CN105319394B - A kind of angular acceleration detector and detection method based on resonance light tunneling effect - Google Patents
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Abstract
Description
技术领域technical field
本发明涉及角加速度检测器,具体涉及基于共振光隧穿效应原理制作的角加速度检测器及检测方法。The invention relates to an angular acceleration detector, in particular to an angular acceleration detector and a detection method based on the principle of resonant light tunneling effect.
背景技术Background technique
目前,角加速度计是用于测量运动物体角加速度的惯性传感器,现已应用于诸多方面,例如用于汽车的翻车预警检测装置以保护乘客安全、检测飞机的飞行状态、以及机器人设计等。在微电子机械系统(MEMS)技术高速发展条件下,微机械陀螺仪正朝着低功耗、易集成、微型化,高灵敏度,低成本等方向发展。但由于微机械理论与技术不完善,微机械陀螺仪仍属于中低精度的惯性传感器。其中由环境温度引起的漂移误差、加工精度成为制约微机械陀螺仪发展的关键因素。在光学技术不断进步下,采用光学方法测量角加速度已经切实可行,如光纤陀螺仪。光纤陀螺仪利用Sagnac效应,根据光路内相向传播的两列光波产生的光程差与旋转角速率的内在联系确定旋转角速率。与微机械陀螺仪相比,光纤陀螺仪因其耐冲击、使用寿命长、可瞬启、检测灵敏度高、动态量程范围大等优点而应用于更多领域。但光纤陀螺仪的核心部件光纤环,因在不同温度下受到的热应力不同,对光纤陀螺仪的温度性能影响很大,从而使角加速度的准确性测量受限。At present, angular accelerometers are inertial sensors used to measure the angular acceleration of moving objects, and have been used in many fields, such as rollover warning detection devices for cars to protect passenger safety, flight status detection of aircraft, and robot design. With the rapid development of micro-electro-mechanical systems (MEMS) technology, micro-mechanical gyroscopes are developing towards low power consumption, easy integration, miniaturization, high sensitivity, and low cost. However, due to the imperfection of micromechanical theory and technology, micromechanical gyroscopes are still low-to-medium precision inertial sensors. Among them, the drift error and machining accuracy caused by the ambient temperature have become the key factors restricting the development of micro-mechanical gyroscopes. With the continuous advancement of optical technology, it is practical to use optical methods to measure angular acceleration, such as fiber optic gyroscopes. The fiber optic gyroscope uses the Sagnac effect to determine the angular rate of rotation according to the internal relationship between the optical path difference and the angular rate of rotation generated by two columns of light waves propagating oppositely in the optical path. Compared with micromechanical gyroscopes, fiber optic gyroscopes are used in more fields due to their advantages such as impact resistance, long service life, instant start, high detection sensitivity, and large dynamic range. However, the fiber ring, the core component of the fiber optic gyroscope, suffers from different thermal stresses at different temperatures, which greatly affects the temperature performance of the fiber optic gyroscope, which limits the accuracy of angular acceleration measurement.
微机械陀螺仪设计的基本思想是利用科氏力现象,而光纤陀螺仪是利用Sagnac效应测量角速率。与其不同,本发明提出角加速度检测方法的基本实现思想是利用共振光隧穿效应,通过检测质量块因角加速度引起的角度变化来获得角加速度的大小和方向,实现高精度测量角加速度。共振光隧穿效应以光学隧穿效应(受抑全内反射)为基础。光学隧穿效应指光线由高折射率介质层界面照射到低折射率介质层界面时,在低折射率介质层厚度小于入射光波长条件下,光线将穿过全反射发生的界面,即穿过经典几何光学中光线不能穿过的“壁垒”,形成透射(隧穿光线)。共振光隧穿效应指入射光线在入射角大于临界角后,低折射率介质层厚度可在大于入射光波长情况下,入射光线在微米或者纳米光学腔中形成共振效应。在共振光隧穿效应中,系统的透射强度对入射光源的入射角度变化非常敏感,利用此条件来测量角加速度可以极大地提高角加速度的灵敏度检测及准确性测量。同时,本发明所设计器件可用标准硅工艺进行加工,可提高其生产效率,并降低成本。同时,本发明所设计器件可用标准硅工艺进行加工,可提高其生产效率,并降低成本。The basic idea of micromachined gyroscope design is to use the Coriolis force phenomenon, while the fiber optic gyroscope uses the Sagnac effect to measure angular rate. Different from it, the basic implementation idea of the angular acceleration detection method proposed by the present invention is to use the resonant light tunneling effect to obtain the magnitude and direction of the angular acceleration by detecting the angular change of the mass block caused by the angular acceleration, and realize high-precision measurement of the angular acceleration. Resonant optical tunneling is based on optical tunneling (frustrated total internal reflection). Optical tunneling effect means that when light is irradiated from the interface of high refractive index medium layer to the interface of low refractive index medium layer, under the condition that the thickness of the low refractive index medium layer is smaller than the wavelength of the incident light, the light will pass through the interface where total reflection occurs, that is, through In classical geometric optics, the "barrier" that light cannot pass through forms transmission (tunneling light). The resonant light tunneling effect means that when the incident light angle is greater than the critical angle, the thickness of the low refractive index medium layer can be greater than the wavelength of the incident light, and the incident light forms a resonance effect in the micron or nanometer optical cavity. In the resonant light tunneling effect, the transmission intensity of the system is very sensitive to the change of the incident angle of the incident light source. Using this condition to measure the angular acceleration can greatly improve the sensitivity detection and accuracy measurement of the angular acceleration. At the same time, the device designed in the invention can be processed by standard silicon technology, which can improve its production efficiency and reduce cost. At the same time, the device designed in the invention can be processed by standard silicon technology, which can improve its production efficiency and reduce cost.
发明内容Contents of the invention
本发明提出了一种利用共振光隧穿效应原理上高分辨率的特点,测量角加速度的新型加速度检测器。The invention proposes a new type of acceleration detector for measuring angular acceleration by utilizing the characteristic of high resolution in principle of resonant light tunneling effect.
