CN105319394B - A kind of angular acceleration detector and detection method based on resonance light tunneling effect - Google Patents
A kind of angular acceleration detector and detection method based on resonance light tunneling effect Download PDFInfo
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Abstract
The present invention relates to the angular acceleration detector made based on resonance light tunneling effect principle and detection method；A kind of the characteristics of utilizing high-resolution in resonance light tunneling effect principle is proposed, measures the angular acceleration detector of the new structure of angular acceleration；Used technical scheme is：A kind of angular acceleration detector based on resonance light tunneling effect, including annular fixed frame, elastic cantilever and mass, tunable light source and photodetector, intensity in transmission will be caused using change of the resonance light tunneling effect to the faint shifting amount of massTBig variable quantity is detected, and is obtained angle variable quantity size with the change of the light transmission intensity monitored, is realized the accurate measurement to micro- angle variable quantity.
Description
Technical field
The present invention relates to angular acceleration detector, and in particular to the angular acceleration made based on resonance light tunneling effect principle
Detector and detection method.
Background technology
At present, angular accelerometer is the inertial sensor for measuring moving object angular acceleration, applied to many
Aspect, such as state of flight and machine of the overturning early warning detection means of automobile to protect passenger safety, detect aircraft
People's design etc..Under microelectromechanical systems (MEMS) technology high-speed development condition, micro-mechanical gyroscope just towards low-power consumption, easily
The directions such as integrated, miniaturization, high sensitivity, low cost are developed.But because micromechanics is theoretical and technology imperfection, micromechanical gyro
The inertial sensor of instrument low precision in still falling within.Drift error, machining accuracy are micro- as restricting wherein as caused by environment temperature
The key factor of mechanical gyroscope development.In the case where optical technology is constantly progressive, cut using optical method for measuring angular acceleration
It is real feasible, such as fibre optic gyroscope.Fibre optic gyroscope utilizes Sagnac effects, is produced according to the two row light waves propagated in opposite directions in light path
Optical path difference and the inner link of turning rate determine turning rate.Compared with micro-mechanical gyroscope, fibre optic gyroscope because
Its impact resistance, service life is long, can open in wink, the advantages that detection sensitivity is high, dynamic range scope is big and be applied to more areas.
But the core component fiber optic loop of fibre optic gyroscope, because the thermal stress being subject at different temperatures is different, to the temperature of fibre optic gyroscope
Degree performance impact is very big, so that the accuracy measurement of angular acceleration is limited.
The basic thought of micro-mechanical gyroscope design is to utilize Coriolis force phenomenon, and fibre optic gyroscope is imitated using Sagnac
Angular speed should be measured.It is different from, present invention proposition angular acceleration detection method realizes that thought is to utilize resonance light tunnel substantially
Effect is worn, the size and Orientation of angular acceleration is obtained by detecting mass angle change caused by angular acceleration, is realized
High-acruracy survey angular acceleration.Resonance light tunneling effect is based on optics tunneling effect (frustrated total internal reflection).Optics tunnelling
When effect refers to light and is irradiated to low refractive index dielectric bed boundary by high refractive index medium bed boundary, in low refractive index dielectric thickness degree
Under the conditions of lambda1-wavelength, light will be through the interface of total reflection generation, i.e., can not through light in classical geometric optics
" barrier " passed through, form transmission (tunnelling ray).Resonance light tunneling effect refers to incident ray after incidence angle is more than critical angle,
Low refractive index dielectric thickness degree can be in the case of more than lambda1-wavelength, and incident ray is formed in micron or nanocomposite optical chamber
Resonance effects.In resonance light tunneling effect, the intensity in transmission of system changes very sensitive, profit to the incident angle of incident light source
With this condition, to measure, angular acceleration can be greatly enhanced the sensitivity technique of angular acceleration and accuracy measures.Meanwhile this
Device available standards silicon technology is processed designed by invention, can improve its production efficiency, and reduce cost.Meanwhile the present invention
Designed device available standards silicon technology is processed, and can improve its production efficiency, and reduce cost.
The content of the invention
The present invention proposes a kind of the characteristics of utilizing high-resolution in resonance light tunneling effect principle, measures angular acceleration
New acceleration detector.
