CN105301910B - UV LED lights source structure and parallel smooth exposure machine - Google Patents
UV LED lights source structure and parallel smooth exposure machine Download PDFInfo
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- CN105301910B CN105301910B CN201410226527.6A CN201410226527A CN105301910B CN 105301910 B CN105301910 B CN 105301910B CN 201410226527 A CN201410226527 A CN 201410226527A CN 105301910 B CN105301910 B CN 105301910B
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Abstract
The present invention relates to the technical field of exposure machine, disclose UV LED lights source structure and parallel smooth exposure machine, including UV LED lamp holders, fly's-eye lens module, level crossing and spherical mirror, along the optical path direction of UV LED light source structures, UV LED lamp holders, fly's-eye lens module, level crossing and spherical mirror are sequentially arranged；UV LED lamp beads, UV LED lamp holders and the adjacent, parallel arrangement of fly's-eye lens module are provided with UV LED, is connected between the two by the governor motion of adjustable distance between UV LED lamp holders and fly's-eye lens module.UV LED lamp holders are placed in front of fly's-eye lens module, using fly's-eye lens module, level crossing and spherical mirror, form the directional light for exposure；The UV LED light source structures are used in existing parallel exposing machine, client's update equipment is not needed, large-scale redevelopment equipment is not needed, spend minimum cost, low temperature, energy-saving and environmental protection, the exposure machine of the use UV LED light source structures of safety can be obtained, avoid delaying production, and substantially reduce cost.
Description
Technical field
The present invention relates to the technical field of exposure machine, more particularly to UV LED lights source structure and including the UV LED/light source knots
The parallel exposing machine of structure.
Background technology
It is the light-source structure 1 of Conventional parallel light exposure machine shown in reference picture 1, traditional parallel exposing machine, it uses super
High-pressure sodium lamp 10 is as light source, and the ultrahigh pressure mercury lamp 10 first passes around the optically focused of elliptical reflector 11, and light collection is to one
On first level crossing 12, the first level crossing 12 is saturating high IR light (infrared light) part of heat in the light of ultrahigh pressure mercury lamp 10
It is shot out, and by UV light (ultraviolet light) reflecting focal in ultrahigh pressure mercury lamp 10 to the second level crossing 13, the second plane
Further UV light, almost the lossless reflecting focal that obtains is to a fly's-eye lens 14 for mirror 13, and the scientific name of fly's-eye lens 14 is flat
Row light convex lens array, is also fly lens, English entitled fly eyes；The light collection come out via fly's-eye lens 14 is the
On three level crossings 15, and after the 3rd level crossing 15 reflects, it is diffused on a spherical mirror 16, spherical mirror 16 reflects large area
The uniformity is high, the parallel rays of collimation good (about 1.5 ° -5 ° of parallel half-angle), and parallel rays passes through photomask blank 17, you can
Develop on exposure glass 18, so as to complete the process entirely exposed.
From the foregoing, being all to use ultrahigh pressure mercury lamp light-source structure 1, its ultra high pressure mercury in traditional parallel exposing machine
Lamp 10 reaches the purpose for producing extensive parallel light by complicated optical texture, and still, the life-span of mercury lamp 10 generally only has
Or so 1000 hours, therefore, after 1-2 months, then need to replace primary source.And in the prior art, UV LED are (ultraviolet
Line light emitting diode) luminous efficiency be greatly improved, it is public with Japanese Ya companies, South Korea Seoul company, South Korea LG
The wafer luminous efficiency that department, Taiwan Xu Ming companies, Taiwan Lian Sheng companies etc. are the 365NM wavelength UV LED of representative is from several years ago
<15%, to current close to 40%, also, UV LED have the advantage that compared with ultrahigh pressure mercury lamp：
1), UV LED life-span is at 20000 more than hour, therefore can avoid frequently changing the trouble of light source；
2), UV LED effective spectral ranges are narrow, and its light utilization efficiency is high, more saves；
3), UV LED are not mercurous, will not produce ozone, more environmentally-friendly；
4) high pressure, is not contained in UV LED/light sources driving power supply, it is safer.
