CN205982318U - Double -deck nanometer grating triaxial of high accuracy adds speed detector - Google Patents
Double -deck nanometer grating triaxial of high accuracy adds speed detector Download PDFInfo
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- CN205982318U CN205982318U CN201620752175.2U CN201620752175U CN205982318U CN 205982318 U CN205982318 U CN 205982318U CN 201620752175 U CN201620752175 U CN 201620752175U CN 205982318 U CN205982318 U CN 205982318U
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Abstract
The utility model relates to an acceleration detects technical field, provides a double -deck nanometer grating triaxial of high accuracy adds speed detector, including boss, the sensitive structure of 3 acceleration, photoelectric detector array, arranged fixed nanometer grating on the boss, corresponding laser lamp -house array is arranged to boss below, and 3 sensitive structures of acceleration are located the boss top including the sensitive structure of the nanometer grating acceleration that detects X, Y, Z axle acceleration respectively, the sensitive structural movable nanometer grating of answering with fixed nanometer grating pair that is equipped with of nanometer grating acceleration, and the connecting block is passed through to 3 sensitive structures of acceleration and the boss is portable is connected, laser lamp -house array, fixed nanometer grating, movable nanometer grating, photoelectric detector array correspond from bottom to top to be arranged on a vertical axis. The beneficial effects of the utility model are that: can detect the acceleration of triaxial direction simultaneously, the precision is high, uses the inert gas encapsulation, and is longe -lived, the miniaturation, integrate, multi -functional, be suitable for popularization and application.
Description
Technical field
This utility model is related to acceleration detection technical field, adds particularly to a kind of High-precision double-layer nanometer grating three axle
Speed detector.
Background technology
Nanometer grating research origin, the nineties, is broadly divided into two stages, and the first stage is concentrated mainly on diffraction theory
And process exploration aspect (1996 2003), later stage research concentrates on nanometer grating in the sensitive sensor of displacement and displacement
Application (2003 modern), 1996, M.G.Moharam used rigorous coupled wave approach first, begs for taking TE ripple and TM ripple as a example
Discuss transmission and reflection characteristic under laser irradiation for the diffraction grating it was demonstrated that analyzing nanometer grating using rigorous coupled wave approach
Feasibility, be that theoretical basiss have been established in the development of nanometer grating sensor.Hereafter, rigorous coupled wave approach is gradually by theoretical point
Design application is moved towards in analysis.
The technology solving grating diffration efficiency with strict coupled wave theory is constantly ripe, and scientific research person starts handle
Experience is transferred in sensor design and the application technology of nanometer grating, and sandia National Laboratory of the U.S. is in 2003 in paper
In level adjustable nanometer grating displacement transducer is proposed first, resonable touching upon experimentally demonstrates two nanometer light being horizontally staggered
The minor variations of grid spacing can cause the very big change all of optical grating reflection light intensity it is achieved thatDisplacement resolution, should
Displacement transducer has very high sensitivity, up to 10%/nm.But this displacement transducer is single shaft displacement transducer, only
The micrometric displacement in some direction can be detected.2005, American Studies person proposed the processing side of the adjustable nanometer grating of level first
Method, steps a solid step in its practicality.
2007, sandia laboratory achieved first nanometer grating accelerometer in the world, and emphasis solves weak cantilever
Beam is integrated with big mass, and high-aspect-ratio nanometer grating is processed, and after device wet etching, Stress Release and reliable etching etc. is
Row problem, light beam is irradiated on nanometer grating at a certain angle, and the grid closing between grating occurs near field (far field) diffraction, when
When having external acceleration effect, there is the displacement of nanometer scale in nanometer grating spacing, cause the effective refractive index of sub-wavelength structure
Change, big change will be there is in the amplitude of reflected light and diffraction light, by detect this change thus realize high-sensitive plus
Tachometric survey, the nanometer grating of this horizontal adjustable structure is easily achieved the multi-shaft acceleration transducer of one chip.This device
Sensitivity is 598V/g, and resolution isThe closely thermal noise Limiting Level of this deviceIt is to work as
Shi Jingdu highest MOEMS accelerometer.