为解决上述技术问题,本发明所采用的技术方案为:一种基于共振光隧穿效应的角加速度检测器,包括环形固定框、弹性悬臂梁和质量块,In order to solve the above-mentioned technical problems, the technical solution adopted in the present invention is: an angular acceleration detector based on the resonant light tunneling effect, comprising an annular fixed frame, an elastic cantilever beam and a mass block,
所述质量块由折射单元、连接单元和共振单元组成,折射单元和连接单元的数量均为两个,共振单元和两个连接单元连接组成工字形结构,两个连接单元为工字形结构的两条平行梁,两个折射单元的方形面相对并通过该工字形结构连接,共振单元与折射单元的方形面平行;折射单元、连接单元和共振单元之间构成两个空隙为两个隧穿层;所述两个折射单元的外轮廓的曲线属于同一个圆;The mass block is composed of a refraction unit, a connection unit and a resonance unit, the number of the refraction unit and the connection unit is two, the resonance unit and the two connection units are connected to form an I-shaped structure, and the two connection units are two I-shaped structures. A parallel beam, the square faces of the two refraction units face each other and are connected by the I-shaped structure, the resonant unit is parallel to the square faces of the refraction unit; two gaps are formed between the refraction unit, the connection unit and the resonant unit as two tunneling layers ; The curves of the outer contours of the two refraction units belong to the same circle;
所述弹性悬臂梁有四个,四个弹性悬臂梁成十字分布,一端分别连接在两个折射单元的弧形面中央和两个连接单元的外侧中央,另一端固定在环形固定框的内壁上;并且静止状态下质量块的重心与环形固定框的重心重合;There are four elastic cantilever beams, the four elastic cantilever beams are distributed in a cross, one end is respectively connected to the center of the arc surface of the two refraction units and the center of the outer side of the two connection units, and the other end is fixed on the inner wall of the ring-shaped fixed frame ; and the center of gravity of the mass block coincides with the center of gravity of the annular fixed frame in a static state;
所述环形固定框上还固定有光源和光电探测器;所述光源和光电探测器的固定位置及角度需要满足的条件为:光源发射的光线经一个折射单元的曲面折射后,在该折射单元的平面上以大于全反射角的角度入射,以倏逝波的形式进入谐振腔,在其中共振后,再经过另一折射单元被光电探测器接收。A light source and a photodetector are also fixed on the ring-shaped fixed frame; the fixed position and angle of the light source and the photodetector need to meet the conditions that: after the light emitted by the light source is refracted by the curved surface of a refraction unit, it will be refracted in the refraction unit Incident on the plane at an angle greater than the total reflection angle, it enters the resonant cavity in the form of an evanescent wave, resonates in it, and then passes through another refraction unit to be received by a photodetector.
所述环形固定框内部通过弹性悬臂梁将质量块连接,环形固定框的框架上固定有光源和光电探测器;整个检测器在通过环形固定框进行安装。The inside of the ring-shaped fixed frame connects the mass blocks through elastic cantilever beams, and the frame of the ring-shaped fixed frame is fixed with a light source and a photodetector; the entire detector is installed through the ring-shaped fixed frame.
虽然连接单元的作用仅是连接折射单元和共振单元,并与二者共同构成两个隧穿层,连接单元的外侧轮廓的形状对质量块的功能无影响,但是由于质量块是采用一片圆形的硅片刻蚀而成,为了减少刻蚀的工作量,连接单元的外侧轮廓曲线与折射单元的外侧轮廓曲线优选组成如图1和图3所示的圆。Although the function of the connection unit is only to connect the refraction unit and the resonance unit, and form two tunneling layers together with the two, the shape of the outer contour of the connection unit has no effect on the function of the mass block, but since the mass block is a circular In order to reduce the workload of etching, the outer contour curve of the connection unit and the outer contour curve of the refraction unit preferably form a circle as shown in Fig. 1 and Fig. 3 .
所用弹性悬臂梁结构参考图1,所用弹性梁共4根,分别设置于外边框与所用质量块之间的间隔空间内,作用是连接环形固定框和质量块,使质量块可以在固定框围成的空间内自由转动,并在静止状态准确复位;在检测器以一旋转轴为轴(垂直于下述XY平面,也是质量块的圆心)转动时,质量块在弹性梁支持下,在图1平面内相对外框旋转,并在角加速度作用之后,支撑质量块位置复原。Refer to Figure 1 for the structure of the elastic cantilever beams used. There are 4 elastic beams in total, which are respectively arranged in the space between the outer frame and the mass blocks used. Free rotation in the space formed, and reset accurately in a static state; when the detector rotates around a rotation axis (perpendicular to the following XY plane, which is also the center of the mass block), the mass block is supported by the elastic beam. 1 Rotate relative to the outer frame in the plane, and after the angular acceleration acts, the position of the supporting mass is restored.
所述固定框上还固定有光源和光电探测器;所述光源和光电探测器的固定位置及角度需要满足的条件为:光源发射的光线经上折射单元的曲面折射后,在该折射单元的隧穿层上方形表面以大于全反射角的角度入射,以倏逝波的形式进入谐振腔(即共振单元),并在其中形成共振现象,然后再经过另一折射单元,被光电探测器接收。A light source and a photodetector are also fixed on the fixed frame; the fixed position and angle of the light source and the photodetector need to satisfy the following conditions: after the light emitted by the light source is refracted by the curved surface of the upper refraction unit, The square surface on the tunneling layer is incident at an angle greater than the total reflection angle, and enters the resonant cavity (ie, the resonant unit) in the form of evanescent waves, and forms a resonance phenomenon in it, and then passes through another refraction unit, and is received by the photodetector .
所述固定框内部通过弹性悬臂梁将质量块连接,固定框的框架上固定有光源和光电探测器;整个检测器在通过固定框进行安装。The inside of the fixed frame connects the quality blocks through elastic cantilever beams, and the frame of the fixed frame is fixed with a light source and a photodetector; the entire detector is installed through the fixed frame.
