CN104635617B - Cold-cathode gun electromagnetic control system and its control method - Google Patents
Cold-cathode gun electromagnetic control system and its control method Download PDFInfo
- Publication number
- CN104635617B CN104635617B CN201410804403.1A CN201410804403A CN104635617B CN 104635617 B CN104635617 B CN 104635617B CN 201410804403 A CN201410804403 A CN 201410804403A CN 104635617 B CN104635617 B CN 104635617B
- Authority
- CN
- China
- Prior art keywords
- coil
- current
- scanned
- power supply
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
Abstract
The invention provides a kind of cold-cathode gun electromagnetic control system and its control method, the system includes：First disappear and disappear as coil, lower focus coil and deflection scanning coil as coil, upper focus coil, second along what electron gun axis were installed from top to bottom successively；First disappears disappears as coil drive power supply, lower focus coil driving power supply, deflection scanning coil drive power supply, beam energy distribution control circuit as coil drive power supply, upper focus coil driving power supply, second.The technical scheme that the present invention is provided is consistent can the beam energy density of diverse location scanning element in setting scanning area to be scanned, improve Electron Beam Quality, so that electron gun with long-term stable operation, can reach the technique effect of accurate control beam energy and the quick powdering shaping of accurate control.
Description
Technical field
The present invention relates to electron beam process equipment field, and in particular to a kind of cold-cathode gun electromagnetic control system and its
Control method.
Background technology
Electron beam quickly manufactures (EBM) technology successively to be melted according to predetermined scanning track using electromagnetic system control electron beam
Change a kind of advanced increases material manufacturing technology that metal dust forms functional part.There is short cycle, low cost, the spy of quick response
Point, EBM technology are dual-use technology, and there is irreplaceable superiority in some occasions, in Aero-Space, automobile work
The fields such as industry, petrochemical industry, nuclear industry, marine ship, all potential huge application prospect.Electron beam quickly shaping device is crucial
Technology includes that electronic beam current occurs system, electron-optical system of electron gun etc..
At present, electron beam quickly shaping device produces electronic beam current using hot-cathode electric rifle mostly, and burn-out life compares
Short, the general work time also only has dozens of hour, if processing heavy parts, needs frequently to change filament.Work is not only affected
Make progress, but also crudy can be affected.
Cold cathode electron line generation technique is by the electronics and cation in gas discharge plasma using high voltage
The secondary electron that collision negative electrode is produced is drawn, through a kind of elder generation that can be worked long hours that electromagnetism collecting system forms electron beam
Enter electron Beam Machining, as negative electrode employs cooling technology, general cathode life is up to more than 1000 hours.
At present, the running voltage of conventional cold-cathode gun is general all in below 40kV, through analysing in depth hot cathode
After electron gun and conventional cold cathode electron gun structure feature, a kind of height that running voltage can be brought up to more than 60kV has been invented
Pressure cold-cathode gun.Burn-out life is significantly improved, but still can not meet need of the EBM technology to high-quality electronic beam current
Ask.EBM technical requirements lectron beam spot diameters are in below 0.1mm, and quickly can scan, and this is accomplished by affecting quality of beam
High voltage cold-cathode gun electron-optical system power supply and its control system redesigned.
Except constituting the various solenoids and its intrinsic electrical quantity of drive circuit of electron-optical system to electron beam family status
Matter produce impact beyond, accelerating potential V orAnd affect the important parameter of quality of beam.
As high voltage power supply employs the topological circuit of double inversions of AC-DC-AC-DC-AC-DC so that output high pressure is micro-
Ripple very little, scope range of the fluctuation of voltage within ± 0.5%, therefore in the electron-optical system of the cold-cathode gun that is invented,
Calculate cold-cathode gun electromagnetic focusing system focal length and deflection of a beam of electrons apart from when, as voltage pulsation is to accelerating potential
V orImpact very little, impact of the corresponding voltage pulsation to electron beam focal length and deflection distance can ignore, therefore, institute
The control method of the electron-optical system of the cold-cathode gun for EBM of invention need not by V orFeedback quantity make
Stablizing for focal length and deflection distance is maintained for control signal.
Therefore, the principal element of quality of beam is affected to include：The focal position of electron beam spot and beam spot shape.Existing cold
The Electron Beam Quality of cathode electron gun is low, and scanning speed is slow.
Content of the invention
The invention provides a kind of cold-cathode gun electromagnetic control system, in order to improve Electron Beam Quality so as to suitable
Field is manufactured quickly for electron beam, and the electromagnetic control system includes：
Along electron gun axis install successively from top to bottom first disappear as coil, upper focus coil, second disappear as coil, under
Focus coil and deflection scanning coil；
The first picture coil drive power supply that disappears, is connected with the first picture coil that disappears, for disappearing and provide constant electricity as coil to first Stream, makes first to disappear and produce stabilizing magnetic field as coil;
Upper focus coil driving power supply, is connected with upper focus coil, for providing constant current to upper focus coil, is made
Focus coil carries out an electromagnetic focusing to the electron beam projected from electron gun anode；
Second disappears as coil drive power supply, disappears as coil is connected with second, can adjust as coil is provided for disappearing to second
The image current that disappears so that the beam spot shape of diverse location scanning element is consistent；
Lower focus coil driving power supply, is connected with lower focus coil, fast-changing poly- for providing to lower focus coil
Burnt electric current, the quick magnetic field for changing lower focus coil generation, quickly to realize the secondary electromagnetic focusing to electron beam；
Deflection scanning coil drive power supply, is connected with deflection scanning coil, for providing quick change to deflection scanning coil
The electric current of change, realizes the quick deflection of electron beam, so that electron beam fast and stable is in point to be scanned；
Beam energy distribution control circuit, disappears as coil drive power supply, lower focus coil driving power supply with described second
With deflection scanning coil drive power supply connect, for calculate and store when point to be scanned focal position and beam spot shape reach and set
Size of current and direction during provisioning request in deflection scanning coil, second disappear as coil in disappear image current value and lower focus coil
In focus current value, and according to the size of current in the deflection scanning coil for calculating and direction, disappear image current value and focusing
Current value control electron beam is scanned, so as to set the beam energy density one of diverse location point to be scanned in scanning area
Cause.
In one embodiment, first disappears as coil is installed in the discharge cavity of the cold cathode and discharge anode composition of electron gun
Outdoor.
In one embodiment, first disappears and includes as coil drive power supply or upper focus coil driving power supply：First constant pressure
Source, sustained diode 1, N- NMOS N-channel MOS N field effect transistor MOSFET Q1, the first current sensor, the first electricity
Stream sample circuit, the first current control circuit, the first given value of current circuit and the first drive circuit；Wherein,
The negativing ending grounding of the first constant pressure source, the anode of the first constant pressure source and first disappear as coil or upper focus coil and N- ditches
The drain electrode connection of road MOSFET Q1；Sustained diode 1 is connected in parallel on first and disappears as the two ends of coil or upper focus coil；Afterflow two
The negative electrode of pole pipe D1 is connected with the anode of the first constant pressure source；The anode of sustained diode 1 and the drain electrode of N- channel mosfet Q1
Connection；The negative terminal of the first constant pressure source is connected to after first current sensor of source series of N- channel mosfet Q1；
The outfan of the first current sensor connects the input of the first current sampling circuit；First current sampling circuit
Outfan connects an input of the first current control circuit；The outfan of the first given value of current circuit connects the first current control
Another input of circuit；The outfan of the first current control circuit connects the input of the first drive circuit；First drives electricity
The outfan on road connects the grid of N- channel mosfet Q1.
