CN105572156A - Two-axis precision movement platform for X-ray diffraction instrument - Google Patents
Two-axis precision movement platform for X-ray diffraction instrument Download PDFInfo
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- CN105572156A CN105572156A CN201610064267.6A CN201610064267A CN105572156A CN 105572156 A CN105572156 A CN 105572156A CN 201610064267 A CN201610064267 A CN 201610064267A CN 105572156 A CN105572156 A CN 105572156A
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- 238000002441 X-ray diffraction Methods 0.000 title abstract description 7
- 238000012360 testing method Methods 0.000 claims abstract description 57
- 229910000831 Steel Inorganic materials 0.000 claims description 28
- 239000010959 steel Substances 0.000 claims description 28
- 230000005855 radiation Effects 0.000 claims description 2
- 238000006073 displacement reaction Methods 0.000 abstract description 6
- 238000004458 analytical method Methods 0.000 abstract description 2
- 238000001514 detection method Methods 0.000 abstract description 2
- 230000001360 synchronised effect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000002050 diffraction method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
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- 238000001228 spectrum Methods 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20025—Sample holders or supports therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
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- General Health & Medical Sciences (AREA)
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention provides a two-axis precision movement platform for an X-ray diffraction instrument, and belongs to the field of X-ray and multi-axis precision movement platforms. Two piezoelectric linear motors arranged in parallel in the Z direction are adopted to push a test piece workbench, Z-direction movement of the test piece workbench is produced through synchronous movement of the two Z-direction piezoelectric linear motors, two Hall sensors are adopted as displacement detection elements of the two Z-direction piezoelectric linear motors respectively, and a spring and a connecting rod are used for pretightening the contact portions of motor rods of the piezoelectric linear motors and the test piece workbench and the hinged portions of the test piece workbench and an Z-direction sliding block. The two-axis precision movement platform has the advantages that the precision piezoelectric linear motors are adopted as the driving components, the movement distance is long, response is rapid, and positioning precision is high; the Hall sensors are used for providing limiting signals and initial position signals, and movement parts are prevented from exceeding the movement range. The two-axis precision movement platform is applicable to movement and multi-angle irradiation analysis of test pieces in X-ray diffraction analysis.
Description
Technical field
The invention belongs to X ray and multi-shaft precise motion platform field, be specifically related to a kind of diaxon precision movement platform for X-ray diffractometer.
Background technology
X-ray diffraction imaging is the important technical of fine structure imaging, when something carries out diffraction analysis, this material is irradiated by X-rays generation diffraction phenomena in various degree, and this material produces distinctive diffracting spectrum to become key mode, molecular configuration etc. to determine in material composition, molecule.The advantage such as bulk information that method of X-ray diffraction has not lesioned sample, pollution-free, quick, measuring accuracy is high, can obtain about crystal perfection.
Accurate multiaxial motion platform is the important component part of X-ray diffraction imaging system, is the important tool that workpiece realizes multiaxial motion and multi-orientation detection.Along with communication engineering, the fast development in the fields such as precision engineering, high precision, high resolving power, the research of the ultraprecise motion platform of high reliability more and more comes into one's own, but the multiaxial motion platform at present for X-ray diffractometer is formed by multiple single dof mobility platform simple combination, single dof mobility platform wherein adopts stepper motor or servomotor as driving element, adopt ball-screw as gear train, this can produce a series of problem: 1. owing to adopting multiple single dof mobility platform to be formed by stacking, the integrated level of platform and integrally is caused to decline, volume is larger, 2. to add the type of drive kinematic accuracy of ball-screw lower for stepper motor or servomotor, is difficult to the requirement meeting motion platform nanometer resolution, 3. lack pre-tightening mechanism in the moving component contact site of key, Long-Time Service can cause gap to increase, and precision stability is lower.
Summary of the invention
The invention provides a kind of diaxon precision movement platform for X-ray diffractometer, to solve the problems such as the volume existed for X-ray diffractometer motion platform is at present too large, kinematic accuracy is low, integrated level is low, precision stability is low.
