CN105319394B - A kind of angular acceleration detector and detection method based on resonance light tunneling effect - Google Patents

Abstract

The present invention relates to the angular acceleration detector made based on resonance light tunneling effect principle and detection method；A kind of the characteristics of utilizing high-resolution in resonance light tunneling effect principle is proposed, measures the angular acceleration detector of the new structure of angular acceleration；Used technical scheme is：A kind of angular acceleration detector based on resonance light tunneling effect, including annular fixed frame, elastic cantilever and mass, tunable light source and photodetector, intensity in transmission will be caused using change of the resonance light tunneling effect to the faint shifting amount of massTBig variable quantity is detected, and is obtained angle variable quantity size with the change of the light transmission intensity monitored, is realized the accurate measurement to micro- angle variable quantity.

Description

An angular acceleration detector and detection method based on resonant light tunneling effect

technical field

The invention relates to an angular acceleration detector, in particular to an angular acceleration detector and a detection method based on the principle of resonant light tunneling effect.

Background technique

At present, angular accelerometers are inertial sensors used to measure the angular acceleration of moving objects, and have been used in many fields, such as rollover warning detection devices for cars to protect passenger safety, flight status detection of aircraft, and robot design. With the rapid development of micro-electro-mechanical systems (MEMS) technology, micro-mechanical gyroscopes are developing towards low power consumption, easy integration, miniaturization, high sensitivity, and low cost. However, due to the imperfection of micromechanical theory and technology, micromechanical gyroscopes are still low-to-medium precision inertial sensors. Among them, the drift error and machining accuracy caused by the ambient temperature have become the key factors restricting the development of micro-mechanical gyroscopes. With the continuous advancement of optical technology, it is practical to use optical methods to measure angular acceleration, such as fiber optic gyroscopes. The fiber optic gyroscope uses the Sagnac effect to determine the angular rate of rotation according to the internal relationship between the optical path difference and the angular rate of rotation generated by two columns of light waves propagating oppositely in the optical path. Compared with micromechanical gyroscopes, fiber optic gyroscopes are used in more fields due to their advantages such as impact resistance, long service life, instant start, high detection sensitivity, and large dynamic range. However, the fiber ring, the core component of the fiber optic gyroscope, suffers from different thermal stresses at different temperatures, which greatly affects the temperature performance of the fiber optic gyroscope, which limits the accuracy of angular acceleration measurement.

The basic idea of micromachined gyroscope design is to use the Coriolis force phenomenon, while the fiber optic gyroscope uses the Sagnac effect to measure angular rate. Different from it, the basic implementation idea of the angular acceleration detection method proposed by the present invention is to use the resonant light tunneling effect to obtain the magnitude and direction of the angular acceleration by detecting the angular change of the mass block caused by the angular acceleration, and realize high-precision measurement of the angular acceleration. Resonant optical tunneling is based on optical tunneling (frustrated total internal reflection). Optical tunneling effect means that when light is irradiated from the interface of high refractive index medium layer to the interface of low refractive index medium layer, under the condition that the thickness of the low refractive index medium layer is smaller than the wavelength of the incident light, the light will pass through the interface where total reflection occurs, that is, through In classical geometric optics, the "barrier" that light cannot pass through forms transmission (tunneling light). The resonant light tunneling effect means that when the incident light angle is greater than the critical angle, the thickness of the low refractive index medium layer can be greater than the wavelength of the incident light, and the incident light forms a resonance effect in the micron or nanometer optical cavity. In the resonant light tunneling effect, the transmission intensity of the system is very sensitive to the change of the incident angle of the incident light source. Using this condition to measure the angular acceleration can greatly improve the sensitivity detection and accuracy measurement of the angular acceleration. At the same time, the device designed in the invention can be processed by standard silicon technology, which can improve its production efficiency and reduce cost. At the same time, the device designed in the invention can be processed by standard silicon technology, which can improve its production efficiency and reduce cost.

Contents of the invention

The invention proposes a new type of acceleration detector for measuring angular acceleration by utilizing the characteristic of high resolution in principle of resonant light tunneling effect.