In one embodiment, second disappears and includes as coil drive power supply or lower focus coil driving power supply：Second constant pressure
Source, sustained diode 2, N- channel mosfet Q2, the second current sensor, the second current sampling circuit, the second current control
Circuit, the second given value of current circuit, the second drive circuit and the first synchronization control circuit；Wherein,
The negativing ending grounding of the second constant pressure source, the anode of the second constant pressure source and second disappear as coil or lower focus coil and N- ditches
The drain electrode connection of road MOSFET Q2；Sustained diode 2 is connected in parallel on second and disappears as the two ends of coil or lower focus coil；Afterflow two
The negative electrode of pole pipe D2 is connected with the anode of the second constant pressure source；The anode of sustained diode 2 and the drain electrode of N- channel mosfet Q2
Connection；The negative terminal of the second constant pressure source is connected to after second current sensor of source series of N- channel mosfet Q2；
The outfan of the second current sensor connects the input of the second current sampling circuit；Second current sampling circuit
Outfan connects the first input end of the second current control circuit；The outfan of the second given value of current circuit connects the second electric current control
Second input of circuit processed；The outfan of the first synchronization control circuit connects the 3rd input of the second current control circuit；
The outfan of the second current control circuit connects the input of the second drive circuit；The outfan connection N- ditches of the second drive circuit
The grid of road MOSFET Q2.
In one embodiment, deflection scanning coil includes X to coil and Y-direction coil；Deflection scanning coil drive power supply
Including for driving Y-direction coil drive power supplys of the X to the X of coil to coil drive power supply and for driving Y-direction coil；
X includes to coil drive power supply or Y-direction coil drive power supply：3rd constant pressure source, for making X to coil or Y-direction line
Enclose N- channel mosfet Q3, N- channel mosfet Q4, N- channel mosfet Q5, N- channel mosfet Q6 of commutation, be used for
X is adjusted to the N- channel mosfet Q7 of size of current, the 3rd current sensor, the 3rd current sample electricity in coil or Y-direction coil
Road, the second synchronization control circuit, the 3rd given value of current circuit, scan control circuit, the 3rd drive circuit, the 4th drive circuit and
5th drive circuit；Wherein,
The negativing ending grounding of the 3rd constant pressure source, the drain electrode of the anode connection N- channel mosfet Q3 of the 3rd constant pressure source and N- ditches
The drain electrode of road MOSFET Q4, to coil or the first end of Y-direction coil, first end connects the source electrode connection X of N- channel mosfet Q3
The drain electrode of N- channel mosfet Q5 is connect, the source electrode of N- channel mosfet Q4 connects X to coil or the second end of Y-direction coil, the
Two ends connect the drain electrode of N- channel mosfet Q6, and the source electrode of N- channel mosfet Q6 connects the source electrode of N- channel mosfet Q5,
The source electrode of the source electrode of N- channel mosfet Q5 and N- channel mosfet Q6 connects the drain electrode of N- channel mosfet Q7, N- raceway grooves
The negative terminal of the 3rd constant pressure source is connected to after the 3rd current sensor of source series of MOSFET Q7；
The outfan of the 3rd current sensor is connected with the input of the 3rd current sampling circuit；3rd current sampling circuit
Outfan be connected with the first input end of scan control circuit；The outfan and scan control circuit of the 3rd given value of current circuit
The second input connection；The outfan of the second synchronization control circuit is connected with the 3rd input of scan control circuit；Scanning
First outfan of control circuit is connected with the input of the 3rd drive circuit；Second outfan of scan control circuit and the 4th
The input connection of drive circuit；3rd outfan of scan control circuit is connected with the input of the 5th drive circuit；
3rd drive circuit connects the grid of N- channel mosfet Q7；4th drive circuit connects N- channel mosfet Q3
Grid and N- channel mosfet Q6 grid；The grid and N- raceway grooves of the 5th drive circuit connection N- channel mosfet Q4
The grid of MOSFET Q5.
Present invention also offers the control method of the cold-cathode gun electromagnetic control system of above-mentioned quick shaping, the party
Method, including：
Multiple Scanning Detction points are set in deflection of a beam of electrons scanning area；
When focal position and beam spot shape at each Scanning Detction point reaches sets requirement, each scanning is determined one by one
At test point, second disappear as coil output the image current value that disappears, lower focus coil output focus current value, deflection scanning coil
In the sense of current and size, and the sense of current in the image current value that disappears, focus current value, deflection scanning coil and size are deposited
Enter in the storage chip in beam energy distribution control circuit；
Beam energy distribution control circuit carried out prescan according to pattern to be scanned before electron beam is formally scanned,
According to the sense of current in the image current value that disappears at each Scanning Detction point, focus current value, deflection scanning coil and size, adopt
With interpolation method, calculate second of each to be scanned position in pattern to be scanned one by one and disappear as the point to be scanned that coil is exported disappears
The to be scanned sense of current in image current value, the point focusing current value to be scanned of lower focus coil output, deflection scanning coil
And size；
Beam energy distribution control circuit is by the coordinate information of each to be scanned position and deflection scanning coil
The to be scanned sense of current and size of current are stored in the memorizer of deflection scanning coil drive power supply, by each seat to be scanned
The coordinate information of punctuate position, point to be scanned disappear image current value and point focusing current value to be scanned is respectively stored into second and disappears as line
In the memorizer of circle driving power supply and lower focus coil driving power supply；
The point electricity to be scanned disappeared according to point to be scanned in image current value, point focusing current value to be scanned, deflection scanning coil
Stream direction and size of current, treat each point to be scanned in scan pattern and are formally scanned.
In one embodiment, in said method, focal position and beam spot shape at each Scanning Detction point reach
During sets requirement, determined at each Scanning Detction point one by one, second disappear as coil output the image current value that disappears, lower focus coil defeated
The sense of current and size in the focus current value that goes out, deflection scanning coil, and the image current value that will disappear, focus current value, deflection
The sense of current and size in scanning coil is stored in the storage chip in beam energy distribution control circuit, including：
Adjustment deflection scanning coil, makes a Scanning Detction point position of the electron beam stabilization in multiple Scanning Detction points；
The focal position of Scanning Detction point position and beam spot shape are carried out using beam energy Density Detection analyser
Analysis, respectively adjustment second disappear as coil drive power supply output disappear image current and lower focus coil driving power supply output focusing
Electric current, after focal position and beam spot shape reach sets requirement, second is disappeared as the image current value that disappears, the lower focusing of coil output
The sense of current and size in the focus current value of coil output, deflection scanning coil is stored in beam energy distribution control circuit
In storage chip in.
In one embodiment, in said method, according to point to be scanned disappear image current value, point focusing current value to be scanned,
The to be scanned sense of current and size of current in deflection scanning coil, treating each point to be scanned in scan pattern is carried out formally
Scanning, including：
Beam energy distribution control circuit disappears as coil drive power supply to deflection scanning coil drive power supply, second respectively
The coordinate information of to be scanned position is sent with lower focus coil driving power supply；
Coordinate information of the deflection scanning coil drive power supply according to be scanned position, searches coordinate information pair in memorizer
The to be scanned sense of current and size of current in the deflection scanning coil that answers, according to waiting in the deflection scanning coil for finding
The scanning element sense of current and size of current control deflection scanning coil deflection are so that electron beam spot is stable in point to be scanned；
Second disappears believes according to the coordinate of to be scanned position respectively as coil drive power supply and lower focus coil driving power supply
Breath, searches the corresponding point to be scanned of coordinate information in memorizer and disappears image current value and point focusing current value to be scanned, according to lookup
To point to be scanned disappear image current value and point focusing current value to be scanned, control second respectively disappears as coil drive power supply is to second
Disappear and disappear image current value as coil is input into point to be scanned, the lower focus coil driving power supply of control is input into point to be scanned to lower focus coil
Focus current value, so that the beam energy density of different to be scanned positions is consistent and is formally swept in scanning area
Retouch.