The technical scheme that the present invention takes is: casing and main support are arranged on base plate, Z-direction piezoelectric linear motor one and Z-direction piezoelectric linear motor two are arranged on main support both sides respectively, Z-direction guide rail one and Z-direction guide rail two side by side parallel are arranged on the inside of main support, Z-direction slide block is arranged on Z-direction guide rail one and Z-direction guide rail two, test piece worktable is hingedly mounted on Z-direction slide block by large boss middle bottom it and axle three, bearing one is arranged on the boss one of side bottom test piece worktable by axle one, bearing two is arranged on the boss two of side bottom test piece worktable by axle two, the upper end of the moving lever one of Z-direction piezoelectric linear motor one is against on bearing one, point cantact is formed with bearing one outer ring, the upper end of the moving lever two of Z-direction piezoelectric linear motor two is against on bearing two, point cantact is formed with bearing two outer ring, Hall element one is arranged on the boss three of test piece worktable front end by wedge one, Hall element two is arranged on the boss four of test piece worktable front end by wedge two, cylindrical magnet steel one and cylindrical magnet steel two are arranged on main support front end boss one and main support front end boss two respectively, Hall element one moves reciprocatingly between cylindrical magnet steel one and cylindrical magnet steel two, cylindrical magnet steel three and cylindrical magnet steel four are arranged on main support front end boss three and main support front end boss four respectively, and Hall element two moves reciprocatingly between cylindrical magnet steel three and cylindrical magnet steel four, pre-loading screw one, pre-loading screw two, pre-loading screw three, pre-loading screw four are arranged on the boss three of test piece worktable surrounding, boss four, boss five, boss six respectively, by test piece worktable stably pretension on casing, the hole of the crossbeam that center linkage is passed in the middle of main support is arranged on the boss lower end of Z-direction slide block, spring one is socketed in center linkage, two near round nut one be arranged on the bottom of center linkage, connecting rod one is hingedly mounted on test piece worktable boss broad in the middle through the hole one on Z-direction slide block boss by axle four, connecting rod two is hingedly mounted on test piece worktable intermediate lands through the hole two on Z-direction slide block boss by axle five, the diameter in hole one is larger than the diameter of connecting rod one, the diameter in hole two is larger than the diameter of connecting rod two, spring two is socketed on connecting rod one, two near round nut two be arranged on the bottom of connecting rod one, spring three is socketed on connecting rod two, two near round nut three be arranged on the bottom of connecting rod two.
Casing of the present invention there is heat radiation fluting.
There are boss one, the boss two of locating for Z-direction piezoelectric linear motor one and Z-direction piezoelectric linear motor two in main support both sides of the present invention.
The present invention can realize Z-direction motion and the rotation around X-axis, for carrying out accurate diffraction analysis to material diverse location, wherein, Z-direction motion and the rotation around X-axis are realized by a drive system, improve the integrated level of platform, reduce volume, and adopt piezoelectric linear motor and precise guide rail respectively as driving element and director element, make Motion Resolution rate reach nanoscale.In addition, adopt elasticity pre-tightening mechanism to provide variable pretightning force to eliminate the gap of key position, improve the precision stability of platform and integrally.
Two accurate piezoelectric linear motors that driving element of the present invention adopts Z-direction to be arranged in parallel, displacement detecting element adopts Hall element, two precise guide rail that director element adopts Z-direction to arrange, and use spring and connecting rod to carry out pretension to movable joint, to ensure kinematic accuracy, improve precision stability.
