CN104772460B - Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method - Google Patents
Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method Download PDFInfo
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- CN104772460B CN104772460B CN201510182670.4A CN201510182670A CN104772460B CN 104772460 B CN104772460 B CN 104772460B CN 201510182670 A CN201510182670 A CN 201510182670A CN 104772460 B CN104772460 B CN 104772460B
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- ion cluster
- cluster bundle
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- bundle
- ionized cluster
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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Abstract
The invention discloses an ionized cluster beam 3D (Three-Dimensional) printing device which comprises an ion source, a ionized cluster beam printing head, an XYZ tri-axis movable platform and an object support, wherein the ion source is used for supplying ionized cluster beams; the ionized cluster beam printing head comprises a traction electrode, a primary electrostatic lens, a beam-limiting diaphragm, a multi-level magnetic deflection device and a secondary electrostatic lens; the pull electrode is used for educing the ionized cluster beams from the ion source; the primary electrostatic lens is used for improving the speeds of the ionized cluster beams; the multi-level magnetic deflection device is used for regulating the positions of the ionized cluster beams so as to reduce astigmation and realize ionized cluster beam blanking; the secondary electrostatic lens is used for focusing so as to obtain ionized cluster beams with required pore diameters; the XYZ tri-axis movable platform is used for driving the ion source and the ionized cluster beam printing head to move; the object support is used for supporting workpieces. The ionized cluster beams are introduced into 3D printing processing, so that complicated-shape 3D ionized cluster beam injection processing can be finished; the ionized cluster beam 3D printing device has the advantages of low pollution, high accuracy, high efficiency, wide optional processing material range, and the like.
Description
Technical field
The invention belongs to 3D printing device field, print more particularly, to a kind of ion cluster bundle 3D
Device and method.
Background technology
At present the most very limited for the material of 3D printer, Gypsum Fibrosum, inorganic powder, photosensitive nothing more than
Resin, plastics etc..The material that can be applied to 3D printing is the most single, based on plastics, and
Printer is the most fastidious to homogenous material.Researchers have been achieved for necessarily on many file printings
Progress, but printed material is still that the big obstacle that 3D prints.Particularly metallic print, at 3D
Printing field still suffers from some difficult problems to be needed to solve, and the Method of printing of exploitation is all high temperature particularly at present
Generate material, there is the shortcomings such as internal stress is excessive.
Ion beam processing is processing the most accurate, the finest in the current special process.Ion etching up to
Nano-precision, ion film plating can be controlled in submicron order precision, and the degree of depth of ion implanting and concentration are also
Can accurately control；Ion beam processing is carried out in fine vacuum, pollutes few, is particularly suitable for easy oxygen
It is by ion bom bardment material surface that metal, alloy and the semi-conducting material changed is processed ion beam processing
Atom realize, be a kind of microcosmic effect, belong to cool grinding, so machining stress and deformation
Minimum, it is suitable for various materials and low firm part part are processed.The above ion beam processing
All monatomic ion state processing method, it is difficult to be applied to 3D print field to carry out rapid processing and
Manufacture complex-shaped changeable structure.
Summary of the invention
For disadvantages described above or the Improvement requirement of prior art, the invention provides a kind of ion cluster bundle 3D
Printing equipment, ion cluster bundle can be incorporated into 3D print processing, thus quickly, precision realization
3D prints the 3D of processing, especially metal and prints processing.
For achieving the above object, according to one aspect of the present invention, it is provided that a kind of ion cluster bundle 3D beats
Printing equipment is put, including ion source, ion cluster bundle printhead, XYZ tri-axle mobile platform and article carrying platform,
Ion source, is used for providing ion cluster bundle；
Ion cluster bundle printhead, is positioned at ionogenic lower section, and it is fixed with ion source and is connected and fixing peace
Being contained on XYZ tri-axle mobile platform, it includes the traction set gradually in ion cluster bundle direction of advance
Electrode, one-level electrostatic lenses, beam-defining jaw, multistage magnetic deflection arrangement and secondary electrostatic lens, wherein,
Extraction electrodes, for drawing ion cluster bundle from ion source；
One-level electrostatic lenses, for accelerating ion cluster bundle；
Beam-defining jaw, for limiting the diameter of ion cluster bundle；
Multistage magnetic deflection arrangement, for adjusting the position of ion cluster bundle to reduce astigmatism and to realize ion
Group's beam blanking；
Secondary electrostatic lens, for focusing on the ion cluster bundle obtaining required aperture；
XYZ tri-axle mobile platform, is used for driving ion source and ion cluster bundle printhead to move, so that from
The beam of son group realizes 3D printing on workpiece；
Article carrying platform, is used for accepting workpiece.