In one embodiment, Scanning Detction point includes：Scanning area centre scan test point and positioned at centre scan examine
Around measuring point relative to X to the symmetrical boundary position Scanning Detction point of, Y-direction central axis.
The technical scheme that the present invention is provided, beam energy distribution control circuit are calculated and are recorded when the focus of point to be scanned
Size of current and direction when position and beam spot shape reach sets requirement in deflection scanning coil, second disappear as coil in disappear
Focus current value in image current value and lower focus coil, and according to the size of current in the deflection scanning coil for calculating and side
It is scanned to, the image current value that disappears and focus current value control electron beam, so that it is to be scanned to set diverse location in scanning area
The beam energy consistent in density of point, improves Electron Beam Quality so that electron gun can reach precision with long-term stable operation
Control beam energy and the technique effect of accurate quick powdering shaping.
Description of the drawings
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, not
Constitute limitation of the invention.In the accompanying drawings：
Fig. 1 is the structural representation of cold-cathode gun electromagnetic control system during the present invention is implemented；
Fig. 2 first is disappeared as coil drive power supply or upper focus coil driving power supply structural representation during the present invention is implemented；
Fig. 3 second is disappeared as coil drive power supply or lower focus coil driving power supply structural representation during the present invention is implemented；
Fig. 4 be the present invention implement in X to coil drive power supply or the structural representation of Y-direction coil drive power supply；
Fig. 5 is the schematic diagram that scanning element position change posterior cord shape of spot is changed with focal position described in the present invention is implemented；
Fig. 6 is the schematic flow sheet of the control method of cold-cathode gun electromagnetic control system during the present invention is implemented；
Fig. 7 is the schematic diagram of the Scanning Detction point determined during the present invention is implemented.
Key fitment symbol description：
1～cold cathode；101～high voltage power supply；2～the first disappear as coil；201～the first disappear as coil drive power supply；3～
Discharge anode；4～electron gun housing；41～airway adpting flange；5～upper focus coil；501～upper focus coil drives electricity
Source；6～the second disappear as coil；601～the second disappear as coil drive power supply；7～lower focus coil；701～lower focus coil drives
Galvanic electricity source；8～deflection scanning coil；80～deflection scanning coil drive power supply；81～X is to coil；82～Y-direction coil；811～
X is to coil or the first end of Y-direction coil；812～X is to coil or the second end of Y-direction coil；The distribution control of 801～beam energy
Circuit processed；9～vacuum chamber；10～workpiece；11～electron beam；12～anode；111～the first current sensors；222～the second electricity
Flow sensor；333～the 3rd current sensor.
Specific embodiment
For making the object, technical solutions and advantages of the present invention become more apparent, with reference to embodiment and accompanying drawing, right
The present invention is described in further details.Here, the exemplary embodiment of the present invention and its illustrating for explaining the present invention, but simultaneously
Not as a limitation of the invention.
Fig. 1 is the structural representation of cold-cathode gun electromagnetic control system during the present invention is implemented；As shown in figure 1, the electricity
Magnetic control system includes：
First disappear and disappear as coil as coil 2, upper focus coil 5, second along what electron gun axis were installed from top to bottom successively
6th, lower focus coil 7 and deflection scanning coil 8；
The first picture coil drive power supply 201 that disappears, disappears and is connected as coil 2 with first, for giving first to disappear and provide perseverance as coil 2 Determine electric current, make first to disappear and stabilizing magnetic field is produced as coil 2;
Upper focus coil driving power supply 501, is connected with upper focus coil 5, for providing constant electricity to upper focus coil 5
Stream, makes 5 pairs of electron beams projected from electron gun anode 12 of focus coil carry out an electromagnetic focusing；
Second disappears as coil drive power supply 601, disappears with second and is connected as coil 6, can as the offer of coil 6 for disappearing to second
The image current that disappears of adjustment, so that the beam spot shape of diverse location scanning element is consistent；
Lower focus coil driving power supply 701, is connected with lower focus coil 7, for providing quick change to lower focus coil 7
Focus current, quick change the magnetic field that lower focus coil 7 is produced, quickly to realize the secondary electromagnetic focusing to electron beam；
Deflection scanning coil drive power supply 80, is connected with deflection scanning coil 8, for providing soon to deflection scanning coil 8
The electric current of speed change, realizes the quick deflection of electron beam, so that electron beam fast and stable is in point to be scanned；
Beam energy distribution control circuit 801, disappears with described second and drives as coil drive power supply 601, lower focus coil
Galvanic electricity source 701 and deflection scanning coil drive power supply 80 connect, for calculating and storing focal position and the beam when point to be scanned
Size of current and direction when shape of spot reaches sets requirement in deflection scanning coil 8, second disappear as coil 6 in the image current that disappears
Value and lower focus coil 7 in focus current value, and according to the size of current in the deflection scanning coil for calculating and direction, disappear
Image current value and focus current value control electron beam are scanned, so as to set the electricity of diverse location point to be scanned in scanning area
Beamlet energy density is consistent.
When being embodied as, first disappears disappears as coil 6, lower focus coil 7 and deflection as coil 2, upper focus coil 5, second
Scanning coil 8 is installed successively along electron gun axis from top to bottom and is referred to：From at electron gun cold cathode 1 down to vacuum chamber 9
Install in direction.Above-mentioned upper focus coil 5, lower focus coil 7, upper focus coil driving power supply 501 and lower focus coil drive
In 701 title of power supply is relative concept up and down, and the name of upper focus coil 5 can be the first focus coil, lower focal line
The name of circle 7 can be the second focus coil, and the name of upper focus coil driving power supply 501 can be that the first focus coil drives
Power supply, the name of lower focus coil driving power supply 701 can be the second focus coil driving power supply.
When being embodied as, upper focus coil driving power supply 501 is to export constant current reality according to the setting value of accelerating potential
Electromagnetic focusing of existing electron beam, the accelerating potential be tens of kilovolts applying between discharge anode 3 and anode 12 with
On negative voltage, and in the negative voltage between cold cathode 1 and discharge anode 3 added with a number kilovolt to volts up to ten thousand.Described cold the moon
It is suspended on the accelerating potential to the negative voltage of volts up to ten thousand added with a number kilovolt between pole 1 and discharge anode 3；High voltage power supply
101 are connected with discharge anode 3 with cold cathode 1, and high voltage power supply 101 provides such a accelerating potential.
Technical scheme provided in an embodiment of the present invention, beam energy distribution control circuit are calculated and are recorded when point to be scanned
Focal position and beam spot shape size of current and direction when reaching sets requirement in deflection scanning coil, second disappear as coil
In the focus current value disappeared in image current value and lower focus coil, and big according to the electric current in the deflection scanning coil for calculating
Little and direction, the image current value that disappears and focus current value control electron beam is scanned, so as to set diverse location in scanning area
The beam energy consistent in density of point to be scanned, improves Electron Beam Quality so that electron gun can be reached with long-term stable operation
To accurate control beam energy and the technique effect of accurate quick powdering shaping.
In one embodiment, as shown in figure 1, first disappears as coil 2 is installed in the cold cathode 1 and discharge anode of electron gun
Outside the discharge cavity room of 3 compositions.Such first disappears disappears as coil 2 to first as coil driver 201 exports constant current, makes the
One disappear as coil 2 produce stationary magnetic field, can reduce charged ion electric discharge chamber inner wall recombination probability, increase electronics and its
The collision probability of its particle, improves the electrical quantity of electric discharge within the chamber.
