CN104772460A - Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method - Google Patents
Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method Download PDFInfo
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- CN104772460A CN104772460A CN201510182670.4A CN201510182670A CN104772460A CN 104772460 A CN104772460 A CN 104772460A CN 201510182670 A CN201510182670 A CN 201510182670A CN 104772460 A CN104772460 A CN 104772460A
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- ion cluster
- cluster bundle
- ion
- bundle
- ionized cluster
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The invention discloses an ionized cluster beam 3D (Three-Dimensional) printing device which comprises an ion source, a ionized cluster beam printing head, an XYZ tri-axis movable platform and an object support, wherein the ion source is used for supplying ionized cluster beams; the ionized cluster beam printing head comprises a traction electrode, a primary electrostatic lens, a beam-limiting diaphragm, a multi-level magnetic deflection device and a secondary electrostatic lens; the pull electrode is used for educing the ionized cluster beams from the ion source; the primary electrostatic lens is used for improving the speeds of the ionized cluster beams; the multi-level magnetic deflection device is used for regulating the positions of the ionized cluster beams so as to reduce astigmation and realize ionized cluster beam blanking; the secondary electrostatic lens is used for focusing so as to obtain ionized cluster beams with required pore diameters; the XYZ tri-axis movable platform is used for driving the ion source and the ionized cluster beam printing head to move; the object support is used for supporting workpieces. The ionized cluster beams are introduced into 3D printing processing, so that complicated-shape 3D ionized cluster beam injection processing can be finished; the ionized cluster beam 3D printing device has the advantages of low pollution, high accuracy, high efficiency, wide optional processing material range, and the like.
Description
Technical field
The invention belongs to 3D printing device field, more specifically, relate to a kind of ion cluster bundle 3D printing equipment and method.
Background technology
The current material for 3D printer is very limited, nothing more than gypsum, inorganic powder, photosensitive resin, plastics etc.The material that can be applied to 3D printing is also very single, and based on plastics, and printer is also very fastidious to homogenous material.Researchers make some progress on many file printings, but printed material is still the large obstacle that 3D prints.Particularly metallic print, print field at 3D and still there are some difficult problems and need to solve, the Method of printing of particularly at present exploitation is all high temperature generating material, there is the shortcomings such as internal stress is excessive.
Ion beam processing is processing accurate, the finest in the current special process.Ion etching can reach nano-precision, and ion film plating can be controlled in submicron order precision, and the degree of depth of ion implantation and concentration also can accurately control; Ion beam processing is carried out in high vacuum, pollute few, being particularly suitable for carrying out processing ion Shu Jiagong to oxidizable metal, alloy and semi-conducting material leans on the atom of Ions Bombardment material surface to realize, it is a kind of microcosmic effect, belong to cool grinding, so machining stress and distortion minimum, be suitable for processing various material and low firm part part.These above ion beam processing are all monatomic ion state processing methods, are difficult to be applied to 3D and print field to carry out rapid processing and to manufacture complex-shaped changeable structure.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides a kind of ion cluster bundle 3D printing equipment, ion cluster bundle can be incorporated into 3D and print processing, thus fast, the accurate 3D that realizes prints processing, especially the 3D of metal prints and processes.
For achieving the above object, according to one aspect of the present invention, providing a kind of ion cluster bundle 3D printing equipment, comprising ion gun, ion cluster bundle printhead, XYZ tri-axle mobile platform and article carrying platform, ion gun, for providing ion cluster bundle;
Ion cluster bundle printhead, be positioned at ionogenic below, it is fixedly connected with ion gun and is fixedly mounted on XYZ tri-axle mobile platform, it comprises along the extraction electrodes that ion cluster bundle direction of advance sets gradually, one-level electrostatic lenses, beam-defining jaw, multipole magnetic deflection arrangement and secondary electrostatic lens, wherein
Extraction electrodes, for drawing ion cluster bundle from ion gun;
One-level electrostatic lenses, for accelerating ion cluster bundle;
Beam-defining jaw, for limiting the diameter of ion cluster bundle;
Multistage magnetic deflection arrangement, for adjusting the position of ion cluster bundle to reduce astigmatism and to realize ion cluster beam blanking;
Secondary electrostatic lens, for focusing on the ion cluster bundle obtaining required aperture;
XYZ tri-axle mobile platform, for driving ion gun and ion cluster bundle printhead to move, prints to make ion cluster beam to workpiece realizing 3D;
Article carrying platform, for accepting workpiece.