The development of current science and technology make it that LED UV light sources substitute ultra high pressure mercury lamp source.Over the past two years, have three
Plant alternate application scheme to rise, the first is for representative with gram science and technology, Shenzhen great river photoelectricity etc. in Shenzhen's indigo plant spectrum
UV LED scan-type directional light exposure light source structures；It is for second that vibrations light filling formula using French AOTUMARK companies as representative is big
Area UV LED directional light exposure light source structures；The third is the straight explicit UV LED exposures by representative of Dainippon Screen Manufacturing Co company
Light-source structure.
Three kinds of above-mentioned UV LED/light sources substitute ultrahigh pressure mercury lamp light source package, and it is used in parallel exposing machine, all
Need thoroughly to change the optical texture inside conventional exposure machine, to reach the effect that can produce directional light, so, for by tradition
Ultrahigh pressure mercury lamp light-source structure 1 exposure machine, it will realize the exposure machine for conveniently repacking UV LED light source structures into,
It is then helpless, it needs to redesign a whole set of optical texture for obtaining directional light, to substitute existing exposure machine completely
Interior optical texture, can realize the effect for obtaining directional light.But, about more than 99% exposure machine is all on the market at present
Using traditional ultrahigh pressure mercury lamp light-source structure 1, also, the price of a whole set of optical texture for obtaining directional light is held high very much
It is expensive, the 1/3 of whole exposure machine cost is almost accounted for, so, not only cost is higher, and optical texture is redesigned, also cause to expose
Mechanical-optical setup is complicated, and needs to interrupt the problem of production causes to delay production.
The content of the invention
It is an object of the invention to provide UV LED light source structures, it is intended to solves parallel exposing machine of the prior art and adopts
With UV LED/light sources, it is necessary to redesign optical texture, the problem of causing cost too high, complicated and delay production.
The present invention is achieved in that UV LED light source structures, including UV LED lamp holders, fly's-eye lens module, level crossing
And spherical mirror, along the optical path direction of the UV LED lights source structure, the UV LED lamp holders, fly's-eye lens module, level crossing
And spherical mirror is sequentially arranged；The UV LED lamp beads for outgoing ultraviolet light, the UV LEDs are provided with the UV LED
Head and the adjacent, parallel arrangement of the fly's-eye lens module, it is saturating by can adjust the UV LED lamp holders and the compound eye between the two
The governor motion connection of distance between mirror module.
Present invention also offers parallel exposing machine, it includes above-mentioned UV LED light source structures.
Compared with prior art, the UV LED light source structures that the present invention is provided, UV LED lamp holders are directly placed on multiple by it
In front of eyelens module, the light that UV LED lamp beads are sent then is formd via fly's-eye lens module, level crossing and spherical mirror
Directional light for exposure；The UV LED light source structures are used in existing parallel exposing machine, it can subtract existing
Elliptical reflector and two level crossings in technology in parallel exposing machine so that its optical texture is simpler, it is not necessary to
Client's update equipment, it is not required that large-scale redevelopment equipment, spends minimum cost, you can make it that heat is big, power consumption is high,
The exposure machine for having the use ultrahigh pressure mercury lamp of pollution is transformed into low temperature, energy-saving and environmental protection, the use UV LED light source structures of safety
Exposure machine, it is to avoid delay production, and substantially reduce cost.
Using the parallel exposing machine of above-mentioned UV LED lights source structure, it is avoided using ultrahigh pressure mercury lamp as light source, tool
Have the advantages that low temperature, it is energy-saving and environmental protection, safe, its relative device of saving is used, and can save production cost and space.