光源选择光谱分布可调的光源,可以选择单色光源。光源发出的光线在到达质量块前,通过偏振片控制为P或S偏振光,但不应改变光线的相对入射方向。The light source is a light source with adjustable spectral distribution, and a monochromatic light source can be selected. The light emitted by the light source is controlled to be P or S polarized light by the polarizer before reaching the quality block, but the relative incident direction of the light should not be changed.
光电探测器的作用是接收来自质量块的透射光线并检测光强,并将检测到的光强和其对应的时间记录并传输到单片机进行数据处理。The function of the photodetector is to receive the transmitted light from the mass block and detect the light intensity, and record and transmit the detected light intensity and its corresponding time to the single-chip microcomputer for data processing.
由于本发明基于共振光隧穿效应,所用质量块尺寸控制在微米级别,质量块的结构参考附图3。所述质量块可拆分为两相同折射单元、共振单元和两个连接单元。质量块的两折射单元对称设置,其形成的共振单元宽度为gλ且两谐振腔(隧穿层)的宽度均为dλ。所述质量块制作材料选择硅,其折射率为nsi=3.42(适用于红外入射光),采用一体成型的标准硅工艺完成,包括以下步骤:Since the present invention is based on the resonant optical tunneling effect, the size of the mass used is controlled at the micron level, and the structure of the mass is referred to in Fig. 3 . The mass block can be divided into two identical refraction units, a resonance unit and two connection units. The two refraction units of the proof mass are arranged symmetrically, the width of the resonant unit formed by them is g λ and the width of the two resonant cavities (tunneling layers) is d λ . The mass block is made of silicon, whose refractive index is n si =3.42 (suitable for infrared incident light), and is completed by an integrally formed standard silicon process, including the following steps:
S1:选取硅片作为材料,并对硅片进行清洗、烘干;S1: Select silicon wafers as materials, and clean and dry the silicon wafers;
S2:在硅片上旋涂上光刻胶,然后将硅片和刻有角加速度检测器整体结构图案的掩膜板固定;S2: Spin-coat photoresist on the silicon wafer, and then fix the silicon wafer and the mask plate engraved with the overall structural pattern of the angular acceleration detector;
S3:对固定好的硅片进行充分曝光;S3: fully exposing the fixed silicon wafer;
S4:曝光结束后,对硅片上的光刻胶进行显影;S4: After the exposure is over, develop the photoresist on the silicon wafer;
S5:对硅片进行刻蚀处理之后进行清洗,形成角加速度检测器所需的整体结构;S5: cleaning the silicon wafer after etching to form the overall structure required by the angular acceleration detector;
所述的整体结构指的是检测器除光源和光电探测器之外的其他结构。The overall structure refers to other structures of the detector except the light source and the photodetector.
由于本发明的角加速度检测器基于共振光隧穿效应,检测器的尺寸在微米级别,适宜于采用硅片整体制作。其中弹性悬臂梁的结构不限于附图所示的结构,本领域技术人员可以根据模态仿真结果,对弹性悬臂梁的宽度、宽度变化、性状等进行合理设计。Since the angular acceleration detector of the present invention is based on the resonant light tunneling effect, the size of the detector is at the micron level, which is suitable for integral production of silicon wafers. The structure of the elastic cantilever beam is not limited to the structure shown in the drawings, and those skilled in the art can reasonably design the width, width change, and properties of the elastic cantilever beam according to the modal simulation results.
基于本发明的检测角加速度的原理和检测器的结构,采用其他合适的材料制作成的检测器也在本申请的保护范围内。例如,检测器的框架和悬臂梁的材料并不限于硅,也不一定要与质量块的材质相同,与光的传播没有关系,之要能够实现各自的功能就可以了。Based on the principle of detecting angular acceleration and the structure of the detector of the present invention, detectors made of other suitable materials are also within the protection scope of the present application. For example, the material of the frame of the detector and the cantilever beam is not limited to silicon, nor does it have to be the same as that of the proof mass, and has nothing to do with the propagation of light, as long as they can realize their respective functions.
质量块的材质也不限于硅片,只是硅片的刻蚀工艺更加成熟,材料成本和加工成本更低,因此,质量块的材质不应成为限制本申请保护范围的因素。The material of the mass block is not limited to silicon wafers, but the etching process of silicon wafers is more mature, and the material cost and processing cost are lower. Therefore, the material of the mass block should not be a factor limiting the scope of protection of this application.
同样的,仅有质量块为硅材质的情况下,也优选采用一体成型的标准硅工艺,如采用一片圆形的硅片刻蚀而成。这是由于结构的尺寸太小,按部件分别加工组合困难,也容易对光的传播产生较大的干扰,一体成型的影响则基本可以忽略。若有更先进的工艺可以分部制作所述的质量块,也不应影响本发明对质量块结构的保护。Similarly, in the case where only the mass block is made of silicon, it is also preferable to adopt an integrally formed standard silicon process, such as etching a circular silicon wafer. This is because the size of the structure is too small, it is difficult to process and combine parts separately, and it is easy to cause great interference to the propagation of light, and the influence of integral molding can basically be ignored. If there is a more advanced process that can make the mass block in parts, it should not affect the protection of the structure of the mass block in the present invention.
采用上述的角加速度检测器检测角加速度的方法,主要包括数据的采集和角加速度的计算。The method for detecting angular acceleration by using the above-mentioned angular acceleration detector mainly includes data collection and calculation of angular acceleration.
本发明一种基于共振光隧穿效应的角加速度检测器,所采用的原理是基于共振光隧穿效应。其中,入射光线以倏逝波的形式进入谐振腔中,并在谐振腔中共振,在输出端可以检测到系统的透射光。The invention is an angular acceleration detector based on the resonant light tunneling effect, and the adopted principle is based on the resonant light tunneling effect. Among them, the incident light enters the resonant cavity in the form of evanescent wave, and resonates in the resonant cavity, and the transmitted light of the system can be detected at the output end.