University of south florida proposes a kind of vertically adjustable nanometer grating displacement transducer in paper within 2011, and by it
Apply in accelerometer design, nanometer grating is carved with, between them respectively in siliceous gauge block bottom and glass substrate
Gap is wavelength magnitude, forms near-field coupling area.Extraneous acceleration makes mass first to bottom grating, vertical displacement occur, and causes
The gap change in near-field coupling area, by the change of detection projection light intensity, obtains the size of extraneous acceleration.
The adjustable or vertically adjustable nanometer grating acceleration transducer of existing level all has limitation, such as Beijing Aviation
Space flight university applied for a patent in 2010, and patent name is：《Adjustable nanometer grating and nanometer grating accelerometer and its
Processing》, Patent No.：ZL201010607706.6, this patent can only detect the acceleration of single shaft, and structure is more single, and structure
All expose in atmosphere, service life is short, and this utility model can detect the acceleration of spatial triaxial, the structure of design is new
Grain husk, is packaged with helium, and function is more, and service life is longer.
Utility model content
The purpose of this utility model is exactly to overcome the deficiencies in the prior art, there is provided a kind of High-precision double-layer nanometer grating three
Axle acceleration detection means, can detect the acceleration in spatial triaxial direction, extend the life-span and can guarantee that the concordance of testing result
And accuracy.
A kind of this utility model High-precision double-layer nanometer grating 3-axis acceleration detection means, including boss, 3 axle accelerations
Sensitive structure, photodetector array；Fixing nanometer grating is disposed with boss, boss arranged beneath has and fixing nanometer grating
Corresponding laser source array, 3 axle acceleration sensitive structures include the nanometer grating acceleration detecting X, Y, Z axis acceleration respectively
Sensitive structure, above boss, described nanometer grating acceleration sensitive structure be provided with fixing nanometer grating is corresponding can
Dynamic nanometer grating, 3 axle acceleration sensitive structures are dynamically connected by contiguous block is removable with boss；Laser source array, fixing nanometer
Grating, movable nanometer grating, photodetector array corresponding arrangement from bottom to top, and all on same vertical axis.
Further, laser source array, fixing nanometer grating, movable nanometer grating, photodetector array are 5
Group, 2 groups are used for X-axis acceleration in detection faces, and 2 groups are used for Y-axis acceleration in detection faces, and 1 group is used for detection and accelerates from face Z axis
Degree.
Further, the making material of nanometer grating is silicon.
Further, the structural parameters of fixing nanometer grating and movable nanometer grating are：Lambda1-wavelength λ is 850nm,
Grating period A is 800nm, and dutycycle r is 0.5, and grating thickness d is 400nm.
Further, above-mentioned detection device noble gases encapsulate.
Further, described noble gases are helium.
The beneficial effects of the utility model are：The acceleration in spatial triaxial direction can be detected simultaneously, adding of ng level can be obtained
Velocity measuring resolution；It is packaged using inert gas helium, life-span length；This plant bulk only has micro-nano rank, and application is wide
General；The miniaturization of this device, integrated, high precision, multi-functional, life-span length, are suitable to popularization and application.
Brief description
Fig. 1 show this utility model embodiment High-precision double-layer nanometer grating 3-axis acceleration structure of the detecting device and illustrates
Figure.
Fig. 2 show monolayer grating illustraton of model in this utility model embodiment.
Fig. 3 show double-layer nanometer grating from areal acceleration detects schematic diagram.
Fig. 4 show acceleration detection schematic diagram in double-layer nanometer grating face.
Fig. 5 show contiguous block and movable nanometer grating structural representation.
Fig. 6 show boss and fixing nanometer grating structural representation.
Wherein：1- laser source array, 2- photodetector array, 3- contiguous block, the movable nanometer grating of 4-, 5- fixation are received
Rice grating, 6- boss, the acceleration sensitive structure of X-axis in 7- face, in 8- face the acceleration sensitive structure of Y-axis, 9- from face Z axis
Acceleration sensitive structure.
Specific embodiment
Describe this utility model specific embodiment below in conjunction with concrete accompanying drawing in detail.It should be noted that following enforcements
Example described in technical characteristic or technical characteristic combination be not construed as isolated, they can be mutually combined from
And reach superior technique effect.In the accompanying drawing of following embodiments, the identical label that each accompanying drawing occurs represents identical spy
Levy or part, can be applicable in different embodiments.