Brief description of the drawings
Fig. 1 is the schematic front view of the light-source structure of parallel exposing machine of the prior art；
Fig. 2 is the schematic front view of UV LED lights source structure provided in an embodiment of the present invention；
Fig. 3 is the part isometric schematic diagram of UV LED lights source structure provided in an embodiment of the present invention；
Fig. 4 is the exploded perspective schematic diagram between UV LED lamp holders provided in an embodiment of the present invention and fly's-eye lens module
One；
Fig. 5 is the exploded perspective schematic diagram between UV LED lamp holders provided in an embodiment of the present invention and fly's-eye lens module
Two；
Fig. 6 is the exploded perspective figure one of driver provided in an embodiment of the present invention；
Fig. 7 is the exploded perspective figure two of driver provided in an embodiment of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The realization of the present invention is described in detail below in conjunction with specific embodiment.
Shown in reference picture 2~7, the preferred embodiment provided for the present invention.
With reference to shown in 2~5, the UV LED lights source structure 2 that the present invention is provided is used in parallel exposing machine, or, its
It can also be used in other equipment for needing to expose, be not limited to the parallel exposing machine in the present embodiment.
UV LED lights source structure 2 includes UV LED lamp holders 23, fly's-eye lens module 24, level crossing 25 and spherical mirror 26,
Along the exit direction of light path, UV LED lamp holders 23, fly's-eye lens module 24, level crossing 25 and spherical mirror 26 are sequentially arranged；
Wherein, UV LED lamp holders 23 and the adjacent, parallel arrangement of fly's-eye lens module 24, and be placed in the front of fly's-eye lens module 24, inside set
There are UV LED/light sources, the UV LED are used to project UV light；The light of the outgoing of UV LED lamp holders 23 passes through fly's-eye lens module 24,
Level crossing 25 is incident upon, light reflexes to spherical mirror 26 via level crossing 25, parallel rays is formed after being reflected via spherical mirror 26, should
Parallel rays passes through photomask blank 27, then can develop on exposure glass 28.
Adjacent, parallel arrangement, is connected by governor motion between the two between UV LED lamp holders 23 and fly's-eye lens module 24
Connect, the governor motion can be used for the distance between regulation UV LED lamp holders 23 and fly's-eye lens module 24.
The UV LED lights source structure 2 of above-mentioned offer, it uses UV LED/light sources, is directly placed on UV LED lamp holders 23 multiple
The front of eyelens module 24, also, the light that UV LED/light sources are sent passes through fly's-eye lens module 24, level crossing 25 and ball
After face mirror 26, directional light can be formed, for being exposed to exposure glass.By the UV LED lights source structure 2 of above-mentioned offer
It is used in parallel exposing machine of the prior art, UV LED lamp holders 23 directly can be placed on fly's-eye lens module 24 by it
Front, instead of ultra high pressure mercury lamp source, large area uniform parallel is directly obtained using the level crossing 25 and spherical mirror 26 of rear end
Ultraviolet light.And the elliptical reflector in parallel exposing machine in the prior art and two level crossings can be subtracted so that
Its optical texture is simpler, during replacing, directly disassembles some devices and then may be used, it is not necessary to redesigns optics knot
Structure, will not delay production, and can further reduce cost, in addition, by governor motion, can adjust UV LED lamp holders 23 with
Fly's-eye lens module 24 so that the UV LED lights source structure 2 reaches more effect, obtains more uniform directional light.
Above-mentioned UV LED lights source structure 2 is used in existing parallel exposing machine, updates and sets without client
It is standby, without large-scale redevelopment equipment, spend minimum cost i.e. can be so that heat is big, power consumption is high, have the use superelevation of pollution
The exposure machine of pressure mercury lamp is transformed into low temperature, energy-saving and environmental protection, the exposure machine of the use UV LED lights source structure 2 of safety, therefore it is
Conventional parallel light exposure machine transforms best solution.
Level crossing 25 is generally by the sour Crystal city of soda-lime glass or heat-resisting boron silicon, and its reflecting surface is done for ultraviolet
The special aluminium film plating layer of optimization, its will can be radiated at ultraviolet thereon almost loss-free reflecting focal to fly's-eye lens mould
In group 24.