1、角加速度检测器对角加速度的检测;1. The angular acceleration detector detects the angular acceleration;
当角加速度检测器承受向左旋转加速度时,质量块相对外框向左旋转移动,旋转角度量检测参考图4(俯视状态图):When the angular acceleration detector is subjected to a leftward rotation acceleration, the mass block rotates to the left relative to the outer frame, and the rotation angle measurement refers to Figure 4 (top view state diagram):
初始静止状态:以所述质量块的中心为坐标系原点,建立X-Y轴坐标系。固定可见光源,入射光线方向始终与水平方向正向(即X轴正向)夹角为β(当角加速度检测器向左旋转移动时,该角加速度检测器各部分结构相对位置不变,可保证入射光线的方向不变)。入射偏振光线经折射后以大于临界角的角度α0入射,其以倏逝波的状态耦合(或者说传输)进共振腔,并在共振腔内形成共振效应,并穿过质量块传播,最后由光电探测器检测到输出光强度。Initial static state: take the center of the mass block as the origin of the coordinate system to establish an XY axis coordinate system. Fix the visible light source, and the angle between the direction of the incident light and the positive direction of the horizontal direction (that is, the positive direction of the X-axis) is β (when the angular acceleration detector rotates to the left, the relative position of each part of the angular acceleration detector remains unchanged, and can be ensure that the direction of the incident light remains the same). The incident polarized light is incident at an angle α 0 greater than the critical angle after being refracted, and it is coupled (or transmitted) into the resonant cavity in the state of evanescent wave, and forms a resonance effect in the resonant cavity, and propagates through the mass block, and finally The output light intensity is detected by a photodetector.
关于图4的解释:由于隧传层与折射单元以及共振单元的界面均平行于X轴,且折射单元的外轮廓属于质量块的外圆,隧穿层与折射单元界面上发生的折射,折射前后的角度变化与折射单元为半圆的情况(即图4所示的情况)相同,仅相当于折射界面的平移。为了使附图线条更加清晰,便于理解,故以图4作为参考示意图。以下图5的情况与图4相同。Explanation for Figure 4: Since the interfaces between the tunneling layer and the refraction unit and the resonance unit are parallel to the X-axis, and the outer contour of the refraction unit belongs to the outer circle of the proof mass, the refraction and refraction occurring on the interface between the tunneling layer and the refraction unit The front and rear angle changes are the same as the case where the refraction unit is a semicircle (that is, the case shown in FIG. 4 ), which is only equivalent to the translation of the refraction interface. In order to make the lines of the drawings clearer and easier to understand, FIG. 4 is taken as a reference schematic diagram. The situation of FIG. 5 below is the same as that of FIG. 4 .
角加速度变化运动状态:在角加速度发生变化后,弹性悬臂梁带动质量块引起左旋转角度变化量Δθ。此时,因质量块相对外框旋转,半圆棱镜表面入射光斑的位置发生变化。通过几何关系,角度变化量可以表示为下式:Angular acceleration change motion state: After the angular acceleration changes, the elastic cantilever beam drives the mass block to cause the left rotation angle change Δθ. At this time, due to the rotation of the proof mass relative to the outer frame, the position of the incident light spot on the surface of the semicircular prism changes. Through the geometric relationship, the angular variation can be expressed as the following formula:
Δθ=α0-α1 (1)Δθ=α 0 -α 1 (1)
其中,α0为某一时刻的入射角,α1为下一时刻的入射角;所述入射角指的是光线从折射单元中进入隧穿层时在二者的界面发生折射的入射角(如图4、图5所示);Wherein, α 0 is the angle of incidence at a certain moment, and α 1 is the angle of incidence at the next moment; the angle of incidence refers to the angle of incidence at which light refracts at the interface between the two when the light enters the tunneling layer from the refraction unit ( As shown in Figure 4 and Figure 5);
上述所采用的角度变化量检测方法同样适用于右旋转角度变化量检测。右旋转角度变化量参考图5,与左旋转角度量检测不同之处在于:质量块相对外框出现右旋转后,偏振光线经折射后的入射角度将由α0增大为α1(α1仍大于临界角)。经过计算得到前后入射角度α0、α1与角度变化量Δθ(此时角度变化量为负值)仍满足关系式(1)。The angle variation detection method adopted above is also applicable to the detection of right rotation angle variation. Refer to Figure 5 for the amount of change in the right rotation angle, which is different from the detection of the left rotation angle in that: after the proof mass rotates to the right relative to the outer frame, the incident angle of the polarized light after refraction will increase from α 0 to α 1 (α 1 is still greater than the critical angle). After calculation, the front and rear incidence angles α 0 , α 1 and the angle variation Δθ (the angle variation is a negative value at this time) still satisfy the relationship (1).
2、透射光强度T与入射角度α存在以下关系2. There is the following relationship between the transmitted light intensity T and the incident angle α
质量块构成的共振光隧穿结构参考图6,由左至右包括输入单元、隧穿层、谐振腔(即共振单元)、隧穿层、输出单元。在此结构中,输入、输出单元为材料硅,其介电常数为ε0、ε4(即有ε0=ε4=εsi);隧穿层为空气层,介电常数为ε1、ε3(即有ε1=ε3=εair),隧穿层的宽度为d1、d3(即有d1=d3=dλ);共振单元为材料硅,其介电常数为ε2(即有ε2=εsi),宽度为d2(即有d2=gλ)。Referring to Figure 6, the resonant optical tunneling structure composed of mass blocks includes an input unit, a tunneling layer, a resonant cavity (ie, a resonant unit), a tunneling layer, and an output unit from left to right. In this structure, the input and output units are made of silicon, and their dielectric constants are ε 0 , ε 4 (that is, ε 0 = ε 4 = ε si ); the tunneling layer is an air layer, and their dielectric constants are ε 1 , ε 3 (that is, ε 1 =ε 3 =ε air ), the width of the tunneling layer is d 1 and d 3 (that is, there is d 1 =d 3 =d λ ); the resonant unit is made of silicon, and its dielectric constant is ε 2 (that is, there is ε 2 =ε si ), and the width is d 2 (that is, there is d 2 =g λ ).
