CN105548610B - A kind of acceleration detector and detection method based on resonance light tunneling effect - Google Patents

A kind of acceleration detector and detection method based on resonance light tunneling effect Download PDF

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CN105548610B
CN105548610B CN201510888044.7A CN201510888044A CN105548610B CN 105548610 B CN105548610 B CN 105548610B CN 201510888044 A CN201510888044 A CN 201510888044A CN 105548610 B CN105548610 B CN 105548610B
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msub
mrow
light
mtd
incident
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CN105548610A (en
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菅傲群
段倩倩
魏重光
桑胜波
张文栋
唐军
石云波
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SHANXI QINGZHONG TECHNOLOGY Co.,Ltd.
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Taiyuan University of Technology
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration

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  • Mechanical Light Control Or Optical Switches (AREA)
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Abstract

The present invention relates to the acceleration detector and detection method made based on resonance light tunneling effect principle；A kind of the characteristics of utilizing high-resolution in resonance light tunneling effect principle is proposed, measures the acceleration detector of the new structure of acceleration；Used technical solution is：A kind of acceleration detector based on resonance light tunneling effect, including fixed frame, elastic cantilever and mass block, tunable light source and photodetector, will cause intensity in transmission using change of the resonance light tunneling effect to the faint shifting amount of mass blockTBig variable quantity is detected, and amount of displacement is obtained with the change of the light transmission intensity monitored, realizes the accurate measurement to micro-displacement amount.

Description

A kind of acceleration detector and detection method based on resonance light tunneling effect
Technical field
The present invention relates to acceleration detector, and in particular to the acceleration detection made based on resonance light tunneling effect principle Device and detection method.
Background technology
At present, accelerometer is applied to all various aspects, such as measures the impact strength of automobile, detection in traffic accident and fly The shockproofness of the accelerating ability and bridge of machine under the influence of external environment condition etc..In microelectromechanical systems (MEMS) technology Under the conditions of high speed development, with low-power consumption, easy of integration, micro-volume, micro weight and famous micro-mechanical accelerometer is shown one's talent, into For the core devices of miniature inertial measurement combination.Common mems accelerometer has condenser type and piezoresistive accelerometer, capacitance Formula accelerometer mainly includes cantilever beam and mass block.It is small-sized due to accelerometer for capacitive accelerometer, Mass block capacitance change because of caused by mobile micro-displacement is very faint under acceleration effect, so as to influence acceleration analysis Accuracy.Piezoresistive accelerometer is mainly made of overarm arm and mass block and force sensing resistance is arranged in overarm arm.Quality Block can produce an opposite inertia force under acceleration effect, by and cause cantilever beam deformation, so as to cause force sensing resistance to hinder The change of value.But the material property of large-scale production accelerometer material requested (such as silicon semi-conducting material) limits pressure The Sensitivity rate of resistance accelerometer.In the case where optical technology is constantly progressive, using optical method for measuring micro-acceleration and micro-displacement Amount is practical, so that the accuracy measurement of acceleration is no longer limited by conventional mechanical method limitation, further obtains Room for promotion.
For optical accelerometer, its basic thought realized has points of resemblance with micro-mechanical accelerometer, is to rely on Mass block change in displacement caused by acceleration is detected to obtain the size and Orientation of acceleration.Now, integrated optics acceleration Count the principle of interference realization that light is usually used in the detection to acceleration, such as grating accelerometer.Traditional raster accelerometer Basic composed component mainly includes light source, conductive grating, conductive film, transparent substrates, photo-electric conversion element.Extraneous acceleration Change can cause the change that grating accelerometer chamber is grown, so as to can change the intensity level of the interference fringe detected, by right The change detection of light intensity can obtain acceleration.However, during the acceleration analysis is realized, there may be curved for conductive film Song deformation, influences whether the measurement accuracy of accelerometer.At the same time to realize high measurement accuracy, by the sensitive of integral mechanical structure Degree proposes requirements at the higher level, adds processing technology difficulty.