Advantage of the present invention and beneficial effect: adopt accurate piezoelectric linear motor as driver part, have that movement travel is large, response rapidly, positioning precision advantages of higher.Two piezoelectric linear motors adopt built-in, and compact conformation, guiding mechanism, pre-tightening mechanism and circuit, all in the inside of main support, improve globality and integrated level.The hinge point of spring to the motor bar of piezoelectric linear motor and the contact site of test piece worktable and test piece worktable and Z-direction slide block is adopted to carry out pretension, the gap of contact site can be eliminated, regulate the horizontal level of test piece worktable, thus improve stability and the kinematic accuracy of motion platform.Pre-loading screw is installed for manual self-locking test piece worktable in each degree of freedom, the destruction of external force to guide rail and piezoelectric linear motor can have been alleviated, can also prevent from being subject in the event of a power failure the interference of external force and produce displacement.Use Hall element to provide limit signal and initial position signal, prevent moving component from exceeding range of movement.The present invention is applicable to: the motion of the test specimen in X-ray diffraction analysis and multi-angle irradiation analysis.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the inner structure schematic diagram after the present invention removes casing;
Fig. 3 is the inner structure schematic diagram after the present invention removes casing;
Fig. 4 is the structural representation of inside of the present invention;
Fig. 5 is the structural representation of inside of the present invention;
Fig. 6 is the front elevation of inside of the present invention;
Fig. 7 is the rear view of Fig. 6;
Fig. 8 is the left view of Fig. 6;
Fig. 9 is the right view of Fig. 6;
Figure 10 be Z-direction slide block of the present invention with support coordinate schematic diagram;
Figure 11 is the structural representation of casing of the present invention;
Figure 12 is the structural representation of support of the present invention;
Figure 13 is the structural representation of Z-direction slide block of the present invention;
Figure 14 is the structural representation of test piece worktable of the present invention;
Figure 15 is the structural representation of test piece worktable of the present invention;
Figure 16 is that test piece worktable of the present invention coordinates schematic diagram with Z-direction slide block;
Figure 17 is the structural representation of base plate of the present invention;
Figure 18 is the structural representation of piezoelectric linear motor one of the present invention;
Figure 19 is the structural representation of piezoelectric linear motor two of the present invention;
Figure 20 is the structural representation of guide rail of the present invention;
Wherein: base plate 1, casing 2, test piece worktable 3, guide rail 1, Z-direction piezoelectric linear motor 1, main support 6, pre-loading screw 47, bearing 1, axle 1, pre-loading screw 1, axle 3 11, axle 4 12, connecting rod 1, pre-loading screw 2 14, Z-direction piezoelectric linear motor 2 15, Z-direction slide block 16, guide rail 2 17, round nut 1, voussoir 1, axle 2 20, bearing 2 21, pre-loading screw 3 22, voussoir 2 23, center linkage 24, spring 1, round nut 3 26, spring 3 27, axle 5 28, connecting rod 2 29, spring 2 30, round nut 2 31, Hall element 1, Hall element 2 33, cylindrical magnet steel 1, cylindrical magnet steel 2 35, cylindrical magnet steel 3 36, cylindrical magnet steel 4 37.
Embodiment
Casing 2 and main support 6 are arranged on base plate 1, casing 2 have for system radiating fluting 201, main support 6 is for support drive system, Z-direction piezoelectric linear motor 1 and Z-direction piezoelectric linear motor 2 15 are arranged on main support 6 both sides respectively, there is the boss 1 of locating for Z-direction piezoelectric linear motor 1 and Z-direction piezoelectric linear motor 2 15 described main support 6 both sides, boss 2 607, Z-direction guide rail 1 and Z-direction guide rail 2 17 side by side parallel are arranged on the inside of main support 6, Z-direction slide block 16 is arranged on Z-direction guide rail 1 and Z-direction guide rail 2 17, test piece worktable 3 is hingedly mounted on Z-direction slide block 16 by large boss 301 middle bottom it and axle 3 11, thus realize test piece worktable 3 around X to rotation and move with the Z-direction of Z-direction slide block 16, bearing 