In order to solve the above-mentioned technical problems, the technical solution adopted in the present invention is: an angular acceleration detector based on the resonant light tunneling effect, comprising an annular fixed frame, an elastic cantilever beam and a mass block,

The mass block is composed of a refraction unit, a connection unit and a resonance unit, the number of the refraction unit and the connection unit is two, the resonance unit and the two connection units are connected to form an I-shaped structure, and the two connection units are two I-shaped structures. A parallel beam, the square faces of the two refraction units face each other and are connected by the I-shaped structure, the resonant unit is parallel to the square faces of the refraction unit; two gaps are formed between the refraction unit, the connection unit and the resonant unit as two tunneling layers ; The curves of the outer contours of the two refraction units belong to the same circle;

There are four elastic cantilever beams, the four elastic cantilever beams are distributed in a cross, one end is respectively connected to the center of the arc surface of the two refraction units and the center of the outer side of the two connection units, and the other end is fixed on the inner wall of the ring-shaped fixed frame ; and the center of gravity of the mass block coincides with the center of gravity of the annular fixed frame in a static state;

A light source and a photodetector are also fixed on the ring-shaped fixed frame; the fixed position and angle of the light source and the photodetector need to meet the conditions that: after the light emitted by the light source is refracted by the curved surface of a refraction unit, it will be refracted in the refraction unit Incident on the plane at an angle greater than the total reflection angle, it enters the resonant cavity in the form of an evanescent wave, resonates in it, and then passes through another refraction unit to be received by a photodetector.

The inside of the ring-shaped fixed frame connects the mass blocks through elastic cantilever beams, and the frame of the ring-shaped fixed frame is fixed with a light source and a photodetector; the entire detector is installed through the ring-shaped fixed frame.

Although the function of the connection unit is only to connect the refraction unit and the resonance unit, and form two tunneling layers together with the two, the shape of the outer contour of the connection unit has no effect on the function of the mass block, but since the mass block is a circular In order to reduce the workload of etching, the outer contour curve of the connection unit and the outer contour curve of the refraction unit preferably form a circle as shown in Fig. 1 and Fig. 3 .

Refer to Figure 1 for the structure of the elastic cantilever beams used. There are 4 elastic beams in total, which are respectively arranged in the space between the outer frame and the mass blocks used. Free rotation in the space formed, and reset accurately in a static state; when the detector rotates around a rotation axis (perpendicular to the following XY plane, which is also the center of the mass block), the mass block is supported by the elastic beam. 1 Rotate relative to the outer frame in the plane, and after the angular acceleration acts, the position of the supporting mass is restored.

A light source and a photodetector are also fixed on the fixed frame; the fixed position and angle of the light source and the photodetector need to satisfy the following conditions: after the light emitted by the light source is refracted by the curved surface of the upper refraction unit, The square surface on the tunneling layer is incident at an angle greater than the total reflection angle, and enters the resonant cavity (ie, the resonant unit) in the form of evanescent waves, and forms a resonance phenomenon in it, and then passes through another refraction unit, and is received by the photodetector .

The inside of the fixed frame connects the quality blocks through elastic cantilever beams, and the frame of the fixed frame is fixed with a light source and a photodetector; the entire detector is installed through the fixed frame.

The light source is a light source with adjustable spectral distribution, and a monochromatic light source can be selected. The light emitted by the light source is controlled to be P or S polarized light by the polarizer before reaching the quality block, but the relative incident direction of the light should not be changed.

The function of the photodetector is to receive the transmitted light from the mass block and detect the light intensity, and record and transmit the detected light intensity and its corresponding time to the single-chip microcomputer for data processing.

Since the present invention is based on the resonant optical tunneling effect, the size of the mass used is controlled at the micron level, and the structure of the mass is referred to in Fig. 3 . The mass block can be divided into two identical refraction units, a resonance unit and two connection units. The two refraction units of the proof mass are arranged symmetrically, the width of the resonant unit formed by them is g _λ and the width of the two resonant cavities (tunneling layers) is d _λ . The mass block is made of silicon, whose refractive index is n _si =3.42 (suitable for infrared incident light), and is completed by an integrally formed standard silicon process, including the following steps:

S1: Select silicon wafers as materials, and clean and dry the silicon wafers;

S2: Spin-coat photoresist on the silicon wafer, and then fix the silicon wafer and the mask plate engraved with the overall structural pattern of the angular acceleration detector;

S3: fully exposing the fixed silicon wafer;

S4: After the exposure is over, develop the photoresist on the silicon wafer;

S5: cleaning the silicon wafer after etching to form the overall structure required by the angular acceleration detector;

The overall structure refers to other structures of the detector except the light source and the photodetector.