Preferably, described ion source includes arc initiation device and arc ions evaporation source.
Preferably, described XYZ tri-axle mobile platform is provided with fixture, described ion cluster bundle printhead
It is fixedly mounted on XYZ tri-axle mobile platform by fixture.
Preferably, described XYZ mobile platform includes X-axis motor, y-axis motor and Z axis motor, point
It is not used for driving ion cluster bundle printhead to move along X-axis, Y-axis and Z axis.
Preferably, described X-axis motor, y-axis motor and Z axis motor are linear electric motors, described X
It is respectively connected with slide rail on spindle motor, y-axis motor and Z axis motor.
Realize, according to above-mentioned ion cluster bundle 3D printing equipment, the method that 3D prints, comprise the following steps:
(1) ion cluster bundle is drawn by extraction electrodes from ion source；
(2) ion cluster bundle is accelerated by ion cluster bundle through one-level electrostatic lenses, one-level electrostatic lenses；
(3) ion cluster bundle passes through beam-defining jaw, and it is big that ion cluster bundle is limited to required aperture by beam-defining jaw
Little ion cluster bundle；
(4) ion cluster bundle adjusts ion cluster bundle through multistage magnetic deflection arrangement, multistage magnetic deflection arrangement
Position is to reduce astigmatism and as required to ion cluster Shu Shixian blanking；
(5) ion cluster bundle is through secondary electrostatic lens, and ion cluster bundle is focused on and obtains by secondary electrostatic lens
The ion cluster bundle in required aperture；
(6) ion cluster bundle printhead under the driving of XYZ tri-axle mobile platform to the work on article carrying platform
Part carries out 3D and prints processing.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it is possible to
Obtain following beneficial effect:
1) present invention comes the aperture of the ion cluster bundle after accelerating one-level electrostatic lenses by beam-defining jaw
Limit, flexibly changing ion cluster bundle beam spot size, in order on workpiece, printing-forming is multiple
The structure of miscellaneous shape；
2) ion cluster bundle is adjusted by the present invention by multistage magnetic deflection arrangement, multistage magnetic deflection arrangement
To reduce astigmatism and as required ion beam is realized blanking, and by two grades, ion cluster bundle is focused on
To the ion cluster bundle in required aperture, fine ion cluster bundle beam spot can be obtained, in order to realize high accuracy
3D print processing；
3) the XYZ tri-axle mobile platform of the present invention can drive ion source and ion cluster bundle printhead along X-axis,
Y-axis and Z axis move, thus the workpiece on article carrying platform realize 3D and prints processing；
4) present invention uses and ion cluster bundle introduces 3D printing processing, can complete complex-shaped three-dimensional
Ion cluster bundle injects processing, has low stain, precision is high, efficiency is high and available rapidoprint
Than the advantage such as wide.
Accompanying drawing explanation
Fig. 1 is the ion cluster bundle 3D printing equipment schematic diagram of the present invention；
Fig. 2 is the ion cluster bundle printhead schematic diagram using arc ions evaporation source in the present invention.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And embodiment, the present invention is further elaborated.Should be appreciated that described herein specifically
Embodiment only in order to explain the present invention, is not intended to limit the present invention.Additionally, it is disclosed below
Just may be used as long as technical characteristic involved in each embodiment of the present invention does not constitutes conflict each other
To be mutually combined.
As shown in Figure 1 and Figure 2, a kind of ion cluster bundle 3D printing equipment, including ion source 1, ion
Group's bundle printhead 2, XYZ tri-axle mobile platform 12 and article carrying platform 17, wherein,
Ion source 1, is used for providing ion cluster bundle；
Ion cluster bundle printhead 2, fixes with ion source 1 and is connected, be positioned at the lower section of ion source 1, and solid
Dingan County is contained on XYZ tri-axle mobile platform 12, its be used for drawing ion cluster bundle, regulate and focus on from
Son group bundle；
XYZ tri-axle mobile platform 12, is used for carrying ion cluster bundle printhead 2, drives ion cluster bundle to print
2 move along X-axis, Y-axis and Z axis；
Article carrying platform 17, is used for carrying workpiece；
Wherein, described ion cluster bundle printhead 2 includes from ion successively along the direction of advance of ion cluster bundle
The extraction electrodes 11 of ion cluster bundle, the one-level electrostatic lenses 13 accelerating ion cluster bundle, limit are drawn in source 1
The beam-defining jaw 14 of ion cluster beam diameter size processed, adjustment ion cluster bundle position are to reduce astigmatism, realization
The multistage magnetic deflection arrangement 15 of ion cluster beam blanking and focusing obtain two grades of the ion cluster bundle in required aperture
Electrostatic lenses 16.