When being embodied as, second disappears as the electric source topology electricity of coil drive power supply 201 and lower focus coil driving power supply 501 Line structure is identical with control method, and Fig. 2 first is disappeared and drive electricity as coil drive power supply or upper focus coil during the present invention is implemented The structural representation in source, as shown in Fig. 2 first disappears and can wrap as coil drive power supply 201 or upper focus coil driving power supply 501 Include: the first constant pressure source, sustained diode 1, N-NMOS N-channel MOS N FET MOSFET Q1, the first electric current pass Sensor 111, the first current sampling circuit, the first current control circuit, the first given value of current circuit and the first drive circuit; Its In,
When concrete enforcement, first disappears as respectively holding in the circuit of coil drive power supply 201 or upper focus coil driving power 501 Method of attachment between son is: negative terminal "-" ground connection of the first constant pressure source, anode "+" series connection first of the first constant pressure source disappears as line After circle 2 or upper focus coil 5, be connected to the drain D of N-channel mosfet Q1, sustained diode 1 is connected in parallel on first and disappears as coil 2 or the two ends of upper focus coil 5, the negative electrode of sustained diode 1 connects the anode of the first constant pressure source; The sun of sustained diode 1 The utmost point connects the drain electrode of N-channel mosfet Q1; The rear connection of the first current sensor 111 of connecting of the source S of N-channel mosfet Q1 To the negative terminal "-" of the first constant pressure source;
The output of the first current sensor 111 connects the input of the first current sampling circuit; The first current sample electricity The output on road connects an input of the first current control circuit; The output of the first given value of current circuit connects the first electric current Another input of control circuit; The output of the first current control circuit connects the input of the first drive circuit; First drives The output of moving circuit connects the grid G of N-channel mosfet Q1.
First disappears as the current control process of coil drive power supply 201: to reach optimal discharge state as standard, according to examination Test and determine first maximum current flowing through as coil that disappears, described maximum current set-point is input to the by the first given value of current circuit One current control circuit, voltage signal is controlled in the first current control circuit output, after the first drive circuit, is input to N-ditch The grid G of road MOSFET Q1; The first current sampling circuit gathers the current feedback signal of the first current sensor 111, described electricity Stream feedback signal is input to the first current control circuit, the electric current that described current feedback signal and the first given value of current circuit are given Signal comparison, by the first current control circuit regulation output control voltage signal, regulates the amplification shape of N-channel mosfet Q1 State, makes output current reach setting requirement.
The current control process of upper focus coil driving power 501 and first disappears identical as the current control process of coil drive power supply 201, upper focus coil driving power 501 is exported maximum current according to the operating distance on accelerating potential set-point and electron gun axis, to reach best surface focus as standard, determine according to test the maximum current that upper focus coil flows through.
In addition, in Fig. 2, "+" is the anode of the first constant pressure source, "-" is the negative terminal of the first constant pressure source, C is the negative electrode of sustained diode 1, and A is the anode of sustained diode 1, and D is the drain electrode of N-channel mosfet Q1, S is the source electrode of N-channel mosfet Q1, G is the grid of N-channel mosfet Q1, and Fig. 3 is similar with the define method about above-mentioned symbol in Fig. 4, below is not repeating.
When concrete enforcement, second disappears as the electric source topology electricity of coil drive power supply 601 and lower focus coil driving power 701 Line structure is identical with control method, and Fig. 3 is that in the invention process, the second disappear picture coil drive power supply or lower focus coil drives electricity The structural representation in source, as shown in Figure 3, second disappears can wrap as coil drive power supply 601 or lower focus coil driving power 701 Draw together: the second constant pressure source, sustained diode 2, N-channel mosfet Q2, the second current sensor 222, the second current sample electricity Road, the second current control circuit, the second given value of current circuit, the second drive circuit and the first synchronization control circuit; Wherein,
Second disappears as the company between each terminal in the circuit of coil drive power supply 601 or lower focus coil driving power 701 Connect as negative terminal "-" ground connection of the second constant pressure source anode "+" series connection second of the second constant pressure source disappear picture coil 6 or lower focus coil After 7, be connected to the drain D of N-channel mosfet Q2; Sustained diode 2 is connected in parallel on second and disappears as coil 6 or lower focus coil 7 Two ends, the negative electrode of sustained diode 2 connects the anode of the second constant pressure source; The anode connection N-raceway grooves of sustained diode 1 The drain electrode of MOSFET Q2; The second constant pressure source is connected to after source S second current sensor 222 of series connection of N-channel mosfet Q2 Negative terminal " ";
The outfan of the second current sensor 222 connects the input of the second current sampling circuit；Second current sample electricity
The outfan on road connects the first input end of the second current control circuit；Second electricity of outfan connection of the second given value of current circuit
Second input of flow control circuit；The outfan of the first synchronization control circuit connects the 3rd input of the second current control circuit
End；The outfan of the second current control circuit connects the input of the second drive circuit；The outfan connection of the second drive circuit
The grid G of N- channel mosfet Q2.
When being embodied as, deflection scanning coil 8 includes X to coil 81 and Y-direction coil 82；Deflection scanning coil drive power supply
80 include the Y-direction coil drive power supply for driving X to the X of coil 81 to coil drive power supply and for driving Y-direction coil 82；
Deflection scanning coil 8 is formed by axisymmetric two groups of coil windings, and the magnetic field that two groups of coils are produced is mutually perpendicular to, respectively by
X in deflection scanning coil drive power supply 80 is to coil drive power supply and Y-direction coil drive power drives.
When being embodied as, the X in deflection scanning coil drive power supply 80 of the present invention is driven to coil drive power supply and Y-direction coil
The topological structure in galvanic electricity source is identical, and the control method for being adopted is also identical, Fig. 4 be the present invention implement in X to coil drive power supply
Or the structural representation of Y-direction coil drive power supply, as shown in figure 4, X can be with to coil drive power supply or Y-direction coil drive power supply
Including：3rd constant pressure source, N- channel mosfet Q3, N- channel mosfets for making X commutate to coil 81 or Y-direction coil 82
Q4, N- channel mosfet Q5, N- channel mosfet Q6, for adjusting X to the N- of size of current in coil 81 or Y-direction coil 82
Channel mosfet Q7, the 3rd current sensor 333, the 3rd current sampling circuit, the second synchronization control circuit, the 3rd electric current are given
Determine circuit, scan control circuit, the 3rd drive circuit, the 4th drive circuit and the 5th drive circuit；Wherein,
X to the connection between each terminal in coil drive power supply or Y-direction coil drive power supply is：The negative terminal of the 3rd constant pressure source
"-" is grounded, and the anode "+" of the 3rd constant pressure source connects the drain D of N- channel mosfet Q3 and the drain electrode of N- channel mosfet Q4
The source S connection first ends 811 of the X to coil 81 or Y-direction coil 82 of D, N- channel mosfet Q3, first end 811 connect N- ditches
The drain D of road MOSFET Q5；The source S of N- channel mosfet Q4 connects X to coil 81 or the second end 812 of Y-direction coil 82,
Second end 812 connects the drain D of N- channel mosfet Q6；The source S connection N- channel mosfet Q5 of N- channel mosfet Q6
Source S；The source S of the source S of N- channel mosfet Q5 and N- channel mosfet Q6 connects the leakage of N- channel mosfet Q7
Pole D；The negative terminal "-" of the 3rd constant pressure source is connected to after source S the 3rd current sensor 333 of series connection of N- channel mosfet Q7；
The outfan of the 3rd current sensor 333 is connected with the input of the 3rd current sampling circuit；3rd current sample
The outfan of circuit is connected with the first input end of scan control circuit；The outfan of the 3rd given value of current circuit and scan control
The second input connection of circuit；The outfan of the second synchronization control circuit is connected with the 3rd input of scan control circuit；
First outfan of scan control circuit is connected with the input of the 3rd drive circuit；Second outfan of scan control circuit with
The input connection of the 4th drive circuit；3rd outfan of scan control circuit is connected with the input of the 5th drive circuit；
3rd drive circuit connects the grid G of N- channel mosfet Q7；4th drive circuit connects N- channel mosfets
The grid G of Q3 and the grid G of N- channel mosfet Q6；The grid G of the 5th drive circuit connection N- channel mosfet Q4 and N-
The grid G of channel mosfet Q5.