In order to solve the above technical problems, the technical solution adopted in the present invention is：It is a kind of based on resonance light tunneling effect
Angular acceleration detector, including annular fixed frame, elastic cantilever and mass,
The mass is made up of refractive elements, connection unit and resonating member, the quantity of refractive elements and connection unit
It it is two, resonating member and two connection unit connection composition I-shape constructions, two connection units are I-shape construction
Two parallel girders, the square face of two refractive elements is relative and is connected by the I-shape construction, resonating member and refractive elements
Square face it is parallel；It is two tunnel layers that two spaces are formed between refractive elements, connection unit and resonating member；It is described two
The curve of the outline of refractive elements belongs to same circle；
The elastic cantilever has four, and for four elastic cantilevers into cross distribution, one end is connected to two refractions
The arcwall face center of unit and the outside center of two connection units, the other end are fixed on the inwall of annular fixed frame；And
The center of gravity of mass overlaps with the center of gravity of annular fixed frame under inactive state；
Light source and photodetector are further fixed on the annular fixed frame；The fixed bit of the light source and photodetector
Put and angle needs the condition that meets to be：The light of light source transmitting is after the curved refractive of a refractive elements, in the refraction list
It is incident with the angle more than the angle of total reflection in the plane of member, resonator is entered in the form of evanescent wave, after resonating wherein, then is passed through
Another refractive elements are crossed to be received by a photoelectric detector.
Mass is connected by elastic cantilever inside the annular fixed frame, is fixed with the framework of annular fixed frame
Light source and photodetector；Whole detector is installed by annular fixed frame.
Although the effect of connection unit is only connection refractive elements and resonating member, and collectively forms two tunnellings with the two
Layer, the shape of the lateral profile of connection unit on the function of mass without influence, but because mass is to use a piece of circle
Silicon chip erosion form, in order to reduce the workload of etching, the lateral profile curve of connection unit and the outboard wheel of refractive elements
Wide curve preferably constitutes circle as shown in figures 1 and 3.
Elastic cantilever structural reference Fig. 1 used, spring beam used totally 4, is respectively arranged at outer rim and quality used
In clearance space between block, effect is to connect annular fixed frame and mass, the sky for alloing mass to be surrounded in fixed frame
It is interior freely to rotate, and in inactive state parking position accuracy；Detector using a rotary shaft as axle (perpendicular to following X/Y planes,
It is the center of circle of mass) when rotating, mass is under spring beam support, and relative housing rotates in Fig. 1 planes, and in angle acceleration
After degree effect, support mass position is restored.
Light source and photodetector are further fixed on the fixed frame；The fixed position of the light source and photodetector and
Angle needs the condition that meets to be：The light of light source transmitting is after the curved refractive of upper refractive elements, in the tunnel of the refractive elements
It is incident with the angle more than the angle of total reflection to wear square face on layer, resonator (i.e. resonating member) is entered in the form of evanescent wave,
And covibration is formed wherein, then pass through another refractive elements again, be received by a photoelectric detector.
Mass is connected by elastic cantilever inside the fixed frame, light source and light are fixed with the framework of fixed frame
Electric explorer；Whole detector is installed by fixed frame.
Light source selects the adjustable light source of spatial distribution, can select monochromatic source.The light that light source is sent reaches quality
It is P or S-polarization light by polarizer control, but the relative incident direction of light should not be changed before block.
The effect of photodetector is transmitted ray of the reception from mass and detects light intensity, and the light intensity that will be detected
Time corresponding with its, which records and is transferred to single-chip microcomputer, carries out data processing.
Because the present invention is based on resonance light tunneling effect, mass size control used is in micron level, the knot of mass
Structure refer to the attached drawing 3.The mass is removable to be divided into the same refractive elements of two-phase, resonating member and two connection units.Mass
Two refractive elements are symmetrical arranged, and its resonating member width formed is gλAnd two the width of resonator (tunnel layer) be dλ.It is described
Mass making material selects silicon, and its refractive index is nsi=3.42 (being applied to infrared incident light), using integrally formed standard
Silicon technology is completed, and is comprised the following steps：
S1：Silicon chip is chosen as material, and silicon chip is cleaned, dried；
S2：The photoresist in spin coating on silicon chip, then silicon chip and angular acceleration detector overall structure pattern will be carved with
Mask plate is fixed；
S3：The silicon chip fixed is fully exposed；
S4：After end exposure, the photoresist on silicon chip is developed；
S5：Processing is performed etching to silicon chip to clean afterwards, forms the overall structure needed for angular acceleration detector；
Described overall structure refers to other structures of the detector in addition to light source and photodetector.