Described XYZ tri-axle mobile platform 12 include X-axis motor 4, y-axis motor 5, Z axis motor 6 with
And corresponding slide rail 3, in order to ion cluster bundle printhead 2 moves along X-axis, Y-axis and Z axis；Described
X-axis motor 4, y-axis motor 5 and Z axis motor 6 are linear electric motors, print with applicable ion cluster bundle
The high-speed straight-line motion of 2.X-axis motor 4, y-axis motor 5, Z axis motor 6 be respectively used for driving from
Son group bundle printhead 2 moves along X-axis, Y-axis and Z axis, to realize 3D printing.
Being provided with fixture 7 on described XYZ tri-axle mobile platform 12, ion cluster bundle printhead 2 is arranged on
On fixture 7, at X-axis motor 4, y-axis motor 5 and the Z axis motor 6 of XYZ tri-axle mobile platform 12
Driving under, ion cluster bundle printhead 2 can realize three-dimensional motion with fixture 7.Ion source 1 is positioned at
Above ion cluster bundle printhead 2, workpiece 8 is fixed on article carrying platform 17.Preferably, described ion
Source 1 is made up of arc initiation device 9 and arc ions evaporation source 10, in order to quickly produce ion cluster bundle.
A kind of 3D is realized according to above-mentioned ion cluster bundle 3D printing equipment it addition, present invention also offers
The method printed, comprises the following steps:
(1) ion cluster bundle is drawn by extraction electrodes 11 from ion source 1；
(2) ion cluster bundle is entered by ion cluster bundle through one-level electrostatic lenses 13, one-level electrostatic lenses 13
Row accelerates；
(3) ion cluster bundle passes through beam-defining jaw 14, and ion cluster bundle is limited to required by beam-defining jaw 14
The ion cluster bundle of pore size；
(4) ion cluster bundle is through multistage magnetic deflection arrangement 15, and multistage magnetic deflection arrangement 15 is to ion cluster
Bundle is adjusted reducing astigmatism and as required to ion cluster Shu Shixian blanking；
(5) ion cluster bundle is gathered by ion cluster bundle through secondary electrostatic lens 16, secondary electrostatic lens 16
Jiao obtains the ion cluster bundle in required aperture；
(6) ion cluster bundle printhead 2 under the driving of XYZ tri-axle mobile platform 12 to article carrying platform
Workpiece 8 on 17 realizes 3D and prints processing.
The present invention uses and ion cluster bundle introduces 3D printing processing, can complete complex-shaped three-dimensional ion
Group's bundle injects processing, has low stain, precision is high, efficiency high and can be selected for rapidoprint extensively etc.
Advantage.
As it will be easily appreciated by one skilled in the art that and the foregoing is only presently preferred embodiments of the present invention,
Not in order to limit the present invention, all made within the spirit and principles in the present invention any amendment, etc.
With replacement and improvement etc., should be included within the scope of the present invention.
Claims (6)
1. an ion cluster bundle 3D printing equipment, including ion source, ion cluster bundle printhead, XYZ tri-axle
Mobile platform and article carrying platform, it is characterised in that:
Ion source, is used for providing ion cluster bundle；
Ion cluster bundle printhead, is positioned at ionogenic lower section, and it is fixed with ion source and is connected and fixedly mounts
On XYZ tri-axle mobile platform, it includes the traction set gradually in ion cluster bundle direction of advance
Electrode, one-level electrostatic lenses, beam-defining jaw, multistage magnetic deflection arrangement and secondary electrostatic lens, its
In,
Extraction electrodes, for drawing ion cluster bundle from ion source；
One-level electrostatic lenses, for accelerating ion cluster bundle；
Beam-defining jaw, for limiting the diameter of ion cluster bundle；
Multistage magnetic deflection arrangement, for adjusting the position of ion cluster bundle to reduce astigmatism and to realize ion cluster
Beam blanking；
Secondary electrostatic lens, for focusing on the ion cluster bundle obtaining required aperture；
XYZ tri-axle mobile platform, is used for driving ion source and ion cluster bundle printhead to move, so that ion
Group's beam realizes 3D printing on workpiece；
Article carrying platform, is used for accepting workpiece.
