coil drive power supply, is connected with the second picture coil that disappears, and provides the adjustable image current that disappears, to make the bundle shape of spot of diverse location analyzing spot consistent for disappearing to second as coil;
Lower focusing coil driving power, is connected with lower focusing coil, for providing fast-changing focusing current to lower focusing coil, changes the magnetic field that lower focusing coil produces fast, to realize the secondary electromagnetic focusing to electron beam fast;
Deflection scanning coil drive power supply, is connected with deflection scanning coil, for providing fast-changing electric current to deflection scanning coil, realizes the quick deflection of electron beam, to make electron beam fast and stable at point to be scanned;
Beam energy distribution control circuit, disappear as coil drive power supply with described second, lower focusing coil driving power is connected with deflection scanning coil drive power supply, for calculating and storing when the focal position of point to be scanned and bundle shape of spot reach size of current when setting requires in deflection scanning coil and direction, second disappears as the focusing current value disappeared in image current value and lower focusing coil in coil, and according to the size of current in the deflection scanning coil calculated and direction, the image current value that disappears and focusing current value control electron beam and scan, to make the electron beam energy consistent in density of the point to be scanned of diverse location in setting scanning area.
In one embodiment, first disappears that to be arranged on the discharge cavity of the cold cathode of electron gun and discharge anode composition as coil outdoor.
In one embodiment, first disappears and to comprise as coil drive power supply or upper focusing coil driving power: the first constant pressure source, sustained diode 1, N-NMOS N-channel MOS N field effect transistor MOSFET Q1, the first current sensor, the first current sampling circuit, the first current control circuit, the first given value of current circuit and the first driving circuit; Wherein,
The negativing ending grounding of the first constant pressure source, the disappear drain electrode of picture coil or upper focusing coil and N-channel mosfet Q1 of the anode and first of the first constant pressure source is connected; Sustained diode 1 is connected in parallel on the first two ends disappeared as coil or upper focusing coil; The negative electrode of sustained diode 1 is connected with the anode of the first constant pressure source; The anode of sustained diode 1 is connected with the drain electrode of N-channel mosfet Q1; The negative terminal of the first constant pressure source is connected to after source series first current sensor of N-channel mosfet Q1;
The output terminal of the first current sensor connects the input end of the first current sampling circuit; The output terminal of the first current sampling circuit connects an input end of the first current control circuit; The output terminal of the first given value of current circuit connects another input end of the first current control circuit; The output terminal of the first current control circuit connects the input end of the first driving circuit; The output terminal of the first driving circuit connects the grid of N-channel mosfet Q1.
In one embodiment, second disappears and to comprise as coil drive power supply or lower focusing coil driving power: the second constant pressure source, sustained diode 2, N-channel mosfet Q2, the second current sensor, the second current sampling circuit, the second current control circuit, the second given value of current circuit, the second driving circuit and the first synchronization control circuit; Wherein,
The negativing ending grounding of the second constant pressure source, the disappear drain electrode of picture coil or lower focusing coil and N-channel mosfet Q2 of the anode and second of the second constant pressure source is connected; Sustained diode 2 is connected in parallel on the second two ends disappeared as coil or lower focusing coil; The negative electrode of sustained diode 2 is connected with the anode of the second constant pressure source; The anode of sustained diode 2 is connected with the drain electrode of N-channel mosfet Q2; The negative terminal of the second constant pressure source is connected to after source series second current sensor of N-channel mosfet Q2;
The output terminal of the second current sensor connects the input end of the second current sampling circuit; The output terminal of the second current sampling circuit connects the first input end of the second current control circuit; The output terminal of the second given value of current circuit connects the second input end of the second current control circuit; The output terminal of the first synchronization control circuit connects the 3rd input end of the second current control circuit; The output terminal of the second current control circuit connects the input end of the second driving circuit; The output terminal of the second driving circuit connects the grid of N-channel mosfet Q2.
In one embodiment, deflection scanning coil comprises X to coil and Y-direction coil; Deflection scanning coil drive power supply comprises for driving X to the X of coil to coil drive power supply with for driving the Y-direction coil drive power supply of Y-direction coil;
X comprises to coil drive power supply or Y-direction coil drive power supply: the 3rd constant pressure source, for the N-channel mosfet Q3 making X commutate to coil or Y-direction coil, N-channel mosfet Q4, N-channel mosfet Q5, N-channel mosfet Q6, for regulating X to the N-channel mosfet Q7 of size of current in coil or Y-direction coil, 3rd current sensor, 3rd current sampling circuit, second synchronization control circuit, 3rd given value of current circuit, scan control circuit, 3rd driving circuit, four-wheel drive circuit and the 5th driving circuit, wherein,
The negativing ending grounding of the 3rd constant pressure source, the anode of the 3rd constant pressure source connects the drain electrode of N-channel mosfet Q3 and the drain electrode of N-channel mosfet Q4, the source electrode of N-channel mosfet Q3 connects the first end of X to coil or Y-direction coil, first end connects the drain electrode of N-channel mosfet Q5, the source electrode of N-channel mosfet Q4 connects second end of X to coil or Y-direction coil, second end connects the drain electrode of N-channel mosfet Q6, the source electrode of N-channel mosfet Q6 connects the source electrode of N-channel mosfet Q5, the source electrode of N-channel mosfet Q5 is connected the drain electrode of N-channel mosfet Q7 with the source electrode of N-channel mosfet Q6, the negative terminal of the 3rd constant pressure source is connected to after source series the 3rd current sensor of N-channel mosfet Q7,
The output terminal of the 3rd current sensor is connected with the input end of the 3rd current sampling circuit; The output terminal of the 3rd current sampling circuit is connected with the first input end of scan control circuit; The output terminal of the 3rd given value of current circuit is connected with the second input end of scan control circuit; The output terminal of the second synchronization control circuit is connected with the 3rd input end of scan control circuit; First output terminal of scan control circuit is connected with the input end of the 3rd driving circuit; Second output terminal of scan control circuit is connected with the input end of four-wheel drive circuit; 3rd output terminal of scan control circuit is connected with the input end of the 5th driving circuit;
3rd driving circuit connects the grid of N-channel mosfet Q7; Four-wheel drive circuit connects the grid of N-channel mosfet Q3 and the grid of N-channel mosfet Q6; 5th driving circuit connects the grid of N-channel mosfet Q4 and the grid of N-channel mosfet Q5.