Preferably, described ion gun comprises arc initiation device and arc ions evaporation source.
Preferably, described XYZ tri-axle mobile platform is provided with fixture, and described ion cluster bundle printhead is fixedly mounted on XYZ tri-axle mobile platform by fixture.
Preferably, described XYZ mobile platform comprises X-axis motor, y-axis motor and Z axis motor, is respectively used to drive ion cluster bundle printhead to move along X-axis, Y-axis and Z axis.
Preferably, described X-axis motor, y-axis motor and Z axis motor are linear electric motors, and described X-axis motor, y-axis motor and Z axis motor are all connected with slide rail.
Realize the method for 3D printing according to above-mentioned ion cluster bundle 3D printing equipment, comprise the following steps:
(1) ion cluster bundle is drawn by extraction electrodes from ion gun;
(2) ion cluster bundle is through one-level electrostatic lenses, and one-level electrostatic lenses accelerates ion cluster Shu Jinhang;
(3) ion cluster bundle is by beam-defining jaw, and ion cluster bundle is restricted to the ion cluster bundle of required pore size by beam-defining jaw;
(4) ion cluster bundle is through multistage magnetic deflection arrangement, and the position of multistage magnetic deflection arrangement adjustment ion cluster bundle is to reduce astigmatism also as required to ion cluster Shu Shixian blanking;
(5) ion cluster bundle is through secondary electrostatic lens, and ion cluster bundle is focused on the ion cluster bundle obtaining required aperture by secondary electrostatic lens;
(6) ion cluster bundle printhead carries out 3D printing processing to the workpiece on article carrying platform under the driving of XYZ tri-axle mobile platform.
In general, the above technical scheme conceived by the present invention compared with prior art, can obtain following beneficial effect:
1) the present invention is limited the aperture of ion cluster bundle after one-level electrostatic lenses accelerates by beam-defining jaw, flexibly changing ion cluster bundle bundle spot size so that on workpiece the structure of printing-forming complicated shape;
2) the present invention is by multistage magnetic deflection arrangement, multistage magnetic deflection arrangement adjusts reduce astigmatism and realize blanking to ion beam as required to ion cluster Shu Jinhang, and by secondary, ion cluster bundle is focused on the ion cluster bundle obtaining required aperture, meticulous ion cluster bundle bundle spot can be obtained, to realize high-precision 3D printing processing;
3) XYZ tri-axle mobile platform of the present invention can drive ion gun and ion cluster bundle printhead to move along X-axis, Y-axis and Z axis, thus realizes 3D printing processing to the workpiece on article carrying platform;
4) the present invention adopts and ion cluster bundle is introduced 3D prints processing, advantages such as can completing complex-shaped three-dimensional ion cluster bundle and inject processing, have low stain, precision is high, efficiency is high and available rapidoprint is more extensive.
Accompanying drawing explanation
Fig. 1 is ion cluster bundle 3D printing equipment schematic diagram of the present invention;
Fig. 2 is the ion cluster bundle printhead schematic diagram adopting arc ions evaporation source in the present invention.
Detailed description of the invention
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1 and Figure 2, a kind of ion cluster bundle 3D printing equipment, comprises ion gun 1, ion cluster bundle printhead 2, XYZ tri-axle mobile platform 12 and article carrying platform 17, wherein,
Ion gun 1, for providing ion cluster bundle;
Ion cluster bundle printhead 2, is fixedly connected with ion gun 1, is positioned at the below of ion gun 1, and is fixedly mounted on XYZ tri-axle mobile platform 12, and it is for drawing ion cluster bundle, adjustment and focused ion group bundle;
XYZ tri-axle mobile platform 12, for carrying ion cluster bundle printhead 2, drives ion cluster bundle printhead 2 to move along X-axis, Y-axis and Z axis;
Article carrying platform 17, for carrying workpiece;
Wherein, described ion cluster bundle printhead 2 along the direction of advance of ion cluster bundle comprise successively from ion gun 1 draw the extraction electrodes 11 of ion cluster bundle, the one-level electrostatic lenses 13 that ion cluster bundle is accelerated, the beam-defining jaw 14 of restriction ion cluster beam diameter size, adjustment ion cluster bundle position reducing astigmatism, realize the secondary electrostatic lens 16 that the multipole magnetic deflection arrangement 15 of ion cluster beam blanking and focusing obtain the ion cluster bundle in required aperture.
