CN104551718B - Five dimension micro-adjusting mechanisms - Google Patents
Five dimension micro-adjusting mechanisms Download PDFInfo
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- CN104551718B CN104551718B CN201510033553.1A CN201510033553A CN104551718B CN 104551718 B CN104551718 B CN 104551718B CN 201510033553 A CN201510033553 A CN 201510033553A CN 104551718 B CN104551718 B CN 104551718B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 91
- 238000012546 transfer Methods 0.000 claims abstract description 7
- 230000008878 coupling Effects 0.000 claims description 13
- 238000010168 coupling process Methods 0.000 claims description 13
- 238000005859 coupling reaction Methods 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 3
- 230000004807 localization Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 5
- 238000012545 processing Methods 0.000 abstract description 4
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 abstract description 3
- 230000001105 regulatory effect Effects 0.000 abstract description 2
- 239000002360 explosive Substances 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000004247 hand Anatomy 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
- B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
- B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
- B23Q3/04—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part adjustable in inclination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q5/00—Driving or feeding mechanisms; Control arrangements therefor
- B23Q5/22—Feeding members carrying tools or work
- B23Q5/34—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission
- B23Q5/38—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously
- B23Q5/40—Feeding other members supporting tools or work, e.g. saddles, tool-slides, through mechanical transmission feeding continuously by feed shaft, e.g. lead screw
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Transmission Devices (AREA)
- Control Of Position Or Direction (AREA)
Abstract
The present invention relates to a kind of five dimension micro-adjusting mechanisms, it is made up of horizontal mobile mechanism, servo transfer mechanism, vertically modulating mechanism and two-dimentional manual adjustment means, attitude for fine adjustment workpiece or mechanism and position, so as to ensure stability and the safety of mechanism or workpiece, five described dimension micro-adjusting mechanisms have X/Y/Z/ θ x/ θ y five dimension regulating power.Five dimension micro-adjusting mechanisms of the present invention take up room little, and it is lightweight, break down or during damage parts maintenance replace simple and convenient, itself big small size, stroke accuracy scope and unknown adjustable angle can be adjusted flexibly according to existing environment space, can apply in optical test and shop parts sharp processing.
Description
Technical field
A kind of the present invention relates to technical field of precision optical machinery, it is more particularly related to five dimension micro-adjusting mechanisms.
Background technology
In field of manufacture of precision machinery, such as optical element (eyeglass and wafer) and shop parts sharp processing neck
Domain, its positioning requirements is very accurate, needs to use various adjustment frames, adjusts dimension requirement and reaches more than three-dimensional.In prior art
In, single displacement platform internal structure is mainly made up of line slideway, ball-screw, shaft coupling, driving motor, and displacement platform work is former
Reason has driving motor to drive ball-screw push-and-pull to move slide unit line slideway provides the mode of movement locus.Its shortcoming：Take up room
Very greatly it is impossible to reduce the volume of itself in existing work space.There is dead angle, the angle of the offer in five axles can only be provided
Scope and can not flexibly change the angle of needs.
Content of the invention
In order to solve above-mentioned technical problem of the prior art, it is an object of the invention to provide a kind of five dimension freqency fine adjustment machines
Structure.
To achieve these goals, present invention employs technical scheme below：
A kind of five dimension micro-adjusting mechanisms it is characterised in that：Its by horizontal mobile mechanism (X-axis), servo transfer mechanism (Y-axis),
Vertically modulating mechanism (Z axis) and two-dimentional manual adjustment means composition.
Wherein, described horizontal mobile mechanism includes horizontally disposed X axis datum fixed plate, in described X axis datum fixed plate
It is provided with X-axis motor and ball-screw, between described X-axis motor and X-axis ball-screw by shaft coupling axially
Connect；At least two X-axis linear guides be arrangeding in parallel along X axis are additionally provided with described X axis datum fixed plate, and X-axis
Limited block, the both sides of described X-axis limited block are each provided with X-axis limit sensors；It is provided with X on described X-axis linear guides
Axle location-plate；Described X-axis motor of stating drives X-axis ball screw turns by shaft coupling, and then drives described X-axis location-plate
Described X-axis linear guides are advanced along X-direction, when X-axis location-plate is when being traveling out rated travel, described X-axis limit
Position block collision X-axis limit sensors, described X-axis motor stops driving.