Present invention also offers the control method of the cold-cathode gun electromagnetic control system of above-mentioned Quick-forming, the method, comprising:
Multiple Scanning Detction point is set in deflection of a beam of electrons scanning area;
When each Scanning Detction point place focal position and bundle shape of spot reach setting require time, determine each Scanning Detction point place one by one, the image current value that disappears that second disappears exports as coil, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size, and by the direction of current in the image current value that disappears, focusing current value, deflection scanning coil and size stored in the storage chip in beam energy distribution control circuit;
Beam energy distribution control circuit is according to pattern to be scanned, prescan was carried out before electron beam formally scans, according to the direction of current in the image current value that disappears at each Scanning Detction point place, focusing current value, deflection scanning coil and size, adopt method of interpolation, calculate the disappear point to be scanned that exports as coil of second of each to be scanned some position in pattern to be scanned one by one and to disappear image current value, point focusing current value to be scanned that lower focusing coil exports, to be scanned some direction of current in deflection scanning coil and size;
To be scanned some direction of current in the coordinate information of each to be scanned some position and deflection scanning coil and size of current are stored in the storer of deflection scanning coil drive power supply by beam energy distribution control circuit, and the image current value that the coordinate information of each coordinate points position to be scanned, point to be scanned disappeared and point focusing current value to be scanned are stored into second respectively and disappear in the storer of picture coil drive power supply and lower focusing coil driving power;
To disappear to be scanned some direction of current in image current value, point focusing current value to be scanned, deflection scanning coil and size of current according to point to be scanned, treat each point to be scanned in scan pattern and formally scan.
In one embodiment, in said method, when each Scanning Detction point place focal position and bundle shape of spot reach setting require time, determine each Scanning Detction point place one by one, the image current value that disappears that second disappears exports as coil, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size, and by the direction of current in the image current value that disappears, focusing current value, deflection scanning coil and size stored in the storage chip in beam energy distribution control circuit, comprising:
Adjustment deflection scanning coil, makes the Scanning Detction point position of electron beam stabilization in multiple Scanning Detction point;
Beam energy Density Detection analyser is utilized to analyze the focal position of Scanning Detction point position and bundle shape of spot, adjusting second respectively disappears as the focusing current of disappear image current and the output of lower focusing coil driving power of the output of coil drive power supply, when focal position and bundle shape of spot reach after setting requires, the image current value that disappears exported as coil that disappears second, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size are stored in the storage chip in beam energy distribution control circuit.
In one embodiment, in said method, to disappear to be scanned some direction of current in image current value, point focusing current value to be scanned, deflection scanning coil and size of current according to point to be scanned, treat each point to be scanned in scan pattern and formally scan, comprising:
Beam energy distribution control circuit disappears respectively to deflection scanning coil drive power supply, second and sends the coordinate information of to be scanned some position as coil drive power supply and lower focusing coil driving power;
Deflection scanning coil drive power supply is according to the coordinate information of to be scanned some position, search to be scanned some direction of current in deflection scanning coil corresponding to coordinate information in storer and size of current, control the deflection of deflection scanning coil to make electron beam spot be stabilized in point to be scanned according to be scanned some direction of current in the deflection scanning coil found and size of current;
Second disappear picture coil drive power supply and lower focusing coil driving power respectively according to the coordinate information of to be scanned some position, search point to be scanned corresponding to coordinate information in storer to disappear image current value and point focusing current value to be scanned, to disappear image current value and point focusing current value to be scanned according to the point to be scanned found, control second respectively to disappear to disappear to second as coil drive power supply and input point to be scanned as coil and to disappear image current value, control lower focusing coil driving power and input point focusing current value to be scanned to lower focusing coil, formally scan to make the beam energy density of different to be scanned some position in scanning area be consistent.
In one embodiment, Scanning Detction point comprises: scanning area centre scan check point and be positioned at around centre scan check point relative to X to the symmetrical boundary position Scanning Detction point of, Y-direction central axis.
Technical scheme provided by the invention, beam energy distribution control circuit calculates and records when the focal position of point to be scanned and bundle shape of spot reach size of current when setting requires in deflection scanning coil and direction, second disappears as the focusing current value disappeared in image current value and lower focusing coil in coil, and according to the size of current in the deflection scanning coil calculated and direction, the image current value that disappears and focusing current value control electron beam and scan, to make the electron beam energy consistent in density of the point to be scanned of diverse location in setting scanning area, improve Electron Beam Quality, make electron gun can long-term stable operation, reach precise hard_drawn tuhes beam energy and precision and spread the technique effect that powder is shaped fast.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms a application's part, does not form limitation of the invention.In the accompanying drawings:
Fig. 1 is the structural representation of cold-cathode gun electromagnetic control system in the invention process;
Fig. 2 first to disappear picture coil drive power supply or upper focusing coil driving power structural representation in the invention process;
Fig. 3 second to disappear picture coil drive power supply or lower focusing coil driving power structural representation in the invention process;
Fig. 4 be in the invention process X to the structural representation of coil drive power supply or Y-direction coil drive power supply;
Fig. 5 describes analyzing spot position to change the schematic diagram that posterior cord shape of spot and focal position change in the invention process;
Fig. 6 is the schematic flow sheet of the control method of cold-cathode gun electromagnetic control system in the invention process;
Fig. 7 is the schematic diagram of the Scanning Detction point determined in the invention process.
Key fitment symbol description:
1 ~ cold cathode; 101 ~ high-voltage power supply; 2 ~ the first disappear as coil; 201 ~ the first disappear as coil drive power supply; 3 ~ discharge anode; 4 ~ electron gun housing; 41 ~ wireway joint flange; 5 ~ upper focusing coil; 501 ~ upper focusing coil driving power; 6 ~ the second disappear as coil; 601 ~ the second disappear as coil drive power supply; 7 ~ lower focusing coil; 701 ~ lower focusing coil driving power; 8 ~ deflection scanning coil; 80 ~ deflection scanning coil drive power supply; 81 ~ X is to coil; 82 ~ Y-direction coil; 811 ~ X is to the first end of coil or Y-direction coil; 812 ~ X is to the second end of coil or Y-direction coil; 801 ~ beam energy distribution control circuit; 9 ~ vacuum chamber; 10 ~ workpiece; 11 ~ electron beam; 12 ~ anode; 111 ~ the first current sensors; 222 ~ the second current sensors; 333 ~ three current sensor.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly understand, below in conjunction with embodiment and accompanying drawing, the present invention is described in further details.At this, exemplary embodiment of the present invention and illustrating for explaining the present invention, but not as a limitation of the invention.