In view of deficiency, the present invention propose one kind and utilize resonance light tunneling effect to realize high-acruracy survey acceleration above Detection method.Resonance light tunneling effect, is a kind of new optical effect, can be greatly enhanced the sensitivity of accelerometer Detection and accuracy measurement.Resonance light tunneling effect is based on relatively simple optics tunneling effect (frustrated total internal reflection).Optics Two interfaces in two index distributions from high to low occur for tunneling effect, in the case where low refractive index dielectric layer is very thin (thickness is less than incident wavelength), the interface that light occurs through total reflection, i.e., cannot pass through through light in classical geometric optics " barrier ", formed transmission (tunnelling ray).Resonance light tunneling effect refers to incident ray after incidence angle is more than critical angle, incident Light is by the resonance effects in micron or nanocomposite optical chamber., can be by the transmitted light of system using this resonance light tunneling effect Intensity is associated with the angle change situation of the incidence angle of incident light source.Meanwhile device available standards silicon work designed by the present invention Skill is processed, and can improve its production efficiency, and reduce cost.
The content of the invention
The present invention proposes a kind of the characteristics of utilizing high-resolution in resonance light tunneling effect principle, measures the new of acceleration The acceleration detector of type structure.
In order to solve the above technical problems, the technical solution adopted in the present invention is：It is a kind of based on resonance light tunneling effect Acceleration detector, including fixed frame, elastic cantilever and mass block,
The mass block is made of semicircle pole unit, rectangular body unit and resonating member, semicircle pole unit and cuboid list The quantity of member is two, and resonating member and two rectangular body unit connection composition I-shape constructions, two rectangular body units are Two parallel girders of I-shape construction, the square face of two semicircle pole units is opposite and by the connection of the I-shape construction, common The unit that shakes is parallel with the square face of semicircle pole unit；Two skies are formed between semicircle pole unit, rectangular body unit and resonating member Gap is two resonators；
The elastic cantilever has four, and for four elastic cantilevers into cross distribution, one end is connected to two semicircles The arcwall face center of pole unit and the outside center of two rectangular body units, the other end are fixed on the inner wall of fixed frame；
Light source and photodetector are further fixed on the fixed frame；The fixed position of the light source and photodetector and Angle needs the condition that meets to be：The light of light source transmitting is after the curved refractive of a semicircle pole unit, in the semicolumn list It is incident with the angle more than the angle of total reflection in the plane of member, resonator is entered in the form of evanescent wave, after resonating wherein, then is passed through The other half cylinder units is crossed, is received by a photoelectric detector.
Mass block is connected by elastic cantilever inside the fixed frame, light source and light are fixed with the frame of fixed frame Electric explorer；Whole detector is installed by fixed frame.
Elastic cantilever beam action is connection fixed frame and mass block, allows mass block in the space that fixed frame surrounds Freely activity, and in inactive state parking position accuracy.Structure and principle based on acceleration detector of the present invention, people in the art Member can reasonably design cantilever beam structure by experiment.
Light source selects monochromatic light source.The light that light source is sent is P or S by polarizer control before mass block is reached Polarised light, but the incident direction of light should not be changed.
The effect of photodetector is transmitted ray of the reception from mass block and detects light intensity, and the light intensity that will be detected Time corresponding with its, which records and is transferred to microcontroller, carries out data processing.
Since the present invention is based on resonance light tunneling effect, mass size used controls other in the micron-scale, the knot of mass block Structure refer to the attached drawing 3.The mass block is removable to be divided into two semicircular pole unit, resonating member, two rectangular body units.The two of mass block Semicircle pole unit is symmetrical arranged, and radius is R (measurement that radius is arranged to acceleration provides necessary data condition)；Resonance is single First width is gλAnd apart from two halves cylinder it is dλ.The mass block making material selects silicon, its refractive index is nsi=3.42 is (suitable For infrared incident light), completed, comprised the following steps using integrally formed standard silicon process：
S1：Silicon chip is chosen as material, and silicon chip is cleaned, is dried；
S2：The photoresist in spin coating on silicon chip, then silicon chip and will be carved with covering for acceleration detector overall structure pattern Diaphragm plate is fixed；
S3：The silicon chip fixed is fully exposed；
S4：After end exposure, develop to the photoresist on silicon chip；
S5：Processing is performed etching to silicon chip to clean afterwards, forms the overall structure needed for acceleration detector.