Wherein, described servo transfer mechanism includes Y axis datum fixed plate and the Y-axis location-plate be arrangeding in parallel along Y direction,
And described Y axis datum fixed plate and Y-axis location-plate are vertically set on described X-axis location-plate；In described Y axis datum fixed plate
It is provided with Y-axis motor, vertical tumbler gear and Y-axis ball-screw；It is additionally provided with along Y-direction in described Y axis datum fixed plate
At least two groups Y-axis linear guides be arrangeding in parallel, and Y-axis limited block, the both sides of described Y-axis limited block are each provided with a Y
Axle limit sensors；Described Y-axis motor drives described Y-axis ball-screw to turn by the transmission of described vertical tumbler gear
Dynamic, and then drive described Y-axis location-plate to advance along Y direction on described two groups of Y-axis linear guides, when Y-axis location-plate
When being traveling out rated travel, described Y-axis limited block collides Y-axis limit sensors, and described Y-axis motor stops driving.
Wherein, described vertically modulating mechanism includes Z axis datum fixed plate and the Z axis location-plate be arrangeding in parallel along Z-direction,
And, as described Z axis datum fixed plate, described Z axis location-plate is as fixture datum detent mechanism for described Y-axis location-plate；Described
Z axis motor, shaft coupling, vertical tumbler gear and Z axis ball-screw are provided with Z axis datum fixed plate；Described Z axis datum
At least two groups Z axis linear guides be arrangeding in parallel along Z-direction are additionally provided with fixed plate, and Z axis limited block, described Z axis are spacing
The both sides of block are each provided with Z axis limit sensors；Described Z axis motor passes through described shaft coupling and vertical tumbler gear
Transmission drive described Z axis ball screw turns, and then drive described Z axis location-plate edge on described two groups of Z axis linear guides
Z-direction to advance, when Z axis location-plate is when being traveling out rated travel, described Z axis limited block collides Z axis limit sensors,
Described Z axis motor stops driving.
Wherein, described two dimension manual adjustment means include fixture datum detent mechanism, on described fixture datum detent mechanism
It is provided with workpiece orientation angle micro-adjusting mechanism, described workpiece orientation angle micro-adjusting mechanism is provided with three adjustment screws and 3
Locking screw；Fixture datum detent mechanism described in described three adjustment screw top pressures pulls open described workpiece orientation angle micro-adjusting mechanism
With fixture datum detent mechanism and produce relative angle, and described workpiece orientation angle freqency fine adjustment machine is locked by described locking screw
The relative position of angle between structure and fixture datum detent mechanism.
Wherein, described adjustment screw and locking screw are spaced apart and arranged on described workpiece orientation angle micro-adjusting mechanism.
Wherein, the surface that described workpiece orientation angle micro-adjusting mechanism is contacted with described fixture datum detent mechanism is sphere
Structure.
Compared with prior art five dimension micro-adjusting mechanisms of the present invention have the advantages that：
Five dimension micro-adjusting mechanism spaces of the present invention are little, lightweight, break down or letter is replaced in maintenance during damage parts
Just, itself big small size, stroke accuracy scope and unknown angle can be adjusted flexibly according to existing environment space can for folk prescription
Adjust, can apply in optical test and shop parts sharp processing.
Brief description
Fig. 1 is the overall structure diagram of the five dimension micro-adjusting mechanisms of the present invention；
Fig. 2 is the overall schematic of the X-axis of five dimension micro-adjusting mechanisms of the present invention；
Fig. 3 is the explosive view of the X-axis of five dimension micro-adjusting mechanisms of the present invention；
Fig. 4 is the overall schematic of the Y-axis of five dimension micro-adjusting mechanisms of the present invention；
Fig. 5 is the explosive view of the Y-axis of five dimension micro-adjusting mechanisms of the present invention；
Fig. 6 is the overall schematic of the Z axis of five dimension micro-adjusting mechanisms of the present invention；
Fig. 7 is the explosive view of the Z axis of five dimension micro-adjusting mechanisms of the present invention；
Fig. 8 is the two-dimentional manual adjustment means schematic diagram of the five dimension micro-adjusting mechanisms of the present invention；
Fig. 9 is the cross-sectional view of the two-dimentional manual adjustment means of five dimension micro-adjusting mechanisms of the present invention；
Figure 10 is the close-up schematic view of Fig. 9 encircled portion.
Specific embodiment
Below with reference to specific embodiment, of the present invention five dimension micro-adjusting mechanisms are further elaborated, to help this
The technical staff in field has more complete, accurate and deep understanding to the inventive concept of the present invention, technical scheme.
As shown in figure 1, five dimension micro-adjusting mechanisms of the present invention, it is by horizontal mobile mechanism (10), servo transfer mechanism
(20), vertically modulating mechanism (30) and two-dimentional manual adjustment means (40) composition.