Fig. 1 is the structural representation of cold-cathode gun electromagnetic control system in the invention process; As shown in Figure 1, this electromagnetic control system comprises:
That installs successively from top to bottom along electron gun axis first disappears and to disappear picture coil 6, lower focusing coil 7 and deflection scanning coil 8 as coil 2, upper focusing coil 5, second;
First disappears picture coil drive power supply 201, disappears to be connected as coil 2 with first, provides steady current for disappearing to first as coil 2, makes first to disappear and produces stabilizing magnetic field as coil 2;
Upper focusing coil driving power 501, is connected with upper focusing coil 5, for providing steady current to upper focusing coil 5, makes focusing coil 5 carry out an electromagnetic focusing to the electron beam penetrated from electron gun anode 12;
Second disappears picture coil drive power supply 601, disappears to be connected as coil 6 with second, provides the adjustable image current that disappears, to make the bundle shape of spot of diverse location analyzing spot consistent for disappearing to second as coil 6;
Lower focusing coil driving power 701, is connected with lower focusing coil 7, for providing fast-changing focusing current to lower focusing coil 7, changes the magnetic field that lower focusing coil 7 produces fast, to realize the secondary electromagnetic focusing to electron beam fast;
Deflection scanning coil drive power supply 80, is connected with deflection scanning coil 8, for providing fast-changing electric current to deflection scanning coil 8, realizes the quick deflection of electron beam, to make electron beam fast and stable at point to be scanned;
Beam energy distribution control circuit 801, disappear as coil drive power supply 601 with described second, lower focusing coil driving power 701 is connected with deflection scanning coil drive power supply 80, for calculating and storing when the focal position of point to be scanned and bundle shape of spot reach size of current when setting requires in deflection scanning coil 8 and direction, second disappears as the focusing current value disappeared in image current value and lower focusing coil 7 in coil 6, and according to the size of current in the deflection scanning coil calculated and direction, the image current value that disappears and focusing current value control electron beam and scan, to make the electron beam energy consistent in density of the point to be scanned of diverse location in setting scanning area.
During concrete enforcement, first disappears disappears to install successively from top to bottom along electron gun axis as coil 6, lower focusing coil 7 and deflection scanning coil 8 as coil 2, upper focusing coil 5, second and refers to: install from electron gun cold cathode 1 down to the direction of vacuum chamber 9.Above-mentioned upper focusing coil 5, lower focusing coil 7, upper focusing coil driving power 501 and be relative concept up and down in lower focusing coil driving power 701 title, the name of upper focusing coil 5 can be the first focusing coil, the name of lower focusing coil 7 can be the second focusing coil, the name of upper focusing coil driving power 501 can be the first focusing coil driving power, and the name of lower focusing coil driving power 701 can be the second focusing coil driving power.
During concrete enforcement, upper focusing coil driving power 501 exports according to the setting value of accelerating potential the electromagnetic focusing that steady current realizes electron beam, this accelerating potential is the negative voltage of more than the tens of kilovolt applied between discharge anode 3 and anode 12, and between cold cathode 1 and discharge anode 3, be added with the negative voltage of a number kilovolt to volt up to ten thousand.Being added with a number kilovolt to the negative voltage of volt up to ten thousand between described cold cathode 1 and discharge anode 3 is suspended on described accelerating potential; High-voltage power supply 101 is connected with discharge anode 3 with cold cathode 1, and namely high-voltage power supply 101 provides such accelerating potential.
The technical scheme that the embodiment of the present invention provides, beam energy distribution control circuit calculates and records when the focal position of point to be scanned and bundle shape of spot reach size of current when setting requires in deflection scanning coil and direction, second disappears as the focusing current value disappeared in image current value and lower focusing coil in coil, and according to the size of current in the deflection scanning coil calculated and direction, the image current value that disappears and focusing current value control electron beam and scan, to make the electron beam energy consistent in density of the point to be scanned of diverse location in setting scanning area, improve Electron Beam Quality, make electron gun can long-term stable operation, reach precise hard_drawn tuhes beam energy and precision and spread the technique effect that powder is shaped fast.
In one embodiment, as shown in Figure 1, first disappears that to be arranged on as coil 2 discharge cavity that the cold cathode 1 of electron gun and discharge anode 3 form outdoor.Such first disappear as coil driver 201 export steady current to first disappear picture coil 2, first is made to disappear as the stationary magnetic field of coil 2 generation, the recombination probability of charged ion in discharge cavity chamber interior walls can be reduced, increase the collision probability of electronics and other particle, improve the electrical quantity of discharge cavity indoor.
During concrete enforcement, the second picture coil drive power supply 201 that disappears is identical with control method with the electric source topology circuit structure of lower focusing coil driving power 501, Fig. 2 is the first structural representation disappeared as coil drive power supply or upper focusing coil driving power in the invention process, as shown in Figure 2, first disappears can comprise as coil drive power supply 201 or upper focusing coil driving power 501: the first constant pressure source, sustained diode 1, N-NMOS N-channel MOS N field effect transistor MOSFET Q1, first current sensor 111, first current sampling circuit, first current control circuit, first given value of current circuit and the first driving circuit, wherein,
During concrete enforcement, first disappears as the method for attachment in the circuit of coil drive power supply 201 or upper focusing coil driving power 501 between each terminal is: negative terminal "-" ground connection of the first constant pressure source, anode "+" series connection first of the first constant pressure source disappears as the drain D being connected to N-channel mosfet Q1 after coil 2 or upper focusing coil 5, sustained diode 1 is connected in parallel on the first two ends disappeared as coil 2 or upper focusing coil 5, and the negative electrode of sustained diode 1 connects the anode of the first constant pressure source; The anode of sustained diode 1 connects the drain electrode of N-channel mosfet Q1; The source S of N-channel mosfet Q1 is connected and is connected to the negative terminal "-" of the first constant pressure source after the first current sensor 111;
The output terminal of the first current sensor 111 connects the input end of the first current sampling circuit; The output terminal of the first current sampling circuit connects an input end of the first current control circuit; The output terminal of the first given value of current circuit connects another input end of the first current control circuit; The output terminal of the first current control circuit connects the input end of the first driving circuit; The output terminal of the first driving circuit connects the grid G of N-channel mosfet Q1.