Because the angular acceleration detector of the present invention is based on resonance light tunneling effect, the size of detector in micron level,
It is suitable for using silicon chip integral manufacturing.The structure of wherein elastic cantilever is not limited to structure shown in the drawings, people in the art
Member can rationally design according to Modal Analysis result to the width of elastic cantilever, change width, character etc..
The principle of detection angular acceleration and the structure of detector based on the present invention, are fabricated to using other suitable materials
Detector also in the protection domain of the application.For example, the framework of detector and the material of cantilever beam are not limited to silicon, also not
Must be identical with the material of mass, it is not related with the propagation of light, will can realize respective function can.
The material of mass is also not necessarily limited to silicon chip, and simply the etching technics of silicon chip is more ripe, material cost and is processed into
This is lower, and therefore, the material of mass should not turn into the factor of limitation the application protection domain.
Likewise, in the case that only mass is silicon material, it is also preferred that using integrally formed standard silicon process, such as adopt
Formed with a piece of circular silicon chip erosion.This is due to that the size of structure is too small, processes combination difficulty respectively by part, also easily
Propagation to light produces larger interference, and integrally formed influence can then be ignored substantially.If there is more advanced technique to divide
Portion makes described mass, should not also influence protection of the present invention to mass block structure.
Using the method for above-mentioned angular acceleration detector detection angular acceleration, main collection and angle including data accelerate
The calculating of degree.
A kind of angular acceleration detector based on resonance light tunneling effect of the present invention, used principle is to be based on resonance light
Tunneling effect.Wherein, incident ray is entered in resonator in the form of evanescent wave, and is resonated in resonator, can in output end
To detect the transmitted light of system.
1st, the detection of angular acceleration detector angular acceleration；
When angular acceleration detector bears rotary acceleration to the left, mass is in rotary moving to the left with respect to housing, rotation
Angular metric is detected with reference to figure 4 (vertical view state figure)：
Initial rest state:Using the center of the mass as coordinate origin, X-Y axis coordinate systems are established.Fixation is visible
Light source, incident ray direction (i.e. X-axis forward direction) angle positive with horizontal direction all the time are β (when angular acceleration detector is to left-handed
When transfer is dynamic, the angular acceleration detector Each part relative position is constant, it is ensured that the direction of incident ray is constant).Enter
Polarization light is penetrated after refraction with the angle [alpha] more than critical angle0Incidence, it is entered with the state coupling (transmitting in other words) of evanescent wave
Resonant cavity, and resonance effects is formed in resonant cavity, and propagated through mass, output light is finally detected by photodetector
Intensity.
Explanation on Fig. 4：Because tunnel passes layer with the interface of refractive elements and resonating member each parallel to X-axis, and roll over
The outline for penetrating unit belongs to the cylindrical of mass, tunnel layer and the refraction occurred on refractive elements interface, reflects front and rear angle
Degree change is identical for the situation (situation i.e. shown in Fig. 4) of semicircle with refractive elements, just corresponds to the translation of refracting interface.In order to
Accompanying drawing lines are become apparent from, are readily appreciated, therefore reference view is used as using Fig. 4.The situation of figure 5 below is identical with Fig. 4.
Angular acceleration change motion state：After angular acceleration changes, elastic cantilever drives mass to cause a left side
Anglec of rotation variation delta θ.Now, because mass is relative to housing rotation, the position of semicircle prism surface launching spot becomes
Change.By geometrical relationship, angle variable quantity can be expressed as following formula：
Δ θ=α0-α1 (1)
Wherein, α0For the incidence angle at a certain moment, α1For the incidence angle of subsequent time；The incidence angle refer to light from
The incidence angle (as shown in Figure 4, Figure 5) reflected when entering tunnel layer in refractive elements at the interface of the two；
Angle change quantity measuring method is equally applicable to the detection of right rotation angle variable quantity used by above-mentioned.Dextrorotation corner
Variable quantity is spent with reference to figure 5, is with anticlockwise angular metric detection difference：After mass right rotation occurs with respect to housing, partially
Shaking incident angle of the light after refraction will be by α0It is increased to α1(α1Still greater than critical angle).By front and rear incidence angle is calculated
Spend α0、α1Still meet relational expression (1) with angle variable quantity Δ θ (now angle variable quantity is negative value).
