CN107622932B - A kind of electron beams rifle deflected joint and its application method - Google Patents
A kind of electron beams rifle deflected joint and its application method Download PDFInfo
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- CN107622932B CN107622932B CN201710828486.1A CN201710828486A CN107622932B CN 107622932 B CN107622932 B CN 107622932B CN 201710828486 A CN201710828486 A CN 201710828486A CN 107622932 B CN107622932 B CN 107622932B
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Abstract
The present invention relates to a kind of electron beams rifle deflected joints, including deflection tube, the deflection tube upper end is equipped with upper flange, lower end is equipped with lower flange, deflection coil is cased with outside the upper flange, focus coil, scanning coil are successively cased with outside the lower flange from top to bottom, temperature probe is inserted in the lower flange, after deflected joint, the deflection coil that the electron beam projected by electron gun is deflected connector enters back into vacuum container after deflecting an angle, and various steam in furnace chamber, splash are avoided from structure to the direct projection inside electron gun.So that the pollutants such as most steam and splashing is all deposited on deflected joint inner wall, to protect inside the electron gun for needing high-cleanness environment, greatly improves electron gun job stability.
Description
Technical field
The present invention relates to electron beam gun technical field more particularly to a kind of electron beams rifle deflected joint and its uses
Method.
Background technique
It is currently used for all kinds of axial electron guns also known as electron beam gun of welding, evaporation and melting purposes.It is generated from electronics
Position to stream outlet be nearly all beeline channel, either traditional hot-cathode electric beam rifle still newer cold cathode gas
Electron Beam Produced by Gas Discharge rifle.
The benefit of this axial arrangement is that entire electron gun rifle is compact-sized, and beam direction is concentrated, and is easy to focus and scan.
But disadvantage is also apparent from simultaneously.Since the outlet of electron gun is towards face vacuum chamber, each component in electron gun inside is exposed to furnace
Under room environmental pollution.In electron gun use process, due to each metalloid and nonmetallic steam, splashing that material heats and generates
The impurity such as object can also be easy to be deposited on zero, electron gun inside entrance electron gun straight (disadvantage of linear structure)
Rifle room is polluted on part surface, causes high-voltage isulation reduced performance, is caused accidental discharge, is influenced electron gun job stability.Pollution is tight
Splash even can fall in the gap for needing high-voltage isulation when weight, directly contribute partial high pressure electric discharge, burn inside electron gun
Component.Therefore, this evaporant and splash how is reduced or avoided just becomes raising electron gun to the pollution inside electron gun
One of key of job stability.
Existing method substantially has following two: one is constructed between electron gun and furnace chamber with the method for micro inflation
One opposite high-pressure area forms certain pressure retardance to steam.This method needs additional many disadvantage is that mechanism is complicated
Inflation, extraction sector, and influence electron gun working vacuum of not taking pains is controlled, cause electric discharge in rifle.Another method is pair
Rifle room is vacuumized by force, siphons away steam with higher vacuum degree.This method majority is carried out using additional vacuum pumps, is also deposited
Structure is complicated, disadvantage at high cost.The common drawback of both methods be no matter which kind of method, for bulky grain splashing all
It is helpless, and for the vapor deposition of steam, it also acts on limited.
Summary of the invention
To the above-mentioned state of the art, technical problem to be solved by the present invention lies in provide one kind
The technical scheme of the invention to solve the technical problem is: a kind of electron beams rifle deflected joint,
Including deflection tube, the deflection tube upper end is equipped with upper flange, and lower end is equipped with lower flange, is cased with deflection coil outside the upper flange,
It is successively cased with focus coil, scanning coil from top to bottom outside the lower flange, is inserted with temperature probe in the lower flange.
Further, it is equipped with water outlet between the deflection tube and upper flange, is equipped between the deflection tube and lower flange
Water inlet.
Further, the upper flange is equipped with electron gun outlet(discharge) flange.
Further, sealing ring is equipped with more than the electron gun outlet(discharge) flange between the upper flange.
Further, the lower flange lower end is equipped with furnace body electron gun interface.