First disappears as the current control process of coil drive power supply 201: to reach optimal discharge state for standard, determine that first disappears the maximum current flow through as coil according to test, described maximum current set-point is input to the first current control circuit by the first given value of current circuit, first current control circuit exports control voltage signal, after the first driving circuit, be input to the grid G of N-channel mosfet Q1; First current sampling circuit gathers the current feedback signal of the first current sensor 111, described current feedback signal is input to the first current control circuit, the current signal that described current feedback signal is given with the first given value of current circuit compares, by the first current control circuit regulation output control voltage signal, regulate the magnifying state of N-channel mosfet Q1, make output current reach setting requirement.
The current control process and first of upper focusing coil driving power 501 disappears identical as the current control process of coil drive power supply 201, upper focusing coil driving power 501 exports maximum current according to the operating distance on accelerating potential set-point and electron gun axis, to reach best surface focus for standard, determine according to test the maximum current that upper focusing coil flows through.
In addition, in Fig. 2, "+" is the anode of the first constant pressure source, "-" is the negative terminal of the first constant pressure source, C is the negative electrode of sustained diode 1, and A is the anode of sustained diode 1, and D is the drain electrode of N-channel mosfet Q1, S is the source electrode of N-channel mosfet Q1, G is the grid of N-channel mosfet Q1, and the define method about above-mentioned symbol in Fig. 3 with Fig. 4 is similar, is not repeating below.
During concrete enforcement, the second picture coil drive power supply 601 that disappears is identical with control method with the electric source topology circuit structure of lower focusing coil driving power 701, Fig. 3 is the second structural representation disappeared as coil drive power supply or lower focusing coil driving power in the invention process, as shown in Figure 3, second disappears can comprise as coil drive power supply 601 or lower focusing coil driving power 701: the second constant pressure source, sustained diode 2, N-channel mosfet Q2, second current sensor 222, second current sampling circuit, second current control circuit, second given value of current circuit, second driving circuit and the first synchronization control circuit, wherein,
Second disappears as the connection in the circuit of coil drive power supply 601 or lower focusing coil driving power 701 between each terminal is: negative terminal "-" ground connection of the second constant pressure source, and anode "+" series connection second of the second constant pressure source disappears as the drain D being connected to N-channel mosfet Q2 after coil 6 or lower focusing coil 7; Sustained diode 2 is connected in parallel on the second two ends disappeared as coil 6 or lower focusing coil 7, and the negative electrode of sustained diode 2 connects the anode of the second constant pressure source; The anode of sustained diode 1 connects the drain electrode of N-channel mosfet Q2; The source S of N-channel mosfet Q2 is connected and is connected to the negative terminal "-" of the second constant pressure source after the second current sensor 222;
The output terminal of the second current sensor 222 connects the input end of the second current sampling circuit; The output terminal of the second current sampling circuit connects the first input end of the second current control circuit; The output terminal of the second given value of current circuit connects the second input end of the second current control circuit; The output terminal of the first synchronization control circuit connects the 3rd input end of the second current control circuit; The output terminal of the second current control circuit connects the input end of the second driving circuit; The output terminal of the second driving circuit connects the grid G of N-channel mosfet Q2.
During concrete enforcement, deflection scanning coil 8 comprises X to coil 81 and Y-direction coil 82; Deflection scanning coil drive power supply 80 comprises for driving X to the X of coil 81 to coil drive power supply with for driving the Y-direction coil drive power supply of Y-direction coil 82; Deflection scanning coil 8 is formed by axisymmetric two groups of coil windings, and the magnetic field that described two groups of coils produce is mutually vertical, respectively by the X in deflection scanning coil drive power supply 80 to coil drive power supply and Y-direction coil drive power drives.
During concrete enforcement, X in deflection scanning coil drive power supply 80 of the present invention is identical with the topological structure of Y-direction coil drive power supply to coil drive power supply, the control method adopted is also identical, Fig. 4 be in the invention process X to the structural representation of coil drive power supply or Y-direction coil drive power supply, as shown in Figure 4, X can comprise to coil drive power supply or Y-direction coil drive power supply: the 3rd constant pressure source, for the N-channel mosfet Q3 making X commutate to coil 81 or Y-direction coil 82, N-channel mosfet Q4, N-channel mosfet Q5, N-channel mosfet Q6, for regulating X to the N-channel mosfet Q7 of size of current in coil 81 or Y-direction coil 82, 3rd current sensor 333, 3rd current sampling circuit, second synchronization control circuit, 3rd given value of current circuit, scan control circuit, 3rd driving circuit, four-wheel drive circuit and the 5th driving circuit, wherein,
X to the connection between each terminal in coil drive power supply or Y-direction coil drive power supply is: negative terminal "-" ground connection of the 3rd constant pressure source, the anode "+" of the 3rd constant pressure source connects the drain D of N-channel mosfet Q3 and the drain D of N-channel mosfet Q4, the source S of N-channel mosfet Q3 connects the first end 811 of X to coil 81 or Y-direction coil 82, and first end 811 connects the drain D of N-channel mosfet Q5; The source S of N-channel mosfet Q4 connects X connects drain D from N-channel mosfet Q6 to the second end 812, second end 812 of coil 81 or Y-direction coil 82; The source S of N-channel mosfet Q6 connects the source S of N-channel mosfet Q5; The source S of N-channel mosfet Q5 is connected the drain D of N-channel mosfet Q7 with the source S of N-channel mosfet Q6; The negative terminal "-" of the 3rd constant pressure source is connected to after source S series connection the 3rd current sensor 333 of N-channel mosfet Q7;
The output terminal of the 3rd current sensor 333 is connected with the input end of the 3rd current sampling circuit; The output terminal of the 3rd current sampling circuit is connected with the first input end of scan control circuit; The output terminal of the 3rd given value of current circuit is connected with the second input end of scan control circuit; The output terminal of the second synchronization control circuit is connected with the 3rd input end of scan control circuit; First output terminal of scan control circuit is connected with the input end of the 3rd driving circuit; Second output terminal of scan control circuit is connected with the input end of four-wheel drive circuit; 3rd output terminal of scan control circuit is connected with the input end of the 5th driving circuit;
3rd driving circuit connects the grid G of N-channel mosfet Q7; Four-wheel drive circuit connects the grid G of N-channel mosfet Q3 and the grid G of N-channel mosfet Q6; 5th driving circuit connects the grid G of N-channel mosfet Q4 and the grid G of N-channel mosfet Q5.
