CN107622932A - A kind of electron beams rifle deflected joint and its application method - Google Patents

A kind of electron beams rifle deflected joint and its application method Download PDF

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Publication number
CN107622932A
CN107622932A CN201710828486.1A CN201710828486A CN107622932A CN 107622932 A CN107622932 A CN 107622932A CN 201710828486 A CN201710828486 A CN 201710828486A CN 107622932 A CN107622932 A CN 107622932A
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electron gun
electron
deflection
deflected
flange
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CN201710828486.1A
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CN107622932B (en
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赵文天
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Pujiang SoSs enterprise management consulting studio
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Ningbo Xinli Vacuum Technology Co Ltd
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Abstract

The present invention relates to a kind of electron beams rifle deflected joint, including deflection tube, the deflection tube upper end is provided with upper flange, lower end is provided with lower flange, deflection coil is cased with outside the upper flange, focus coil, scanning coil are cased with successively from top to bottom outside the lower flange, temperature probe is inserted with the lower flange, after deflected joint, the electron beam projected by electron gun enters back into vacuum container after being deflected deflection coil one angle of deflection of joint, and various steam in furnace chamber, splash are avoided from structure to the direct projection inside electron gun.The pollutants such as most steam and splashing is all deposited on deflected joint inwall, so as to protect inside the electron gun for needing high-cleanness environment, greatly improve electron gun job stability.