The scientific name of fly's-eye lens module 24 is also fly lens directional light convex lens array, and English entitled flyeyes is
Using multiple vitreosil glass directional light convex lens monomers by high temperature key and by the way of array form, the optical surface of the lens will also
Ultraviolet transmittance enhancing coating film treatment is done, effect is to allow as much as possible pass through of ultraviolet light to go, and exiting surface is greatly improved
The uniformity in region, the uniformity of directional light is higher, parallel half-angle is smaller, then exposure imaging of the directional light on exposure glass
Precision is higher.
In the present embodiment, governor motion includes the guide rod 20 of multiple adjacent, parallel arrangements, the one of the plurality of guide rod 20
End is fixedly connected on fly's-eye lens module 24, and its other end extends towards UV LED lamp holders 23, and activity is located in UV LEDs
In first 23, so, lamp holder can then be moved along the plurality of guide rod 20, so as to reduce or expander and fly's-eye lens module 24
The distance between.
Certainly, as other embodiments, the two ends of guide rod 20 can activity be located in UV LED lamp holders 23 and compound eye
In lens module 24, or, one end is fixedly connected in UV LED lamp holders 23, and other end activity is located in fly's-eye lens module 24
In, the change of distance between UV LED lamp holders 23 and fly's-eye lens module 24 can be realized.
Certainly, governor motion also can also be other structures, such as directly by UV LED lamp holders 23 and fly's-eye lens module
24 are connected on same guide rail, are moved using it on guide rail, realize the change of distance between the two.
UV LED lamp holders 23 include being provided with the installation cavity of opening, the installation in lamp head shell 233, the rear end of the lamp head shell 233
The opening of chamber is arranged towards fly's-eye lens module 24；Cloth on circuit board 234, circuit board 234 is provided with the installation cavity of lamp head shell 233
Provided with multiple UV LED lamp beads 235, UV LED/light sources are formed, so, the plurality of UV LED lamp beads 235 are also towards fly's-eye lens mould
Group 24 is arranged so that its light sent can pass through fly's-eye lens module 24；UV LED lamp beads 235 pass through low temperature solder(ing) paste
Welding procedure is connected on circuit board 234, and then direct profit is screwed in the installation cavity inside lamp head shell 233 to circuit board 234
In, and filler is used as using the silicone grease of high thermal conductivity coefficient between the contact surface of installation cavity at it.
Above-mentioned guide rod 20 is located in UV LED lamp holders 23, and pilot hole is provided with four ends of lamp head shell 233
238, guide rod 20 is directly located in the pilot hole 238, and can be walked in pilot hole 238, certainly, according to lamp head shell
233 set shape different, and the facilities of pilot hole 238 are also corresponding to be changed, and is not limited in the setting side in the present embodiment
Formula.
Certainly, after the distance between UV LED lamp holders 23 and fly's-eye lens module 24 are determined, then need UV LEDs
First 23 are fixed, in the present embodiment, and lock hole is provided with lamp head shell 233, and the lock hole connects pilot hole 238, and with leading
, then can be with so, by being locked into screw rod in lock hole so that screw top is stayed on guide rod 20 to the perpendicular arrangement in hole 238
Make the fixed position on guide rod 20 of UV LED lamp holders 23, certainly, it is necessary to when moving UV LED lamp holders 23, then only need to unclamp spiral shell
Bar then may be used.
Parallel light lens support 236, the directional light are provided between multiple UV LED lamp beads 235 and fly's-eye lens module 24
Lens carrier 236 is provided with multiple parallel light lens 237, and the plurality of parallel light lens 237 are right against multiple UV LED lamp beads
235 arrangements, so, the light that multiple UV LED lamp beads 235 are sent then first passes through parallel light lens 237, then into fly's-eye lens
Module 24.