As shown in Figure 4, X forms " H " bridge to N-channel mosfet Q3, N-channel mosfet Q4, N-channel mosfet Q5, N-channel mosfet Q6 in coil drive power supply, Y-direction coil drive electric source topology circuit, all works on off state, for commutation; When described N-channel mosfet Q3, N-channel mosfet Q6 is in opening state, and described N-channel mosfet Q4, N-channel mosfet Q5 is in closed condition, electric current from N-channel mosfet Q3 source electrode through X to coil or Y-direction coil, flow to the drain electrode of N-channel mosfet Q6; When described N-channel mosfet Q3, N-channel mosfet Q6 is in closed condition, and described N-channel mosfet Q4, N-channel mosfet Q5 is in opening state, electric current from N-channel mosfet Q4 source electrode through X to coil or Y-direction coil, flow to the drain electrode of N-channel mosfet Q5; On described " H " bridge N-channel mosfet open mode, change X to sense of current in coil 81, Y-direction coil 82; N-channel mosfet Q7 works in magnifying state, for Current adjustment; Q7 according to the X in sweep waveform adjustment deflection scanning coil 8 to the size of current in coil 81, Y-direction coil 82.
The first synchronization control circuit in above-described embodiment and the second synchronization control circuit are used for when scanning, disappear as coil drive power supply and lower focusing coil driving power synchronous working by controlling deflection scanning coil drive power supply, second, thus deflection scanning coil, second is disappeared carry out synchronous working as coil and lower focusing coil, jointly coordinated the scanning work of electron beam.Certainly, X can be controlled independently carry out scanning work by scan control circuit to coil drive power supply, Y-direction coil drive power supply, also can disappear and to synchronous working as coil driver, lower focusing coil driving power with second.
Fig. 5 describes analyzing spot position to change the schematic diagram that posterior cord shape of spot and focal position change in the invention process, as shown in Figure 5, due to electronics, to manufacture (EBM) deflection scanning scope fast larger, when electron beam 11 deflects α degree, from L0 (n0, when m0) deflecting into L2 (n0, m2), electron beam 11 operating distance increases to h1 by h; If setting focus is surperficial focus, because operating distance changes, when electron beam 11 deflects into L2 (n0, m2) from L0 (n0, m0), then focal position is in L1, and focus becomes upper focus by surperficial focus; Bundle shape of spot is then changing into the ellipse at L2 (n0, m2) place by the circle at L0 (n0, m0) some place.Because focal position, operating distance, bundle shape of spot all change, and when deflection of a beam of electrons disappears picture, focus control again to L2 (n0, m2), at L2 (n0, m2) place, beam energy density will change.As can be seen here, the principal element affecting Electron Beam Quality comprises: focal position and bundle shape of spot, and the technical scheme that the embodiment of the present invention provides will adjust focal position and the laggard line scanning of bundle shape of spot exactly, to improve electron beam quality of beam.
In order to realize the object of above-mentioned raising electron beam quality of beam, the embodiment of the present invention is except disclosing the cold-cathode gun electromagnetic control system of the Quick-forming as Fig. 1 to 4, additionally provide the control method of the cold-cathode gun electromagnetic control system of above-mentioned Quick-forming, Fig. 6 is the schematic flow sheet of the control method of cold-cathode gun electromagnetic control system in the invention process, as shown in Figure 6, the method comprises the steps:
Step 1: multiple Scanning Detction point is set in deflection of a beam of electrons scanning area;
Step 2: when each Scanning Detction point place focal position and bundle shape of spot reach setting require time, determine each Scanning Detction point place one by one, the image current value that disappears that second disappears exports as coil, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size, and by the direction of current in the image current value that disappears, focusing current value, deflection scanning coil and size stored in the storage chip in beam energy distribution control circuit;
Step 3: beam energy distribution control circuit is according to pattern to be scanned, prescan was carried out before electron beam formally scans, according to the direction of current in the image current value that disappears at each Scanning Detction point place, focusing current value, deflection scanning coil and size, adopt method of interpolation, calculate the disappear point to be scanned that exports as coil of second of each to be scanned some position in pattern to be scanned one by one and to disappear image current value, point focusing current value to be scanned that lower focusing coil exports, to be scanned some direction of current in deflection scanning coil and size;
Step 4: to be scanned some direction of current in the coordinate information of each to be scanned some position and deflection scanning coil and size of current are stored in the storer of deflection scanning coil drive power supply by beam energy distribution control circuit, the image current value that the coordinate information of each coordinate points position to be scanned, point to be scanned disappeared and point focusing current value to be scanned are stored into second respectively and disappear in the storer of picture coil drive power supply and lower focusing coil driving power;
Step 5: to disappear to be scanned some direction of current in image current value, point focusing current value to be scanned, deflection scanning coil and size of current according to point to be scanned, treat each point to be scanned in scan pattern and formally scan.
In one embodiment, in said method, step 2 comprises:
Step 21: adjustment deflection scanning coil, makes the Scanning Detction point position of electron beam stabilization in multiple Scanning Detction point;
Step 22: utilize beam energy Density Detection analyser to analyze the focal position of Scanning Detction point position and bundle shape of spot, adjusting second respectively disappears as the focusing current of disappear image current and the output of lower focusing coil driving power of the output of coil drive power supply, when focal position and bundle shape of spot reach after setting requires, the image current value that disappears exported as coil that disappears second, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size are stored in the storage chip in beam energy distribution control circuit.