Description

A kind of electron beams rifle deflected joint and its application method
Technical field
The present invention relates to electron beam gun technical field, more particularly to a kind of electron beams rifle deflected joint and its use Method.
Background technology
It is currently used for welding, evaporates and all kinds of axial electron guns of melting purposes, also known as electron beam gun.Produced from electronics Position is nearly all beeline channel to stream outlet, either traditional hot-cathode electric beam rifle still newer cold cathode gas Electron Beam Produced by Gas Discharge rifle.
The benefit of this axial arrangement is that whole electron gun rifle is compact-sized, and beam direction is concentrated, and is easy to focus on and is scanned. But shortcoming is also apparent from simultaneously.Because the outlet of electron gun is exposed to stove towards face vacuum chamber, each part in electron gun inside Under room environmental pollution.During electron gun use, caused each metalloid and nonmetallic steam, splashing due to material heating The impurity such as thing, it can also be easy to inside entrance electron gun straight(The disadvantage of linear structure), it is deposited on zero, electron gun Part surface, pollution rifle room, the reduction of high-voltage isulation performance is caused, triggers accidental discharge, influences electron gun job stability.Pollution is tight Splash can even fall in the gap for needing high-voltage isulation during weight, directly contribute partial high pressure electric discharge, burn inside electron gun Part.Therefore, this evaporant and splash, which how is reduced or avoided, just turns into raising electron gun to the pollution inside electron gun One of key of job stability.
Existing method substantially has following two:A kind of is to be built between electron gun and furnace chamber with the method for micro inflation One relative high-pressure area, forms certain pressure retardance to steam.This method shortcoming is that mechanism is complicated, it is necessary to extra a lot Inflation, extraction sector, and influence electron gun working vacuum of not taking pains is controlled, cause to discharge in rifle.Another method is pair Rifle room is vacuumized by force, and steam is siphoned away with higher vacuum.This method is most to be carried out using additional vacuum pumps, is also deposited In the shortcomings that complicated, cost is high.The common drawback of both approaches be no matter which kind of method, the splashing for bulky grain is all It is helpless, and for the evaporation of steam, also act on limited.
The content of the invention
To the above-mentioned state of the art, the technical problems to be solved by the invention are to provide one kind
Technical scheme is used by the present invention solves above-mentioned technical problem:A kind of electron beams rifle deflected joint, including Deflection tube, the deflection tube upper end are provided with upper flange, and lower end is provided with lower flange, deflection coil is cased with outside the upper flange, described Focus coil, scanning coil are cased with successively from top to bottom outside lower flange, and temperature probe is inserted with the lower flange.
Further, delivery port is provided between the deflection tube and upper flange, is provided between the deflection tube and lower flange Water inlet.
Further, the upper flange is provided with electron gun outlet(discharge) flange.
Further, it is provided with sealing ring between the upper flange more than the electron gun outlet(discharge) flange.
Further, the lower flange lower end is provided with body of heater electron gun interface.
A kind of electron beams rifle deflected joint application method, it is characterised in that comprise the following steps:
(1)Regulation needs to use the electron beam of the electron gun of deflected joint to project direction first, it is projected along center;
(2)Electron gun, deflected joint and vacuum furnace body are connected, subsequent start-up vacuum system, body of heater and electron gun are extracted into work Vacuum;
(3)Starting electron gun, regulation accelerating potential is slowly increased beam power to 0.01 ~ 0.4kW to normal operating value, by The current value of the deflection coil of step increase deflected joint(When using the deflected joint with temperature measuring equipment, can be become with temperature measurement data It is turned to the foundation whether electron beam is irradiated to deflected joint side wall.When its temperature rises, continue to increase yoke current, Until it is not increasing), while electron beam in close observation furnace chamber, until the electron beam of deflected joint outlet projects from center;
(4)The current value of the simultaneously deflection coil of fixed deflection joint is recorded, same accelerating potential corresponds to same in use Deflection current;
(5)Start normal use.
Compared with prior art, the advantage of the invention is that:After deflected joint, by the electron beam quilt of electron gun injection The deflection coil of deflected joint enters back into vacuum container after deflecting an angle, avoided from structure various steam in furnace chamber, Splash is to the direct projection inside electron gun.The pollutants such as most steam and splashing are made all to be deposited on deflected joint inwall, from And protect inside the electron gun for needing high-cleanness environment, greatly improve electron gun job stability.
Brief description of the drawings
Fig. 1 is a kind of electron beams rifle deflected joint structural representation of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, below in conjunction with accompanying drawing, the present invention is entered Row is further described.
As illustrated, a kind of electron beams rifle deflected joint, including deflection tube 2, the upper end of deflection tube 2 are provided with upper Flange 1, lower end are provided with lower flange 6, and deflection coil 3 is cased with outside the upper flange 1, is covered successively from top to bottom outside the lower flange 6 There are focus coil 4, scanning coil 5, temperature probe 8 is inserted with the lower flange 6, is provided between the deflection tube 2 and upper flange 1 Delivery port 8, is provided with water inlet 7 between the deflection tube 2 and lower flange 6, the upper flange 1 is provided with electron gun outlet(discharge) flange 101, sealing ring 102 is provided between the upper flange 1 of electron gun outlet(discharge) flange more than 101, and the lower end of lower flange 6 is provided with stove Body electron gun interface 201.
A kind of electron beams rifle deflected joint application method, it is characterised in that comprise the following steps:
(1)Regulation needs to use the electron beam of the electron gun of deflected joint to project direction first, it is projected along center;
(2)Electron gun, deflected joint and vacuum furnace body are connected, subsequent start-up vacuum system, body of heater and electron gun are extracted into work Vacuum;
(3)Starting electron gun, regulation accelerating potential is slowly increased beam power to 0.01 ~ 0.4kW to normal operating value, by The current value of the deflection coil of step increase deflected joint(When using the deflected joint with temperature measuring equipment, can be become with temperature measurement data It is turned to the foundation whether electron beam is irradiated to deflected joint side wall.When its temperature rises, continue to increase yoke current, Until it is not increasing), while electron beam in close observation furnace chamber, until the electron beam of deflected joint outlet projects from center;
(4)The current value of the simultaneously deflection coil of fixed deflection joint is recorded, same accelerating potential corresponds to same in use Deflection current;
(5)Start normal use.
Compared with prior art, the advantage of the invention is that:After deflected joint, by the electron beam quilt of electron gun injection The deflection coil of deflected joint enters back into vacuum container after deflecting an angle, avoided from structure various steam in furnace chamber, Splash is to the direct projection inside electron gun.The pollutants such as most steam and splashing are made all to be deposited on deflected joint inwall, from And protect inside the electron gun for needing high-cleanness environment, greatly improve electron gun job stability.