The overall structure refers to other structures of the detector in addition to light source and photodetector.
Since the acceleration detector of the present invention is based on resonance light tunneling effect, the size of detector is other in the micron-scale, fits It is suitable for and uses silicon chip integral manufacturing.The structure of wherein elastic cantilever is not limited to structure shown in the drawings, those skilled in the art Can be according to Modal Analysis as a result, being rationally designed to the width of elastic cantilever, change width, character etc..
The principle of detection acceleration and the structure of detector based on the present invention, are fabricated to using other suitable materials Detector is also in the protection domain of the application.For example, the frame of detector and the material of cantilever beam are not limited to silicon, also differ Surely it is identical with the material of mass block, it is not related with the propagation of light, will can realize that respective function can.
The material of mass block is also not necessarily limited to silicon chip, and simply the etching technics of silicon chip is more ripe, material cost and is processed into This is lower, and therefore, the material of mass block should not become the factor of limitation the application protection domain.
Likewise, in the case that only mass block is silicon material, it is also preferred that using integrally formed standard silicon process, such as adopt Formed with the silicon chip erosion of a piece of oval.This is because the size of structure is too small, processes combination difficulty respectively by component, also hold Propagation easily to light produces larger interference, and integrally formed influence can then be ignored substantially.If there is more advanced technique can be with Branch makes the mass block, should not also influence protection of the present invention to mass block structure.
Using the method for above-mentioned acceleration detector detection acceleration, the meter of main collection and acceleration including data Calculate.
A kind of acceleration detection method based on resonance light tunneling effect of the present invention, used principle is to be based on resonance light Tunneling effect.Wherein, incident ray is entered in resonator in the form of evanescent wave, and is resonated in resonator, can in output terminal To detect the transmitted light of system.
1st, the relation with incident angle α of displacement Δ H
1) detection of displacement is moved up
When accelerometer bears downward acceleration, mass block is moved up with respect to outline border.Together should accelerometer level When, when accelerometer bears acceleration backward, mass block is moved forward with respect to outline border.The change in displacement of mass block, can join Examine attached drawing 4.
Initial motion state：Using the center of circle of the upper half cylinder units (radius R) of the mass block as coordinate origin, build Vertical X-Y axis coordinate systems.Fixed visible light source, incident ray direction is all the time β with X-axis forward direction angle.Incident polarization light is through upper With the angle [alpha] more than critical angle after the curved refractive of semicircle pole unit0Incidence, it (is passed in other words with the state coupling of evanescent wave It is defeated) into resonant cavity, and resonance effects is formed in resonant cavity, and propagated through mass block, finally detected by photodetector Output light energy is strong and weak.