A kind of electron beams rifle deflected joint application method, which comprises the steps of:
(1) it adjusts first and needs to project direction using the electron beam of the electron gun of deflected joint, project it along center；
(2) electron gun, deflected joint and vacuum furnace body, subsequent start-up vacuum system is connected to be extracted into furnace body and electron gun
Working vacuum degree；
(3) start electron gun, adjust acceleration voltage to normal operating value, be slowly increased beam power to 0.01 ~
0.4kW, the current value for being stepped up the deflection coil of deflected joint (when using the deflected joint with temperature measuring equipment, can be surveyed
Whether warm data variation is irradiated to the foundation of deflected joint side wall as electron beam.When its temperature rises, continue to increase deflection
Coil current, until it is not increasing), while electron beam in close observation furnace chamber, until deflected joint outlet electron beam from
It projects at center；
(4) current value of the deflection coil of record and fixed deflection connector, same acceleration voltage is corresponding in use
Same deflection current；
(5) start normal use.
Compared with the prior art, the advantages of the present invention are as follows: use the electron beam quilt after deflected joint, projected by electron gun
The deflection coil of deflected joint enters back into vacuum container after deflecting an angle, avoided from structure various steam in furnace chamber,
Splash is to the direct projection inside electron gun.The pollutants such as most steam and splashing are made all to be deposited on deflected joint inner wall, from
And protect inside the electron gun for needing high-cleanness environment, greatly improve electron gun job stability.
Detailed description of the invention
Fig. 1 is a kind of electron beams rifle deflected joint structural schematic diagram of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing, to the present invention into
Row is further described.
As shown, a kind of electron beams rifle deflected joint, including deflection tube 2,2 upper end of deflection tube are equipped with upper
Flange 1, lower end are equipped with lower flange 6, and deflection coil 3 is cased with outside the upper flange 1, is successively covered from top to bottom outside the lower flange 6
There are focus coil 4, scanning coil 5, temperature probe 9 is inserted in the lower flange 6, is equipped between the deflection tube 2 and upper flange 1
Water outlet 8, is equipped with water inlet 7 between the deflection tube 2 and lower flange 6, the upper flange 1 is equipped with electron gun outlet(discharge) flange
101, sealing ring 102 is equipped between the electron gun outlet(discharge) flange more than 101 upper flange 1,6 lower end of lower flange is equipped with furnace
Body electron gun interface 201.
A kind of electron beams rifle deflected joint application method, which comprises the steps of:
(1) it adjusts first and needs to project direction using the electron beam of the electron gun of deflected joint, project it along center；
(2) electron gun, deflected joint and vacuum furnace body, subsequent start-up vacuum system is connected to be extracted into furnace body and electron gun
Working vacuum degree；
(3) start electron gun, adjust acceleration voltage to normal operating value, be slowly increased beam power to 0.01 ~
0.4kW, the current value for being stepped up the deflection coil of deflected joint (when using the deflected joint with temperature measuring equipment, can be surveyed
Whether warm data variation is irradiated to the foundation of deflected joint side wall as electron beam.When its temperature rises, continue to increase deflection
Coil current, until it is not increasing), while electron beam in close observation furnace chamber, until deflected joint outlet electron beam from
It projects at center；
(4) current value of the deflection coil of record and fixed deflection connector, same acceleration voltage is corresponding in use
Same deflection current；
(5) start normal use.
Compared with the prior art, the advantages of the present invention are as follows: use the electron beam quilt after deflected joint, projected by electron gun
The deflection coil of deflected joint enters back into vacuum container after deflecting an angle, avoided from structure various steam in furnace chamber,
Splash is to the direct projection inside electron gun.The pollutants such as most steam and splashing are made all to be deposited on deflected joint inner wall, from
And protect inside the electron gun for needing high-cleanness environment, greatly improve electron gun job stability.
Claims (5)
1. a kind of electron beams rifle deflected joint, which is characterized in that including deflection tube, the deflection tube upper end is equipped with upper method
Orchid, lower end are equipped with lower flange, and deflection coil is cased with outside the upper flange, is successively cased with focal line outside the lower flange from top to bottom
It encloses, scanning coil, is inserted with temperature probe in the lower flange, water outlet is equipped between the deflection tube and upper flange, it is described inclined
Water inlet is equipped between tube and lower flange.