As shown in figures 1 to 6, a kind of High-precision double-layer of this utility model embodiment nanometer grating 3-axis acceleration detection means,
Including boss 6,3 axle acceleration sensitive structure 7,8,9, photodetector array 2；Fixing nanometer grating 5 is disposed with boss 6,
Boss 6 arranged beneath is had and is included with fixing corresponding laser source array 1, the 3 axle acceleration sensitive structure 7,8,9 of nanometer grating 5
Detect the nanometer grating acceleration sensitive structure of X, Y, Z axis acceleration respectively, the acceleration sensitive structure 7 of X-axis respectively in face,
The acceleration sensitive structure 8 of Y-axis, the acceleration sensitive structure from face Z axis in face, 3 axle acceleration sensitive structures 7,8,9 are located at convex
Above platform 6, described nanometer grating acceleration sensitive structure 7,8,9 is provided with and the fixing corresponding movable nanometer light of nanometer grating 5
Grid 4,3 axle acceleration sensitive structures 7,8,9 are dynamically connected by contiguous block 3 is removable with boss 6；Laser source array 1, fixing nanometer
Grating 5, movable nanometer grating 4, photodetector array 2 corresponding arrangement from bottom to top, and all on same vertical axis.
Preferably, laser source array 1, fixing nanometer grating 5, movable nanometer grating 4, photodetector array 2 are 5
Group, 2 groups are used for X-axis acceleration in detection faces, and 2 groups are used for Y-axis acceleration in detection faces, and 1 group is used for detection and accelerates from face Z axis
Degree.
Preferably, the making material of nanometer grating 4,5 is silicon.
Preferably, the structural parameters of fixing nanometer grating 5 and movable nanometer grating 4 are：Lambda1-wavelength λ is 850nm,
Grating period A is 800nm, and dutycycle r is 0.5, and grating thickness d is 400nm.
Preferably, described detection means is encapsulated with noble gases, and noble gases may be selected helium, and circuit, power supply etc. are by drawing
Line is drawn.
Grating can make the phase place of incident illumination or amplitude (or simultaneously) be modulated by periodic spatial, grating diffration
Can be mainly by decisions such as the groove depth of the wavelength, polarization characteristic and grating of incident illumination, cycle, grooveds.Property according to light wave
Matter divides, and has scalar diffraction theory and Vector Diffraction Theory；Levels of precision according to optical grating diffraction performance divides, and has near diffraction
Theory and rigorous diffraction theory.Scalar diffraction theory does not account for the vectorial property of light, is mainly used to analysis characteristic size remote
More than the grating diffration characteristic of wavelength (cycle is more than 10 times of wavelength), grating can easily be obtained according to this Theoretical Calculation
Dispersion, resolution, the grating performance indications such as diffraction efficiency, but the close wavelength that is even less than for characteristic size and wavelength
In the case of, scalar diffraction theory will lose efficacy, and calculates the result that may produce mistake, at this moment needs to manage using vector diffraction
By.Vector Diffraction Theory is the rigorous method of analysis diffraction properties, mainly includes differentiation, integration method, type method and tight
Lattice coupled wave method (Rigorous Coupled Wave Analysis, RCWA), wherein rigorous coupled wave method is extensively used
In analysis grating diffration problem.In this utility model, the characteristic size of grating is close with optical source wavelength, in order to more accurate
Analysis double-layer nanometer grating diffration characteristic, we adopt rigorous coupled wave method as the analysis side of double-layer grating diffraction characteristic
Method.
Rigorous couple-wave analysis (RCWA) are one kind directly effective Theories of Electromagnetic Field, and it is in the strict solution of grating region
Maxwell equation, the Solve problems of Maxwell equation is turned to the problem of a solution characteristic function, obtains grating region
The electromagnetic field expressions being coupled together by characteristic function, then solve perimeter strip on grating region with other regions interface
Part, finally obtains diffraction efficiency or reflection efficiency.This method is widely used in the analysis design of variously-shaped grating.Sternly
Lattice coupled-mode theory is that do not have approximate rigorous method, dielectric grating is processed as the slab guide of periodic modulation, passes through
Maxwell equation group and boundary condition carry out solving the eigen[value of waveguide mode.