Acceleration change motion state：After acceleration changes, elastic cantilever drives mass block to cause displacement Shifting amount Δ H.At this time, because mass block moves up, the position of semicircle prism surface launching spot changes, and polarization light is after refraction Incident angle will be by α0It is reduced to α1(α1More than critical angle).By geometrical relationship, displacement can be expressed as following formula：
Δ H=R (sin γ0-sinγ1)+R·tan(π-β)·(cosγ0-cosγ1) (1)
Wherein γ0With γ1Respectively incident ray is when the upper half cylinder units outer edge of mass block reflects, intersection point The normal at place and the positive angle (with reference to figure 4) of X-axis, and incident angle α meets relationship below (2), (3) with γ：
2) detection of displacement is moved down
Displacement quantity measuring method is moved up used by above-mentioned to be equally applicable to move down displacement detection.Move down displacement change Refer to the attached drawing 5, is with moving up displacement detection difference：After mass block occurs moving down under elastic cantilever drive, partially Shaking incident angle of the light after refraction will be by α0It is reduced to α1(α1Need to be still greater than critical angle).By front and rear incidence is calculated Angle [alpha]0、α1Still meet relational expression (1), wherein γ with displacement Δ H (displacement is negative value at this time)0With γ1Still meet relational expression (2)、(3)。
2nd, there are following relation by transmitted intensity T and incident angle α
The resonance light tunneling structure that mass block is formed with reference to figure 6, from left to right including input unit (upper half cylinder units), Tunnel layer, resonator (i.e. resonating member), tunnel layer, output unit (lower half cylinder units).In this structure, input, output Unit is material silicon, its dielectric constant is ε0、ε4(there is ε0=ε4=εsi)；Tunnel layer is air layer, dielectric constant ε1、ε3 (there is ε1=ε3=εair), the width of tunnel layer is d1、d3(make d1=d3=dλ)；Resonating member is material silicon, its dielectric constant For ε2(there is ε2=εsi), width d2(there is d2=gλ)。
When incident light is incident with incident angle α, system transmittance luminous intensity T and incident angle α theoretical according to transmission matrix There are following relation：
S-polarization light：
P polarization light：
Wherein, the m in above formula11、m12、m21、m22For element in transmission matrix M, and meet relational expression：
In this transmission matrix M, δwFor phase factor, and have(w=1,2,3), ηk For the optical admittance factor, when incident ray is S-polarization light,When incident ray is P polarization light,And have(k=0,1,2,3,4).
For designed resonance light tunneling structure, calculated by method of transition matrices, when incident angle changes, thoroughly Penetrate luminous intensity (transmissivity) change dramatically.With reference to figure 7, it can be seen from the figure that for P polarization light, incident angle changes 0.1 degree Transmitted intensity is caused about to decline 30dB；For S-polarization light, under 0.1 degree of incident angle change causes transmitted intensity about 55dB drops.
A kind of above-mentioned acceleration detection method based on resonance light tunneling effect, in sensing process is accelerated, realizes position The method of shifting amount detection is described as：There is micro-displacement amount Δ H due to moving up and down in mass block, from formula (1)-(3), because of quality The change up and down of block position will cause incident angle α to change.At this time, incident light is incident with different incidence angles α, and in the form of evanescent wave Through mass block, so as to obtain different light transmission luminous intensity T, i.e. displacement Δ H and light transmission luminous intensity T, which exists, determines curve Relation.According to Δ H-T curved line relations, displacement Δ H is obtained with the transmitted intensity T monitored, then and can detect that acceleration. Alternatively, it can be accelerated according to the correspondence between transmitted intensity T and incident angle α and displacement Δ H, and the prior art Spend computational theory, the relation curve of transmitted intensity T and acceleration drawn, when detect acceleration, it becomes possible to according to curve with The transmitted intensity T detected, draws corresponding acceleration.
Explanation：Since displacement is the displacement variable of mass block in a time interval；In order to facilitate description, the present invention It is middle that the corresponding incidence angle of the starting point being sometime spaced is denoted as α0, end puts corresponding incidence angle and is denoted as α1, i.e. α0It is not limited only to refer to For the incidence angle at initial time (0 moment).Corresponding incident ray is reflected in the upper half cylinder units outer edge of mass block When, the mark of the normal of point of intersection and the positive angle γ of X-axis, which are also opposed, should be understood that.
Compared with prior art the invention has the advantages that.
1st, light with more than/incide glass prism/low-refraction bed boundary equal to the angle of total reflection, in the form of evanescent wave Into resonator, different from traditional method amber resonator, the latter's light to enter resonator less than the incidence angle of the angle of total reflection, Vibrated in resonator in the form of transmission wave in resonator.Compared with transmission wave, change of the evanescent wave to angle is more sensitive.
2nd, the measurement of micro-displacement amount is more accurate, the reason is that the change of faint displacement will cause transmitted intensity T big Variable quantity.Amount of displacement is obtained with the change of the light transmission luminous intensity monitored, obtains the measurement accuracy of displacement Very big lifting.
