CN116224721B - Light source of exposure machine - Google Patents
Light source of exposure machine Download PDFInfo
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- CN116224721B CN116224721B CN202310081526.6A CN202310081526A CN116224721B CN 116224721 B CN116224721 B CN 116224721B CN 202310081526 A CN202310081526 A CN 202310081526A CN 116224721 B CN116224721 B CN 116224721B
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- heat dissipation
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- 230000001502 supplementing effect Effects 0.000 claims abstract description 70
- 230000017525 heat dissipation Effects 0.000 claims abstract description 51
- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 239000011324 bead Substances 0.000 claims abstract description 48
- 238000001816 cooling Methods 0.000 claims abstract description 38
- 239000000843 powder Substances 0.000 claims abstract description 28
- 238000009792 diffusion process Methods 0.000 claims abstract description 17
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 11
- 239000000463 material Substances 0.000 claims description 14
- 229910000838 Al alloy Inorganic materials 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 239000002861 polymer material Substances 0.000 claims description 7
- 229920000431 shape-memory polymer Polymers 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 230000000694 effects Effects 0.000 abstract description 33
- 238000005286 illumination Methods 0.000 abstract description 9
- 230000003044 adaptive effect Effects 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 6
- 230000008859 change Effects 0.000 abstract description 4
- 239000006185 dispersion Substances 0.000 abstract description 4
- 238000004020 luminiscence type Methods 0.000 abstract 1
- 239000012528 membrane Substances 0.000 description 24
- 230000003014 reinforcing effect Effects 0.000 description 8
- 230000000903 blocking effect Effects 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- 238000005057 refrigeration Methods 0.000 description 6
- 230000005855 radiation Effects 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 230000003667 anti-reflective effect Effects 0.000 description 3
- 230000003446 memory effect Effects 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000009795 derivation Methods 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000001795 light effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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- 230000000191 radiation effect Effects 0.000 description 1
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- 239000000126 substance Substances 0.000 description 1
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
Abstract
The invention discloses a light source of an exposure machine, which belongs to the technical field of light sources of exposure machines, wherein the light of UVLED lamp beads is gathered through a condensing lens to reduce dispersion, meanwhile, each UVLED lamp bead is subjected to temperature monitoring by means of a temperature measurement radiating mechanism, and independent and adaptive heat dissipation is carried out on each UVLED lamp bead through driving a telescopic baffle film and a cooling device, so that the heat dissipation is more complete, the heat dissipation effect is enhanced, the stable work of the UVLED lamp beads is ensured, and an extended light supplementing mechanism utilizes the illumination cooperation of a luminescent lamp and light supplementing fluorescent powder to compensate and enhance the dispersed light of the UVLED lamp beads in an edge area, so that the luminescence of the UVLED lamp beads in the edge area is ensured to be stable, the illumination exposure effect is enhanced, and a diffusion heat conducting mechanism drives a plurality of heat conducting wires to be dispersed through the phase change of a deformation memory film to accelerate the heat conduction and heat dissipation, the heat dissipation efficiency is improved, the heat interference on the light supplementing is reduced, and the use effect is enhanced.
Description
Technical Field
The invention relates to the technical field of exposure machine light sources, in particular to a light source of an exposure machine.
Background
An exposure machine refers to a machine device that transfers image information on a film or other transparent body to a surface coated with a photosensitive substance by turning on light to emit ultraviolet rays of UVA wavelength. The exposure machine light source usually adopts a UVLED light source, and has the advantages of long service life, instant lighting, high light effect, energy saving, good monochromaticity, narrow light-emitting spectrum and no infrared ray and heat radiation.
Because the luminous power of a single UVLED light source is small and the luminous angle is large, a plurality of UVLED light sources are often adopted for arranging and emitting light, so that the use requirement is met, but as the number of the UVLED light sources is increased, the heat generated during operation of the UVLED light sources is also gradually increased, a collective heat dissipation mode is often adopted in the prior art for dissipating heat, but the collective heat dissipation is limited, the heat dissipation of the UVLED light sources cannot be achieved in a face-to-face manner, the heat dissipation of part of the UVLED light sources is insufficient, the heat dissipation is insufficient and comprehensive, and meanwhile, the UVLED light sources at the edge are scattered in light emission, insufficient in brightness and lack of corresponding compensation mechanisms.