1 is arranged on the boss 1 of side bottom test piece worktable 3 by axle 1, bearing 2 21 is arranged on the boss 2 303 of side bottom test piece worktable 3 by axle 2 20, the upper end of the moving lever 1 of Z-direction piezoelectric linear motor 1 is against on bearing 1, point cantact is formed with bearing 1 outer ring, the upper end of the moving lever 2 1501 of Z-direction piezoelectric linear motor 2 15 is against on bearing 2 21, point cantact is formed with bearing 2 21 outer ring, Hall element 1 is arranged on the boss 3 304 of test piece worktable 3 front end by wedge 1, Hall element 2 33 is arranged on the boss 4 305 of test piece worktable 3 front end by wedge 2 23, cylindrical magnet steel 1 and cylindrical magnet steel 2 35 are arranged on main support front end boss 1 and main support front end boss 2 602 respectively, Hall element 1 moves reciprocatingly between cylindrical magnet steel 1 and cylindrical magnet steel 2 35, cylindrical magnet steel 3 36 and cylindrical magnet steel 4 37 are arranged on main support front end boss 3 603 and main support front end boss 4 604 respectively, and Hall element 2 33 moves reciprocatingly between cylindrical magnet steel 3 36 and cylindrical magnet steel 4 37, pre-loading screw 1, pre-loading screw 2 14, pre-loading screw 3 22, pre-loading screw 47 are arranged on the boss 3 304 of test piece worktable 3 surrounding, boss 4 305, boss 5 306, boss 6 307 respectively, by test piece worktable 3 stably pretension on casing 2,
The hole of the crossbeam 605 that center linkage 24 is passed in the middle of main support 6 is arranged on boss 1601 lower end of Z-direction slide block 16, spring 1 is socketed in center linkage 24, two near round nut 1 be arranged on the bottom of center linkage 24, spring 1 due to be subject to two near the pressure of round nut 1, be pressed in below the crossbeam 605 in the middle of main support 6, thus make center linkage 24 obtain the tightening force of Z-direction, the moving lever 2 1501 of the moving lever 1 of Z-direction piezoelectric linear motor 1 and the gap of bearing 1 and Z-direction piezoelectric linear motor 2 15 and the gap of bearing 2 21 can be eliminated, connecting rod 1 is hingedly mounted on test piece worktable 3 boss 301 broad in the middle through the hole 1 on Z-direction slide block boss 1601 by axle 4 12, connecting rod 2 29 is hingedly mounted on test piece worktable 3 intermediate lands 301 through the hole 2 1603 on Z-direction slide block boss 1601 by axle 5 28, the diameter in hole 1 is larger than the diameter of connecting rod 1, the diameter in hole 2 1603 is larger than the diameter of connecting rod 2 29, thus ensure that connecting rod 1 and connecting rod 2 29 do not collide with the boss 1601 of Z-direction slide block 16 when test piece worktable 3 is carried out around X to when rotating, spring 2 30 is socketed on connecting rod 1, two near round nut 2 31 be arranged on the bottom of connecting rod 1, spring 2 30 is owing to being subject to the pressure of two round nuts 2 31, be pressed in the below of Z-direction slide block boss 1601, spring 3 27 is socketed on connecting rod 2 29, two near round nut 3 26 be arranged on the bottom of connecting rod 2 29, spring 3 27 is owing to being subject to the pressure of two round nuts 3 26, be pressed in the below of Z-direction slide block boss 1601, and guarantee that spring 3 27 is identical with the pressure suffered by spring 2 30, thus ensure the horizontal level that test piece worktable 3 is initial and eliminate the gap of test specimen workbench 3 and Z-direction slide block 16 hinge portion.
The present invention is formed primarily of drive system and pretensioner systems, and wherein drive system adopts Z-direction to be arranged in parallel two piezoelectric linear motors to promote test piece worktable, thus realize test piece worktable Z-direction motion and around X to rotation; The Z-direction of test piece worktable is moved by the generation that is synchronized with the movement of two Z-direction piezoelectric linear motors; Test piece worktable around X to rotation by the differential generation of two Z-direction piezoelectric linear motors; Adopt two Hall elements respectively as two Z-direction piezoelectric linear motor displacement detecting elements, to ensure that moving component does not exceed range of movement.Described pretensioner systems uses spring and the hinge point of connecting rod to the motor bar of piezoelectric linear motor and the contact site of test piece worktable and test piece worktable and Z-direction slide block to carry out pretension.