3rd, the design is simple in structure, and manufacture difficulty is low, and cost is relatively low.
Brief description of the drawings
The invention will be further described below in conjunction with the accompanying drawings.
Fig. 1 is the structure diagram figure of the acceleration detector of the present invention.
Fig. 2 is the sectional view of Fig. 1 side views.
Fig. 3 is mass block structure schematic diagram.
Fig. 4 moves up incident angle change schematic diagram for mass block nuclear structure (upper half cylinder units).
Fig. 5 moves down incident angle change schematic diagram for mass block nuclear structure (upper half cylinder units).
Fig. 6 is resonance light tunneling structure schematic diagram.
Fig. 7 is system transmittance intensity T and incident angle variation delta θ curve maps based under the polarizing light irradiation of fixed position.
Fig. 8 is that system transmittance intensity T (chooses initial with displacement Δ H curve maps based under the polarizing light irradiation of fixed position Incident angle α0For 17.9516 degree).
In figure：1 is fixed frame, and 2 be elastic cantilever, and 3 be mass block, and 4 be semicircle pole unit, and 5 be rectangular body unit, 6 It is light source for resonating member, 7,8 be photodetector.
Embodiment
Below in conjunction with specific embodiment, the invention will be further described.
Embodiment 1
As shown in Figs. 1-3, a kind of acceleration detector based on resonance light tunneling effect, including fixed frame 1, elastic cantilever Beam 2 and mass block 3,
The mass block 3 is made of semicircle pole unit 4, rectangular body unit 5 and resonating member 6, semicircle pole unit 4 and rectangular The quantity of body unit 5 is two, resonating member 6 and the two rectangular connection of body unit 5 composition I-shape constructions, two cuboids Unit 5 is two parallel girders of I-shape construction, and the square face of two semicircle pole units 4 is opposite and passes through the I-shape construction Connection, resonating member 6 are parallel with the square face of semicircle pole unit 4；Semicircle pole unit 4, rectangular body unit 5 and resonating member 6 it Between form two gaps be two resonators；The mass block 3 is formed by the silicon chip erosion of a piece of oval；
The elastic cantilever 2 has four, and four elastic cantilevers 2 are connected to two and half into cross distribution, one end The arcwall face center of cylinder units 4 and the outside center of two rectangular body units 5, the other end are fixed on the inner wall of fixed frame 1；
Light source 7 and photodetector 8 are further fixed on the fixed frame；The fixed bit of the light source 7 and photodetector 8 Put and angle needs the condition that meets to be：The light that light source 7 is launched is after the curved refractive of a semicircle pole unit 4, at this partly It is incident with the angle more than the angle of total reflection in the plane of cylinder units, resonator is entered in the form of evanescent wave, is resonated wherein Afterwards, then by the other half cylinder units, it is received by a photoelectric detector.
Embodiment 2
It is 1550nm to select incident ray wavelength X, and incident ray direction is all the time β, incident light P with X-axis forward direction angle Polarised light；The width of resonating member 6 is gλ=15.622 μm, air layer width dλ=2280nm, air refraction 1.
Because of mass block the selection of material silicon, silicon refractive index is 3.42, so obtaining critical angle θ according to Snell laws of refractionc For 17.0016 degree, the present embodiment selection original incident angle is α0For 17.9516 degree, displacement excursion is controlled in 150nm Within.
According to conditions above, by simulation calculation, light transmission intensity T (is fitted bent with the change curve of angle variable quantity Δ θ Line) as shown in fig. 7, light transmission intensity T is as shown in Figure 8 with displacement Δ H change curves.With reference to figure 7, in same test condition Under, using angle variable quantity Δ θ values as 0.95 degree for boundary, choose relative to the slower P polarization curve of S-polarization curvilinear motion and classics F-P resonant cavity curve compares, it is found that P polarization curvilinear motion rate is still significantly higher than F-P resonant cavity curve, it can thus be appreciated that the invention has There is the superiority of higher.With reference to figure 8, it can be observed in the plot, for P polarization light, mass block moves up change about 75nm (i.e. incident angle changes about 0.05 degree) causes intensity in transmission T to decline about 25dB；For S-polarization light, on mass block Moving change about 75nm (i.e. incident angle changes about 0.05 degree) causes intensity in transmission T to decline about 50dB, it is possible thereby to see Go out the invention and possess the characteristics of high certainty of measurement.