In one embodiment, in said method, step 5 comprises:
Step 51: beam energy distribution control circuit disappears respectively to deflection scanning coil drive power supply, second and sends the coordinate information of to be scanned some position as coil drive power supply and lower focusing coil driving power;
Step 52: deflection scanning coil drive power supply is according to the coordinate information of to be scanned some position, search to be scanned some direction of current in deflection scanning coil corresponding to coordinate information in storer and size of current, control the deflection of deflection scanning coil to make electron beam spot be stabilized in point to be scanned according to be scanned some direction of current in the deflection scanning coil found and size of current;
Step 53: second disappear picture coil drive power supply and lower focusing coil driving power respectively according to the coordinate information of to be scanned some position, search point to be scanned corresponding to coordinate information in storer to disappear image current value and point focusing current value to be scanned, to disappear image current value and point focusing current value to be scanned according to the point to be scanned found, control second respectively to disappear to disappear to second as coil drive power supply and input point to be scanned as coil and to disappear image current value, control lower focusing coil driving power and input point focusing current value to be scanned to lower focusing coil, formally scan to make the beam energy density of different to be scanned some position in scanning area be consistent.
In one embodiment, as shown in Figure 7, Scanning Detction point comprises: scanning area centre scan check point and be positioned at around centre scan check point relative to X to the symmetrical boundary position Scanning Detction point of, Y-direction central axis.The object of such selection is: when carrying out prescan, in the image current value that disappears, focusing current value and the deflection scanning coil that utilize method of interpolation to carry out calculating when the focal position of each point to be scanned in pattern to be scanned and bundle shape of spot reach requirement when size of current and direction, conveniently to calculate.
Composition graphs 1 to Fig. 7 more below, is described with example, so that understand how to implement the present invention.
The control method of the cold-cathode gun electromagnetic control system of Quick-forming in the invention process, step comprises:
A () arranges eight boundary position Scanning Detction points on the border of electron beam maximum deflection scanning area: F (n1, m2), G (n1, m0), H (n1, m1), I (n0, m2), K (n0, m1), L (n2, m2), M (n2, and N (n2 m0), m1), it is symmetrical to, Y-direction central axis relative to X that centre scan check point a: J (n0, m0) eight boundary position Scanning Detction points are set in center;
B (), by the 3rd given value of current circuit, the X manually in adjustment deflection scanning coil 8, to the size of current in coil, Y-direction coil and direction, makes electron beam 11 be stabilized in one of them Scanning Detction point J (n0, m0) position;
C () is respectively by the second given value of current circuit, manual adjustment second disappears as the focusing current of the image current that disappears of coil drive power supply 601 output, the output of lower focusing coil driving power 701, adopt beam energy Density Detection analyser to center Scanning Detction point J (n0, m0) focal position and bundle shape of spot are analyzed, after focal position and bundle shape of spot reach setting requirement, the X of record J (n0, m0) Scanning Detction point position is to the current value in the current value in coil, Y-direction coil, focusing current value and the image current value that disappears;
D () adopts (b) ~ (c) described method to detect one by one and F (n1 in writing scan region, m2), G (n1, m0), H (n1, m1), I (n0, m2), K (n0, m1), L (n2, m2), M (n2, m0), N (n2, m1) X of each boundary scan check point to the current value in the current value in coil, Y-direction coil, focusing current value, disappear image current value, and by described each current value stored in the storage chip in beam energy distribution control circuit 801;
E () beam energy distribution control circuit 801 is according to pattern to be scanned, before electron beam formally scans, carry out prescan: according to the X of an above-mentioned centre scan check point and eight boundary scan check point positions to the current value in the current value in coil, Y-direction coil, focusing current value, disappear image current value, adopt method of interpolation, determine one by one the X of each coordinate points position to be scanned in pattern to be scanned to the current value in the current value in coil, Y-direction coil, focusing current value, disappear image current value;
F the X of each to be scanned some position in the pattern to be scanned calculated is stored in the storer of the 2nd synchronization control circuit of deflection scanning coil drive power supply 80 to the current value in the current value in coil, Y-direction coil by () beam energy distribution control circuit 801; The focusing current value of each to be scanned some position in the pattern each to be scanned calculated, the image current value that disappears are stored into lower focusing coil driving power, second and disappear in the storer of the 1st synchronous scanning control circuit in picture coil drive power supply by beam energy distribution control circuit 801 respectively;
G () is in electron beam scanning process, beam energy distribution control circuit 801 is respectively to deflection scanning coil drive power supply 80, lower focusing coil driving power 701, second disappears sends the coordinate of analyzing spot position as coil drive power supply 601, deflection scanning coil drive power supply 80 according to the coordinate of certain analyzing spot position respectively to X to coil drive power supply, input current Setting signal and electric current commutation signal in the scan control circuit of Y-direction coil drive power supply, commutation signal and current controling signal is exported by scan control circuit, respectively through four-wheel drive circuit, 5th driving circuit, 3rd driving circuit, control Q3, Q4, Q5, the on off state of Q6 and the magnifying state of Q7, electron beam spot is made to be stabilized in described analyzing spot position,
Focusing coil driving power 701 under (h), second disappears picture coil drive power supply 601 respectively according to the coordinate of the given described analyzing spot position of beam energy distribution control circuit 801, after mating with the current information of the corresponding coordinate position of recording in storer in respective synchronization control circuit, given value of current signal is sent into respectively to the second respective current control circuit, by the second current control circuit output current control signal, through the second driving circuit, the magnifying state of control Q2, the focal position of described to be scanned some position and bundle shape of spot is made to remain stable, the beam energy density of different scanning point position in scanning area is consistent formally scan,
Repeat the step of (g) ~ (h), until in scan pattern all analyzing spots all by electron beam scanning.
In Fig. 5 and Fig. 7, F, G, H, I, K, L, M, N are boundary position Scanning Detction point, Scanning Detction point centered by J; α is deflection angle; O is initial inflexion point.
