CN105385489A - 一种硅片切割液 - Google Patents

一种硅片切割液 Download PDF

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Publication number
CN105385489A
CN105385489A CN201510787934.9A CN201510787934A CN105385489A CN 105385489 A CN105385489 A CN 105385489A CN 201510787934 A CN201510787934 A CN 201510787934A CN 105385489 A CN105385489 A CN 105385489A
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parts
cutting fluid
silicon chip
chip cutting
silicon wafer
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陈斌
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JIANGSU JINVINPV CO Ltd
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JIANGSU JINVINPV CO Ltd
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    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M173/00—Lubricating compositions containing more than 10% water
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M107/00—Lubricating compositions characterised by the base-material being a macromolecular compound
    • C10M107/20—Lubricating compositions characterised by the base-material being a macromolecular compound containing oxygen
    • C10M107/30—Macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M107/32—Condensation polymers of aldehydes or ketones; Polyesters; Polyethers
    • C10M107/34—Polyoxyalkylenes
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/085—Phosphorus oxides, acids or salts
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/02—Hydroxy compounds
    • C10M2207/023—Hydroxy compounds having hydroxy groups bound to carbon atoms of six-membered aromatic rings
    • C10M2207/024—Hydroxy compounds having hydroxy groups bound to carbon atoms of six-membered aromatic rings having at least two phenol groups but no condensed ring
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/10—Carboxylix acids; Neutral salts thereof
    • C10M2207/16—Naphthenic acids
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2207/00—Organic non-macromolecular hydrocarbon compounds containing hydrogen, carbon and oxygen as ingredients in lubricant compositions
    • C10M2207/40—Fatty vegetable or animal oils
    • C10M2207/401—Fatty vegetable or animal oils used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2209/00—Organic macromolecular compounds containing oxygen as ingredients in lubricant compositions
    • C10M2209/10—Macromolecular compoundss obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
    • C10M2209/103—Polyethers, i.e. containing di- or higher polyoxyalkylene groups
    • C10M2209/104—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only
    • C10M2209/1045—Polyethers, i.e. containing di- or higher polyoxyalkylene groups of alkylene oxides containing two carbon atoms only used as base material
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2219/00—Organic non-macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions
    • C10M2219/04—Organic non-macromolecular compounds containing sulfur, selenium or tellurium as ingredients in lubricant compositions containing sulfur-to-oxygen bonds, i.e. sulfones, sulfoxides
    • C10M2219/044—Sulfonic acids, Derivatives thereof, e.g. neutral salts
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2030/00—Specified physical or chemical properties which is improved by the additive characterising the lubricating composition, e.g. multifunctional additives
    • C10N2030/04—Detergent property or dispersant property

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Lubricants (AREA)

Abstract

本发明公开了一种硅片切割液，按重量份数计包括以下组份：去离子水100份；聚乙二醇70～120份；植物油40～100份；螯合剂10～20份；表面活性剂2～5份。本发明具有更优秀的润滑性能，能提高硅片的切割精度，并降低切割液的使用成本。