Disclosure of Invention
1. Technical problem to be solved
Aiming at the problems existing in the prior art, the invention aims to provide a light source of an exposure machine, the light of the UVLED lamp beads is gathered through a condensing lens, dispersion is reduced, meanwhile, each UVLED lamp bead is subjected to temperature monitoring by means of a temperature measuring and radiating mechanism, and independent and adaptive heat radiation is carried out on each UVLED lamp bead through driving a telescopic baffle film and a cooling device, so that the heat radiation effect is fully and comprehensively enhanced, the stable work of the UVLED lamp beads is ensured, the extended light supplementing mechanism utilizes the illumination cooperation of a luminescent lamp and light supplementing fluorescent powder, the light dispersed by the UVLED lamp beads in an edge area is compensated and enhanced, the light emission stability of the UVLED lamp beads in the edge area is ensured, the illumination exposure effect is enhanced, the diffusion heat conducting mechanism drives a plurality of heat conducting wires to be dispersed through the phase change of a deformation memory film, the heat conduction and the heat radiation are accelerated, the heat radiation efficiency is improved, the interference of the heat on the light supplementing is reduced, and the use effect is enhanced.
2. Technical proposal
In order to solve the problems, the invention adopts the following technical scheme.
The utility model provides a light source of exposure machine, includes the lamp stand, the internally mounted of lamp stand has a plurality of evenly distributed's lamp frame, the internally mounted of lamp frame has the UVLED lamp pearl, the internally mounted of lamp frame has the spotlight lens, and it is located the upside of UVLED lamp pearl, be equipped with the temperature measurement cooling mechanism between lamp frame and the lamp stand, the inside of lamp stand is equipped with and extends the light supplementing mechanism, and extends the inside of light supplementing mechanism and be equipped with diffusion heat conduction mechanism, this scheme gathers the light of UVLED lamp pearl through spotlight lens, reduce the dispersion, carry out the temperature monitoring to every UVLED lamp pearl with the help of the temperature measurement cooling mechanism simultaneously, and carry out independent and the heat dissipation that suits to every UVLED lamp pearl through driving flexible fender membrane and cooling device, make the heat dissipation more abundant comprehensive, strengthen the radiating effect, guarantee the steady work of UVLED lamp pearl, and extend the light supplementing mechanism and utilize the light of luminescent lamp and light of light supplementing fluorescent powder to shine the cooperation, compensate the reinforcing to the dispersed light of edge region, make the luminous assurance of LED lamp pearl steady, reinforcing the illumination of edge region, and the diffusion heat conduction effect is improved through the diffusion heat conduction of diffusion membrane, the heat dissipation effect is improved, the heat dissipation effect is used to the phase change, and heat dissipation effect is improved.
Further, the surface of the condensing lens is provided with an anti-reflection film, the outer end of the anti-reflection film is provided with an anti-static layer, stray light on the surface of the condensing lens can be reduced through the arrangement of the anti-reflection film, so that the light transmittance of the condensing lens is increased, the condensing performance is improved, the condensing effect is enhanced, and the anti-static layer can eliminate static accumulation on the surface of the condensing lens and reduce the adsorption of dust.
Further, the temperature measurement heat dissipation mechanism is including installing the case between lamp frame and lamp stand inside, cooling device is installed to the interior bottom of case, two tight flexible fender membranes of drive that offset are installed to the inner wall of case, temperature sensor is installed to the outer end of UVLED lamp pearl, and its respectively with cooling device and the flexible fender membrane electric connection of drive, the inner wall of case and the outer end of the flexible fender membrane of drive all are equipped with the thermal insulation layer, and temperature measurement heat dissipation mechanism is through the temperature sensor corresponding with every UVLED lamp pearl, monitors its temperature at UVLED lamp pearl during operation to on the flexible fender membrane of feedback to after the temperature risees, make cooling device carry out the refrigeration that suits according to the temperature of temperature sensor feedback, two flexible fender membranes of drive also separate to suitable position according to the temperature of temperature sensor feedback simultaneously, open the air conditioning release mouth that suits, carry out refrigeration cooling, monitor through temperature sensor and the outer end of the flexible fender membrane of drive, and the independent cooling device's cooling down realization is according to the temperature of every UVLED lamp pearl that carries out the work and carries out the cooling down, and the cooling device's the cooling down condition that the cooling device's of cooling down is more fully steady, the cooling down of every UVLED lamp that the realization is cooled down that the work of the cooling bead is more suitable for the whole face-to the LED.
Furthermore, the insulating layer is made of extremely fine hollow ceramic particle materials, the initial state between the storage box and the two driving telescopic baffle films is a closed state, and the insulating layer made of the extremely fine hollow ceramic particle materials has a good insulating effect and can effectively isolate the influence of the internal temperature and the external temperature of the storage box under the closed state.