The present invention can be summarized with others without prejudice to the concrete form of the spirit or essential characteristics of the present invention.Therefore, nothing By from the point of view of which point, the embodiment above of the invention can only all be considered the description of the invention and cannot limit invention, Claims indicate the scope of the present invention, and above-mentioned explanation does not point out the scope of the present invention, therefore, with the present invention The suitable implication and scope of claims in any change, be all considered as being included within the scope of the claims.

Claims (4)

  1. A kind of 1. acceleration detector based on resonance light tunneling effect, it is characterised in that：Including fixed frame (1), elastic cantilever Beam (2) and mass block (3),
    The mass block (3) is made of semicircle pole unit (4), rectangular body unit (5) and resonating member (6), semicircle pole unit (4) Quantity with rectangular body unit (5) is two, and resonating member (6) and two rectangular body unit (5) connections form I-shaped knot Structure, two rectangular body units (5) are two parallel girders of I-shape construction, and the square face of two semicircle pole units (4) is relatively simultaneously It is connected by the I-shape construction, resonating member (6) is parallel with the square face of semicircle pole unit (4)；Semicircle pole unit (4), It is two tunnel layers that two gaps are formed between rectangular body unit (5) and resonating member (6)；
    The elastic cantilever (2) has four, and four elastic cantilevers (2) are connected to two and half into cross distribution, one end The arcwall face center of cylinder units (4) and the outside center of two rectangular body units (5), the other end are fixed on fixed frame (1) On inner wall；
    Light source (7) and photodetector (8) are further fixed on the fixed frame (1)；The light source (7) and photodetector (8) Fixed position and angle need the condition that meets to be：Curved surface of the light through a semicircle pole unit (4) of light source (7) transmitting is rolled over It is incident with the angle more than the angle of total reflection in the plane of the semicircle pole unit (4) after penetrating, resonance is entered in the form of evanescent wave Chamber, after resonating wherein, then by the other half cylinder units (4) by photodetector (8) reception.
  2. A kind of 2. acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that：It is described The material of fixed frame (1), elastic cantilever (2) and mass block (3) is silicon.
  3. 3. a kind of acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that accelerate Spend detector overall structure to complete using integrally formed standard silicon process, comprise the following steps：
    Silicon chip is chosen as material, and silicon chip is cleaned, is dried；
    The photoresist in spin coating on silicon chip, then consolidates silicon chip with the mask plate for being carved with acceleration detector overall structure pattern It is fixed；
    The silicon chip fixed is fully exposed；
    After end exposure, develop to the photoresist on silicon chip；
    Processing is performed etching to silicon chip to clean afterwards, forms the overall structure needed for acceleration detector；
    The overall structure of acceleration detector is referred to by fixed frame (1), elastic cantilever (2) and mass block (3) group of annular Into frame structure.