Since the angular acceleration detector of the present invention is based on the resonant light tunneling effect, the size of the detector is at the micron level, which is suitable for integral production of silicon wafers. The structure of the elastic cantilever beam is not limited to the structure shown in the drawings, and those skilled in the art can reasonably design the width, width change, and properties of the elastic cantilever beam according to the modal simulation results.

Based on the principle of detecting angular acceleration and the structure of the detector of the present invention, detectors made of other suitable materials are also within the protection scope of the present application. For example, the material of the frame of the detector and the cantilever beam is not limited to silicon, nor does it have to be the same as that of the proof mass, and has nothing to do with the propagation of light, as long as they can realize their respective functions.

The material of the mass block is not limited to silicon wafers, but the etching process of silicon wafers is more mature, and the material cost and processing cost are lower. Therefore, the material of the mass block should not be a factor limiting the scope of protection of this application.

Similarly, in the case where only the mass block is made of silicon, it is also preferable to adopt an integrally formed standard silicon process, such as etching a circular silicon wafer. This is because the size of the structure is too small, it is difficult to process and combine parts separately, and it is easy to cause great interference to the propagation of light, and the influence of integral molding can basically be ignored. If there is a more advanced process that can make the mass block in parts, it should not affect the protection of the structure of the mass block in the present invention.

The method for detecting angular acceleration by using the above-mentioned angular acceleration detector mainly includes data collection and calculation of angular acceleration.

The invention is an angular acceleration detector based on the resonant light tunneling effect, and the adopted principle is based on the resonant light tunneling effect. Among them, the incident light enters the resonant cavity in the form of evanescent wave, and resonates in the resonant cavity, and the transmitted light of the system can be detected at the output end.

1. The angular acceleration detector detects the angular acceleration;

When the angular acceleration detector is subjected to a leftward rotation acceleration, the mass block rotates to the left relative to the outer frame, and the rotation angle measurement refers to Figure 4 (top view state diagram):

Initial static state: take the center of the mass block as the origin of the coordinate system to establish an XY axis coordinate system. Fix the visible light source, and the angle between the direction of the incident light and the positive direction of the horizontal direction (that is, the positive direction of the X-axis) is β (when the angular acceleration detector rotates to the left, the relative position of each part of the angular acceleration detector remains unchanged, and can be ensure that the direction of the incident light remains the same). The incident polarized light is incident at an angle α ₀ greater than the critical angle after being refracted, and it is coupled (or transmitted) into the resonant cavity in the state of evanescent wave, and forms a resonance effect in the resonant cavity, and propagates through the mass block, and finally The output light intensity is detected by a photodetector.

Explanation for Figure 4: Since the interfaces between the tunneling layer and the refraction unit and the resonance unit are parallel to the X-axis, and the outer contour of the refraction unit belongs to the outer circle of the proof mass, the refraction and refraction occurring on the interface between the tunneling layer and the refraction unit The front and rear angle changes are the same as the case where the refraction unit is a semicircle (that is, the case shown in FIG. 4 ), which is only equivalent to the translation of the refraction interface. In order to make the lines of the drawings clearer and easier to understand, FIG. 4 is taken as a reference schematic diagram. The situation of FIG. 5 below is the same as that of FIG. 4 .

Angular acceleration change motion state: After the angular acceleration changes, the elastic cantilever beam drives the mass block to cause the left rotation angle change Δθ. At this time, due to the rotation of the proof mass relative to the outer frame, the position of the incident light spot on the surface of the semicircular prism changes. Through the geometric relationship, the angular variation can be expressed as the following formula:

Δθ=α ₀ -α ₁ (1)

Wherein, α ₀ is the angle of incidence at a certain moment, and α ₁ is the angle of incidence at the next moment; the angle of incidence refers to the angle of incidence at which light refracts at the interface between the two when the light enters the tunneling layer from the refraction unit ( As shown in Figure 4 and Figure 5);

The angle variation detection method adopted above is also applicable to the detection of right rotation angle variation. Refer to Figure 5 for the amount of change in the right rotation angle, which is different from the detection of the left rotation angle in that: after the proof mass rotates to the right relative to the outer frame, the incident angle of the polarized light after refraction will increase from α ₀ to α ₁ (α ₁ is still greater than the critical angle). After calculation, the front and rear incidence angles α ₀ , α ₁ and the angle variation Δθ (the angle variation is a negative value at this time) still satisfy the relationship (1).