2nd, there is following relation in transmitted intensity T and incident angle α
The resonance light tunneling structure that mass is formed is with reference to figure 6, from left to right including input block, tunnel layer, resonator
(i.e. resonating member), tunnel layer, output unit.In this structure, input, output unit are material silicon, and its dielectric constant is ε0、
ε4(there is ε0=ε4=εsi)；Tunnel layer is air layer, dielectric constant ε1、ε3(there is ε1=ε3=εair), the width of tunnel layer
For d1、d3(there is d1=d3=dλ)；Resonating member is material silicon, and its dielectric constant is ε2(there is ε2=εsi), width d2(i.e.
There is d2=gλ)。
Theoretical according to transmission matrix when incident light is with incident angle α incidences, system transmittance intensity T deposits with incident angle α
In following relation：
S-polarization light:
P polarization light:
Wherein, the m in above formula11、m12、m21、m22For element in transmission matrix M, and meet relational expression：
In this transmission matrix M, δkFor phase factor, and have For the optical admittance factor, and have
A kind of above-mentioned angular acceleration detection method based on resonance light tunneling effect, in sensing process is accelerated, realize
The method of angle variable quantity detection is described as：Mass is due to left-right rotation angle of arrival variation delta θ, from formula (1),
Because the left rotation and right rotation of mass position will cause incident angle α to change.Now, incident light is incident with different incidence angles α, and suddenly to die
Waveshape passes through mass, exists really so as to obtain different light transmission intensity T, i.e. angle variable quantity Δ θ and light transmission intensity T
Determine curved line relation.According to Δ θ-T curve relation, angle variable quantity Δ θ is obtained with the intensity in transmission T monitored, then and can detect
Go out angular acceleration.
Meanwhile can be according to the corresponding relation between transmitted intensity T and incident angle α and angle variable quantity Δ θ, Yi Jixian
There is technology angular acceleration to calculate theoretical, calculate angular acceleration values corresponding to transmitted intensity T, or draw transmitted intensity T
With the relation curve of angular acceleration, when detecting angular acceleration, it becomes possible to according to curve and the transmitted intensity T that detects, obtain
Go out corresponding angular acceleration.
The present invention has advantages below compared with prior art：
1st, light with more than/incide glass prism/low-refraction bed boundary equal to the angle of total reflection, in the form of evanescent wave
Into resonator, different from traditional method amber resonator, the latter's light to enter resonator less than the incidence angle of the angle of total reflection,
Vibrated in resonator in the form of transmission wave in resonator.Compared with transmission wave, change of the evanescent wave to incident angle is more
It is sensitive.
2nd, the measurement of micro-displacement amount is more accurate, and its reason is that the change of faint incidence angle measurement will cause intensity in transmission T
Big variable quantity.Incident angle variable quantity size is obtained with the change of the light transmission intensity monitored, makes Δ θ measurement accuracy
Very big lifting is obtained.
3rd, the design is simple in construction, and manufacture difficulty is low, and can be mass-produced, and cost is relatively low.
Brief description of the drawings
The utility model is described in further detail below in conjunction with the accompanying drawings.
Fig. 1 is the plan of the angular acceleration detector of the present invention.
Fig. 2 is the side view of the angular acceleration detector of the present invention.
Fig. 3 is mass core texture schematic diagram.
Fig. 4 is mass core texture (upper refractive elements) anticlockwise incident angle change schematic diagram.
Fig. 5 is mass core texture (upper refractive elements) right rotation incident angle change schematic diagram.
Fig. 6 is resonance light tunneling structure schematic diagram.
Fig. 7 is system transmittance intensity T and anglec of rotation variation delta θ curve maps based under the polarizing light irradiation of fixed position.