As shown in figures 2-3, described horizontal mobile mechanism includes horizontally disposed X axis datum fixed plate 14, described X-axis base
X-axis motor 18 and ball-screw 17, described X-axis motor 18 and X-axis ball-screw are provided with quasi- fixed plate 14
Pass through shaft coupling 15 between 17 axially to connect；It is additionally provided with described X axis datum fixed plate 14 and be arranged in parallel at least along X axis
Two X-axis linear guides 13, and X-axis limited block 16, the both sides of described X-axis limited block are each provided with the spacing sensing of X-axis
Device 12；It is provided with X-axis location-plate 11 on described X-axis linear guides 13；Described X-axis motor 18 drives X by shaft coupling 15
Axle ball-screw 17 rotates, and then drives described X-axis location-plate to advance along X-direction on described X-axis linear guides 13, when
When being traveling out rated travel of X-axis location-plate, described X-axis limited block collides X-axis limit sensors, described X-axis motor
Stop driving.
As shown in Figures 4 and 5, described servo transfer mechanism includes Y axis datum fixed plate 21 He be arrangeding in parallel along Y direction
Y-axis location-plate 25, and described Y axis datum fixed plate 21 and Y-axis location-plate 25 be vertically set on described X-axis location-plate 21；
Y-axis motor 26, vertical tumbler gear 27 and Y-axis ball-screw 28 are provided with described Y axis datum fixed plate 21；Described Y
At least two groups Y-axis linear guides 22 be arrangeding in parallel along Y-direction are additionally provided with axle benchmark fixed plate 21, and Y-axis limited block 24,
The both sides of described Y-axis limited block 24 are each provided with Y-axis limit sensors 23；Described Y-axis motor 26 passes through described hanging down
The transmission of straight tumbler gear 27 drives described Y-axis ball-screw 28 to rotate, and then drives described Y-axis location-plate 25 at described two groups
Advance along Y direction on Y-axis linear guides 22, when Y-axis location-plate 25 is when being traveling out rated travel, described Y-axis is spacing
Block collides Y-axis limit sensors, and described Y-axis motor stops driving.
As shown in figs. 6-7, described vertically modulating mechanism includes Z axis datum fixed plate 31 He be arrangeding in parallel along Z-direction
Z axis location-plate 33, and described Y-axis location-plate 25 is as described Z axis datum fixed plate 31, described Z axis location-plate 33 is as folder
Tool origin reference location mechanism；Z axis motor 36, shaft coupling 37, vertical tumbler gear are provided with described Z axis datum fixed plate 31
38 and Z axis ball-screw 35；At least two groups z axis be arrangeding in parallel along Z-direction are additionally provided with described Z axis datum fixed plate 31
Guide rail 32, and Z axis limited block 39, the both sides of described Z axis limited block 39 are each provided with Z axis limit sensors 34；Described Z
Axle motor drives described Z axis ball screw turns by the transmission of described shaft coupling and vertical tumbler gear, and then drives
Described Z axis location-plate on described two groups of Z axis linear guides along Z-direction advance, when Z axis location-plate be traveling out specified
During stroke, described Z axis limited block collides Z axis limit sensors, and described Z axis motor stops driving.
As shown in figs. 8-10, described two dimension manual adjustment means include fixture datum detent mechanism, and described fixture datum is fixed
It is provided with workpiece orientation angle micro-adjusting mechanism in the mechanism of position, described workpiece orientation angle micro-adjusting mechanism is provided with three adjustment spiral shells
43 and 3 locking screws 44 of silk；Fixture datum detent mechanism described in described three adjustment screw top pressures pulls open described workpiece positioning
Angle fine-adjustment mechanism with fixture datum detent mechanism and produces relative angle, and it is fixed to lock described workpiece by described locking screw
The relative position of angle between position angle fine-adjustment mechanism and fixture datum detent mechanism.Described adjustment screw and locking screw interval
Be arranged on described workpiece orientation angle micro-adjusting mechanism.Described workpiece orientation angle micro-adjusting mechanism and described fixture datum positioning
The surface that mechanism contacts is spherical structure.Angular adjustment is rolled by sphere and is not resulted in mechanism's rolling that gap cooperation brings
Dynamic it is ensured that required precision.