2. There is the following relationship between the transmitted light intensity T and the incident angle α

Referring to Figure 6, the resonant optical tunneling structure composed of mass blocks includes an input unit, a tunneling layer, a resonant cavity (ie, a resonant unit), a tunneling layer, and an output unit from left to right. In this structure, the input and output units are made of silicon, and their dielectric constants are ε ₀ , ε ₄ (that is, ε ₀ = ε ₄ = ε _si ); the tunneling layer is an air layer, and their dielectric constants are ε ₁ , ε ₃ (that is, ε ₁ =ε ₃ =ε _air ), the width of the tunneling layer is d ₁ and d ₃ (that is, there is d ₁ =d ₃ =d _λ ); the resonant unit is made of silicon, and its dielectric constant is ε ₂ (that is, there is ε ₂ =ε _si ), and the width is d ₂ (that is, there is d ₂ =g _λ ).

When the incident light is incident at the incident angle α, according to the transmission matrix theory, the transmission intensity T of the system has the following relationship with the incident angle α:

S polarized light:

P polarized light:

Among them, in the above formula, m ₁₁ , m ₁₂ , m ₂₁ , and m ₂₂ are elements in the transmission matrix M, and satisfy the relationship:

In this transmission matrix M, δ _k is the phase factor, and there is is the optical admittance factor, and has

In the above-mentioned angular acceleration detection method based on the resonant light tunneling effect, in the process of acceleration sensing, the method for realizing the detection of the angular variation is described as: the angular variation Δθ of the mass due to the left-right rotation movement is expressed by formula (1) It can be seen that the left and right rotation of the mass block will cause the change of the incident angle α. At this time, the incident light is incident at different incident angles α, and passes through the mass block in the form of evanescent waves, so as to obtain different light transmission intensities T, that is, there is a definite curve relationship between the angle change Δθ and the light transmission intensity T. According to the Δθ-T curve relationship, the angular variation Δθ is obtained from the monitored transmission intensity T, and then the angular acceleration can be detected.

At the same time, the angular acceleration value corresponding to the transmitted light intensity T can be calculated according to the corresponding relationship between the transmitted light intensity T and the incident angle α and the angular change Δθ, as well as the prior art angular acceleration calculation theory, or the transmitted light intensity can be obtained The relationship curve between T and angular acceleration, when the angular acceleration is detected, the corresponding angular acceleration can be obtained according to the curve and the detected transmitted light intensity T.

Compared with the prior art, the present invention has the following advantages:

1. The light is incident on the glass prism/low refractive index layer interface at an angle greater than/equal to the total reflection, and enters the resonator in the form of an evanescent wave, which is different from the traditional Fab resonator, where the light is incident at an angle less than the total reflection The horn enters the resonant cavity, where it oscillates in the resonant cavity in the form of a transmitted wave. Evanescent waves are more sensitive to changes in the angle of incidence than propagating waves.

2. The measurement of the micro-displacement is more accurate, because the change of the weak incident angle will cause a large change of the transmission intensity T. The magnitude of the variation of the incident angle is obtained from the monitored change of the light transmission intensity, so that the measurement accuracy of Δθ is greatly improved.

3. The design is simple in structure, low in production difficulty, and can be mass-produced with low cost.

Description of drawings

Below in conjunction with accompanying drawing, the utility model is further described.

Fig. 1 is a plan view of an angular acceleration detector of the present invention.

Fig. 2 is a side view of the angular acceleration detector of the present invention.

Fig. 3 is a schematic diagram of the core structure of the mass block.

Fig. 4 is a schematic diagram of the variation of the incident angle of the core structure of the proof mass (upper refraction unit) in left rotation.

Fig. 5 is a schematic diagram of changes in the incident angle of right rotation of the core structure of the proof mass (upper refraction unit).

FIG. 6 is a schematic diagram of a resonant light tunneling structure.

FIG. 7 is a graph of the transmission intensity T of the system and the variation of the rotation angle Δθ under the irradiation of polarized light at a fixed position.

In the figure: 1 is an annular fixed frame, 2 is an elastic cantilever beam, 3 is a mass block, 4 is a refraction unit, 5 is a connection unit, 6 is a resonance unit, 7 is a light source, and 8 is a photodetector.

Detailed ways

The present invention will be further described below in conjunction with specific examples.