Specifically, at the opening of the installation cavity for the lamp head shell 233 that above-mentioned parallel light lens support 236 is fixed, it can be with
Fixed by modes such as screw connections, it is of course also possible to fixed by other a variety of fixed forms, or, the parallel light lens
Support 236 can be directly placed in installation cavity, so, then make it that the structure of UV LED lamp holders 23 is compacter.It is parallel at this
Multiple hole clippings are provided with optical lens support 236, multiple parallel light lens 237 are then directly entrenched in the plurality of hole clipping, and in order to
More consolidated so that being connected between parallel light lens 237 and hole clipping, UV gemel connections, or other engagings can be used between two kinds
Structure is connected.
Parallel light lens 237 can carry out secondary light-distribution to the light of the outgoing of UV LED lamp beads 235 so that light it is parallel
Half-angle very little, generally less than 3 °, certainly, the parallel light lens 237 can use fused silica free form surface parallel light lens.
When UV LED lamp holders 23 are in running order, in order to reduce its luminous heat produced of internal UV LED lamp beads 235
Amount, UV LED lights source structure 2 also includes magnetism servo-electric motor water-cooling 22；And the waterway 230 of opening is provided with the front end of lamp head shell 233, should
Covered with cover plate 231 in the opening of waterway 230, the cover plate 231 causes the formation confined space of waterway 230, and in cover plate 231
If the interface of two connection waterways 230, two interfaces are connected by water pipe with magnetism servo-electric motor water-cooling 22 respectively, so, water cooling unit
Water-cooling circulating is then formd between structure 22, two water pipes and waterway 230, is constantly circulated in the Water-cooling circulating by cold water,
The amount of heat produced in lamp head shell 233 can then be taken away.
In order to which junction is more closed between cover plate 231 and lamp head shell 233, gland is provided with embedded groove, and the insertion is recessed
Groove shape in a ring, wherein sealing ring 232 is embedded with, when the lid of cover plate 231 is located on the front end of lamp head shell 233, the ring of sealing ring 232
The periphery of the opening of waterway 230 is wound on, so as to also function to the closed effect to waterway 230；Sealing ring 232 uses high temperature resistant silicon
Glue material matter, its heatproof reaches 260 DEG C, and silica gel hardness is 50 ° -60 °.
Water cooling quick plug 2311 is connected with the interface of cover plate 231, so, is easy to the quick connection of water pipe, also just
Disassembled in by water pipe from cover plate 231.
In the present embodiment, in order to further increase water-cooled effect, multiple fin channels are provided with the bottom of waterway 230
239, the plurality of fin channels 239 are adjacently positioned, and it further increases the contact area between lamp head shell 233 and cold water so that
Heat in lamp head shell 233 is taken away by cold water as early as possible.
The fin channels 239 are integrally formed with lamp head shell 233 to be processed, and it all uses hard anodizing handling process
Processing, case hardness can reach more than HV540, can more resistance to water circulation wash away and corrode.
In order to monitor the temperature of lamp head shell 233, it is to avoid because temperature is too high, cause lamp holder to damage, it is provided with the lamp head shell 233
Temperature sensor is installed in positioning hole, the positioning hole, the temperature for monitoring lamp head shell 233, so that user is according to lamp head shell
233 temperature, takes the corresponding type of cooling.Specifically, the model of temperature sensor can be LM35 or DS18B20.
It is provided with lamp head shell 233 in fixing groove 2302, the fixing groove 2302 and is provided with electric connector 2301, the electric connector
2301 are electrically connected at circuit board 234, and are emerging in outside lamp head shell 233, for being connected with outside power supply, so as to whole
Individual lamp holder provides power supply and supported.
The fly's-eye lens module 24 used in the present embodiment is existing original paper, and it is parallel exposing machine in the prior art
Configuration original paper, here is omitted.