  4. 4. utilize the detection method of the acceleration detector described in claim 1, it is characterised in that include the following steps：
    1) a certain instantaneous incident angle α is definite
    The transmitted intensity T of photodetector (8) detection is necessarily corresponding with the incident angle α of a certain instantaneous incident light, and the two There are following relation：
    If incident light is S-polarization light：
    If incident light is P polarization light：
    Wherein, ε is dielectric constant, semicircle pole unit (4), the tunnel layer for closing on incident light, the resonating member of incident light beam strikes (6), the dielectric constant for closing on the tunnel layer of transmitted light and the semicircle pole unit (4) of transmitted light is followed successively by ε0、ε1、ε2、ε3、ε4, and And the material of semicircle pole unit (4) and resonating member (6) is silicon, therefore ε0=ε2=ε4=εsi, tunnel layer is air layer, therefore ε1= ε3=εair；The width for closing on the tunnel layer of incident light is d1, the width for closing on the tunnel layer of transmitted light is d3, resonating member (6) Width be d2；M in formula11、m12、m21、m22For element in transmission matrix M, and meet relational expression：
    <mrow> <mi>M</mi> <mo>=</mo> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <msub> <mi>m</mi> <mn>11</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>12</mn> </msub> </mtd> </mtr> <mtr> <mtd> <msub> <mi>m</mi> <mn>21</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>22</mn> </msub> </mtd> </mtr> </mtable> </mfenced> <mo>=</mo> <msub> <mi>M</mi> <mn>1</mn> </msub> <msub> <mi>M</mi> <mn>2</mn> </msub> <msub> <mi>M</mi> <mn>3</mn> </msub> <mo>=</mo> <munderover> <mo>&amp;Pi;</mo> <mrow> <mi>k</mi> <mo>=</mo> <mn>1</mn> </mrow> <mn>3</mn> </munderover> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <mrow> <msub> <mi>cos&amp;delta;</mi> <mi>w</mi> </msub> </mrow> </mtd> <mtd> <mfrac> <mrow> <msub> <mi>isin&amp;delta;</mi> <mi>w</mi> </msub> </mrow> <msub> <mi>&amp;eta;</mi> <mi>k</mi> </msub> </mfrac> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>i&amp;eta;</mi> <mi>k</mi> </msub> <msub> <mi>sin&amp;delta;</mi> <mi>w</mi> </msub> </mrow> </mtd> <mtd> <mrow> <msub> <mi>cos&amp;delta;</mi> <mi>w</mi> </msub> </mrow> </mtd> </mtr> </mtable> </mfenced> </mrow>
    In this transmission matrix M, δwFor phase factor, and haveηkFor light The admittance factor, when incident ray is S-polarization light,When incident ray is P polarization light,And have
    It can determine the value of incidence angle according to the relational expression of above-mentioned transmitted intensity T and incident angle α；
    2) displacement variable Δ H's is definite
    Using the center of circle of the semicircle pole unit (4) of the incident light beam strikes of mass block (3) as coordinate origin, X-Y axis coordinate systems are established；
    Then displacement variable Δ H meets relationship below：
    Δ H=R (sin γ0-sinγ1)+R·tan(π-β)·(cosγ0-cosγ1)
    Wherein, α0For the incidence angle at a certain moment, α1For the incidence angle of subsequent time；γ0With γ1Respectively incident ray is in semicircle When the curved surface of pole unit (4) reflects, the normal of point of intersection and the positive angle of X-axis；R is the radius of semicircle pole unit (4)； β is incident ray direction and X-axis forward direction angle；
    Incident angle α meets relationship below with γ：
    <mrow> <msub> <mi>&amp;alpha;</mi> <mn>0</mn> </msub> <mo>=</mo> <msub> <mi>&amp;gamma;</mi> <mn>0</mn> </msub> <mo>-</mo> <mfrac> <mi>&amp;pi;</mi> <mn>2</mn> </mfrac> <mo>-</mo> <mi>arcsin</mi> <mrow> <mo>(</mo> <mfrac> <mrow> <mi>s</mi> <mi>i</mi> <mi>n</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;gamma;</mi> <mn>0</mn> </msub> <mo>-</mo> <mi>&amp;beta;</mi> <mo>)</mo> </mrow> </mrow> <msub> <mi>n</mi> <mrow> <mi>s</mi> <mi>i</mi> </mrow> </msub> </mfrac> <mo>)</mo> </mrow> </mrow>
    <mrow> <msub> <mi>&amp;alpha;</mi> <mn>1</mn> </msub> <mo>=</mo> <msub> <mi>&amp;gamma;</mi> <mn>1</mn> </msub> <mo>-</mo> <mfrac> <mi>&amp;pi;</mi> <mn>2</mn> </mfrac> <mo>-</mo> <mi>arcsin</mi> <mrow> <mo>(</mo> <mfrac> <mrow> <mi>s</mi> <mi>i</mi> <mi>n</mi> <mrow> <mo>(</mo> <msub> <mi>&amp;gamma;</mi> <mn>1</mn> </msub> <mo>-</mo> <mi>&amp;beta;</mi> <mo>)</mo> </mrow> </mrow> <msub> <mi>n</mi> <mrow> <mi>s</mi> <mi>i</mi> </mrow> </msub> </mfrac> <mo>)</mo> </mrow> </mrow>
    Wherein nsiFor the refractive index of silicon；
    According to 1) and 2), it is known that between the transmitted intensity T and incident angle α and displacement variable Δ H of photodetector (8) detection Relation, can be theoretical according to existing acceleration calculation, calculate the corresponding acceleration magnitudes of transmitted intensity T, or draw Penetrate the relation curve of luminous intensity T and acceleration.