As shown in figure 1, grating depth is d, the cycle is Λ to light bar phantom, and dutycycle f is/Λ, plane of incidence and xz plane
Angle be Φ (azimuth), angle of incidence be θ, Ψ is the angle of electric displacement vector E and plane of incidence, wavelength be λ.Incident area
The refractive index of I and regional transmission III is respectively nIAnd nIII.In region II, if the refractive index of grating material itself is nrd, grating
Between gap refractive index be ngr.
When grating is for lossless dielectric material, each reflection, the diffraction efficiency of transmission level time add up to 1, if lossy media,
Because light absorbs portion of energy in communication process medium, diffraction efficiency summation is less than 1.
The analysis theories of double-layer nanometer grating are also based on rigorous coupled wave approach.
Double-layer nanometer grating acceleration detection mainly has two kinds of detection modes of detection in face detection dough-making powder.Its groundwork
Principle is：When light passes through double-layer nanometer grating, when contiguous block 3 is moved by acceleration effect, contiguous block 3 drives movable nanometer light
Grid 4 are made from face or in-plane moving, there occurs horizontal or vertical relative displacement between movable nanometer grating 4 and fixing nanometer grating 5,
This small change in displacement, it will lead to Zero-order diffractive light transmission efficiencies that acute variation occurs.Saturating by detecting zero order diffracted light
Penetrate the change of the efficiency change to obtain acceleration.Movable nanometer grating 4 structure chart is as shown in figure 5, fix nanometer grating 5 structure
Figure is as shown in Figure 6.
Below in conjunction with accompanying drawing, this utility model is described further：
1st, double-layer nanometer grating detects from areal acceleration
As shown in figure 3, laser source array 1, fixing nanometer grating 5, movable nanometer grating 4 and photodetector array 2
In a vertical straight line, when contiguous block 3 is moved by acceleration effect, contiguous block 3 drives movable nanometer grating 4 to do from face fortune
Dynamic, the output of photodetector array 2 electrical quantities just has corresponding change.As shown in figure 4, the structural parameters of nanometer grating are：
Lambda1-wavelength λ is 850nm, and grating period A is 800nm, and dutycycle r is 0.5, and grating thickness d is 400nm, upper and lower two-layer light
The parameter of grid structure is identical.
When the acoplanarity displacement excursion producing between double-layer nanometer optical grating construction is 0-140nm, holding in face is no transported
Dynamic, the diffraction efficiency changing sensitivity of zero order diffracted light is maximum, has reached 1.75%/nm；Between double-layer nanometer optical grating construction
When the acoplanarity displacement change producing is more than 140nm, in face, keep without motion, the diffraction efficiency changing sensitivity meeting of zero order diffracted light
Generating period changes, and has reached 0.236%/nm.
2nd, acceleration detection in double-layer nanometer grating face
As shown in figure 4, laser source array 1, fixing nanometer grating 5, movable nanometer grating 4 and photodetector array 2
In a vertical straight line, when contiguous block 3 is moved by acceleration effect, contiguous block 3 drives movable nanometer grating 4 to do fortune in face
Dynamic, the output of photodetector array 2 electrical quantities just has corresponding change.As shown in figure 4, the structural parameters of nanometer grating are：
Lambda1-wavelength λ is 850nm, and grating period A is 800nm, and dutycycle r is 0.5, and grating thickness d is 400nm, upper and lower two-layer light
The parameter of grid structure is identical, and the spacing of upper and lower two-layer optical grating construction is 160nm.
It is sinusoidal between the diffraction efficiency change of the acceleration change of detection and zero order diffracted light in double-layer nanometer grating face
Relation, its sensitivity is 0.178%/nm.
The double-layer nanometer grating 3-axis acceleration sensitive structure schematic diagram of this utility model embodiment is as shown in Figure 2.