The function mainly attitude of fine adjustment workpiece or mechanism and the position of five dimension micro-adjusting mechanisms of the present invention,
Ensure the stability of mechanism or workpiece, safety etc..It has X/Y/Z/ θ x/ θ y five dimension regulating power.Five dimension governor motions
Axial translation precision need to reach 2 microns.XYZ single shaft governor motion is equipped with the worm gear of 20 times of speed reducing ratio using elaborate servo motor
The technical scheme of worm decelerating machine and precise finiss ball screw is realizing required precision.Wherein bidimensional micro-adjusting mechanism, by handss
Dynamic regulation is arbitrarily angled in the range of sphere, and through calculating, this linkage fully meets our required required precisions.
Five dimension micro-adjusting mechanisms are capable of traditional regulation body function, can both enable function under specific condition, and can reach will again
Ask.Whole five dimension adjustment units are mainly high-quality aluminium alloy using material, you can ensure that the stability using can mitigate entirely again
The weight of mechanism.It is fixed on mounting platform entirely through screw and alignment pin, in case of a failure can be whole machine
Structure removes from fixed platform, maintains easily.Five dimension micro-adjusting mechanisms of the present invention：Space is little, lightweight, breaks down
Or during damage parts, maintenance replacement is simple and convenient, itself big small size, stroke can be adjusted flexibly according to existing environment space
Accuracy rating and unknown adjustable angle, can apply in optical test and shop parts sharp processing.
For the ordinary skill in the art, specific embodiment is simply exemplarily described to the present invention,
Obviously the present invention implements and is not subject to the restrictions described above, as long as employ method of the present invention design entering with technical scheme
The improvement of the various unsubstantialities of row, or the not improved design by the present invention and technical scheme directly apply to other occasions
, all within protection scope of the present invention.
Claims (3)
1. a kind of five dimension micro-adjusting mechanisms it is characterised in that：It is by horizontal mobile mechanism, servo transfer mechanism, vertically modulating mechanism
With two-dimentional manual adjustment means composition；Described horizontal mobile mechanism includes horizontally disposed X axis datum fixed plate, described X-axis base
X-axis motor and X-axis ball-screw are provided with quasi- fixed plate, logical between described X-axis motor and X-axis ball-screw
Cross shaft coupling axially to connect；At least two X-axis be arrangeding in parallel along X axis are additionally provided with described X axis datum fixed plate linear
Guide rail, and X-axis limited block, the both sides of described X-axis limited block are each provided with X-axis limit sensors；Described X-axis is linearly led
X-axis location-plate is provided with rail；Described X-axis motor drives X-axis ball screw turns by shaft coupling, and then drives described
X-axis location-plate is advanced along X-direction on described X-axis linear guides, when X-axis location-plate is when being traveling out rated travel,
Described X-axis limited block collides X-axis limit sensors, and described X-axis motor stops driving；Described servo transfer mechanism includes edge
Y axis datum fixed plate and Y-axis location-plate that Y direction be arranged in parallel, and described Y axis datum fixed plate and Y-axis location-plate hang down
Directly it is arranged on described X-axis location-plate；Y-axis motor, vertical tumbler gear and Y are provided with described Y axis datum fixed plate
Axle ball-screw；At least two groups Y-axis linear guides be arrangeding in parallel along Y-direction are additionally provided with described Y axis datum fixed plate, and
Y-axis limited block, the both sides of described Y-axis limited block are each provided with Y-axis limit sensors；Described Y-axis motor passes through institute
The transmission stating vertical tumbler gear drives described Y-axis ball screw turns, and then drives described Y-axis location-plate in described two groups of Y
Advance along Y direction on axle linear guides, when Y-axis location-plate is when being traveling out rated travel, described Y-axis limited block collision
Y-axis limit sensors, described Y-axis motor stops driving；Described vertically modulating mechanism includes be arrangeding in parallel along Z-direction
Z axis datum fixed plate and Z axis location-plate；Z axis motor, shaft coupling, vertical commutation are provided with described Z axis datum fixed plate
Gear and Z axis ball-screw；At least two groups z axis along Z-direction be arranged in parallel are additionally provided with described Z axis datum fixed plate lead
Rail, and Z axis limited block, the both sides of described Z axis limited block are each provided with Z axis limit sensors；Described Z axis motor
Described Z axis ball screw turns are driven by the transmission of described shaft coupling and vertical tumbler gear, and then drives described Z axis positioning
Plate is advanced along Z-direction on described two groups of Z axis linear guides, when Z axis location-plate is when being traveling out rated travel, described
Z axis limited block collides Z axis limit sensors, and described Z axis motor stops driving；Described Y-axis location-plate is as described Z axis base
Quasi- fixed plate, described Z axis location-plate is as fixture datum detent mechanism；It is fixed that described two dimension manual adjustment means include fixture datum
Position mechanism, described fixture datum detent mechanism is provided with workpiece orientation angle micro-adjusting mechanism, described workpiece orientation angle fine setting
Three adjustment screws and 3 locking screws are provided with mechanism；Fixture datum localization machine described in described three adjustment screw top pressures
Structure pulls open described workpiece orientation angle micro-adjusting mechanism and with fixture datum detent mechanism and produces relative angle, and by described locking
Described in screw locking between workpiece orientation angle micro-adjusting mechanism and fixture datum detent mechanism angle relative position.