Example 1

As shown in Figures 1-3, an angular acceleration detector based on the resonant light tunneling effect includes an annular fixed frame 1, an elastic cantilever beam 2 and a mass block 3,

The mass block 3 is composed of a refraction unit 4, a connection unit 5 and a resonance unit 6, the number of the refraction unit 4 and the connection unit 5 is two, the resonance unit 6 and the two connection units 5 are connected to form an I-shaped structure, and two The connection unit 5 is two parallel beams of an I-shaped structure, the square faces of the two refraction units 4 are opposite and connected by the I-shaped structure, the resonance unit 6 is parallel to the square faces of the refraction unit 4; the refraction unit 4, the connection unit 5 and the Two gaps are formed between the resonance units 6 as two tunneling layers; the mass block 3 is etched from a circular silicon wafer; the curves of the outer contours of the two refraction units 4 belong to the same circle;

There are four elastic cantilever beams 2, and the four elastic cantilever beams 2 are distributed in a cross, one end is respectively connected to the center of the arc surface of the two refraction units 4 and the outer center of the two connection units 5, and the other end is fixed on a ring-shaped fixed on the inner wall of the frame 1; and the center of gravity of the mass block 3 coincides with the center of gravity of the annular fixed frame 1 in a static state;

A light source 7 and a photodetector 8 are also fixed on the annular fixed frame 1; the fixed position and angle of the light source 7 and the photodetector 8 need to satisfy the condition that the light emitted by the light source 7 passes through the curved surface of a refraction unit 4 After refraction, it is incident on the plane of the refraction unit 4 at an angle greater than the total reflection angle, enters the resonant cavity in the form of evanescent waves, resonates there, and then passes through another refraction unit 4 to be received by the photodetector 8 .

Example 2

Taking the angular acceleration detector of Embodiment 1 as an example, the position of the adjustable light source relative to the outer frame is fixed, the incident light wavelength of the adjustable light source is 1550nm, and the incident light is P (or S) polarized light, and the incident direction is relatively kept constant. There are four elastic cantilever beams 2, the four elastic cantilever beams are distributed in a cross, one end is respectively connected around the outer surface of the mass block 3, and the other end is fixed on the inner wall of the fixed frame 1;

The mass block is made of silicon, whose refractive index is n _si =3.42 (suitable for infrared incident light), and is completed by integrated photolithography technology; the position of the photodetector relative to the outer frame is fixed, and the photodetector The response band shall include the source wavelength. After the incident light passes through the mass block, a graph T-Δθ of the light transmission intensity T and the variation of the rotation angle Δθ is formed. When the change in angular acceleration causes the angle change Δθ to change, the transmission intensity T will change accordingly, and the change Δθ can be analyzed by detecting the change in the transmission intensity T. In the above invention, the relational formula and graph of the transmission intensity T and the angle variation Δθ have been given in detail.

In an exemplary embodiment of the present invention, taking the left and right rotation of the proof mass as an example, the variation range of the rotation angle is controlled within ±0.05 degrees. The incident light is P (or S) polarized light, and the wavelength λ of the incident light is 1550nm. The initial incident angle of the incident polarized light after refraction is α ₀ (Since the quality block is made of silicon, the refractive index of silicon is 3.42, so according to Snell’s law of refraction, the critical angle θ _c is 17.0016 degrees, then α ₀ should be greater than this value, In this exemplary embodiment, the incident angle α ₀ is selected as 17.9516 degrees, that is, the incident angle is 0.95 degrees greater than the value of the critical angle _θc ). The refractive index of the mass block used is n _si =3.42, the width of the resonance unit 6 is selected to be g _λ =15.622um (if the incident light is S polarized light, g _λ =15.503um), the air layer width d _λ =2280nm, and the air The refractive index is 1. According to the above conditions, through simulation calculation, the variation curve (fitting curve) of the light transmission intensity T with the angular variation Δθ is shown in FIG. 7 .

