CN103474308A - Electronic gun with electromagnetic centering device - Google Patents
Electronic gun with electromagnetic centering device Download PDFInfo
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- CN103474308A CN103474308A CN2013104605916A CN201310460591A CN103474308A CN 103474308 A CN103474308 A CN 103474308A CN 2013104605916 A CN2013104605916 A CN 2013104605916A CN 201310460591 A CN201310460591 A CN 201310460591A CN 103474308 A CN103474308 A CN 103474308A
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Abstract
The invention discloses an electronic gun with an electromagnetic centering device. An electronic beam generated by a negative electrode sequentially passes through a beam forming electrode, a positive electrode, a focusing device and an eccentric scanning device to be converged on a work piece. The electromagnetic centering device is arranged in the flying path of the electronic beam between the positive electrode and the focusing device, a focusing winding of the electromagnetic centering device is connected with a power supply, and a magnetic field parallel to the reference direction of the electronic beam is generated after the focusing winding is electrified. A deflection winding comprises an X winding body and a Y winding body, wherein the X winding body and the Y winding body are respectively connected with an independent power supply, and the X winding body and the Y winding body can generate magnetic fields perpendicular to the flying reference direction of electronic beam. Vectors, in a plane perpendicular to the flying reference direction of the electronic beam, of a deflection magnetic field can be conveniently and flexibly adjusted by respectively adjusting the current of the X deflection winding body and the current of the Y deflection winding body. The electronic gun can enable an electronic beam emitted by the negative electrode to be converged in the center of an inlet of the focusing device, so that the quality of the electronic beam is improved.
Description
Technical field
The present invention relates to the electron beam process equipment field, be specifically related to a kind of electron gun with electromagnetism sympodium device.
Background technology
Electron gun is the critical component of electron beam process equipment, in precise electronic bundle process equipment, requires the strict centering sympodium of negative electrode, bunching electrode, anode and focusing arrangement of electron gun to produce high-quality electron beam, and current taked measure has for this reason:
1. improve electron gun machining and assembly precision.The negative electrode of this measure electron gun is after being changed by high temperature and service time, and its shape or position can change, and depend the machining of electron gun and stability and the repeatability that assembly precision is difficult to guarantee the electron beam quality alone.
2. between electron beam generator (negative electrode and bunching electrode), anode and focusing arrangement three, certain parts or certain two parts are made fine-tuning device, are generally electron beam generator or focusing arrangement.This measure requires to carry out online machinery adjustment under band high voltage, high vacuum condition, and therefore device is complicated, and operation is very constant.
3. on the electron beam flight path, set up electromagnetism sympodium device between anode and focusing arrangement.Electromagnetism sympodium device has lengthened electron beam at anode and focusing arrangement flight path, thereby increases the diversity of electron beam before entering focusing arrangement.Conventional electromagnetism sympodium device, owing to only merely considering the sympodium function, has therefore increased the difficulty that electron beam converges after focusing arrangement in addition.
Summary of the invention
Technical problem to be solved by this invention is to provide a kind of electron gun with electromagnetism sympodium device, and it can allow the electron beam flown out from anode converge in the center of focusing arrangement entrance, thereby improves the quality of electron beam.
For addressing the above problem, the present invention is achieved by the following technical solutions:
A kind of electron gun with electromagnetism sympodium device, comprise and be successively negative electrode, bunching electrode, anode, focusing arrangement and the deflection scanning device that coaxial centering is laid; The electron beam that negative electrode produces converges on workpiece successively after bunching electrode, anode, focusing arrangement and deflection scanning device; Be provided with electromagnetism sympodium device between anode on the electron beam flight path and focusing arrangement; This electromagnetism sympodium device is mainly by armor and be arranged on focusing magnetic field magnetic gap in armor, focus on winding and the deflection winding forms; The electron beam channel that the supplied for electronic bundle passes through is left at the middle part of armor; The focusing magnetic field magnetic gap is towards electron beam channel; Focus on winding and be connected with power supply, focus on winding after energising and produce the magnetic field that is parallel to electron beam reference flight direction; The deflection winding comprises X, two groups of windings of Y, X, two groups of windings of Y each with one independently power supply be connected, X after energising, two groups of windings generations of Y are perpendicular to the magnetic field of electron beam reference flight direction.Rely on the size of regulating respectively X, two groups of deflection winding currents of Y, just can regulate easily and flexibly magnetic deflection field at the vector perpendicular on electron beam reference flight direction plane.