当入射光以入射角度α入射时,根据传输矩阵理论,系统透射强度T与入射角度α存在以下关系:When the incident light is incident at the incident angle α, according to the transmission matrix theory, the transmission intensity T of the system has the following relationship with the incident angle α:
S偏振光: S polarized light:
P偏振光: P polarized light:
其中,在上式中m11、m12、m21、m22为传输矩阵M中元素,且满足关系式:Among them, in the above formula, m 11 , m 12 , m 21 , and m 22 are elements in the transmission matrix M, and satisfy the relationship:
在此传输矩阵M中,δk为相位因子,且有 为光导纳因子,且有 In this transmission matrix M, δ k is the phase factor, and there is is the optical admittance factor, and has
上述的一种基于共振光隧穿效应的角加速度检测方法,在加速传感过程中,实现角变化量检测的方法描述为:质量块由于左右旋转运动出现角度变化量Δθ,由式(1)可知,因质量块位置的左右旋转将引起入射角α变化。此时,入射光以不同入射角α入射,并以倏逝波形式穿过质量块,从而得到不同的光透射强度T,即角度变化量Δθ与光透射强度T存在确定曲线关系。根据Δθ-T曲线关系,以监测到的透射强度T获得角度变化量Δθ,再而可检测出角加速度。In the above-mentioned angular acceleration detection method based on the resonant light tunneling effect, in the process of acceleration sensing, the method for realizing the detection of the angular variation is described as: the angular variation Δθ of the mass due to the left-right rotation movement is expressed by formula (1) It can be seen that the left and right rotation of the mass block will cause the change of the incident angle α. At this time, the incident light is incident at different incident angles α, and passes through the mass block in the form of evanescent waves, so as to obtain different light transmission intensities T, that is, there is a definite curve relationship between the angle change Δθ and the light transmission intensity T. According to the Δθ-T curve relationship, the angular variation Δθ is obtained from the monitored transmission intensity T, and then the angular acceleration can be detected.
同时,可以根据透射光强度T与入射角α和角度变化量Δθ之间的对应关系,以及现有技术角加速度计算理论,计算出透射光强度T对应的角加速度值,或者得出透射光强度T与角加速度的关系曲线,在检测角加速度时,就能够根据曲线和检测到的透射光强度T,得出对应的角加速度。At the same time, the angular acceleration value corresponding to the transmitted light intensity T can be calculated according to the corresponding relationship between the transmitted light intensity T and the incident angle α and the angular change Δθ, as well as the prior art angular acceleration calculation theory, or the transmitted light intensity can be obtained The relationship curve between T and angular acceleration, when the angular acceleration is detected, the corresponding angular acceleration can be obtained according to the curve and the detected transmitted light intensity T.
与现有技术相比本发明具有以下优点:Compared with the prior art, the present invention has the following advantages:
1、光线以大于/等于全反射角入射到玻璃棱镜/低折射率层界面,以倏逝波的形式进入谐振腔,不同于传统的法珀谐振腔,后者光线以小于全反射角的入射角进入谐振腔,在谐振腔内以传输波的形式在谐振腔内振荡。同传输波相比,倏逝波对入射角度的变化更为敏感。1. The light is incident on the glass prism/low refractive index layer interface at an angle greater than/equal to the total reflection, and enters the resonator in the form of an evanescent wave, which is different from the traditional Fab resonator, where the light is incident at an angle less than the total reflection The horn enters the resonant cavity, where it oscillates in the resonant cavity in the form of a transmitted wave. Evanescent waves are more sensitive to changes in the angle of incidence than propagating waves.
2、微位移量的测量更精确,其原因是微弱入射角度量的变化将会引起透射强度T大的变化量。以监测到的光透射强度的变化获得入射角度变化量大小,使Δθ的测量准确性得到了很大提升。2. The measurement of the micro-displacement is more accurate, because the change of the weak incident angle will cause a large change of the transmission intensity T. The magnitude of the variation of the incident angle is obtained from the monitored change of the light transmission intensity, so that the measurement accuracy of Δθ is greatly improved.
3、本设计结构简单,制作难度低,并且可大规模生产,成本较低。3. The design is simple in structure, low in production difficulty, and can be mass-produced with low cost.
附图说明Description of drawings
下面结合附图对本实用新型作进一步说明。Below in conjunction with accompanying drawing, the utility model is further described.
图1为本发明的角加速度检测器的平面图。Fig. 1 is a plan view of an angular acceleration detector of the present invention.
图2为本发明的角加速度检测器的侧视图。Fig. 2 is a side view of the angular acceleration detector of the present invention.
图3为质量块核心结构示意图。Fig. 3 is a schematic diagram of the core structure of the mass block.
图4为质量块核心结构(上折射单元)左旋转入射角度变化示意图。Fig. 4 is a schematic diagram of the variation of the incident angle of the core structure of the proof mass (upper refraction unit) in left rotation.
图5为质量块核心结构(上折射单元)右旋转入射角度变化示意图。Fig. 5 is a schematic diagram of changes in the incident angle of right rotation of the core structure of the proof mass (upper refraction unit).
图6为共振光隧穿结构示意图。FIG. 6 is a schematic diagram of a resonant light tunneling structure.
图7为基于固定位置偏振光照射下,系统透射强度T与旋转角度变化量Δθ曲线图。FIG. 7 is a graph of the transmission intensity T of the system and the variation of the rotation angle Δθ under the irradiation of polarized light at a fixed position.
图中:1为环形固定框,2为弹性悬臂梁,3为质量块,4为折射单元,5为连接单元,6为共振单元,7为光源,8为光电探测器。In the figure: 1 is an annular fixed frame, 2 is an elastic cantilever beam, 3 is a mass block, 4 is a refraction unit, 5 is a connection unit, 6 is a resonance unit, 7 is a light source, and 8 is a photodetector.
