CN105556272B - 具有多级隔膜泵的嗅探泄漏探测器 - Google Patents

具有多级隔膜泵的嗅探泄漏探测器 Download PDF

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Publication number
CN105556272B
CN105556272B CN201480048598.XA CN201480048598A CN105556272B CN 105556272 B CN105556272 B CN 105556272B CN 201480048598 A CN201480048598 A CN 201480048598A CN 105556272 B CN105556272 B CN 105556272B
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CN
China
Prior art keywords
pump
inlet
leak detector
turbomolecular pump
sniff
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480048598.XA
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English (en)
Chinese (zh)
Other versions
CN105556272A (zh
Inventor
海克·希尔格斯
亚尔马尔·布鲁恩斯
丹尼尔·维茨格
诺伯特·罗尔夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Inficon GmbH Deutschland
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Inficon GmbH Deutschland
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Publication date
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Publication of CN105556272A publication Critical patent/CN105556272A/zh
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
CN201480048598.XA 2013-09-16 2014-09-02 具有多级隔膜泵的嗅探泄漏探测器 Active CN105556272B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE201310218506 DE102013218506A1 (de) 2013-09-16 2013-09-16 Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102013218506.5 2013-09-16
PCT/EP2014/068582 WO2015036282A2 (de) 2013-09-16 2014-09-02 Schnüffellecksucher mit mehrstufiger membranpumpe

Publications (2)

Publication Number Publication Date
CN105556272A CN105556272A (zh) 2016-05-04
CN105556272B true CN105556272B (zh) 2018-06-22

Family

ID=51539242

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480048598.XA Active CN105556272B (zh) 2013-09-16 2014-09-02 具有多级隔膜泵的嗅探泄漏探测器

Country Status (7)

Country Link
US (1) US9810597B2 (enExample)
EP (1) EP3047250B1 (enExample)
JP (1) JP6375378B2 (enExample)
CN (1) CN105556272B (enExample)
BR (1) BR112016005378B1 (enExample)
DE (1) DE102013218506A1 (enExample)
WO (1) WO2015036282A2 (enExample)

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DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass
WO2018063264A1 (en) * 2016-09-30 2018-04-05 Compagnie Generale Des Etablissements Michelin Method of detecting tire mold bladder leakage by smell
FR3069639B1 (fr) * 2017-07-26 2019-08-30 Pfeiffer Vacuum Sonde de reniflage, detecteur de fuites et procede de detection de fuites
DE102017217374A1 (de) * 2017-09-29 2019-04-04 Inficon Gmbh Vorrichtung und Verfahren zur Unterscheidung eines aus einem Leck austretenden Prüfgases von Störgas
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
GB2572958C (en) * 2018-04-16 2021-06-23 Edwards Ltd A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers
DE102018206877A1 (de) * 2018-05-04 2019-11-07 Inficon Gmbh Verfahren zum Ermitteln der relativen Lage eines Gaslecks
EP3567356B1 (en) * 2018-05-07 2021-02-24 Inficon GmbH Sniffing leak detector with switching valve and buffer chamber
FR3101146B1 (fr) * 2019-09-20 2021-09-17 Pfeiffer Vacuum Module de détection de fuites et procédé de contrôle de l'étanchéité d'un objet à tester par gaz traceur
DE102020111959A1 (de) 2020-05-04 2021-11-04 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Verfahren und Messvorrichtung zur Untersuchung der Wasserstoffpermeabilität eines Untersuchungsgegenstands
GB2606392B (en) * 2021-05-07 2024-02-14 Edwards Ltd A fluid routing for a vacuum pumping system
CN113984304B (zh) * 2021-12-28 2022-04-29 河南氢枫能源技术有限公司 一种氢能设备测试系统和测试方法
DE102023104027A1 (de) 2023-02-17 2024-08-22 Inficon Gmbh Turbomolekularpumpe mit variabler Seiteneinlassposition zur Gegenstromlecksuche

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CN101553720A (zh) * 2006-11-29 2009-10-07 因菲康有限公司 嗅探检漏设备
DE102009010064A1 (de) * 2009-02-21 2010-08-26 Inficon Gmbh Schnüffellecksucher

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DE19638506A1 (de) * 1996-09-20 1998-03-26 Leybold Vakuum Gmbh Verfahren zur Untersuchung einer Mehrzahl ähnlicher Prüflinge auf Lecks sowie für die Durchführung dieses Verfahrens geeigneter Lecksucher
CN1798963A (zh) * 2003-05-30 2006-07-05 因菲康有限公司 检漏设备
CN101473208A (zh) * 2006-08-31 2009-07-01 凡利安股份有限公司 相对高试验压力下大泄漏处痕量气体泄漏检测系统和方法
CN101517390A (zh) * 2006-10-10 2009-08-26 因菲康有限公司 嗅测检漏器
CN101553720A (zh) * 2006-11-29 2009-10-07 因菲康有限公司 嗅探检漏设备
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Also Published As

Publication number Publication date
JP2016532122A (ja) 2016-10-13
JP6375378B2 (ja) 2018-08-15
US9810597B2 (en) 2017-11-07
WO2015036282A2 (de) 2015-03-19
BR112016005378B1 (pt) 2021-02-23
WO2015036282A3 (de) 2015-05-28
US20160223424A1 (en) 2016-08-04
CN105556272A (zh) 2016-05-04
DE102013218506A1 (de) 2015-03-19
EP3047250A2 (de) 2016-07-27
EP3047250B1 (de) 2017-11-22

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