As shown in figure 4, X is to N-channel mosfet Q3, N-in coil drive power supply, Y-direction coil drive electric source topology circuit Channel mosfet Q4, N-channel mosfet Q5, N-channel mosfet Q6 constitutes " H " bridge, works on off state, is used for Commutation; When N-channel mosfets Q3, N-channel mosfet Q6 is in opening state, and the N-channel mosfets Q4, N-channel mosfet Q5 are closed, and electric current is from N-channel mosfet Q3 source electrodes through X to coil or Y-direction coil, stream To the drain electrode of N-channel mosfet Q6; When N-channel mosfets Q3, N-channel mosfet Q6 is closed, and Described N-channel mosfet Q4, N-channel mosfet Q5 are in opening state, and electric current passes through from N-channel mosfet Q4 source electrode X is to coil or Y-direction coil, the drain electrode of stream to N-channel mosfet Q5; N-channel mosfets open mode on " H " bridge, Change X to sense of current in coil 81, Y-direction coil 82; N-channel mosfet Q7 work in magnifying state, adjust for electric current Section; Q7 is according to the X in sweep waveform adjustment deflection scanning coil 8 to the size of current in coil 81, Y-direction coil 82.
The first synchronization control circuit and the second synchronization control circuit in above-described embodiment is used for, when being scanned, passing throughControl deflection scanning coil drive power supply, second disappear and work asynchronously as coil drive power supply and lower focus coil driving power supply, from and make deflection scanning coil, second disappears works asynchronously as coil and lower focus coil, common coordinated electron beam sweep Retouch work.Certainly, X can be independently scanned by scan control circuit control to coil drive power supply, Y-direction coil drive power supplyWork, it is also possible to disappear with second and work asynchronously as coil driver, lower focus coil driving power supply.
Fig. 5 is the schematic diagram that scanning element position change posterior cord shape of spot is changed with focal position described in the present invention is implemented,
As shown in figure 5, quickly manufacture (EBM) deflection scanning scope than larger due to electronics, when electron beam 11 deflects α degree, from L0 (n0,
When m0) deflecting into L2 (n0, m2), 11 operating distance of electron beam increases to h1 by h；If setting focus as surface focus, due to
Operating distance changes, and when electron beam 11 deflects into L2 (n0, m2) from L0 (n0, m0), then focal position is in L1, and focus is by table
Wrinkly face point becomes upper focus；Beam spot shape is then changing into the ellipse at L2 (n0, m2) place by the circle at L0 (n0, m0) point.By
Change in focal position, operating distance, beam spot shape, and deflection of a beam of electrons to L2 (n0, m2) disappeared again as, poly-
During burnt control, at L2 (n0, m2) place, beam energy density will change.As can be seen here, the master of Electron Beam Quality is affected
Factor is wanted to include：Focal position and beam spot shape, technical scheme provided in an embodiment of the present invention seek to adjust focal position and
It is scanned after beam spot shape, to improve electron beam quality of beam.
In order to realize the purpose of above-mentioned raising electron beam quality of beam, the embodiment of the present invention is except disclosing such as Fig. 1 to 4
The cold-cathode gun electromagnetic control system of quick shaping, additionally provides the cold-cathode gun Electromagnetic Control of above-mentioned quick shaping
The control method of system, Fig. 6 are that the flow process of the control method of cold-cathode gun electromagnetic control system during the present invention is implemented is illustrated
Figure, as shown in fig. 6, the method comprises the steps：
Step 1：Multiple Scanning Detction points are set in deflection of a beam of electrons scanning area；
Step 2：When focal position and beam spot shape at each Scanning Detction point reaches sets requirement, determine one by one per
At individual Scanning Detction point, second disappear as coil output the image current value that disappears, lower focus coil output focus current value, deflection sweep
Retouch the sense of current in coil and size, and by the sense of current in the image current value that disappears, focus current value, deflection scanning coil and
Size is stored in the storage chip in beam energy distribution control circuit；
Step 3：Beam energy distribution control circuit was carried out before electron beam is formally scanned pre- according to pattern to be scanned
Scanning, according to the sense of current in the image current value that disappears at each Scanning Detction point, focus current value, deflection scanning coil and greatly
Little, using interpolation method, calculate one by one second of each to be scanned position in pattern to be scanned disappear as coil output wait sweep
The point to be scanned that described point disappears in image current value, the point focusing current value to be scanned of lower focus coil output, deflection scanning coil is electric
Stream direction and size；
Step 4：Beam energy distribution control circuit is by the coordinate information of each to be scanned position and deflection scanning line
The to be scanned sense of current in circle and size of current are stored in the memorizer of deflection scanning coil drive power supply, and each is treated
The coordinate information of scanning coordinate point position, point to be scanned disappear image current value and point focusing current value to be scanned is respectively stored into second
In disappearing as the memorizer of coil drive power supply and lower focus coil driving power supply；
Step 5：Swept according to point to be scanned the treating in image current value, point focusing current value to be scanned, deflection scanning coil that disappear
The described point sense of current and size of current, treat each point to be scanned in scan pattern and are formally scanned.
In one embodiment, in said method, step 2 includes：
Step 21：Adjustment deflection scanning coil, makes a Scanning Detction of the electron beam stabilization in multiple Scanning Detction points
Point position；
Step 22：Using focal position and beam spot shape of the beam energy Density Detection analyser to Scanning Detction point position
Shape is analyzed, and adjustment second respectively disappears as disappear image current and the output of lower focus coil driving power supply of the output of coil drive power supply
Focus current, after focal position and beam spot shape reach sets requirement, by second disappear as coil output the image current value that disappears,
The sense of current and size in the focus current value of lower focus coil output, deflection scanning coil is stored in beam energy distribution control
In storage chip in circuit processed.
In one embodiment, in said method, step 5 includes：
Step 51：Beam energy distribution control circuit disappears as coil to deflection scanning coil drive power supply, second respectively
Driving power supply and lower focus coil driving power supply send the coordinate information of to be scanned position；
Step 52：Coordinate information of the deflection scanning coil drive power supply according to be scanned position, searches in memorizer and sits
The to be scanned sense of current and size of current in the corresponding deflection scanning coil of mark information, according to the deflection scanning line for finding
The to be scanned sense of current in circle and size of current control deflection scanning coil deflection are so that electron beam spot is stably being waited to sweep
Described point；
Step 53：Second disappears as coil drive power supply and lower focus coil driving power supply are respectively according to be scanned position
Coordinate information, searches the corresponding point to be scanned of coordinate information in memorizer and disappears image current value and point focusing current value to be scanned, root
Image current value and point focusing the current value to be scanned it is investigated that point to be scanned for finding disappears, respectively control second disappear as coil drive power supply
Disappear to second and disappear image current value as coil is input into point to be scanned, the lower focus coil driving power supply of control is treated to the input of lower focus coil
Scanning element focus current value, so that the beam energy density of different to be scanned positions is consistent and just carries out in scanning area
Formula is scanned.
In one embodiment, as shown in fig. 7, Scanning Detction point includes：Scanning area centre scan test point and it is located at
Around centre scan test point relative to X to the symmetrical boundary position Scanning Detction point of, Y-direction central axis.Such
The purpose of selection is：When prescan is carried out, the focus for calculating each point to be scanned in pattern to be scanned is carried out using interpolation method
Size of current and direction in the image current value that disappears, focus current value and deflection scanning coil when position and beam spot shape reach requirement
When, convenient calculating.