In such scheme, the power supply that focuses on winding is adjustable DC power supply, the adjustable double polarity DC power supply that the power supply of deflection winding is independent two-way.
Compared with prior art, the present invention is by arranging follow-on electromagnetism sympodium device between the anode on electron beam flight path in electron gun and focusing arrangement, this electromagnetism sympodium device had both adopted the focusing winding to produce the magnetic field that is parallel to electron beam reference flight direction, adopted again the deflection winding to produce the magnetic field perpendicular to electron beam reference flight direction, thereby make electron beam can converge in the center of focusing arrangement population, electron beam can pool more speckle at the workpiece place, the more approaching circle of the shape of spot, it is even that Energy distribution more is tending towards, can realize in addition the effective working distance of more growing, thereby improve the electron beam quality.
The accompanying drawing explanation
Fig. 1 is the electron gun internal structure schematic diagram with electromagnetism sympodium device.Mark in figure: 1, negative electrode; 2, bunching electrode; 3, anode; 4, electromagnetism sympodium device; 5, focusing arrangement; 6, deflection scanning device; 7, electron beam; 8, workpiece.
Fig. 2 is electromagnetism sympodium apparatus structure schematic diagram (front view).Mark in figure: 4-1, armor; 4-2, focusing winding; 4-3, focusing magnetic field magnetic gap; 4-4, deflection winding.
Fig. 3 is electromagnetism sympodium apparatus structure schematic diagram (vertical view).
Embodiment
A kind of electron gun with electromagnetism sympodium device, as shown in Figure 1, comprise and be successively negative electrode 1, bunching electrode 2, anode 3, focusing arrangement 5 and the deflection scanning device 6 that coaxial centering is laid.The electron beam 7 that negative electrode 1 produces converges on workpiece 8 successively after bunching electrode 2, anode 3, focusing arrangement 5 and deflection scanning device 6.Be provided with electromagnetism sympodium device 4 between anode 3 on electron beam 7 flight paths and focusing arrangement 5.
Mainly as shown in Figures 2 and 3, it is mainly by armor 4-1 and be located at focusing magnetic field magnetic gap 4-3 in armor 4-1, focus on winding 4-2 and deflection winding 4-4 forms for above-mentioned electromagnetism sympodium device 4.Electron beam 7 passages that supplied for electronic bundle 7 passes through are left at the middle part of armor 4-1.Focusing magnetic field magnetic gap 4-3 is towards electron beam 7 passages.Focus on winding 4-2 and be connected with its power supply, the power supply of this focusing winding 4-2 is adjustable DC power supply.Focus on winding 4-2 after energising and produce the magnetic field that is parallel to electron beam 7 reference flight directions.Deflection winding 4-4 comprises X, two groups of windings of Y, X, two groups of windings of Y each with one independently power supply be connected, the adjustable double polarity DC power supply that the power supply of this deflection winding 4-4 is independent two-way.After energising, X, two groups of windings of Y produce the magnetic field perpendicular to electron beam 7 reference flight directions.
The operation principle of electromagnetism sympodium device 4 is: after passing into adjustable direct current in the focusing winding 4-2 of electromagnetism sympodium device 4, produce at electromagnetism sympodium device 4 inner chamber electron beam 7 passages the magnetic field that is parallel to electron beam 7 reference flight directions, focussing force is played to electron beam 7 in this magnetic field, makes electron beam 7 by the rear generation convergence effect of electromagnetism sympodium device 4.Pass into the size of electric current of the focusing winding 4-2 of electromagnetism sympodium device 4 by adjusting, just can focus.The deflection winding 4-4 of electromagnetism sympodium device 4 is by X, two groups of windings of Y, after X, two groups of windings of Y pass into electric current respectively, produce the resultant magnetic field perpendicular to electron beam 7 reference flight directions at electromagnetism sympodium device 4 inner chamber electron beam 7 passages, deflecting action is played to electron beam 7 in this magnetic field, makes electron beam 7 by the rear generation offset effect of electromagnetism sympodium device 4.Deviation angle is determined by the size of current that passes into respectively X, two groups of windings of Y and polarity.So adjustable double polarity DC power supply that the power supply of deflection winding 4-4 is independent two-way.