Referring to Fig. 7, it can be observed in the graph that for P-polarized light, the right rotation of the proof mass changes by 0.05 degrees (that is, the incident angle variation Δθ is +0.05 degrees) causes the transmission intensity T to rise by about 25 dB, and the left rotation of the proof mass changes 0.05 degrees (that is, the incident angle change Δθ is -0.05 degrees) causes the transmission intensity T to drop by about 5dB; for S polarized light, the right rotation of the proof mass changes by 0.05 degrees (that is, the incident angle change Δθ is +0.05 degrees) causes the transmission intensity T Rising about 50dB, a change of 0.05 degrees in the left rotation of the proof mass (that is, a change in the incident angle Δθ of about -0.05 degrees) causes the transmission intensity T to drop by about 5dB. It can be seen from this that, in the range of P-polarized light incident and mass block rotation ±0.05 degrees, the output light intensity that the detector can detect is 10 ^-3 of the input light intensity, and in the range of S-polarized light incident and mass block rotation ± In the range of 0.05 degrees, the output light intensity that the detector can detect is 10 ^-5 of the input light intensity, far better than the 10 ^-1.5 of the classical FP resonant cavity under the same test conditions.

Under the same test conditions, with the angular change Δθ value of ±0.05 degrees as the limit, select the P polarization curve that changes slowly relative to the S polarization curve and compare it with the classic F-P resonator curve. It is found that the change rate of the P polarization curve is still significantly higher than that of F-P resonant cavity curve, it can be known that this invention has higher superiority.

In practical applications, this design will use the prototype to carry out experiments to obtain the numerical correspondence between the transmitted light intensity and the incident angle (the theoretical curve is shown in Figure 7, which is discretized), and store it in the form of a two-dimensional table into the microprocessor. In addition, more dense points can be stored for the relationship curve on the right side that changes faster generated under the incidence of S-polarized or P-polarized light, and the sensor can obtain higher sensitivity in this interval. After the two-dimensional table is stored in the microprocessor, the transmitted light intensity is obtained according to the detector of the sensor, and the change value of the rotation angle is obtained by using the method of looking up the table. In addition, the sensitivity of the detector is also affected by the intensity of the light source and the photodetector.

The present invention may be embodied in other specific forms without departing from the spirit or main characteristics of the invention. Therefore, no matter from which point of view, the above-mentioned embodiments of the present invention can only be considered as explanations of the present invention and can not limit the invention. The claims indicate the scope of the present invention, but the above description does not indicate the scope of the present invention. Therefore, any changes within the meaning and scope equivalent to the claims of the present invention should be considered to be included in the scope of the claims.

Claims (4)

1. A kind of 1. angular acceleration detector based on resonance light tunneling effect, it is characterised in that：Including annular fixed frame (1), bullet Property cantilever beam (2) and mass (3),

   The mass (3) is made up of refractive elements (4), connection unit (5) and resonating member (6), refractive elements (4) and connection The quantity of unit (5) is two, resonating member (6) and two connection unit (5) connection composition I-shape constructions, two connections Unit (5) is two parallel girders of I-shape construction, and the square face of two refractive elements (4) is relative and passes through the I-shape construction Connection, resonating member (6) are parallel with the square face of refractive elements (4)；Refractive elements (4), connection unit (5) and resonating member (6) it is two tunnel layers that two spaces are formed between；The curve of the outline of described two refractive elements (4) belongs to same Circle；

   The elastic cantilever (2) has four, and for four elastic cantilevers (2) into cross distribution, one end is connected to two foldings The arcwall face center of unit (4) and the outside center of two connection units (5) are penetrated, the other end is fixed on annular fixed frame (1) On inwall；And the center of gravity of mass (3) overlaps with the center of gravity of annular fixed frame (1) under inactive state；

   Light source (7) and photodetector (8) are further fixed on the annular fixed frame (1)；The light source (7) and photodetector (8) condition that fixed position and angle need to meet is：Curved surface of the light through a refractive elements (4) of light source (7) transmitting It is incident with the angle more than the angle of total reflection in the plane of the refractive elements (4) after refraction, resonance is entered in the form of evanescent wave Chamber, after resonating wherein, then by another refractive elements (4) by photodetector (8) reception.
2. A kind of 2. angular acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that：Institute The curve for stating the outline of two refractive elements (4) and two connection units (5) forms a complete circle.
3. A kind of 3. angular acceleration detector based on resonance light tunneling effect according to claim 1, it is characterised in that angle Acceleration detector overall structure is completed using integrally formed standard silicon process, is comprised the following steps：

   Silicon chip is chosen as material, and silicon chip is cleaned, dried；

   The photoresist in spin coating on silicon chip, then silicon chip and the mask plate for having angular acceleration detector overall structure pattern are consolidated It is fixed；