具体实施方式Detailed ways
以下结合具体实施例对本发明作进一步说明。The present invention will be further described below in conjunction with specific examples.
实施例1Example 1
如图1-3所示,一种基于共振光隧穿效应的角加速度检测器,包括环形固定框1、弹性悬臂梁2和质量块3,As shown in Figures 1-3, an angular acceleration detector based on the resonant light tunneling effect includes an annular fixed frame 1, an elastic cantilever beam 2 and a mass block 3,
所述质量块3由折射单元4、连接单元5和共振单元6组成,折射单元4和连接单元5的数量均为两个,共振单元6和两个连接单元5连接组成工字形结构,两个连接单元5为工字形结构的两条平行梁,两个折射单元4的方形面相对并通过该工字形结构连接,共振单元6与折射单元4的方形面平行;折射单元4、连接单元5和共振单元6之间构成两个空隙为两个隧穿层;所述质量块3由一片圆形的硅片刻蚀而成;所述两个折射单元4的外轮廓的曲线属于同一个圆;The mass block 3 is composed of a refraction unit 4, a connection unit 5 and a resonance unit 6, the number of the refraction unit 4 and the connection unit 5 is two, the resonance unit 6 and the two connection units 5 are connected to form an I-shaped structure, and two The connection unit 5 is two parallel beams of an I-shaped structure, the square faces of the two refraction units 4 are opposite and connected by the I-shaped structure, the resonance unit 6 is parallel to the square faces of the refraction unit 4; the refraction unit 4, the connection unit 5 and the Two gaps are formed between the resonance units 6 as two tunneling layers; the mass block 3 is etched from a circular silicon wafer; the curves of the outer contours of the two refraction units 4 belong to the same circle;
所述弹性悬臂梁2有四个,四个弹性悬臂梁2成十字分布,一端分别连接在两个折射单元4的弧形面中央和两个连接单元5的外侧中央,另一端固定在环形固定框1的内壁上;并且静止状态下质量块3的重心与环形固定框1的重心重合;There are four elastic cantilever beams 2, and the four elastic cantilever beams 2 are distributed in a cross, one end is respectively connected to the center of the arc surface of the two refraction units 4 and the outer center of the two connection units 5, and the other end is fixed on a ring-shaped fixed on the inner wall of the frame 1; and the center of gravity of the mass block 3 coincides with the center of gravity of the annular fixed frame 1 in a static state;
所述环形固定框1上还固定有光源7和光电探测器8;所述光源7和光电探测器8的固定位置及角度需要满足的条件为:光源7发射的光线经一个折射单元4的曲面折射后,在该折射单元4的平面上以大于全反射角的角度入射,以倏逝波的形式进入谐振腔,在其中共振后,再经过另一折射单元4被光电探测器8接收。A light source 7 and a photodetector 8 are also fixed on the annular fixed frame 1; the fixed position and angle of the light source 7 and the photodetector 8 need to satisfy the condition that the light emitted by the light source 7 passes through the curved surface of a refraction unit 4 After refraction, it is incident on the plane of the refraction unit 4 at an angle greater than the total reflection angle, enters the resonant cavity in the form of evanescent waves, resonates there, and then passes through another refraction unit 4 to be received by the photodetector 8 .
实施例2Example 2
以实施例1的角加速度检测器为例,所用可调光源相对外边框位置固定不变,可调光源的入射光波长为1550nm,入射光为P(或S)偏振光,入射方向相对保持不变;所述弹性悬臂梁2有四个,四个弹性悬臂梁成十字分布,一端分别连接在质量块3的外表面四周,另一端固定在固定框1的内壁上;Taking the angular acceleration detector of Embodiment 1 as an example, the position of the adjustable light source relative to the outer frame is fixed, the incident light wavelength of the adjustable light source is 1550nm, and the incident light is P (or S) polarized light, and the incident direction is relatively kept constant. There are four elastic cantilever beams 2, the four elastic cantilever beams are distributed in a cross, one end is respectively connected around the outer surface of the mass block 3, and the other end is fixed on the inner wall of the fixed frame 1;
所述质量块制作材料选择硅,其折射率为nsi=3.42(适用于红外入射光),采用一体成型的光刻技术完成;所用光电探测器相对外边框位置固定不变,光电探测器的响应波段应包括光源波长。入射光线穿过质量块后形成光透射强度T与旋转角度变化量Δθ曲线图T-Δθ。当有角加速度变化引起角度变化量Δθ变化时,透射强度T将随之变化,通过检测透射强度T变化量即可分析出变化量Δθ。而在上述发明中,透射强度T与角度变化量Δθ的关系式与曲线图已经详细给出。The mass block is made of silicon, whose refractive index is n si =3.42 (suitable for infrared incident light), and is completed by integrated photolithography technology; the position of the photodetector relative to the outer frame is fixed, and the photodetector The response band shall include the source wavelength. After the incident light passes through the mass block, a graph T-Δθ of the light transmission intensity T and the variation of the rotation angle Δθ is formed. When the change in angular acceleration causes the angle change Δθ to change, the transmission intensity T will change accordingly, and the change Δθ can be analyzed by detecting the change in the transmission intensity T. In the above invention, the relational formula and graph of the transmission intensity T and the angle variation Δθ have been given in detail.