Description

一种硅片切割液
技术领域
本发明属于化学化工技术领域，尤其涉及用于单晶硅和碳化硅切片的金属丝切割液。
背景技术
在硅片切割生产过程中，作为金属丝切割的负责耗材，硅片切割液并不可少。切割液在悬浮能力、冷却性能、润滑性能和砂浆分散性能的好坏，很大程度上决定了硅片切割的精度和效率。目前市场上普通的硅片切割液在散热冷却性能还有所欠缺，尤其是在高频率切割下难以达到尤其。而且随着切割的进行，金属丝如果磨损到一定程度后，且润滑性能会降低，导致切割精度下降，有的抗杂质能力较差，当切割硅、铁、极氧化合物等杂质的产生，还会导致切割液性能明显下降。
发明内容
发明目的：针对上述现有存在的问题和不足，本发明的目的是提供一种硅片切割液，具有更优秀的润滑性能，能提高硅片的切割精度，并降低切割液的使用成本。
技术方案：为实现上述发明目的，本发明采用以下技术方案：一种硅片切割液，按重量份数计包括以下组份：
去离子水100份；
聚乙二醇70～120份；
植物油40～100份；
螯合剂10～20份
表面活性剂2～5份。
作为优选，所述聚乙二醇的聚合度为600～800。
作为优选，所述表面活性剂为环烷酸锌盐、十二烷基磺酸钠或十二烷基硬脂酸盐。
作为优选，所述植物油为大豆油、花生油、玉米油。
作为优选，所述螯合剂由对苯二酚、三聚磷酸钠和氨基三亚甲基磷酸组成，各组分重量比为1:1.2～1.5:1.2～1.5。
有益效果：与现有技术相比，本发明切割液具有较强的碳化硅悬浮分散能力，能有效提高磨料在金属丝上的携带量；同时具有较高的润滑效果，且成本低廉，易于聚乙二醇的回收。
具体实施方式
下面结合具体实施例，进一步阐明本发明，应理解这些实施例仅用于说明本发明而不用于限制本发明的范围，在阅读了本发明之后，本领域技术人员对本发明的各种等价形式的修改均落于本申请所附权利要求所限定的范围。
实施例1
在100L的去离子水中，依次加入聚合度为800的100L聚乙二醇、50L大豆油、5L的环烷酸锌盐，并搅拌均匀，接着加入10L的三聚磷酸钠，搅匀备用。得到切割液为无色透明液体，在25℃下的粘度为27.5～32.0，比重为1.11～1.25，5%的水溶液Ph值范围为5～7,旋转粘度随温度上升而降低，45℃的旋转粘度相对于20℃的旋转粘度下降64.5%。
实施例2
在100L的去离子水中，依次加入聚合度为600的100L聚乙二醇、40L大豆油、2L的十二烷基磺酸钠，并搅拌均匀，接着加入10L的对苯二酚，搅匀备用。得到切割液为无色透明液体，在25℃下的粘度为27.5～32.0，比重为1.11～1.25，5%的水溶液Ph值范围为5～7,旋转粘度随温度上升而降低，45℃的旋转粘度相对于20℃的旋转粘度下降62.5%。

Claims (5)

1.一种硅片切割液，其特征在于，按重量份数计包括以下组份：
去离子水100份；
聚乙二醇70～120份；
植物油40～100份；
螯合剂10～20份
表面活性剂2～5份。
2.根据权利要求1所述硅片切割液，其特征在于：所述聚乙二醇的聚合度为600～800。
3.根据权利要求1所述硅片切割液，其特征在于：所述表面活性剂为环烷酸锌盐、十二烷基磺酸钠或十二烷基硬脂酸盐。
4.根据权利要求1所述硅片切割液，其特征在于：所述植物油为大豆油、花生油、玉米油。
5.根据权利要求1所述硅片切割液，其特征在于：所述螯合剂由对苯二酚、三聚磷酸钠和氨基三亚甲基磷酸组成，各组分重量比为1:1.2～1.5:1.2～1.5。
CN201510787934.9A 2015-11-17 2015-11-17 一种硅片切割液 Pending CN105385489A (zh)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106318588A (zh) * 2016-08-19 2017-01-11 灌阳县陈工选矿机械制造有限公司 一种机械硅片切割液及其制备方法
CN107030904A (zh) * 2017-05-11 2017-08-11 济源石晶光电频率技术有限公司 晶砣切割方法
CN107603693A (zh) * 2017-09-26 2018-01-19 合肥新汇成微电子有限公司 一种半导体晶圆切割液

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106318588A (zh) * 2016-08-19 2017-01-11 灌阳县陈工选矿机械制造有限公司 一种机械硅片切割液及其制备方法
CN107030904A (zh) * 2017-05-11 2017-08-11 济源石晶光电频率技术有限公司 晶砣切割方法
CN107603693A (zh) * 2017-09-26 2018-01-19 合肥新汇成微电子有限公司 一种半导体晶圆切割液

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