Described XYZ tri-axle mobile platform 12 comprises X-axis motor 4, y-axis motor 5, Z axis motor 6 and corresponding slide rail 3, so that ion cluster bundle printhead 2 moves along X-axis, Y-axis and Z axis; Described X-axis motor 4, y-axis motor 5 and Z axis motor 6 are linear electric motors, move with the high-speed straight-line of applicable ion cluster bundle printhead 2.X-axis motor 4, y-axis motor 5, Z axis motor 6 are respectively used to drive ion cluster bundle printhead 2 to move along X-axis, Y-axis and Z axis, print to realize 3D.
Described XYZ tri-axle mobile platform 12 is provided with fixture 7, ion cluster bundle printhead 2 is arranged on fixture 7, under the driving of the X-axis motor 4 of XYZ tri-axle mobile platform 12, y-axis motor 5 and Z axis motor 6, ion cluster bundle printhead 2 can realize three-dimensional motion with fixture 7.Ion gun 1 is positioned at above ion cluster bundle printhead 2, and workpiece 8 is fixed on article carrying platform 17.Preferably, described ion gun 1 is made up of arc initiation device 9 and arc ions evaporation source 10, so that produce ion cluster bundle fast.
In addition, present invention also offers a kind of method realizing 3D printing according to above-mentioned ion cluster bundle 3D printing equipment, comprise the following steps:
(1) ion cluster bundle is drawn by extraction electrodes 11 from ion gun 1;
(2) ion cluster bundle is through one-level electrostatic lenses 13, and one-level electrostatic lenses 13 couples of ion cluster Shu Jinhang accelerate;
(3) ion cluster bundle is by beam-defining jaw 14, and ion cluster bundle is restricted to the ion cluster bundle of required pore size by beam-defining jaw 14;
(4) ion cluster bundle is through multistage magnetic deflection arrangement 15, and multistage magnetic deflection arrangement 15 couples of ion cluster Shu Jinhang adjust to reduce astigmatism also as required to ion cluster Shu Shixian blanking;
(5) ion cluster bundle is through secondary electrostatic lens 16, and ion cluster bundle is focused on the ion cluster bundle obtaining required aperture by secondary electrostatic lens 16;
(6) ion cluster bundle printhead 2 realizes 3D to the workpiece 8 on article carrying platform 17 and prints processing under the driving of XYZ tri-axle mobile platform 12.
The present invention adopts and ion cluster bundle is introduced 3D printing processing, can complete complex-shaped three-dimensional ion cluster bundle and inject processing, advantages such as having low stain, precision is high, efficiency is high and rapidoprint can be selected extensive.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. an ion cluster bundle 3D printing equipment, comprises ion gun, ion cluster bundle printhead, XYZ tri-axle
Mobile platform and article carrying platform, is characterized in that:
Ion gun, for providing ion cluster bundle;
Ion cluster bundle printhead, be positioned at ionogenic below, it is fixedly connected with ion gun and is fixedly mounted on XYZ tri-axle mobile platform, it comprises along the extraction electrodes that ion cluster bundle direction of advance sets gradually, one-level electrostatic lenses, beam-defining jaw, multipole magnetic deflection arrangement and secondary electrostatic lens, wherein
Extraction electrodes, for drawing ion cluster bundle from ion gun;
One-level electrostatic lenses, for accelerating ion cluster bundle;
Beam-defining jaw, for limiting the diameter of ion cluster bundle;
Multistage magnetic deflection arrangement, for adjusting the position of ion cluster bundle to reduce astigmatism and to realize ion cluster beam blanking;
Secondary electrostatic lens, for focusing on the ion cluster bundle obtaining required aperture;
XYZ tri-axle mobile platform, for driving ion gun and ion cluster bundle printhead to move, prints to make ion cluster beam to workpiece realizing 3D;
Article carrying platform, for accepting workpiece.
2. a kind of ion cluster bundle 3D printing equipment according to claim 1, is characterized in that: described ion gun comprises arc initiation device and arc ions evaporation source.
3. a kind of ion cluster bundle 3D printing equipment according to claim 1, is characterized in that: described XYZ tri-axle mobile platform is provided with fixture, and described ion cluster bundle printhead is fixedly mounted on XYZ tri-axle mobile platform by fixture.
4. a kind of ion cluster bundle 3D printing equipment according to claim 1, is characterized in that: described XYZ mobile platform comprises X-axis motor, y-axis motor and Z axis motor, is respectively used to drive ion cluster bundle printhead to move along X-axis, Y-axis and Z axis.