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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0619494B1 (en) * 1993-04-05 1997-05-21 Siemens Aktiengesellschaft Electron tunneling accelerometer
JPH10153613A (en) * 1996-11-20 1998-06-09 Yaskawa Electric Corp Angular velocity sensor
CN1635381A (en) * 2003-12-25 2005-07-06 北京大学 High precision tunnel type accelerometer and preparation method thereof
CN1752757A (en) * 2005-09-12 2006-03-29 中北大学 Resonance tunnel through pressure resistance type micro acceleration meter
CN101109635A (en) * 2007-08-20 2008-01-23 中北大学 Micro-mechanical gyroscope based on tunneling effect
CN103543292A (en) * 2013-11-06 2014-01-29 中北大学 Composite accelerometer based on capacitance effect and tunnel effect
CN103913159A (en) * 2014-04-29 2014-07-09 重庆大学 Tunnel type MEMS (Micro-electromechanical Systems) gyroscope
CN104792731A (en) * 2014-12-17 2015-07-22 太原理工大学 Liquid refractive index sensor based on resonance light tunnel effect

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0619494B1 (en) * 1993-04-05 1997-05-21 Siemens Aktiengesellschaft Electron tunneling accelerometer
JPH10153613A (en) * 1996-11-20 1998-06-09 Yaskawa Electric Corp Angular velocity sensor
CN1635381A (en) * 2003-12-25 2005-07-06 北京大学 High precision tunnel type accelerometer and preparation method thereof
CN1752757A (en) * 2005-09-12 2006-03-29 中北大学 Resonance tunnel through pressure resistance type micro acceleration meter
CN101109635A (en) * 2007-08-20 2008-01-23 中北大学 Micro-mechanical gyroscope based on tunneling effect
CN103543292A (en) * 2013-11-06 2014-01-29 中北大学 Composite accelerometer based on capacitance effect and tunnel effect
CN103913159A (en) * 2014-04-29 2014-07-09 重庆大学 Tunnel type MEMS (Micro-electromechanical Systems) gyroscope
CN104792731A (en) * 2014-12-17 2015-07-22 太原理工大学 Liquid refractive index sensor based on resonance light tunnel effect

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
Optofluidic refractometer using resonant optical tunneling effect;A. Q. Jian;《BIOMICROFLUIDICS》;20100430;第4卷(第4期);第1-11页 *
Resonant Optical Tunneling Effect: Recent Progress in Modeling and Applications;A. Q. Jian;《IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS》;20130601;第19卷(第3期);第1-10页 *
共振隧穿微陀螺仪哥氏效应仿真及理论验证;李孟委等;《中北大学学报》;20100131;第31卷(第1期);第81-87页 *
半无限周期光子晶体全反射隧穿效应的共振机理;刘启能;《光子学报》;20120831;第41卷(第8期);第986-990页 *
基于共振隧穿微结构的GaAs基加速度计;李旭;《仪表技术与传感器》;20071130(第11期);第7-8、17页 *

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