2. a kind of electron beams rifle deflected joint according to claim 1, which is characterized in that set on the upper flange
There is electron gun outlet(discharge) flange.
3. a kind of electron beams rifle deflected joint according to claim 2, which is characterized in that the electron gun outlet
Sealing ring is equipped with more than flange between the upper flange.
4. a kind of electron beams rifle deflected joint according to claim 1, which is characterized in that the lower flange lower end
Equipped with furnace body electron gun interface.
5. a kind of electron beams rifle deflected joint application method, which comprises the steps of:
It adjusts first and needs to project direction using the electron beam of the electron gun of deflected joint, project it along center；
Furnace body and electron gun are extracted into working vacuum by connection electron gun, deflected joint and vacuum furnace body, subsequent start-up vacuum system
Degree；
Start electron gun, adjusts acceleration voltage to normal operating value, be slowly increased beam power to 0.01 ~ 0.4kW, gradually
The current value for increasing the deflection coil of deflected joint can be changed when using the deflected joint with temperature measuring equipment with temperature measurement data
The foundation of deflected joint side wall whether is irradiated to as electron beam；When its temperature rises, continue to increase yoke current, directly
Do not increasing to it, while electron beam in close observation furnace chamber, until the electron beam of deflected joint outlet is projected from center；
The current value of the simultaneously deflection coil of fixed deflection connector is recorded, same acceleration voltage corresponds to same deflection in use
Electric current；
Start normal use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710828486.1A CN107622932B (en) | 2017-09-14 | 2017-09-14 | A kind of electron beams rifle deflected joint and its application method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710828486.1A CN107622932B (en) | 2017-09-14 | 2017-09-14 | A kind of electron beams rifle deflected joint and its application method |
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| CN107622932A CN107622932A (en) | 2018-01-23 |
| CN107622932B true CN107622932B (en) | 2019-04-30 |
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| CN201710828486.1A Active CN107622932B (en) | 2017-09-14 | 2017-09-14 | A kind of electron beams rifle deflected joint and its application method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110838427B (en) * | 2019-11-20 | 2022-04-29 | 中国航空制造技术研究院 | Electronic gun device for fuse wire additive manufacturing |
| CN113365408A (en) * | 2021-05-20 | 2021-09-07 | 中国原子能科学研究院 | Accelerating structure and multi-cavity accelerator |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105590816A (en) * | 2016-02-02 | 2016-05-18 | 赵文天 | Cold-cathode large-power electron beam gun |
| CN107155257A (en) * | 2017-07-20 | 2017-09-12 | 中广核达胜加速器技术有限公司 | A kind of accelerator and its beam path on-Line Monitor Device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| UA113607C2 (en) * | 2016-10-31 | 2017-02-10 | ELECTRONIC BEAM LAMP WITH LINEAR THERMOCATODE | |
| LV15301B (en) * | 2016-12-09 | 2019-01-20 | Kepp Eu, Sia | Gas-discharge electron gun |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105590816A (en) * | 2016-02-02 | 2016-05-18 | 赵文天 | Cold-cathode large-power electron beam gun |
| CN107155257A (en) * | 2017-07-20 | 2017-09-12 | 中广核达胜加速器技术有限公司 | A kind of accelerator and its beam path on-Line Monitor Device |
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| CN107622932A (en) | 2018-01-23 |
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Effective date of registration: 20210916 Address after: 321000 1051, floor 10, No. 169, Zhongshan North Road, Puyang Street, Pujiang County, Jinhua City, Zhejiang Province (self declaration) Patentee after: Pujiang SoSs enterprise management consulting studio Address before: 315000 Building 1, No.2, Wenwei Road, Meixu Industrial Zone, high tech Zone, Ningbo City, Zhejiang Province Patentee before: NINGBO XINLICHENG VACUUM TECHNOLOGY Co.,Ltd. |