Below in conjunction with Fig. 1 to Fig. 7, illustrated with example, in order to understand how to implement the present invention.
The control method of the cold-cathode gun electromagnetic control system of quick shaping in present invention enforcement, step include：
A () arranges eight boundary position Scanning Detction points on the border of electron beam maximum deflection scanning area：F (n1, m2),
G (n1, m0), H (n1, m1), I (n0, m2), K (n0, m1), L (n2, m2), M (n2, m0) and N (n2, m1), install in centre bit
Put a centre scan test point：Eight boundary position Scanning Detction points of J (n0, m0) are mutual to, Y-direction central axis relative to X
Symmetrically；
B () manually adjusts the X in deflection scanning coil 8 in coil, Y-direction coil by the 3rd given value of current circuit
Size of current and direction, make stable Scanning Detction point J (n0, the m0) position wherein of electron beam 11；
C () manually adjusts second and disappears as the picture that disappears of the output of coil drive power supply 601 respectively by the second given value of current circuit
Electric current, the focus current of lower focus coil driving power supply 701 output, are swept to center using beam energy Density Detection analyser
The focal position and beam spot shape for retouching test point J (n0, m0) is analyzed, and reaches sets requirement in focal position and beam spot shape
Afterwards, the X of record J (n0, m0) Scanning Detction point position is to the current value in the current value in coil, Y-direction coil, focus current value
With the image current value that disappears；
D () detects F (n1, m2), G (n1, m0), H in simultaneously writing scan region one by one using (b)～(c) methods describeds
(n1, m1), I (n0, m2), K (n0, m1), L (n2, m2), M (n2, m0), the X of N (n2, m1) each boundary scan test point are to line
The current value in current value, Y-direction coil, focus current value in circle, disappear image current value, and each current value is stored in electronics
In storage chip in beam energy distribution control circuit 801；
E () beam energy distribution control circuit 801 was carried out before electron beam is formally scanned pre- according to pattern to be scanned
Scanning：According to the X of said one centre scan test point and eight boundary scan test point positions to the current value in coil, Y
To the current value in coil, focus current value, disappear image current value, using interpolation method, determines that each is treated in pattern to be scanned one by one
The X of scanning coordinate point position is to the current value in the current value in coil, Y-direction coil, focus current value, disappear image current value；
F () beam energy distribution control circuit 801 is by the X of each to be scanned position in the pattern to be scanned for calculating
To the current value storage in the current value in coil, Y-direction coil to the 2nd Synchronization Control electricity of deflection scanning coil drive power supply 80
In the memorizer on road；Beam energy distribution control circuit 801 is by each point position to be scanned in the pattern each to be scanned for calculating
The focus current value that puts, the image current value that disappears are respectively stored into lower focus coil driving power supply, second disappear as in coil drive power supply
In the memorizer of the 1st synchronous scanning control circuit；
G (), during electron beam scanning, beam energy distribution control circuit 801 is respectively to deflection scanning coil drive
Power supply 80, lower focus coil driving power supply 701, second to disappear and send the coordinate of scanning element position as coil drive power supply 601, deflection
Scanning coil driving power supply 80 is electric to coil drive power supply, Y-direction coil drive to X respectively according to the coordinate of certain scanning element position
Input current Setting signal and electric current commutation signal in the scan control circuit in source, by scan control circuit output commutation signal and
Current controling signal, respectively through the 4th drive circuit, the 5th drive circuit, the 3rd drive circuit, controls Q3, Q4, Q5, Q6
On off state and the magnifying state of Q7, make electron beam spot stable in the scanning element position；
H under (), focus coil driving power supply 701, second disappear as coil drive power supply 601 is respectively according to beam energy point
The coordinate of the given scanning element position of cloth control circuit 801, with record in memorizer in respective synchronization control circuit
Corresponding coordinate position current information mated after, respectively to respective second current control circuit send into given value of current letter
Number, by the second current control circuit output current control signal, through the second drive circuit, the magnifying state of Q2 is controlled, institute is made
The focal position and beam spot shape for stating to be scanned position remains stable, makes the electron beam of different scanning point position in scanning area
Energy density is consistent and is formally scanned；
The step of repeating (g)～(h), in scan pattern, all scanning elements are by electron beam scanning.
In Fig. 5 and Fig. 7 F, G, H, I, K, L, M, N be boundary position Scanning Detction point, Scanning Detction point centered on J；α is inclined
Corner；O is initial inflexion point.
In addition, the interpolation method that mentions in above-mentioned steps (e) is also known as " interpolation ", it is to be inserted in certain interval using function f (x)
If entering the functional value that does, appropriate specific function is made, on these aspects, take given value, special with this on other interval aspects
Determine the approximation of the value as function f (x) of function, this method is referred to as interpolation method.Interpolation method is to be applied to Machine Design, electronics
Optimization method etc. technical field.
The preferred embodiments of the present invention are the foregoing is only, the present invention is not limited to, for the skill of this area
For art personnel, the embodiment of the present invention can have various modifications and variations.All within the spirit and principles in the present invention, made
Any modification, equivalent substitution and improvements etc., should be included within the scope of the present invention.
Claims (9)
1. a kind of cold-cathode gun electromagnetic control system, it is characterised in that include：
First disappear and disappear as coil as coil (2), upper focus coil (5), second along what electron gun axis were installed from top to bottom successively
(6), lower focus coil (7) and deflection scanning coil (8)；
First disappears as coil drive power supply (201), disappears with described first and is connected as coil (2), for disappearing as line to described first
Circle (2) provides constant current, makes described first to disappear and produce stabilizing magnetic field as coil (2)；
Upper focus coil driving power supply (501), are connected with upper focus coil (5), for carrying to upper focus coil (5)
For constant current, upper focus coil (5) are made to carry out an electromagnetic focusing to the electron beam projected from electron gun anode (12)；
Second disappears as coil drive power supply (601), disappears with described second and is connected as coil (6), for disappearing as line to described second
Circle (6) provides the adjustable image current that disappears, so that the beam spot shape of diverse location scanning element is consistent；
Lower focus coil driving power supply (701), are connected with lower focus coil (7), for carrying to lower focus coil (7)
For fast-changing focus current, quickly change the magnetic field that lower focus coil (7) produce, quickly to realize to the electronics
The secondary electromagnetic focusing of beam；
Deflection scanning coil drive power supply (80), is connected with deflection scanning coil (8), for the deflection scanning coil
(8) fast-changing electric current is provided, realizes the quick deflection of electron beam, so that electron beam fast and stable is in point to be scanned；
Beam energy distribution control circuit (801), disappears with described second and drives as coil drive power supply (601), lower focus coil
Galvanic electricity source (701) and deflection scanning coil drive power supply (80) connection, for calculating and storing when the focal position of point to be scanned
During size of current and direction when reaching sets requirement with beam spot shape in deflection scanning coil (8), second disappear as coil (6)
Focus current value in the image current value that disappears and lower focus coil (7), and big according to the electric current in the deflection scanning coil for calculating
Little and direction, the image current value that disappears and focus current value control electron beam is scanned, so as to set diverse location in scanning area
The beam energy consistent in density of point to be scanned.
2. electromagnetic control system as claimed in claim 1, it is characterised in that described first disappears be arranged on electronics as coil (2)
Outside the discharge cavity room that the cold cathode (1) and discharge anode (3) of rifle is constituted.