The course of work of the present invention:
Drive system of the present invention can realize test piece worktable Z-direction motion and around X to rotation, when the piezoelectric linear motors of two toward equidirectional move with identical speed time, test piece worktable will produce Z-direction move; When moving asynchronous, test piece worktable will produce Z-direction motion; Two piezoelectric linear motor displacements adopt a Hall element to detect displacement respectively, exceed range of movement to prevent moving component.Regulate the round nut of the center linkage of pretensioner systems, the size of the pretightning force of center linkage can be regulated, thus eliminate the gap of the motor bar of two piezoelectric linear motors and the bearing of test piece worktable; Regulate the round nut of two side rods of pretensioner systems, the size of two side rod pretightning forces can be regulated, thus the gap of the level of test piece worktable and the hinge point of elimination test piece worktable and Z-direction slide block can be regulated.
Claims (3)
1. the diaxon precision movement platform for X-ray diffractometer, it is characterized in that: casing and main support are arranged on base plate, Z-direction piezoelectric linear motor one and Z-direction piezoelectric linear motor two are arranged on main support both sides respectively, Z-direction guide rail one and Z-direction guide rail two side by side parallel are arranged on the inside of main support, Z-direction slide block is arranged on Z-direction guide rail one and Z-direction guide rail two, test piece worktable is hingedly mounted on Z-direction slide block by large boss middle bottom it and axle three, bearing one is arranged on the boss one of side bottom test piece worktable by axle one, bearing two is arranged on the boss two of side bottom test piece worktable by axle two, the upper end of the moving lever one of Z-direction piezoelectric linear motor one is against on bearing one, point cantact is formed with bearing one outer ring, the upper end of the moving lever two of Z-direction piezoelectric linear motor two is against on bearing two, point cantact is formed with bearing two outer ring, Hall element one is arranged on the boss three of test piece worktable front end by wedge one, Hall element two is arranged on the boss four of test piece worktable front end by wedge two, cylindrical magnet steel one and cylindrical magnet steel two are arranged on main support front end boss one and main support front end boss two respectively, Hall element one moves reciprocatingly between cylindrical magnet steel one and cylindrical magnet steel two, cylindrical magnet steel three and cylindrical magnet steel four are arranged on main support front end boss three and main support front end boss four respectively, and Hall element two moves reciprocatingly between cylindrical magnet steel three and cylindrical magnet steel four, pre-loading screw one, pre-loading screw two, pre-loading screw three, pre-loading screw four are arranged on the boss three of test piece worktable surrounding, boss four, boss five, boss six respectively, by test piece worktable stably pretension on casing, the hole of the crossbeam that center linkage is passed in the middle of main support is arranged on the boss lower end of Z-direction slide block, spring one is socketed in center linkage, two near round nut one be arranged on the bottom of center linkage, connecting rod one is hingedly mounted on test piece worktable boss broad in the middle through the hole one on Z-direction slide block boss by axle four, connecting rod two is hingedly mounted on test piece worktable intermediate lands through the hole two on Z-direction slide block boss by axle five, the diameter in hole one is larger than the diameter of connecting rod one, the diameter in hole two is larger than the diameter of connecting rod two, spring two is socketed on connecting rod one, two near round nut two be arranged on the bottom of connecting rod one, spring three is socketed on connecting rod two, two near round nut three be arranged on the bottom of connecting rod two.
2. a kind of diaxon precision movement platform for X-ray diffractometer according to claim 1, is characterized in that: casing has heat radiation fluting.