   The silicon chip fixed is fully exposed；

   After end exposure, the photoresist on silicon chip is developed；

   Processing is performed etching to silicon chip to clean afterwards, forms the overall structure needed for angular acceleration detector；

   The overall structure of angular acceleration detector is referred to by annular fixed frame (1), elastic cantilever (2) and mass (3) group Into frame structure.
4. 4. utilize the detection method of the angular acceleration detector described in claim 1 or 2, it is characterised in that comprise the following steps：

   1) determination of a certain instantaneous incident angle α

   The transmitted intensity T that photodetector (8) detects is necessarily corresponding with the incident angle α of a certain instantaneous incident light, and two Following relation be present in person：

   If incident light is S-polarization light：

   If incident light is P polarization light：

   ε is dielectric constant, by the refractive elements (4) of incident light beam strikes, the tunnel layer for closing on incident light, resonating member (6), is closed on The dielectric constant of the tunnel layer of transmitted light and the refractive elements (4) of transmitted light is followed successively by ε₀、ε₁、ε₂、ε₃、ε₄, and refractive elements (4) and the material of resonating member (6) is silicon, therefore ε₀=ε₂=ε₄=ε_si, tunnel layer is air layer, therefore ε₁=ε₃=ε_air；Close on The width of the tunnel layer of incident light is d₁, the width for closing on the tunnel layer of transmitted light is d₃, the width of resonating member (6) is d₂；Formula Middle m₁₁、m₁₂、m₂₁、m₂₂For element in transmission matrix M, and meet relational expression：

   <mrow> <mi>M</mi> <mo>=</mo> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <msub> <mi>m</mi> <mn>11</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>12</mn> </msub> </mtd> </mtr> <mtr> <mtd> <msub> <mi>m</mi> <mn>21</mn> </msub> </mtd> <mtd> <msub> <mi>m</mi> <mn>22</mn> </msub> </mtd> </mtr> </mtable> </mfenced> <mo>=</mo> <msub> <mi>M</mi> <mn>1</mn> </msub> <msub> <mi>M</mi> <mn>2</mn> </msub> <msub> <mi>M</mi> <mn>3</mn> </msub> <mo>=</mo> <munderover> <mi>&amp;Pi;</mi> <mrow> <mi>k</mi> <mo>=</mo> <mn>1</mn> </mrow> <mn>3</mn> </munderover> <mfenced open = "(" close = ")"> <mtable> <mtr> <mtd> <mrow> <msub> <mi>cos&amp;delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> <mtd> <mfrac> <mrow> <msub> <mi>isin&amp;delta;</mi> <mi>W</mi> </msub> </mrow> <msub> <mi>&amp;eta;</mi> <mi>k</mi> </msub> </mfrac> </mtd> </mtr> <mtr> <mtd> <mrow> <msub> <mi>i&amp;eta;</mi> <mi>k</mi> </msub> <msub> <mi>sin&amp;delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> <mtd> <mrow> <msub> <mi>cos&amp;delta;</mi> <mi>W</mi> </msub> </mrow> </mtd> </mtr> </mtable> </mfenced> </mrow>

   In this transmission matrix M, δ_wFor phase factor, and have(w=1,2,3)；η_kFor light The admittance factor, when incident ray is S-polarization light,When incident ray is P polarization light,And there is optical admittance The factorThe optical admittance factor(k=0,1,2,3,4)；The quality Block making material selects silicon, silicon refractive index n_si=3.42；

   The value of incident angle α is can determine according to above-mentioned transmitted intensity T and incident angle α relational expression；

   2) angle variable quantity Δ θ determination

   Using the center of circle of the refractive elements (4) of the incident light beam strikes of mass (3) as coordinate origin, X-Y axis coordinate systems are established；

   Then angle shifting variation delta θ meets relationship below：

   Δ θ=α₀-α₁

   Wherein, α₀For the incidence angle at a certain moment, α₁For the incidence angle of subsequent time；The incidence angle refers to light from refraction The incidence angle reflected when entering tunnel layer in unit (4) at the interface of the two；

   According to 1) and 2), it is known that between the transmitted intensity T and incident angle α and angle variable quantity Δ θ of photodetector (8) detection Relation, can be calculated according to existing angular acceleration theoretical, calculate angular acceleration values corresponding to transmitted intensity T, or Go out the relation curve of transmitted intensity T and angular acceleration.