A kind of ion cluster bundle 3D printing equipment the most according to claim 1, it is characterised in that: described from
Component includes arc initiation device and arc ions evaporation source.
A kind of ion cluster bundle 3D printing equipment the most according to claim 1, it is characterised in that: described
Being provided with fixture on XYZ tri-axle mobile platform, described ion cluster bundle printhead is by the fixing peace of fixture
It is contained on XYZ tri-axle mobile platform.
A kind of ion cluster bundle 3D printing equipment the most according to claim 1, it is characterised in that: described
XYZ mobile platform includes X-axis motor, y-axis motor and Z axis motor, is respectively used for driving ion
Group's bundle printhead moves along X-axis, Y-axis and Z axis.
5. want a kind of ion cluster bundle 3D printing equipment described in 4 according to right, it is characterised in that: described X
Spindle motor, y-axis motor and Z axis motor are linear electric motors, described X-axis motor, y-axis motor
And it is respectively connected with slide rail on Z axis motor.
6. realize 3D according to the ion cluster bundle 3D printing equipment described in any claim in Claims 1 to 5
The method printed, it is characterised in that: comprise the following steps:
(1) ion cluster bundle is drawn by extraction electrodes from ion source；
(2) ion cluster bundle is accelerated by ion cluster bundle through one-level electrostatic lenses, one-level electrostatic lenses；
(3) ion cluster bundle passes through beam-defining jaw, and ion cluster bundle is limited to required pore size by beam-defining jaw
Ion cluster bundle；
(4) ion cluster bundle adjusts the position of ion cluster bundle through multistage magnetic deflection arrangement, multistage magnetic deflection arrangement
Put to reduce astigmatism and as required to ion cluster Shu Shixian blanking；
(5) ion cluster bundle is through secondary electrostatic lens, and ion cluster bundle is focused on and obtains institute by secondary electrostatic lens
Need the ion cluster bundle in aperture；
(6) ion cluster bundle printhead under the driving of XYZ tri-axle mobile platform to the workpiece on article carrying platform
Carry out 3D and print processing.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510182670.4A CN104772460B (en) | 2015-04-17 | 2015-04-17 | Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510182670.4A CN104772460B (en) | 2015-04-17 | 2015-04-17 | Ionized cluster beam 3D (Three-Dimensional) printing device and ionized cluster beam 3D printing method |
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| Publication Number | Publication Date |
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| CN104772460A CN104772460A (en) | 2015-07-15 |
| CN104772460B true CN104772460B (en) | 2017-01-11 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105463378B (en) * | 2015-12-24 | 2018-10-23 | 昆山工研院新型平板显示技术中心有限公司 | The organic luminous layer preparation process of OLED evaporated devices and OLED device |
| CN105869985A (en) * | 2016-06-12 | 2016-08-17 | 江苏天瑞仪器股份有限公司 | Vacuum cover plate structure for desorption ion source sampling device |
| CN105895492A (en) * | 2016-06-12 | 2016-08-24 | 江苏天瑞仪器股份有限公司 | XY mobile platform for analyzing ion source sampling device |
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| CN1658331A (en) * | 2004-02-17 | 2005-08-24 | Fei公司 | Particle source with selectable beam current and energy spread |
| CN102983050A (en) * | 2011-09-06 | 2013-03-20 | 上海凯世通半导体有限公司 | Ion injection device |
| CN103978212A (en) * | 2014-05-29 | 2014-08-13 | 北京中科博益科技有限公司 | Multiple cavity laser 3D (three dimensional) printing device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2798280B2 (en) * | 1989-10-31 | 1998-09-17 | 龍三 渡辺 | Temperature gradient addition sintering method and apparatus |
| US20150042017A1 (en) * | 2013-08-06 | 2015-02-12 | Applied Materials, Inc. | Three-dimensional (3d) processing and printing with plasma sources |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1658331A (en) * | 2004-02-17 | 2005-08-24 | Fei公司 | Particle source with selectable beam current and energy spread |
| CN102983050A (en) * | 2011-09-06 | 2013-03-20 | 上海凯世通半导体有限公司 | Ion injection device |
| CN103978212A (en) * | 2014-05-29 | 2014-08-13 | 北京中科博益科技有限公司 | Multiple cavity laser 3D (three dimensional) printing device |
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