3. a kind of diaxon precision movement platform for X-ray diffractometer according to claim 1, is characterized in that: there are boss one, the boss two of locating for Z-direction piezoelectric linear motor one and Z-direction piezoelectric linear motor two in described main support both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610064267.6A CN105572156B (en) | 2016-01-29 | 2016-01-29 | A kind of two axle precision movement platforms for X-ray diffractometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610064267.6A CN105572156B (en) | 2016-01-29 | 2016-01-29 | A kind of two axle precision movement platforms for X-ray diffractometer |
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| Publication Number | Publication Date |
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| CN105572156A true CN105572156A (en) | 2016-05-11 |
| CN105572156B CN105572156B (en) | 2018-04-06 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610064267.6A Expired - Fee Related CN105572156B (en) | 2016-01-29 | 2016-01-29 | A kind of two axle precision movement platforms for X-ray diffractometer |
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| CN (1) | CN105572156B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908462A (en) * | 2017-04-28 | 2017-06-30 | 重庆理工大学 | A kind of high accuracy indexes angle measurement rotation table device compared with big load concentric double-shaft |
| CN116203051A (en) * | 2023-05-06 | 2023-06-02 | 无锡日联科技股份有限公司 | Product internal defect detection equipment and detection method based on X-rays |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5957145A (en) * | 1982-09-27 | 1984-04-02 | Shimadzu Corp | X-ray analytical apparatus |
| CN101231255A (en) * | 2008-02-02 | 2008-07-30 | 丹东方圆仪器有限公司 | Multifunctional sample shelf for X-ray diffractometer |
| US20090262895A1 (en) * | 2008-04-22 | 2009-10-22 | Bruker Axs Gmbh | X-ray diffractometer for mechanically correlated movement of the source, detector, and sample position |
| CN202126417U (en) * | 2011-06-17 | 2012-01-25 | 上海现代科技发展有限公司 | X-ray fluoroscopy imaging four-axis moving platform of measured object |
| CN102371359A (en) * | 2011-11-03 | 2012-03-14 | 吉林大学 | Three-dimensional elliptical vibration cutting device |
| CN203870042U (en) * | 2014-06-10 | 2014-10-08 | 大庆佳昌晶能信息材料有限公司 | Three-dimensional monochromatic X-ray diffraction orientation finder |
| CN104777180A (en) * | 2015-04-20 | 2015-07-15 | 中国人民大学 | Device and method for adjusting sample scattered plane of cold neutron triple-axis spectrometer |
| CN205352971U (en) * | 2016-01-29 | 2016-06-29 | 吉林大学 | A accurate motion platform of diaxon for X X -ray diffractometer |
-
2016
- 2016-01-29 CN CN201610064267.6A patent/CN105572156B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5957145A (en) * | 1982-09-27 | 1984-04-02 | Shimadzu Corp | X-ray analytical apparatus |
| CN101231255A (en) * | 2008-02-02 | 2008-07-30 | 丹东方圆仪器有限公司 | Multifunctional sample shelf for X-ray diffractometer |
| US20090262895A1 (en) * | 2008-04-22 | 2009-10-22 | Bruker Axs Gmbh | X-ray diffractometer for mechanically correlated movement of the source, detector, and sample position |
| CN202126417U (en) * | 2011-06-17 | 2012-01-25 | 上海现代科技发展有限公司 | X-ray fluoroscopy imaging four-axis moving platform of measured object |
| CN102371359A (en) * | 2011-11-03 | 2012-03-14 | 吉林大学 | Three-dimensional elliptical vibration cutting device |
| CN203870042U (en) * | 2014-06-10 | 2014-10-08 | 大庆佳昌晶能信息材料有限公司 | Three-dimensional monochromatic X-ray diffraction orientation finder |
| CN104777180A (en) * | 2015-04-20 | 2015-07-15 | 中国人民大学 | Device and method for adjusting sample scattered plane of cold neutron triple-axis spectrometer |
| CN205352971U (en) * | 2016-01-29 | 2016-06-29 | 吉林大学 | A accurate motion platform of diaxon for X X -ray diffractometer |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908462A (en) * | 2017-04-28 | 2017-06-30 | 重庆理工大学 | A kind of high accuracy indexes angle measurement rotation table device compared with big load concentric double-shaft |
| CN116203051A (en) * | 2023-05-06 | 2023-06-02 | 无锡日联科技股份有限公司 | Product internal defect detection equipment and detection method based on X-rays |
| CN116203051B (en) * | 2023-05-06 | 2023-08-08 | 无锡日联科技股份有限公司 | Product internal defect detection equipment and detection method based on X-rays |
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| Publication number | Publication date |
|---|---|
| CN105572156B (en) | 2018-04-06 |
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