3. electromagnetic control system as claimed in claim 1, it is characterised in that described first disappears as coil drive power supply (201)
Or upper focus coil driving power supply (501) include：First constant pressure source, sustained diode 1, N- channel mosfet Q1, the first electricity
Flow sensor (111), the first current sampling circuit, the first current control circuit, the first given value of current circuit and first drive electricity
Road；Wherein,
The negativing ending grounding of first constant pressure source, anode disappear as coil (2) or upper focus coil (5) and the N- with described first
The drain electrode connection of channel mosfet Q1；The sustained diode 1 is connected in parallel on described first and disappears as coil (2) or upper focus coil
(5) two ends；The negative electrode of the sustained diode 1 is connected with the anode of first constant pressure source；The sustained diode 1
Anode is connected with the drain electrode of the N- channel mosfets Q1；First current sense described in the source series of N- channel mosfet Q1
The negative terminal of first constant pressure source is connected to after device (111)；
The outfan of the first current sensor (111) connects the input of first current sampling circuit；Described first
The outfan of current sampling circuit connects an input of first current control circuit；The first given value of current circuit
Outfan connects another input of first current control circuit；The outfan connection institute of first current control circuit
State the input of the first drive circuit；The outfan of first drive circuit connects the grid of N- channel mosfet Q1.
4. electromagnetic control system as claimed in claim 1, it is characterised in that described second disappears as coil drive power supply (601)
Or lower focus coil driving power supply (701) include：Second constant pressure source, sustained diode 2, N- channel mosfet Q2, the second electricity
Flow sensor (222), the second current sampling circuit, the second current control circuit, the second given value of current circuit, the second drive circuit
With the first synchronization control circuit；Wherein,
The negativing ending grounding of second constant pressure source, anode disappear as coil (6) or lower focus coil (7) and the N- with described second
The drain electrode connection of channel mosfet Q2；The sustained diode 2 is connected in parallel on described second and disappears as coil (6) or lower focus coil
(7) two ends；The negative electrode of the sustained diode 2 is connected with the anode of second constant pressure source；The sustained diode 2
Anode is connected with the drain electrode of the N- channel mosfets Q2；Second current sense described in the source series of N- channel mosfet Q2
The negative terminal of second constant pressure source is connected to after device (222)；
The outfan of the second current sensor (222) connects the input of second current sampling circuit；Described second
The outfan of current sampling circuit connects the first input end of second current control circuit；The second given value of current circuit
Outfan connect the second input of second current control circuit；The outfan connection of first synchronization control circuit
3rd input of second current control circuit；The outfan connection described second of second current control circuit drives
The input of circuit；The outfan of second drive circuit connects the grid of the N- channel mosfets Q2.
5. electromagnetic control system as claimed in claim 1, it is characterised in that described deflection scanning coil (8) include X to coil
And Y-direction coil (82) (81)；Deflection scanning coil drive power supply (80) are included for driving the X to the X of coil (81)
Y-direction coil drive power supply to coil drive power supply and for driving Y-direction coil (82)；
The X includes to coil drive power supply or the Y-direction coil drive power supply：3rd constant pressure source, for making the X to coil
Or N- channel mosfet Q3, N- channel mosfet Q4, N- channel mosfet Q5, N- raceway grooves for commutating of Y-direction coil (82) (81)
MOSFET Q6, for adjusting X to N- channel mosfet Q7 of size of current in coil (81) or Y-direction coil (82), the 3rd electricity
Flow sensor (333), the 3rd current sampling circuit, the second synchronization control circuit, the 3rd given value of current circuit, scan control electricity
Road, the 3rd drive circuit, the 4th drive circuit and the 5th drive circuit；Wherein,
The negativing ending grounding of the 3rd constant pressure source, the drain electrode of anode connection N- channel mosfet Q3 and N- channel mosfet Q4's
Drain electrode, the source electrode of the N- channel mosfets Q3 connect the X to coil (81) or the first end of Y-direction coil (82), and described the
One end connects the drain electrode of the N- channel mosfets Q5, and the source electrode of the N- channel mosfets Q4 connects the X to coil
(81) or Y-direction coil (82) the second end, second end connects the drain electrode of N- channel mosfet Q6, the N- raceway grooves
The source electrode of MOSFET Q6 connects the source electrode of N- channel mosfet Q5, the source electrode and N- raceway grooves of the N- channel mosfets Q5
The source electrode of MOSFET Q6 connects the drain electrode of N- channel mosfet Q7, the described in the source series of the N- channel mosfets Q7
The negative terminal of the 3rd constant pressure source is connected to after three current sensors (333)；
The outfan of the 3rd current sensor (333) is connected with the input of the 3rd current sampling circuit；Described
The outfan of three current sampling circuits is connected with the first input end of the scan control circuit；The 3rd given value of current circuit
Outfan be connected with the second input of the scan control circuit；The outfan of second synchronization control circuit with described
The 3rd input connection of scan control circuit；First outfan of the scan control circuit and the 3rd drive circuit
Input connects；Second outfan of the scan control circuit is connected with the input of the 4th drive circuit；Described sweep
The 3rd outfan for retouching control circuit is connected with the input of the 5th drive circuit；
3rd drive circuit connects the grid of N- channel mosfet Q7；4th drive circuit connects N- raceway grooves
The grid of MOSFET Q3 and the grid of N- channel mosfet Q6；5th drive circuit connects the N- channel mosfets
The grid of Q4 and the grid of N- channel mosfet Q5.
6. the control method of the cold-cathode gun electromagnetic control system as described in claim 1 to 5 any claim, its are special
Levy and be, including：
Multiple Scanning Detction points are set in deflection of a beam of electrons scanning area；
When focal position and beam spot shape at each Scanning Detction point reaches sets requirement, each Scanning Detction is determined one by one
Point place, second disappear focus current value as the image current value that disappears of coil output, lower focus coil are exported, in deflection scanning coil
The sense of current and size, and the sense of current in the image current value that disappears, focus current value, deflection scanning coil and size are deposited
Enter in the storage chip in beam energy distribution control circuit；
Beam energy distribution control circuit carried out prescan according to pattern to be scanned before electron beam is formally scanned, according to
The sense of current in the image current value that disappears, focus current value, deflection scanning coil and size at each described Scanning Detction point, adopts
With interpolation method, calculate one by one second of each to be scanned position in the pattern to be scanned disappear to be scanned as coil output
The to be scanned electric current that point disappears in image current value, the point focusing current value to be scanned of lower focus coil output, deflection scanning coil
Direction and size；
Treating in the coordinate information of each to be scanned position and deflection scanning coil is swept by beam energy distribution control circuit
The described point sense of current and size of current are stored in the memorizer of deflection scanning coil drive power supply, by each coordinate points to be scanned
The coordinate information of position, point to be scanned disappear image current value and point focusing current value to be scanned is respectively stored into second and disappears and drives as coil
In the memorizer of galvanic electricity source and lower focus coil driving power supply；
The point electricity to be scanned disappeared according to the point to be scanned in image current value, point focusing current value to be scanned, deflection scanning coil
Stream direction and size of current, are formally scanned to each point to be scanned in the pattern to be scanned.
7. control method as claimed in claim 6, it is characterised in that the focal position at each Scanning Detction point and
When beam spot shape reaches sets requirement, determined at each Scanning Detction point one by one, second disappear as coil output the image current value that disappears,
The sense of current and size in the focus current value of lower focus coil output, deflection scanning coil, and by the image current value that disappears,
The sense of current and size in focus current value, deflection scanning coil is stored in the storage core in beam energy distribution control circuit
In piece, including：
Adjustment deflection scanning coil, makes a Scanning Detction point position of the electron beam stabilization in the plurality of Scanning Detction point；
The focal position of the Scanning Detction point position and beam spot shape are carried out using beam energy Density Detection analyser
Analysis, respectively adjustment second disappear as coil drive power supply output disappear image current and lower focus coil driving power supply output focusing
Electric current, after focal position and beam spot shape reach sets requirement, by described second disappear as coil output the image current value that disappears, under
The sense of current and size in the focus current value of focus coil output, deflection scanning coil is stored in beam energy distributed controll
In storage chip in circuit.