In figure：1 is annular fixed frame, and 2 be elastic cantilever, and 3 be mass, and 4 be refractive elements, and 5 be connection unit, 6
It is light source for resonating member, 7,8 be photodetector.
Embodiment
Below in conjunction with specific embodiment, the invention will be further described.
Embodiment 1
As Figure 1-3, a kind of angular acceleration detector based on resonance light tunneling effect, including annular fixed frame 1, bullet
Property cantilever beam 2 and mass 3,
The mass 3 is made up of refractive elements 4, connection unit 5 and resonating member 6, refractive elements 4 and connection unit 5
Quantity be two, resonating member 6 and two connection units 5 connection composition I-shape constructions, two connection units 5 are I-shaped
Two parallel girders of shape structure, the square face of two refractive elements 4 is relative and is connected by the I-shape construction, resonating member 6
It is parallel with the square face of refractive elements 4；It is two that two spaces are formed between refractive elements 4, connection unit 5 and resonating member 6
Tunnel layer；The mass 3 is formed by a piece of circular silicon chip erosion；The curve category of the outline of described two refractive elements 4
In same circle；
The elastic cantilever 2 has four, and for four elastic cantilevers 2 into cross distribution, one end is connected to two foldings
The arcwall face center of unit 4 and the outside center of two connection units 5 are penetrated, the other end is fixed on the inwall of annular fixed frame 1；
And the center of gravity of mass 3 overlaps with the center of gravity of annular fixed frame 1 under inactive state；
Light source 7 and photodetector 8 are further fixed on the annular fixed frame 1；The light source 7 and photodetector 8
The condition that fixed position and angle need to meet is：Light source 7 launch light after the curved refractive of a refractive elements 4,
It is incident with the angle more than the angle of total reflection in the plane of the refractive elements 4, resonator is entered in the form of evanescent wave, wherein altogether
After shaking, then pass through another refractive elements 4 and received by photodetector 8.
Embodiment 2
By taking the angular acceleration detector of embodiment 1 as an example, tunable light source opposing outer frame position used immobilizes, adjustable
The a length of 1550nm of incident light wave of light source, incident light are P (or S) polarised light, and incident direction is relative to keep constant；The elastic suspended
Arm beam 2 has four, and for four elastic cantilevers into cross distribution, one end is connected to the outer surface surrounding of mass 3, the other end
It is fixed on the inwall of fixed frame 1；
The mass making material selects silicon, and its refractive index is nsi=3.42 (being applied to infrared incident light), using one
Body formed photoetching technique is completed；Photodetector opposing outer frame position used immobilizes, the response ripple of photodetector
Section should include optical source wavelength.Incident ray forms light transmission intensity T and anglec of rotation variation delta θ curve maps after passing through mass
T-Δθ.When there is angular acceleration change to cause angle variable quantity Δ θ to change, intensity in transmission T will change therewith, saturating by detecting
Variation delta θ can be analyzed by penetrating intensity T variable quantities.And in the present invention as stated above, intensity in transmission T and angle variable quantity Δ θ pass
It is that formula has been shown in detail with curve map.
In one exemplary embodiment of the present invention, illustrate by taking mass left rotation and right rotation as an example, anglec of rotation variable quantity
Scope control is within ± 0.05 degree.Incident light is P (or S) polarised light, and lambda1-wavelength λ is 1550nm.Incident polarization light
Original incident angle is α after refraction0(because of mass the selection of material silicon, silicon refractive index is 3.42, so according to Snell refraction
Law obtains critical angle θcFor 17.0016 degree, then α0This value is should be greater than, chooses incident angle α in the present example embodiment0For
17.9516 degree, i.e., with more than critical angle θc0.95 degree of value is incident).Used mass refractive index is nsi=3.42, from altogether
The width of unit 6 that shakes is gλ=15.622um (if incident light is S-polarization light, gλ=15.503um), air layer width dλ=
2280nm, and air refraction is 1.According to conditions above, by simulation calculation, light transmission intensity T is with angle variable quantity Δ θ's
Change curve (matched curve) is as shown in Figure 7.
With reference to figure 7, can be observed in the plot, for P polarization light, mass right rotation change 0.05 degree (be into
Firing angle degree variation delta θ is+0.05 degree) cause intensity in transmission T to rise about 25dB, mass anticlockwise changes 0.05 degree (i.e.