Shown in reference picture 6 and 7, UV LED lights source structure 2 also includes driver 21, and the driver 21 is electrically connected with UV LED
The circuit board 234 of lamp holder 23, is powered using current constant mode to UV LED lamp holders 23, certainly, and the driver 21 directly passes through
Electric wire is connected with the electric connector 2301 of UV LED lamp holders 23 then may be used.
Driver 21, which includes being provided with inner chamber, inner chamber in housing, the housing, is provided with Switching Power Supply 212, drive circuit board 234
And temperature control panel, the temperature control panel is used for the signal for receiving temperature sensor in UV LED lamp holders 23, when UV LEDs
During first 23 temperature over-limit condition, then temporarily work, and further radiated using radiating mode.
Display screen 214, multiple buttons 218, AC sockets 216, signal terminal 217 are additionally provided with the side wall of housing
Deng；Display screen 214 is used for the working condition for showing whole driver 21；Button circuit board 215 is provided with the cavity of housing, its with
Multiple buttons 218 are electrically connected with, so, and user is input into signal value button circuit board 215 by depresses button 218, are realized
Operation to driver 21；AC sockets 216 are then used to be connected with external power source etc.；Signal terminal 217 then can be used for
Outside signal terminal connection.
Multiple radiator fans 213 are additionally provided with the radiating to driver 21, the inner chamber of the housing in order to realize, it is the plurality of to dissipate
Hot-air fan 213 is emerging in outside housing, and the heat in the inner chamber of driver 21 is taken away by endless form of drying.For above-mentioned switch electricity
Source 212 and the set location of drive circuit board 234, the plurality of radiator fan 213 also correspond to diverse location arrangement respectively, so that
Realize the radiating to main heater element.
In the present embodiment, housing includes upper casing 210 and lower casing 211, mutually covers to form housing between the two, certainly its
It can be that other multiple structures are constituted, be not limited to structure in the present embodiment.
The parallel exposing machine that the present embodiment is also provided, it is so, parallel that includes above-mentioned UV LED lights source structure 2
Light exposure machine then uses UV LED/light sources, has the advantages that low temperature, energy-saving and environmental protection, safe, and in actual transformation process, can
Directly to be transformed on existing parallel exposing machine, production will not be delayed, and substantially reduce cost.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
Any modifications, equivalent substitutions and improvements made within refreshing and principle etc., should be included in the scope of the protection.
Claims (8)
1.UV LED light source structures, it is characterised in that including UV LED lamp holders, fly's-eye lens module, level crossing and spherical mirror,
Along the optical path direction of the UV LED lights source structure, the UV LED lamp holders, fly's-eye lens module, level crossing and spherical mirror according to
Sequence is arranged；The UV LED lamp beads for outgoing ultraviolet light, the UV LED lamp holders and the compound eye are provided with the UV LED
The adjacent, parallel arrangement of lens module, between the two by can adjust the UV LED lamp holders and the spacing of the fly's-eye lens module
From governor motion connection, the governor motion includes the guide rod of multiple adjacent, parallel arrangements, and one end of the guide rod is solid
Surely the fly's-eye lens module is connected to, the other end is actively located in the UV LED lamp holders towards the UV LED lamp holders,
The lamp holder is provided with pilot hole and lock hole, the lock hole and the perpendicular arrangement of the pilot hole, the lock hole and is provided with
Lock nut for withstanding the guide rod, the UV LED lamp holders include lamp head shell, and the front end of the lamp head shell, which is provided with, opens
The waterway of mouth, the bottom of the waterway is convexly equipped with multiple fin channels being adjacently positioned, the fin channels and the lamp
Head capsule, which is integrally formed, to be processed.
2. UV LED lights source structure as claimed in claim 1, it is characterised in that opening is provided with the rear end of the lamp head shell
It is provided with installation cavity, the installation cavity on circuit board, the circuit board and is connected with multiple UV LED lamp beads, the lamp bead court
Arranged to the fly's-eye lens module.