In addition, the method of interpolation mentioned in above-mentioned steps (e) is also known as " interpolation method ", it is the functional value utilizing function f (x) to insert some points in certain interval, make suitable specific function, these aspects get given value, by the approximate value of the value of this specific function as function f (x) on other aspects in interval, this method is called method of interpolation.Method of interpolation is the optimization method being applied to the technical field such as Machine Design, electronics.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the embodiment of the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (9)
1. a cold-cathode gun electromagnetic control system, is characterized in that, comprising:
The first disappear picture coil (2), the upper focusing coil (5), second installed successively from top to bottom along electron gun axis disappears picture coil (6), lower focusing coil (7) and deflection scanning coil (8);
First disappears as coil drive power supply (201), with described first disappear picture coil (2) be connected, for give described first disappear picture coil (2) steady current is provided, make described first disappear picture coil (2) produce stabilizing magnetic field;
Upper focusing coil driving power (501), be connected with described upper focusing coil (5), for providing steady current to described upper focusing coil (5), described upper focusing coil (5) is made to carry out an electromagnetic focusing to the electron beam penetrated from electron gun anode (12);
Second disappear picture coil drive power supply (601), with described second disappear picture coil (6) is connected, for give described second disappear as coil (6) provide the adjustable image current that disappears, to make the bundle shape of spot of diverse location analyzing spot consistent;
Lower focusing coil driving power (701), be connected with described lower focusing coil (7), fast-changing focusing current is provided for giving described lower focusing coil (7), the magnetic field that the described lower focusing coil (7) of quick change produces, to realize the secondary electromagnetic focusing to described electron beam fast;
Deflection scanning coil drive power supply (80), be connected with described deflection scanning coil (8), for providing fast-changing electric current to described deflection scanning coil (8), realize the quick deflection of electron beam, to make electron beam fast and stable at point to be scanned;
Beam energy distribution control circuit (801), disappear as coil drive power supply (601) with described second, lower focusing coil driving power (701) is connected with deflection scanning coil drive power supply (80), for calculating and storing when the focal position of point to be scanned and bundle shape of spot reach size of current when setting requires in deflection scanning coil (8) and direction, the second focusing current value disappeared in image current value and lower focusing coil (7) disappeared in picture coil (6), and according to the size of current in the deflection scanning coil calculated and direction, the image current value that disappears and focusing current value control electron beam and scan, to make the electron beam energy consistent in density of the point to be scanned of diverse location in setting scanning area.
2. electromagnetic control system as claimed in claim 1, is characterized in that, described first picture coil (2) that disappears is arranged on the discharge cavity outdoor that the cold cathode (1) of electron gun and discharge anode (3) form.
3. electromagnetic control system as claimed in claim 1, it is characterized in that, described first disappear picture coil drive power supply (201) or upper focusing coil driving power (501) comprising: the first constant pressure source, sustained diode 1, N-NMOS N-channel MOS N field effect transistor MOSFET Q1, the first current sensor (111), the first current sampling circuit, the first current control circuit, the first given value of current circuit and the first driving circuit; Wherein,
The negativing ending grounding of described first constant pressure source, disappear picture coil (2) or the drain electrode of upper focusing coil (5) and described N-channel mosfet Q1 of anode and described first is connected; Described sustained diode 1 is connected in parallel on the described first two ends disappeared as coil (2) or upper focusing coil (5); The negative electrode of described sustained diode 1 is connected with the anode of described first constant pressure source; The anode of described sustained diode 1 is connected with the drain electrode of described N-channel mosfet Q1; The negative terminal of described first constant pressure source is connected to after first current sensor (111) described in the source series of N-channel mosfet Q1;
The output terminal of described first current sensor (111) connects the input end of described first current sampling circuit; The output terminal of described first current sampling circuit connects an input end of described first current control circuit; The output terminal of described first given value of current circuit connects another input end of described first current control circuit; The output terminal of described first current control circuit connects the input end of described first driving circuit; The output terminal of described first driving circuit connects the grid of N-channel mosfet Q1.
4. electromagnetic control system as claimed in claim 1, it is characterized in that, described second disappear picture coil drive power supply (601) or lower focusing coil driving power (701) comprising: the second constant pressure source, sustained diode 2, N-channel mosfet Q2, the second current sensor (222), the second current sampling circuit, the second current control circuit, the second given value of current circuit, the second driving circuit and the first synchronization control circuit; Wherein,
The negativing ending grounding of described second constant pressure source, disappear picture coil (6) or the drain electrode of lower focusing coil (7) and described N-channel mosfet Q2 of anode and described second is connected; Described sustained diode 2 is connected in parallel on the described second two ends disappeared as coil (6) or lower focusing coil (7); The negative electrode of described sustained diode 2 is connected with the anode of described second constant pressure source; The anode of described sustained diode 2 is connected with the drain electrode of described N-channel mosfet Q2; The negative terminal of described second constant pressure source is connected to after second current sensor (222) described in the source series of N-channel mosfet Q2;
The output terminal of described second current sensor (222) connects the input end of described second current sampling circuit; The output terminal of described second current sampling circuit connects the first input end of described second current control circuit; The output terminal of described second given value of current circuit connects the second input end of described second current control circuit; The output terminal of described first synchronization control circuit connects the 3rd input end of described second current control circuit; The output terminal of described second current control circuit connects the input end of described second driving circuit; The output terminal of described second driving circuit connects the grid of described N-channel mosfet Q2.
5. electromagnetic control system as claimed in claim 1, it is characterized in that, described deflection scanning coil (8) comprises X to coil (81) and Y-direction coil (82); Described deflection scanning coil drive power supply (80) comprises for driving described X to the X of coil (81) to coil drive power supply with for driving the Y-direction coil drive power supply of described Y-direction coil (82);
Described X comprises to coil drive power supply or described Y-direction coil drive power supply: the 3rd constant pressure source, for the N-channel mosfet Q3 making described X commutate to coil (81) or Y-direction coil (82), N-channel mosfet Q4, N-channel mosfet Q5, N-channel mosfet Q6, for regulating X to the N-channel mosfet Q7 of size of current in coil (81) or Y-direction coil (82), 3rd current sensor (333), 3rd current sampling circuit, second synchronization control circuit, 3rd given value of current circuit, scan control circuit, 3rd driving circuit, four-wheel drive circuit and the 5th driving circuit, wherein,
The negativing ending grounding of described 3rd constant pressure source, anode connects the drain electrode of N-channel mosfet Q3 and the drain electrode of N-channel mosfet Q4, the source electrode of described N-channel mosfet Q3 connects the first end of described X to coil (81) or Y-direction coil (82), described first end connects the drain electrode of described N-channel mosfet Q5, the source electrode of described N-channel mosfet Q4 connects second end of described X to coil (81) or Y-direction coil (82), described second end connects the drain electrode of N-channel mosfet Q6, the source electrode of described N-channel mosfet Q6 connects the source electrode of N-channel mosfet Q5, the source electrode of described N-channel mosfet Q5 is connected the drain electrode of N-channel mosfet Q7 with the source electrode of N-channel mosfet Q6, the negative terminal of described 3rd constant pressure source is connected to after 3rd current sensor (333) described in the source series of described N-channel mosfet Q7,
The output terminal of described 3rd current sensor (333) is connected with the input end of described 3rd current sampling circuit; The output terminal of described 3rd current sampling circuit is connected with the first input end of described scan control circuit; The described output terminal of the 3rd given value of current circuit is connected with the second input end of described scan control circuit; The output terminal of described second synchronization control circuit is connected with the 3rd input end of described scan control circuit; First output terminal of described scan control circuit is connected with the input end of described 3rd driving circuit; Second output terminal of described scan control circuit is connected with the input end of described four-wheel drive circuit; 3rd output terminal of described scan control circuit is connected with the input end of described 5th driving circuit;
Described 3rd driving circuit connects the grid of N-channel mosfet Q7; Described four-wheel drive circuit connects the grid of N-channel mosfet Q3 and the grid of N-channel mosfet Q6; Described 5th driving circuit connects the grid of described N-channel mosfet Q4 and the grid of N-channel mosfet Q5.