5. want a kind of ion cluster bundle 3D printing equipment described in 4 according to right, it is characterized in that: described X-axis motor, y-axis motor and Z axis motor are linear electric motors, described X-axis motor, y-axis motor and Z axis motor are all connected with slide rail.
6. the ion cluster bundle 3D printing equipment according to claim arbitrary in Claims 1 to 5 realizes the method that 3D prints, and it is characterized in that: comprise the following steps:
(1) ion cluster bundle is drawn by extraction electrodes from ion gun;
(2) ion cluster bundle is through one-level electrostatic lenses, and one-level electrostatic lenses accelerates ion cluster Shu Jinhang;
(3) ion cluster bundle is by beam-defining jaw, and ion cluster bundle is restricted to the ion cluster bundle of required pore size by beam-defining jaw;
(4) ion cluster bundle is through multistage magnetic deflection arrangement, and the position of multistage magnetic deflection arrangement adjustment ion cluster bundle is to reduce astigmatism also as required to ion cluster Shu Shixian blanking;
(5) ion cluster bundle is through secondary electrostatic lens, and ion cluster bundle is focused on the ion cluster bundle obtaining required aperture by secondary electrostatic lens;
(6) ion cluster bundle printhead carries out 3D printing processing to the workpiece on article carrying platform under the driving of XYZ tri-axle mobile platform.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510182670.4A CN104772460B (en) | 2015-04-17 | 2015-04-17 | Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method |
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| CN201510182670.4A CN104772460B (en) | 2015-04-17 | 2015-04-17 | Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method |
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| CN104772460A true CN104772460A (en) | 2015-07-15 |
| CN104772460B CN104772460B (en) | 2017-01-11 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105463378A (en) * | 2015-12-24 | 2016-04-06 | 昆山工研院新型平板显示技术中心有限公司 | Evaporation plating equipment and preparation process for organic light-emitting layer of organic light-emitting diode (OLED) device |
| CN105869985A (en) * | 2016-06-12 | 2016-08-17 | 江苏天瑞仪器股份有限公司 | Vacuum cover plate structure for desorption ion source sampling device |
| CN105895492A (en) * | 2016-06-12 | 2016-08-24 | 江苏天瑞仪器股份有限公司 | XY mobile platform for analyzing ion source sampling device |
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| JPH03146603A (en) * | 1989-10-31 | 1991-06-21 | Ryuzo Watanabe | Sintering method for adding temperature gradation and device thereof |
| CN1658331A (en) * | 2004-02-17 | 2005-08-24 | Fei公司 | Particle source with selectable beam current and energy spread |
| CN102983050A (en) * | 2011-09-06 | 2013-03-20 | 上海凯世通半导体有限公司 | Ion injection device |
| CN103978212A (en) * | 2014-05-29 | 2014-08-13 | 北京中科博益科技有限公司 | Multiple cavity laser 3D (three dimensional) printing device |
| US20150042017A1 (en) * | 2013-08-06 | 2015-02-12 | Applied Materials, Inc. | Three-dimensional (3d) processing and printing with plasma sources |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH03146603A (en) * | 1989-10-31 | 1991-06-21 | Ryuzo Watanabe | Sintering method for adding temperature gradation and device thereof |
| CN1658331A (en) * | 2004-02-17 | 2005-08-24 | Fei公司 | Particle source with selectable beam current and energy spread |
| CN102983050A (en) * | 2011-09-06 | 2013-03-20 | 上海凯世通半导体有限公司 | Ion injection device |
| US20150042017A1 (en) * | 2013-08-06 | 2015-02-12 | Applied Materials, Inc. | Three-dimensional (3d) processing and printing with plasma sources |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105463378A (en) * | 2015-12-24 | 2016-04-06 | 昆山工研院新型平板显示技术中心有限公司 | Evaporation plating equipment and preparation process for organic light-emitting layer of organic light-emitting diode (OLED) device |
| CN105463378B (en) * | 2015-12-24 | 2018-10-23 | 昆山工研院新型平板显示技术中心有限公司 | The organic luminous layer preparation process of OLED evaporated devices and OLED device |
| CN105869985A (en) * | 2016-06-12 | 2016-08-17 | 江苏天瑞仪器股份有限公司 | Vacuum cover plate structure for desorption ion source sampling device |
| CN105895492A (en) * | 2016-06-12 | 2016-08-24 | 江苏天瑞仪器股份有限公司 | XY mobile platform for analyzing ion source sampling device |
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| CN104772460B (en) | 2017-01-11 |
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