Incident angle variation delta θ is -0.05 degree) cause intensity in transmission T to decline about 5dB；For S-polarization light, mass right rotation
0.05 degree of change (i.e. incident angle variation delta θ is+0.05 degree) causes intensity in transmission T to rise about 50dB, and mass is left-handed
0.05 degree of transformationization (i.e. incident angle changes delta θ about -0.05 degree) causes intensity in transmission T to decline about 5dB.It is possible thereby to see
Go out, in the case where P polarization light is incident and mass rotates ± 0.05 degree of scope, the output light intensity that the detector is able to detect that is defeated
Enter the 10 of luminous intensity-3, in the case where S-polarization light is incident and mass rotates ± 0.05 degree of scope, the detector is able to detect that defeated
Go out 10 that luminous intensity is input light intensity-5, the 10 of classical F-P resonant cavity is utilized far superior under the conditions of same test-1.5。
Under the conditions of same test, using angle variable quantity Δ θ values as ± 0.05 degree for boundary, choose relative to S-polarization curve
The slower P polarization curve of change is with classical F-P resonant cavity curve ratio compared with it is humorous that discovery P polarization curvilinear motion rate is still significantly higher than F-P
Shake chamber curve, it can thus be appreciated that the invention has higher superiority.
In actual applications, the design will utilize prototype to carry out experiment, obtain between transmitted intensity and incident angle
Numerical value corresponding relation (theoretical curve such as Fig. 7, by its discretization), and it is stored in the form of bivariate table and arrives microprocessor
In.In addition, its right optional storage of the faster relation curve of change to S-polarization or the lower generation of P polarization light incidence is more dense
Point, sensor can obtain higher sensitivity in this section.After this bivariate table is stored in into microprocessor, according to sensor
After detector obtains transmitted intensity, anglec of rotation changing value is obtained using the method tabled look-up.In addition, the spirit of the detector
Sensitivity can also be influenceed by the intensity of light source and photodetector.
The present invention can be summarized with others without prejudice to the concrete form of the spirit or essential characteristics of the present invention.Therefore, nothing
By from the point of view of which point, the embodiment above of the invention can only all be considered the description of the invention and can not limit invention,
Claims indicate the scope of the present invention, and above-mentioned explanation does not point out the scope of the present invention, therefore, with the present invention
The suitable implication and scope of claims in any change, be all considered as being included within the scope of the claims.
Claims (4)
- A kind of 1. angular acceleration detector based on resonance light tunneling effect, it is characterised in that：Including annular fixed frame (1), bullet Property cantilever beam (2) and mass (3),The mass (3) is made up of refractive elements (4), connection unit (5) and resonating member (6), refractive elements (4) and connection The quantity of unit (5) is two, resonating member (6) and two connection unit (5) connection composition I-shape constructions, two connections Unit (5) is two parallel girders of I-shape construction, and the square face of two refractive elements (4) is relative and passes through the I-shape construction Connection, resonating member (6) are parallel with the square face of refractive elements (4)；Refractive elements (4), connection unit (5) and resonating member (6) it is two tunnel layers that two spaces are formed between；The curve of the outline of described two refractive elements (4) belongs to same Circle；The elastic cantilever (2) has four, and for four elastic cantilevers (2) into cross distribution, one end is connected to two foldings The arcwall face center of unit (4) and the outside center of two connection units (5) are penetrated, the other end is fixed on annular fixed frame (1) On inwall；And the center of gravity of mass (3) overlaps with the center of gravity of annular fixed frame (1) under inactive state；Light source (7) and photodetector (8) are further fixed on the annular fixed frame (1)；The light source (7) and photodetector (8) condition that fixed position and angle need to meet is：Curved surface of the light through a refractive elements (4) of light source (7) transmitting It is incident with the angle more than the angle of total reflection in the plane of the refractive elements (4) after refraction, resonance is entered in the form of evanescent wave Chamber, after resonating wherein, then by another refractive elements (4) by photodetector (8) reception.
- A kind of 2. angular acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that：Institute The curve for stating the outline of two refractive elements (4) and two connection units (5) forms a complete circle.