在本发明的一个示例性实施例中,以质量块左右旋转为例说明,旋转角度变化量范围控制在±0.05度以内。入射光为P(或S)偏振光,入射光波长λ为1550nm。入射偏振光线经折射后初始入射角度为α0(因质量块选用材料硅,硅折射率为3.42,所以根据斯涅耳折射定律得到临界角θc为17.0016度,则α0应大于此值,在本示例性实施例中选取入射角度α0为17.9516度,即以大于临界角θc值0.95度入射)。所采用的质量块折射率为nsi=3.42,选用共振单元6宽度为gλ=15.622um(若入射光为S偏振光,gλ=15.503um),空气层宽度dλ=2280nm,且空气折射率为1。根据以上条件,通过仿真计算,光透射强度T随角度变化量Δθ的变化曲线(拟合曲线)如图7所示。In an exemplary embodiment of the present invention, taking the left and right rotation of the proof mass as an example, the variation range of the rotation angle is controlled within ±0.05 degrees. The incident light is P (or S) polarized light, and the wavelength λ of the incident light is 1550nm. The initial incident angle of the incident polarized light after refraction is α 0 (Since the quality block is made of silicon, the refractive index of silicon is 3.42, so according to Snell’s law of refraction, the critical angle θ c is 17.0016 degrees, then α 0 should be greater than this value, In this exemplary embodiment, the incident angle α 0 is selected as 17.9516 degrees, that is, the incident angle is 0.95 degrees greater than the value of the critical angle θc ). The refractive index of the mass block used is n si =3.42, the width of the resonance unit 6 is selected to be g λ =15.622um (if the incident light is S polarized light, g λ =15.503um), the air layer width d λ =2280nm, and the air The refractive index is 1. According to the above conditions, through simulation calculation, the variation curve (fitting curve) of the light transmission intensity T with the angular variation Δθ is shown in FIG. 7 .
参考图7,在该曲线图中可观察到,对于P偏振光,质量块右旋转变化0.05度(即入射角度变化量Δθ为+0.05度)引起透射强度T上升大约25dB,质量块左旋转变化0.05度(即入射角度变化量Δθ为-0.05度)引起透射强度T下降大约5dB;对于S偏振光,质量块右旋转变化0.05度(即入射角度变化量Δθ为+0.05度)引起透射强度T上升大约50dB,质量块左旋转变化0.05度(即入射角度变化Δθ大约-0.05度)引起透射强度T下降大约5dB。由此可以看出,在P偏振光入射及质量块旋转±0.05度范围下,该检测器能够检测到的输出光强度为输入光强度的10-3,在S偏振光入射及质量块旋转±0.05度范围下,该检测器能够检测到的输出光强度为输入光强度的10-5,远远优于相同测试条件下利用经典F-P谐振腔的10-1.5。Referring to Fig. 7, it can be observed in the graph that for P-polarized light, the right rotation of the proof mass changes by 0.05 degrees (that is, the incident angle variation Δθ is +0.05 degrees) causes the transmission intensity T to rise by about 25 dB, and the left rotation of the proof mass changes 0.05 degrees (that is, the incident angle change Δθ is -0.05 degrees) causes the transmission intensity T to drop by about 5dB; for S polarized light, the right rotation of the proof mass changes by 0.05 degrees (that is, the incident angle change Δθ is +0.05 degrees) causes the transmission intensity T Rising about 50dB, a change of 0.05 degrees in the left rotation of the proof mass (that is, a change in the incident angle Δθ of about -0.05 degrees) causes the transmission intensity T to drop by about 5dB. It can be seen from this that, in the range of P-polarized light incident and mass block rotation ±0.05 degrees, the output light intensity that the detector can detect is 10 -3 of the input light intensity, and in the range of S-polarized light incident and mass block rotation ± In the range of 0.05 degrees, the output light intensity that the detector can detect is 10 -5 of the input light intensity, far better than the 10 -1.5 of the classical FP resonant cavity under the same test conditions.
在相同测试条件下,以角度变化量Δθ值为±0.05度为界,选取相对于S偏振曲线变化较慢的P偏振曲线与经典F-P谐振腔曲线比较,发现P偏振曲线变化率仍明显高于F-P谐振腔曲线,由此可知该发明具有更高的优越性。Under the same test conditions, with the angular change Δθ value of ±0.05 degrees as the limit, select the P polarization curve that changes slowly relative to the S polarization curve and compare it with the classic F-P resonator curve. It is found that the change rate of the P polarization curve is still significantly higher than that of F-P resonant cavity curve, it can be known that this invention has higher superiority.
在实际应用中,本设计将利用原型机开展实验,得到透射光强度与入射角度之间的数值对应关系(理论曲线如图7,将其离散化),并将其以二维表的形式存储到微处理器中。另外,对S偏振或P偏振光入射下生成的其右边变化较快的关系曲线可选择存储更密集的点,传感器在此区间可获得更高的灵敏度。在将此二维表存入微处理器后,根据传感器的检测器得到透射光强度后,利用查表的方法得到旋转角度变化值。除此之外,该检测器的灵敏度也会受到光源强度以及光电探测器的影响。In practical applications, this design will use the prototype to carry out experiments to obtain the numerical correspondence between the transmitted light intensity and the incident angle (the theoretical curve is shown in Figure 7, which is discretized), and store it in the form of a two-dimensional table into the microprocessor. In addition, more dense points can be stored for the relationship curve on the right side that changes faster generated under the incidence of S-polarized or P-polarized light, and the sensor can obtain higher sensitivity in this interval. After the two-dimensional table is stored in the microprocessor, the transmitted light intensity is obtained according to the detector of the sensor, and the change value of the rotation angle is obtained by using the method of looking up the table. In addition, the sensitivity of the detector is also affected by the intensity of the light source and the photodetector.
本发明可用其他的不违背本发明的精神或主要特征的具体形式来概述。因此,无论从哪一点来看,本发明的上述实施方案都只能认为是对本发明的说明而不能限制发明,权利要求书指出了本发明的范围,而上述的说明并未指出本发明的范围,因此,在与本发明的权利要求书相当的含义和范围内的任何变化,都应认为是包括在权利要求书的范围内。The present invention may be embodied in other specific forms without departing from the spirit or main characteristics of the invention. Therefore, no matter from which point of view, the above-mentioned embodiments of the present invention can only be considered as explanations of the present invention and can not limit the invention. The claims indicate the scope of the present invention, but the above description does not indicate the scope of the present invention. Therefore, any changes within the meaning and scope equivalent to the claims of the present invention should be considered to be included in the scope of the claims.