The nanometer grating acceleration that double-layer nanometer grating 3-axis acceleration sensitive structure includes 2 groups of detection X-axis acceleration is quick
The nanometer grating acceleration sensitive structure 8 of 7,2 groups of detection Y-axis acceleration of sense structure and the nanometer grating of 1 group of detection Z axis acceleration
Acceleration sensitive structure 9；5 groups of movable nanometer gratings 4 are provided with 5 groups of nanometer grating acceleration sensitive structures；Movable nanometer light
It is provided with 5 groups of photodetector arrays 2 above grid 4；The fixing nanometer grating 5 of arrangement and movable nanometer grating 4, light on boss 6
Electric explorer array 2 collectively constitutes acceleration sensitive device.As shown in figure 3,9,1 group of 1 group of nanometer grating acceleration sensitive structure
Fixing nanometer grating structure 2,1 group of laser source array 1 of 5,1 group of photodetector array constitutes Z axis acceleration detecting unit.
As shown in figure 4,7 or 8,1 group of fixing 5,1 group of photodetector battle array of nanometer grating structure of 1 group of nanometer grating acceleration sensitive structure
2,1 group of laser source array 1 of row constitutes X-axis or Y-axis acceleration detecting.
The beneficial effects of the utility model are：The acceleration in spatial triaxial direction can be detected simultaneously, adding of ng level can be obtained
Velocity measuring resolution；It is packaged using inert gas helium, life-span length；This plant bulk only has micro-nano rank, and application is wide
General；The miniaturization of this device, integrated, high precision, multi-functional, life-span length, are suitable to popularization and application.
Although having been presented for several embodiment of the present utility model herein, those skilled in the art should manage
Solution, in the case of without departing from this utility model spirit, can be changed to the embodiments herein.Above-described embodiment simply shows
Example property, should not be using the embodiments herein as the restriction of this utility model interest field.
Claims (6)
1. a kind of High-precision double-layer nanometer grating 3-axis acceleration detection means is it is characterised in that include boss, 3 axle accelerations
Sensitive structure, photodetector array；Fixing nanometer grating is disposed with boss, boss arranged beneath has and fixing nanometer grating
Corresponding laser source array, 3 axle acceleration sensitive structures include the nanometer grating acceleration detecting X, Y, Z axis acceleration respectively
Sensitive structure, above boss, described nanometer grating acceleration sensitive structure be provided with fixing nanometer grating is corresponding can
Dynamic nanometer grating, 3 axle acceleration sensitive structures are dynamically connected by contiguous block is removable with boss；Laser source array, fixing nanometer
Grating, movable nanometer grating, photodetector array corresponding arrangement from bottom to top, and all on same vertical axis.
2. High-precision double-layer nanometer grating 3-axis acceleration detection means as claimed in claim 1 is it is characterised in that laser light
Source array, fixing nanometer grating, movable nanometer grating, photodetector array are 5 groups, and 2 groups are used for X-axis in detection faces and accelerate
Degree, 2 groups are used for Y-axis acceleration in detection faces, and 1 group is used for detection from face Z axis acceleration.
3. High-precision double-layer nanometer grating 3-axis acceleration detection means as claimed in claim 1 is it is characterised in that nanometer light
The making material of grid is silicon.
4. High-precision double-layer nanometer grating 3-axis acceleration detection means as claimed in claim 1 is it is characterised in that fixation is received
The structural parameters of rice grating and movable nanometer grating are：Lambda1-wavelength λ is 850nm, and grating period A is 800nm, duty
It is 0.5 than r, grating thickness d is 400nm.
5. the High-precision double-layer nanometer grating 3-axis acceleration detection means as described in any one of claim 1-4, its feature exists
In described detection means noble gases encapsulate.
6. High-precision double-layer nanometer grating 3-axis acceleration detection means as claimed in claim 5 is it is characterised in that described lazy
Property gas be helium.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199069A (en) * | 2016-07-15 | 2016-12-07 | 中北大学 | A kind of High-precision double-layer nanometer grating 3-axis acceleration detection device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199069A (en) * | 2016-07-15 | 2016-12-07 | 中北大学 | A kind of High-precision double-layer nanometer grating 3-axis acceleration detection device |
| CN106199069B (en) * | 2016-07-15 | 2023-10-10 | 中北大学 | High-precision double-layer nanometer Grating triaxial acceleration detection device |
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