- A kind of 3. angular acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that angle Acceleration detector overall structure is completed using integrally formed standard silicon process, is comprised the following steps：Silicon chip is chosen as material, and silicon chip is cleaned, dried；The photoresist in spin coating on silicon chip, then silicon chip and the mask plate for having angular acceleration detector overall structure pattern are consolidated It is fixed；The silicon chip fixed is fully exposed；After end exposure, the photoresist on silicon chip is developed；Processing is performed etching to silicon chip to clean afterwards, forms the overall structure needed for angular acceleration detector；The overall structure of angular acceleration detector is referred to by annular fixed frame (1), elastic cantilever (2) and mass (3) group Into frame structure.
- 4. utilize the detection method of the angular acceleration detector described in claim 1 or 2, it is characterised in that comprise the following steps：1) determination of a certain instantaneous incident angle αThe transmitted intensity T that photodetector (8) detects is necessarily corresponding with the incident angle α of a certain instantaneous incident light, and two Following relation be present in person：If incident light is S-polarization light：If incident light is P polarization light：ε is dielectric constant, by the refractive elements (4) of incident light beam strikes, the tunnel layer for closing on incident light, resonating member (6), is closed on The dielectric constant of the tunnel layer of transmitted light and the refractive elements (4) of transmitted light is followed successively by ε0、ε1、ε2、ε3、ε4, and refractive elements (4) and the material of resonating member (6) is silicon, therefore ε0=ε2=ε4=εsi, tunnel layer is air layer, therefore ε1=ε3=εair；Close on The width of the tunnel layer of incident light is d1, the width for closing on the tunnel layer of transmitted light is d3, the width of resonating member (6) is d2；Formula Middle m11、m12、m21、m22For element in transmission matrix M, and meet relational expression：<mrow> <mi>M</mi> <mo>=</mo> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <msub> <mi>m</mi> <mn>11</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>12</mn> </msub> </mtd> </mtr> <mtr> <mtd> <msub> <mi>m</mi> <mn>21</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>22</mn> </msub> </mtd> </mtr> </mtable> </mfenced> <mo>=</mo> <msub> <mi>M</mi> <mn>1</mn> </msub> <msub> <mi>M</mi> <mn>2</mn> </msub> <msub> <mi>M</mi> <mn>3</mn> </msub> <mo>=</mo> <munderover> <mi>&Pi;</mi> <mrow> <mi>k</mi> <mo>=</mo> <mn>1</mn> </mrow> <mn>3</mn> </munderover> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <mrow> <msub> <mi>cos&delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> <mtd> <mfrac> <mrow> <msub> <mi>isin&delta;</mi> <mi>W</mi> </msub> </mrow> <msub> <mi>&eta;</mi> <mi>k</mi> </msub> </mfrac> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>i&eta;</mi> <mi>k</mi> </msub> <msub> <mi>sin&delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> <mtd> <mrow> <msub> <mi>cos&delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> </mtr> </mtable> </mfenced> </mrow>In this transmission matrix M, δwFor phase factor, and have(w=1,2,3)；ηkFor light The admittance factor, when incident ray is S-polarization light,When incident ray is P polarization light,And there is optical admittance The factorThe optical admittance factor(k=0,1,2,3,4)；The quality Block making material selects silicon, silicon refractive index nsi=3.42；The value of incident angle α is can determine according to above-mentioned transmitted intensity T and incident angle α relational expression；2) angle variable quantity Δ θ determinationUsing the center of circle of the refractive elements (4) of the incident light beam strikes of mass (3) as coordinate origin, X-Y axis coordinate systems are established；Then angle shifting variation delta θ meets relationship below：Δ θ=α0-α1Wherein, α0For the incidence angle at a certain moment, α1For the incidence angle of subsequent time；The incidence angle refers to light from refraction The incidence angle reflected when entering tunnel layer in unit (4) at the interface of the two；According to 1) and 2), it is known that between the transmitted intensity T and incident angle α and angle variable quantity Δ θ of photodetector (8) detection Relation, can be calculated according to existing angular acceleration theoretical, calculate angular acceleration values corresponding to transmitted intensity T, or Go out the relation curve of transmitted intensity T and angular acceleration.
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