6. the control method of the cold-cathode gun electromagnetic control system as described in claim as arbitrary in claim 1 to 5, is characterized in that, comprising:
Multiple Scanning Detction point is set in deflection of a beam of electrons scanning area;
When each Scanning Detction point place focal position and bundle shape of spot reach setting require time, determine each Scanning Detction point place one by one, the image current value that disappears that second disappears exports as coil, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size, and by the direction of current in the described image current value that disappears, focusing current value, deflection scanning coil and size stored in the storage chip in beam energy distribution control circuit;
Beam energy distribution control circuit is according to pattern to be scanned, prescan was carried out before electron beam formally scans, according to the direction of current in the image current value that disappears at each described Scanning Detction point place, focusing current value, deflection scanning coil and size, adopt method of interpolation, calculate the disappear point to be scanned that exports as coil of second of each to be scanned some position in described pattern to be scanned one by one and to disappear image current value, point focusing current value to be scanned that lower focusing coil exports, to be scanned some direction of current in deflection scanning coil and size;
To be scanned some direction of current in the coordinate information of each to be scanned some position and deflection scanning coil and size of current are stored in the storer of deflection scanning coil drive power supply by beam energy distribution control circuit, and the image current value that the coordinate information of each coordinate points position to be scanned, point to be scanned disappeared and point focusing current value to be scanned are stored into second respectively and disappear in the storer of picture coil drive power supply and lower focusing coil driving power;
To disappear to be scanned some direction of current in image current value, point focusing current value to be scanned, deflection scanning coil and size of current according to described point to be scanned, point to be scanned each in described pattern to be scanned is formally scanned.
7. control method as claimed in claim 6, it is characterized in that, the described focal position when each Scanning Detction point place and bundle shape of spot reach setting when requiring, determine each Scanning Detction point place one by one, the image current value that disappears that second disappears exports as coil, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size, and by the direction of current in the described image current value that disappears, focusing current value, deflection scanning coil and size stored in the storage chip in beam energy distribution control circuit, comprising:
Adjustment deflection scanning coil, makes the Scanning Detction point position of electron beam stabilization in described multiple Scanning Detction point;
Beam energy Density Detection analyser is utilized to analyze the focal position of described Scanning Detction point position and bundle shape of spot, adjusting second respectively disappears as the focusing current of disappear image current and the output of lower focusing coil driving power of the output of coil drive power supply, when focal position and bundle shape of spot reach after setting requires, the image current value that disappears exported as coil that disappears described second, focusing current value that lower focusing coil exports, direction of current in deflection scanning coil and size are stored in the storage chip in beam energy distribution control circuit.
8. control method as claimed in claim 6, it is characterized in that, describedly to disappear to be scanned some direction of current in image current value, point focusing current value to be scanned, deflection scanning coil and size of current according to described point to be scanned, point to be scanned each in described pattern to be scanned is formally scanned, comprising:
Beam energy distribution control circuit disappears respectively to deflection scanning coil drive power supply, second and sends the coordinate information of to be scanned some position as coil drive power supply and lower focusing coil driving power;
Deflection scanning coil drive power supply is according to the coordinate information of described to be scanned some position, search to be scanned some direction of current in deflection scanning coil corresponding to coordinate information described in storer and size of current, control the deflection of deflection scanning coil to make electron beam spot be stabilized in described point to be scanned according to be scanned some direction of current in the deflection scanning coil found and size of current;
Second disappear picture coil drive power supply and lower focusing coil driving power respectively according to the coordinate information of described to be scanned some position, search point to be scanned corresponding to coordinate information described in storer to disappear image current value and point focusing current value to be scanned, to disappear image current value and point focusing current value to be scanned according to the point to be scanned found, control second respectively to disappear to disappear to second as coil drive power supply and input point to be scanned as coil and to disappear image current value, control lower focusing coil driving power and input point focusing current value to be scanned to lower focusing coil, formally scan to make the beam energy density of different to be scanned some position in scanning area be consistent.
9. control method as claimed in claim 6, it is characterized in that, described Scanning Detction point comprises: scanning area centre scan check point and be positioned at around described centre scan check point relative to X to the symmetrical boundary position Scanning Detction point of, Y-direction central axis.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6111732A (en) * | 1998-04-23 | 2000-08-29 | Transfotec International Ltee | Apparatus and method for detecting ground fault |
| WO2012055458A1 (en) * | 2010-10-25 | 2012-05-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for producing an electron beam |
| CN103458153A (en) * | 2013-07-11 | 2013-12-18 | 中国航空工业集团公司北京航空制造工程研究所 | Control electron beam high-frequency deflection scanning device based on same-type MOSFETs |
| US20140111111A1 (en) * | 2012-10-23 | 2014-04-24 | Lutron Electronics Inc., Co. | Gas discharge lamp ballast with reconfigurable filament voltage |
| CN103887131A (en) * | 2012-12-19 | 2014-06-25 | 北京有色金属研究总院 | 600kw gas discharge electronic gun and application method thereof |
-
2014
- 2014-12-19 CN CN201410804403.1A patent/CN104635617B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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