3. UV LED lights source structure as claimed in claim 2, it is characterised in that multiple UV LED lamp beads and the compound eye
Parallel light lens support is provided between lens module, the parallel light lens support is provided with multiple parallel light lens, Duo Gesuo
Parallel light lens are stated to correspond to respectively with multiple UV LED lamp beads just to arrangement.
4. UV LED lights source structure as claimed in claim 2 or claim 3, it is characterised in that the opening capping of the waterway has lid
Plate, the cover plate is provided with two interfaces for being respectively communicated with the waterway, and interface described in two is connected to water cooling by water pipe respectively
Mechanism.
5. UV LED lights source structure as claimed in claim 2 or claim 3, it is characterised in that be embedded with the lamp head shell for supervising
Survey the temperature sensor of the lamp head shell temperature.
6. UV LED lights source structure as claimed in claim 2 or claim 3, it is characterised in that institute is provided with the end angle of the lamp head shell
Pilot hole is stated, the guide rod is actively located in the pilot hole, and the lamp head shell is provided with the lock hole.
7. UV LED lights source structure as claimed in claim 5, it is characterised in that the UV LED lights source structure includes being used to give
The driver that UV LED lamp holders are powered, the driver is included in the housing with inner chamber, the inner chamber provided with Switching Power Supply, drive
Move circuit board and be electrically connected at the temperature sensor and receive the temperature control panel of its temperature signal, the side of the housing
In wall provided with can reality UV LED lamp holder temperature informations display screen.
8. parallel exposing machine, it is characterised in that including the UV LED light source structures described in any one of claim 1~7.
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| CN201410226527.6A CN105301910B (en) | 2014-05-26 | 2014-05-26 | UV LED lights source structure and parallel smooth exposure machine |
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| EP3495050A1 (en) * | 2017-12-07 | 2019-06-12 | Syddansk Universitet | Fluid based cooling system |
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| CN105589302A (en) * | 2016-03-14 | 2016-05-18 | 东莞王氏港建机械有限公司 | Ultraviolet light exposure system capable of emitting light in parallel and exposure machine |
| JP6514828B2 (en) * | 2016-08-12 | 2019-05-15 | 株式会社小糸製作所 | Lighting system and sensor system |
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| CN107748482A (en) * | 2017-11-20 | 2018-03-02 | 张家港奇点光电科技有限公司 | A kind of Multifunctional LED parallel exposing machine |
| CN108508708A (en) * | 2018-04-08 | 2018-09-07 | 河南百合特种光学研究院有限公司 | A kind of UV-LED exposure light sources holder |
| CN108535970A (en) * | 2018-06-06 | 2018-09-14 | 广州嘉禾盛信息科技有限公司 | A kind of scan-type UV exposure light source systems of dynamic calibration |
| CN110376853A (en) * | 2019-08-27 | 2019-10-25 | 爱司凯科技股份有限公司 | High-precision full-automatic sided exposure machine |
| CN112817211A (en) * | 2021-01-08 | 2021-05-18 | 湖南松井新材料股份有限公司 | Plate making method of screen printing plate and prepared screen printing plate |
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| CN114325890A (en) * | 2021-12-30 | 2022-04-12 | 拓荆科技股份有限公司 | Optical lighting device and optical modification equipment |
| CN116224721B (en) * | 2023-02-03 | 2023-11-14 | 广东科视光学技术股份有限公司 | Light source of exposure machine |
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| CN1732403A (en) * | 2002-12-26 | 2006-02-08 | 三洋电机株式会社 | Illuminating device and porjection type image display unit |
| CN102449552A (en) * | 2010-02-24 | 2012-05-09 | 恩斯克科技有限公司 | Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate |
| CN203870394U (en) * | 2014-05-26 | 2014-10-08 | 张河生 | UV LED light source structure and parallel-light exposure machine |
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| EP3495050A1 (en) * | 2017-12-07 | 2019-06-12 | Syddansk Universitet | Fluid based cooling system |
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