2. according to claim 1 five dimension micro-adjusting mechanisms it is characterised in that：Described adjustment screw and locking screw compartment of terrain
It is arranged on described workpiece orientation angle micro-adjusting mechanism.
3. according to claim 1 five dimension micro-adjusting mechanisms it is characterised in that：Described workpiece orientation angle micro-adjusting mechanism and institute
Stating the surface that fixture datum detent mechanism contacts is spherical structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510033553.1A CN104551718B (en) | 2015-01-23 | 2015-01-23 | Five dimension micro-adjusting mechanisms |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510033553.1A CN104551718B (en) | 2015-01-23 | 2015-01-23 | Five dimension micro-adjusting mechanisms |
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| CN104551718A CN104551718A (en) | 2015-04-29 |
| CN104551718B true CN104551718B (en) | 2017-03-08 |
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| CN201510033553.1A Expired - Fee Related CN104551718B (en) | 2015-01-23 | 2015-01-23 | Five dimension micro-adjusting mechanisms |
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Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105241391B (en) * | 2015-09-21 | 2017-08-01 | 长春设备工艺研究所 | A kind of device for the recessed aspherical mirror type accuracy interferometric detection of heavy caliber |
| CN107775589B (en) * | 2016-08-30 | 2020-06-09 | 中国飞行试验研究院 | Method for installing aircraft nose reinforcing structure of avionic testing machine |
| CN106405775B (en) * | 2016-12-08 | 2018-08-24 | 中国科学院长春光学精密机械与物理研究所 | Support adjustment mechanism applied to heavy caliber dichronic mirror |
| CN109435315B (en) * | 2018-11-09 | 2023-06-23 | 苏州益顺华智能装备有限公司 | Full-automatic cake gluing machine |
| CN110108998A (en) * | 2019-04-18 | 2019-08-09 | 海迪科（南通）光电科技有限公司 | A kind of vertical point measurement machine of LED chip fully automatic high-speed |
| CN110044254B (en) * | 2019-05-16 | 2024-03-05 | 苏州慧利仪器有限责任公司 | Five-dimensional supporting and adjusting seat and optical element clamping device |
| CN110434815B (en) * | 2019-09-03 | 2024-09-24 | 苏州日和科技有限公司 | Manual multidimensional fine positioning device |
| CN111421497A (en) * | 2020-04-26 | 2020-07-17 | 上海联谊光纤激光器械有限公司 | Ultrahigh-precision five-dimensional movement adjusting device with high bearing capacity |
| CN112405033B (en) * | 2020-10-15 | 2022-06-14 | 渤海造船厂集团有限公司 | Adjustable platform for machining gasket and method thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62282801A (en) * | 1986-05-31 | 1987-12-08 | Tsugami Corp | Complex processing lathe |
| GB2325915A (en) * | 1997-06-02 | 1998-12-09 | Julian Fuchs | Gantry robot type tangential edge profiling machine |
| US6478136B2 (en) * | 2001-01-08 | 2002-11-12 | Nikon Corporation | Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations |
| CN102798954A (en) * | 2012-08-22 | 2012-11-28 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
-
2015
- 2015-01-23 CN CN201510033553.1A patent/CN104551718B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62282801A (en) * | 1986-05-31 | 1987-12-08 | Tsugami Corp | Complex processing lathe |
| GB2325915A (en) * | 1997-06-02 | 1998-12-09 | Julian Fuchs | Gantry robot type tangential edge profiling machine |
| US6478136B2 (en) * | 2001-01-08 | 2002-11-12 | Nikon Corporation | Method and apparatus for automatically transporting and precisely positioning work pieces at processing stations |
| CN102798954A (en) * | 2012-08-22 | 2012-11-28 | 中国科学院上海光学精密机械研究所 | Five-dimensional adjusting rack |
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| CN104551718A (en) | 2015-04-29 |
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