Claims (4)
- A kind of 1. angular acceleration detector based on resonance light tunneling effect, it is characterised in that:Including annular fixed frame (1), bullet Property cantilever beam (2) and mass (3),The mass (3) is made up of refractive elements (4), connection unit (5) and resonating member (6), refractive elements (4) and connection The quantity of unit (5) is two, resonating member (6) and two connection unit (5) connection composition I-shape constructions, two connections Unit (5) is two parallel girders of I-shape construction, and the square face of two refractive elements (4) is relative and passes through the I-shape construction Connection, resonating member (6) are parallel with the square face of refractive elements (4);Refractive elements (4), connection unit (5) and resonating member (6) it is two tunnel layers that two spaces are formed between;The curve of the outline of described two refractive elements (4) belongs to same Circle;The elastic cantilever (2) has four, and for four elastic cantilevers (2) into cross distribution, one end is connected to two foldings The arcwall face center of unit (4) and the outside center of two connection units (5) are penetrated, the other end is fixed on annular fixed frame (1) On inwall;And the center of gravity of mass (3) overlaps with the center of gravity of annular fixed frame (1) under inactive state;Light source (7) and photodetector (8) are further fixed on the annular fixed frame (1);The light source (7) and photodetector (8) condition that fixed position and angle need to meet is:Curved surface of the light through a refractive elements (4) of light source (7) transmitting It is incident with the angle more than the angle of total reflection in the plane of the refractive elements (4) after refraction, resonance is entered in the form of evanescent wave Chamber, after resonating wherein, then by another refractive elements (4) by photodetector (8) reception.
- A kind of 2. angular acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that:Institute The curve for stating the outline of two refractive elements (4) and two connection units (5) forms a complete circle.
- A kind of 3. angular acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that angle Acceleration detector overall structure is completed using integrally formed standard silicon process, is comprised the following steps:Silicon chip is chosen as material, and silicon chip is cleaned, dried;The photoresist in spin coating on silicon chip, then silicon chip and the mask plate for having angular acceleration detector overall structure pattern are consolidated It is fixed;The silicon chip fixed is fully exposed;After end exposure, the photoresist on silicon chip is developed;Processing is performed etching to silicon chip to clean afterwards, forms the overall structure needed for angular acceleration detector;The overall structure of angular acceleration detector is referred to by annular fixed frame (1), elastic cantilever (2) and mass (3) group Into frame structure.
- 4. utilize the detection method of the angular acceleration detector described in claim 1 or 2, it is characterised in that comprise the following steps:1) determination of a certain instantaneous incident angle αThe transmitted intensity T that photodetector (8) detects is necessarily corresponding with the incident angle α of a certain instantaneous incident light, and two Following relation be present in person:If incident light is S-polarization light:If incident light is P polarization light:ε is dielectric constant, by the refractive elements (4) of incident light beam strikes, the tunnel layer for closing on incident light, resonating member (6), is closed on The dielectric constant of the tunnel layer of transmitted light and the refractive elements (4) of transmitted light is followed successively by ε0、ε1、ε2、ε3、ε4, and refractive elements (4) and the material of resonating member (6) is silicon, therefore ε0=ε2=ε4=εsi, tunnel layer is air layer, therefore ε1=ε3=εair;Close on The width of the tunnel layer of incident light is d1, the width for closing on the tunnel layer of transmitted light is d3, the width of resonating member (6) is d2;Formula Middle m11、m12、m21、m22For element in transmission matrix M, and meet relational expression:<mrow> <mi>M</mi> <mo>=</mo> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <msub> <mi>m</mi> <mn>11</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>12</mn> </msub> </mtd> </mtr> <mtr> <mtd> <msub> <mi>m</mi> <mn>21</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>22</mn> </msub> </mtd> </mtr> </mtable> </mfenced> <mo>=</mo> <msub> <mi>M</mi> <mn>1</mn> </msub> <msub> <mi>M</mi> <mn>2</mn> </msub> <msub> <mi>M</mi> <mn>3</mn> </msub> <mo>=</mo> <munderover> <mi>&Pi;</mi> <mrow> <mi>k</mi> <mo>=</mo> <mn>1</mn> </mrow> <mn>3</mn> </munderover> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <mrow> <msub> <mi>cos&delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> <mtd> <mfrac> <mrow> <msub> <mi>isin&delta;</mi> <mi>W</mi> </msub> </mrow> <msub> <mi>&eta;</mi> <mi>k</mi> </msub> </mfrac> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>i&eta;</mi> <mi>k</mi> </msub> <msub> <mi>sin&delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> <mtd> <mrow> <msub> <mi>cos&delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> </mtr> </mtable> </mfenced> </mrow>In this transmission matrix M, δwFor phase factor, and have(w=1,2,3);ηkFor light The admittance factor, when incident ray is S-polarization light,When incident ray is P polarization light,And there is optical admittance The factorThe optical admittance factor(k=0,1,2,3,4);The quality Block making material selects silicon, silicon refractive index nsi=3.42;The value of incident angle α is can determine according to above-mentioned transmitted intensity T and incident angle α relational expression;2) angle variable quantity Δ θ determinationUsing the center of circle of the refractive elements (4) of the incident light beam strikes of mass (3) as coordinate origin, X-Y axis coordinate systems are established;Then angle shifting variation delta θ meets relationship below:Δ θ=α0-α1Wherein, α0For the incidence angle at a certain moment, α1For the incidence angle of subsequent time;The incidence angle refers to light from refraction The incidence angle reflected when entering tunnel layer in unit (4) at the interface of the two;According to 1) and 2), it is known that between the transmitted intensity T and incident angle α and angle variable quantity Δ θ of photodetector (8) detection Relation, can be calculated according to existing angular acceleration theoretical, calculate angular acceleration values corresponding to transmitted intensity T, or Go out the relation curve of transmitted intensity T and angular acceleration.
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