Claims (2)
1. with the electron gun of electromagnetism sympodium device, comprise and be successively negative electrode (1), bunching electrode (2), anode (3), focusing arrangement (5) and the deflection scanning device (6) that coaxial centering is laid; The electron beam (7) that negative electrode (1) produces converges on workpiece (8) successively after bunching electrode (2), anode (3), focusing arrangement (5) and deflection scanning device (6); It is characterized in that: between the anode (3) on electron beam (7) flight path and focusing arrangement (5), be provided with electromagnetism sympodium device (4); This electromagnetism sympodium device (4) is mainly by armor (4-1) and be arranged on focusing magnetic field magnetic gap (4-3) in armor (4-1), focus on winding (4-2) and deflection winding (4-4) forms; Electron beam (7) passage that supplied for electronic bundle (7) passes through is left at the middle part of armor (4-1); Focusing magnetic field magnetic gap (4-3) is towards electron beam (7) passage; Focus on winding (4-2) and be connected with power supply, focus on winding (4-2) after energising and produce the magnetic field that is parallel to electron beam (7) reference flight direction; Deflection winding (4-4) comprises X, two groups of windings of Y, X, two groups of windings of Y each with one independently power supply be connected, X after energising, two groups of windings generations of Y are perpendicular to the magnetic field of electron beam (7) reference flight direction.
2. the electron gun with electromagnetism sympodium device according to claim 1 is characterized in that: the power supply that focuses on winding (4-2) is adjustable DC power supply, the adjustable double polarity DC power supply that the power supply of deflection winding (4-4) is independent two-way.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104605916A CN103474308A (en) | 2013-09-30 | 2013-09-30 | Electronic gun with electromagnetic centering device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104605916A CN103474308A (en) | 2013-09-30 | 2013-09-30 | Electronic gun with electromagnetic centering device |
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| CN103474308A true CN103474308A (en) | 2013-12-25 |
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| CN2013104605916A Pending CN103474308A (en) | 2013-09-30 | 2013-09-30 | Electronic gun with electromagnetic centering device |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105702545A (en) * | 2016-04-07 | 2016-06-22 | 桂林狮达机电技术工程有限公司 | Electron gun system of electron beam rapid forming machine with focusing compensation function |
| CN106298403A (en) * | 2016-08-29 | 2017-01-04 | 中航动力股份有限公司 | A kind of electron beam sympodium method of calibration |
| CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4665297A (en) * | 1985-05-31 | 1987-05-12 | Bakish Materials Corporation | High power electron gun |
| CN1716512A (en) * | 2004-04-22 | 2006-01-04 | Fei公司 | Particle-optical apparatus provided with lenses with permanent-magnetic material |
| US20080224062A1 (en) * | 2007-03-14 | 2008-09-18 | Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh | Lens coil cooling of a magnetic lens |
| CN203481175U (en) * | 2013-09-30 | 2014-03-12 | 桂林狮达机电技术工程有限公司 | Electronic gun with electromagnetic centering device |
-
2013
- 2013-09-30 CN CN2013104605916A patent/CN103474308A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4665297A (en) * | 1985-05-31 | 1987-05-12 | Bakish Materials Corporation | High power electron gun |
| CN1716512A (en) * | 2004-04-22 | 2006-01-04 | Fei公司 | Particle-optical apparatus provided with lenses with permanent-magnetic material |
| US20080224062A1 (en) * | 2007-03-14 | 2008-09-18 | Ict Integrated Circuit Testing Gesellschaft Fur Halbleiterpruftechnik Mbh | Lens coil cooling of a magnetic lens |
| CN203481175U (en) * | 2013-09-30 | 2014-03-12 | 桂林狮达机电技术工程有限公司 | Electronic gun with electromagnetic centering device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105702545A (en) * | 2016-04-07 | 2016-06-22 | 桂林狮达机电技术工程有限公司 | Electron gun system of electron beam rapid forming machine with focusing compensation function |
| CN106298403A (en) * | 2016-08-29 | 2017-01-04 | 中航动力股份有限公司 | A kind of electron beam sympodium method of calibration |
| CN106298403B (en) * | 2016-08-29 | 2018-03-30 | 中航动力股份有限公司 | A kind of electron beam sympodium method of calibration |
| CN106981410A (en) * | 2017-05-03 | 2017-07-25 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
| CN106981410B (en) * | 2017-05-03 | 2019-06-28 | 桂林实创真空数控设备有限公司 | High-power wide cut deflection of a beam of electrons scanning means |
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Application publication date: 20131225 |