8. control method as claimed in claim 6, it is characterised in that described according to the point to be scanned disappear image current value, treat
The to be scanned sense of current and size of current in scanning element focus current value, deflection scanning coil, to the pattern to be scanned
In each point to be scanned formally scanned, including：
Beam energy distribution control circuit respectively to deflection scanning coil drive power supply, second disappear as coil drive power supply and under
Focus coil driving power supply sends the coordinate information of to be scanned position；
Coordinate information of the deflection scanning coil drive power supply according to the to be scanned position, searches coordinate letter described in memorizer
The to be scanned sense of current and the size of current in corresponding deflection scanning coil is ceased, according in the deflection scanning coil for finding
The to be scanned sense of current and size of current control deflection scanning coil deflection so that electron beam spot is stable waits to sweep described
Described point；
Second disappears believes according to the coordinate of the to be scanned position respectively as coil drive power supply and lower focus coil driving power supply
Breath, searches the corresponding point to be scanned of coordinate information described in memorizer and disappears image current value and point focusing current value to be scanned, according to
The point to be scanned for finding disappears image current value and point focusing current value to be scanned, respectively control second disappear as coil drive power supply to
Second disappears disappears image current value as coil is input into point to be scanned, and the lower focus coil driving power supply of control is input into lower focus coil to be waited to sweep
Described point focus current value so that in scanning area the beam energy density of different to be scanned positions be consistent carry out formal
Scanning.
9. control method as claimed in claim 6, it is characterised in that the Scanning Detction point includes：Sweep at scanning area center
Retouch test point and around the centre scan test point relative to X to the symmetrical boundary position of, Y-direction central axis
Scanning Detction point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410804403.1A CN104635617B (en) | 2014-12-19 | 2014-12-19 | Cold-cathode gun electromagnetic control system and its control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410804403.1A CN104635617B (en) | 2014-12-19 | 2014-12-19 | Cold-cathode gun electromagnetic control system and its control method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104635617A CN104635617A (en) | 2015-05-20 |
| CN104635617B true CN104635617B (en) | 2017-03-15 |
Family
ID=53214493
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410804403.1A Active CN104635617B (en) | 2014-12-19 | 2014-12-19 | Cold-cathode gun electromagnetic control system and its control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104635617B (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105328187A (en) * | 2015-11-21 | 2016-02-17 | 天津清研智束科技有限公司 | Control device and method for achieving wide-range scanning of electron beam and additive manufacturing device |
| CN106735198B (en) * | 2016-11-23 | 2018-06-15 | 北京航空航天大学 | A kind of electron beam High-precision high-frequency deflection scanning device |
| WO2019137183A1 (en) | 2018-01-10 | 2019-07-18 | 桂林狮达技术股份有限公司 | Deflection scanning device for multi-phase winding and deflection scanning system |
| CN109213233B (en) * | 2018-03-21 | 2021-06-29 | 中国航空制造技术研究院 | Temperature field regulating and controlling method and device in electron beam fuse additive manufacturing |
| CN109216135B (en) * | 2018-03-21 | 2021-04-13 | 中国航空制造技术研究院 | Fuse wire additive manufacturing electron gun device with coaxial wire bundles |
| CN109175371A (en) * | 2018-11-02 | 2019-01-11 | 西安赛隆金属材料有限责任公司 | A kind of ferromagnetic concentrator and powder bed electron beam selective melting former |
| CN110592390A (en) * | 2019-08-08 | 2019-12-20 | 云南昆钢电子信息科技有限公司 | Cold cathode electron gun control system and control method |
| CN110468286B (en) * | 2019-08-09 | 2021-02-05 | 云南昆钢电子信息科技有限公司 | Cold cathode electron gun smelting furnace control system and metal ingot smelting method |
| CN113793790A (en) * | 2021-08-30 | 2021-12-14 | 无锡日联科技股份有限公司 | Open type micro-focus X-ray source and control method thereof |
| CN115194181B (en) * | 2022-05-19 | 2023-06-06 | 广东省科学院中乌焊接研究所 | Workpiece morphology monitoring system and related method |
| CN115476028B (en) * | 2022-06-20 | 2023-10-24 | 河北志成束源科技有限公司 | Focusing system for electron beam welding machine |
| CN115863128B (en) * | 2023-02-06 | 2023-05-16 | 广东省科学院半导体研究所 | Focusing deflection module for key dimension measuring device and electron beam optical column |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6111732A (en) * | 1998-04-23 | 2000-08-29 | Transfotec International Ltee | Apparatus and method for detecting ground fault |
| DE102010049521B3 (en) * | 2010-10-25 | 2012-04-12 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Device for generating an electron beam |
| US9232607B2 (en) * | 2012-10-23 | 2016-01-05 | Lutron Electronics Co., Inc. | Gas discharge lamp ballast with reconfigurable filament voltage |
| CN103887131B (en) * | 2012-12-19 | 2016-08-17 | 北京有色金属研究总院 | A kind of 600kw gas discharge electron gun and using method thereof |
| CN103458153B (en) * | 2013-07-11 | 2015-11-11 | 中国航空工业集团公司北京航空制造工程研究所 | A kind of control electron beam high frequency deflection scanning device based on homotype MOSFET |
-
2014
- 2014-12-19 CN CN201410804403.1A patent/CN104635617B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN104635617A (en) | 2015-05-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104635617B (en) | Cold-cathode gun electromagnetic control system and its control method | |
| US9431210B2 (en) | Charged particle beam device with dynamic focus and method of operating thereof | |
| TWI557769B (en) | Electron beam wafer inspection system and method for operation thereof | |
| JP4215282B2 (en) | SEM equipped with electrostatic objective lens and electrical scanning device | |
| TWI489515B (en) | Ion beam line | |
| JP6242745B2 (en) | Charged particle beam apparatus and inspection method using the apparatus | |
| JP4913599B2 (en) | Charged particle extraction device and design method thereof | |
| TW201209877A (en) | Charged particle apparatus | |
| US4214162A (en) | Corpuscular beam microscope for ring segment focusing | |
| CN208256614U (en) | A kind of objective lens of the scanning electron microscope, system | |
| Ueno et al. | Interesting experimental results in Japan Proton Accelerator Research Complex H− ion-source development | |
| CN108305701A (en) | A kind of the deflection scanning device and deflection and scanning system of polyphase windings | |
| US20140264062A1 (en) | High throughput scan deflector and method of manufacturing thereof | |
| CN104658842B (en) | Focusing system and control method for electron beam quick melting manufacturing equipment | |
| CN205667005U (en) | Utilize hollow cathode to adjust device of ion energy | |
| JP2008166137A (en) | Focused ion beam device | |
| CN106409635A (en) | Short magnetic focusing device and method for transversal compression of ultrafast electronic pulses | |
| CN114752909A (en) | Ion implantation method for improving ionization rate of ions | |
| CN103474308A (en) | Electronic gun with electromagnetic centering device | |
| CN208067550U (en) | A kind of vacuum electron beam welder filament optimization device | |
| CN203481175U (en) | Electronic gun with electromagnetic centering device | |
| CN114540777B (en) | Ion implantation method combined with magnetron sputtering | |
| US9824867B2 (en) | Plasma generation apparatus, deposition apparatus, and plasma generation method | |
| CN108231527B (en) | Uniform projection type electronic optical structure | |
| Shemyakin et al. | Test of a full-scale prototype of the Fermilab electron cooler |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100024 North East military villa, eight Li bridge, Chaoyang District, Beijing Patentee after: China Institute of Aeronautical Manufacturing Technology Address before: 100024 North East military villa, eight Li bridge, Chaoyang District, Beijing Patentee before: Beijing Aviation Manufacturing Engineering Institute of China Aviation Industry Group Company |
|
| CP01 | Change in the name or title of a patent holder |