Claims (7)

1. a kind of electron beams rifle deflected joint, it is characterised in that including deflection tube, the deflection tube upper end is provided with upper method Orchid, lower end are provided with lower flange, and deflection coil is cased with outside the upper flange, focal line is cased with successively from top to bottom outside the lower flange Enclose, scanning coil, temperature probe is inserted with the lower flange.
A kind of 2. electron beams rifle deflected joint according to claim 1, it is characterised in that the deflection tube with it is upper Delivery port is provided between flange, water inlet is provided between the deflection tube and lower flange.
3. a kind of electron beams rifle deflected joint according to claim 1, it is characterised in that set on the upper flange There is electron gun outlet(discharge) flange.
A kind of 4. electron beams rifle deflected joint according to claim 3, it is characterised in that the electron gun outlet Sealing ring is provided with more than flange between the upper flange.
A kind of 5. electron beams rifle deflected joint according to claim 1, it is characterised in that the lower flange lower end Provided with body of heater electron gun interface.
6. a kind of electron beams rifle deflected joint application method, it is characterised in that comprise the following steps:
Regulation needs to use the electron beam of the electron gun of deflected joint to project direction first, it is projected along center;
Electron gun, deflected joint and vacuum furnace body are connected, subsequent start-up vacuum system, body of heater and electron gun are extracted into working vacuum Degree;
Start electron gun, regulation accelerating potential is slowly increased beam power to 0.01 ~ 0.4kW, progressively increased to normal operating value The current value of the deflection coil of biasing adapter(When using the deflected joint with temperature measuring equipment, it can be become with temperature measurement data and be turned into The foundation of deflected joint side wall whether is irradiated to for electron beam.
7. when its temperature rises, continue to increase yoke current, until it is not increasing), while in close observation furnace chamber Electron beam, until the electron beam of deflected joint outlet projects from center;
The current value of the simultaneously deflection coil of fixed deflection joint is recorded, same accelerating potential corresponds to same deflection in use Electric current;
Start normal use.
CN201710828486.1A 2017-09-14 2017-09-14 A kind of electron beams rifle deflected joint and its application method Active CN107622932B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110838427A (en) * 2019-11-20 2020-02-25 中国航空制造技术研究院 Electronic gun device for fuse wire additive manufacturing
CN113365408A (en) * 2021-05-20 2021-09-07 中国原子能科学研究院 Accelerating structure and multi-cavity accelerator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105590816A (en) * 2016-02-02 2016-05-18 赵文天 Cold-cathode large-power electron beam gun
CN107155257A (en) * 2017-07-20 2017-09-12 中广核达胜加速器技术有限公司 A kind of accelerator and its beam path on-Line Monitor Device
WO2017155495A1 (en) * 2016-10-31 2017-09-14 State Enterprise "International Center For Electron Beam Technologies Of E.O. Paton Electric Welding Institute Of National Academy Of Sciences Of Ukraine" Electron beam projector with linear thermal cathode
EP3333878A1 (en) * 2016-12-09 2018-06-13 Sia "Kepp Eu" Gas-discharge electron gun

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105590816A (en) * 2016-02-02 2016-05-18 赵文天 Cold-cathode large-power electron beam gun
WO2017155495A1 (en) * 2016-10-31 2017-09-14 State Enterprise "International Center For Electron Beam Technologies Of E.O. Paton Electric Welding Institute Of National Academy Of Sciences Of Ukraine" Electron beam projector with linear thermal cathode
EP3333878A1 (en) * 2016-12-09 2018-06-13 Sia "Kepp Eu" Gas-discharge electron gun
CN107155257A (en) * 2017-07-20 2017-09-12 中广核达胜加速器技术有限公司 A kind of accelerator and its beam path on-Line Monitor Device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110838427A (en) * 2019-11-20 2020-02-25 中国航空制造技术研究院 Electronic gun device for fuse wire additive manufacturing
CN110838427B (en) * 2019-11-20 2022-04-29 中国航空制造技术研究院 Electronic gun device for fuse wire additive manufacturing
CN113365408A (en) * 2021-05-20 2021-09-07 中国原子能科学研究院 Accelerating structure and multi-cavity accelerator

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Effective date of registration: 20210916

Address after: 321000 1051, floor 10, No. 169, Zhongshan North Road, Puyang Street, Pujiang County, Jinhua City, Zhejiang Province (self declaration)

Patentee after: Pujiang SoSs enterprise management consulting studio

Address before: 315000 Building 1, No.2, Wenwei Road, Meixu Industrial Zone, high tech Zone, Ningbo City, Zhejiang Province

Patentee before: NINGBO XINLICHENG VACUUM TECHNOLOGY Co.,Ltd.