Further, extend light filling mechanism including installing a plurality of electric telescopic handle on the lamp stand inner bottom, a plurality of fixedly connected with light filling lamp shade between the upper end of electric telescopic handle, transparent cover plate is installed to the inner wall of light filling lamp shade, and its outer end installs the luminescent light, be equipped with light filling fluorescent powder between transparent cover plate and the light filling lamp shade, the upper end of lamp stand is excavated and is had the export, the outer end of light filling lamp shade is located the export, and the upper end of light filling lamp shade flushes with the upper end of lamp stand, extends light filling mechanism and drives the light filling lamp shade outwards through electric telescopic handle and extend, carries out certain blocking to the light of the dispersed light of the regional UVLED lamp pearl of edge, and the while luminescent light shines light filling fluorescent powder, makes light filling fluorescent powder send with the dispersed light of UVLED lamp pearl, compensates the reinforcing to the dispersed light of the regional UVLED lamp pearl of edge, makes the luminous assurance stable, reinforcing illumination exposure effect.
Further, the light of light filling fluorescent powder and the light phase-match of UVLED lamp pearl, the inner wall fixedly connected with of derivation mouth returns shape seal ring, and returns shape seal ring and the outer end in close contact of light filling lamp shade, the light of light filling fluorescent powder and the light phase-match of UVLED lamp pearl, can effectually compensate the reinforcing to the light of UVLED lamp pearl, and the setting of returning shape seal ring makes the dust be difficult for entering into inside the lamp stand through the gap between export and the light filling lamp shade, reinforcing dustproof effect.
Further, the diffusion heat conduction mechanism comprises a plurality of deformation memory membranes, a plurality of evenly distributed mounting openings are formed in the left end and the right end of the light supplementing lamp shade, the outer end of the deformation memory membranes is fixedly connected with the inner wall of the mounting openings, a plurality of connecting frames are fixedly connected with the outer end of the light emitting lamp and the inner wall of the light supplementing lamp shade, a plurality of heat conducting wires are fixedly connected between the outer end of the light emitting lamp and the outer end of the deformation memory membranes, a heat dissipation layer is arranged on the surface of the deformation memory membranes, the diffusion heat conduction mechanism drives the deformation memory membranes to deform through lamplight of the light emitting lamp, the heat conducting wires are pulled to be outwards dispersed, heat inside the light emitting lamp and the light supplementing lamp shade is dispersed and conducted, heat residues are reduced, heat conduction is quickened, heat is radiated outwards by matching with the heat dissipation layer, and the heat dissipation effect is enhanced.
Furthermore, the deformation memory film body is made of photoinduced shape memory polymer materials, the initial state of the deformation memory film body is a straight state, the deformation memory film body is matched with the lamplight of the luminous lamp, the deformation memory film body made of the photoinduced shape memory polymer materials has a memory effect, deformation is outwards projected under the irradiation of the lamplight of the luminous lamp, and the initial straight state is restored after the lamplight disappears.
Further, a plurality of heat conduction wires are all made of metal copper materials, a plurality of heat conduction wires are in petal-shaped distribution, aluminum alloy powder is filled in the heat dissipation layer, good heat conduction effect is achieved through the heat conduction wires made of the metal copper materials, aluminum alloy powder is filled in the heat dissipation layer, and heat dissipation can be accelerated.
3. Advantageous effects
Compared with the prior art, the invention has the advantages that:
(1) According to the scheme, the light of the UVLED lamp beads is gathered through the condensing lens, dispersion is reduced, temperature monitoring is carried out on each UVLED lamp bead by means of the temperature measuring and radiating mechanism, independent and adaptive heat dissipation is carried out on each UVLED lamp bead through the driving of the telescopic baffle film and the cooling device, the heat dissipation is enabled to be more complete and comprehensive, the heat dissipation effect is enhanced, stable operation of the UVLED lamp beads is guaranteed, the light of the edge area is compensated and enhanced by the extending light supplementing mechanism through illumination cooperation of the light emitting lamp and the light supplementing fluorescent powder, the stability is guaranteed to light emission of the UVLED lamp beads in the edge area, the illumination exposure effect is enhanced, the diffusion heat conducting mechanism drives a plurality of heat conducting wires through phase change of the deformation memory film body, heat conduction and heat dissipation are accelerated, the heat dissipation efficiency is improved, the interference of the heat on the light supplementing is reduced, and the use effect is enhanced.
(2) The surface of the condensing lens is provided with the antireflection film, the outer end of the antireflection film is provided with the antistatic layer, and stray light on the surface of the condensing lens can be reduced through the arrangement of the antireflection film, so that the light transmittance of the condensing lens is increased, the condensing performance is improved, the condensing effect is enhanced, and the antistatic layer can eliminate static accumulation on the surface of the condensing lens and reduce the adsorption of dust.
(3) The temperature measurement heat dissipation mechanism is including installing the case between lamp frame and lamp stand inside, cooling device is installed to the inner bottom end of case, two tight drive flexible fender membranes that offset are installed to the inner wall of case, temperature sensor is installed to the outer end of UVLED lamp pearl, and it respectively with cooling device and the flexible fender membrane electric connection of drive, the inner wall of case and the outer end of the flexible fender membrane of drive all are equipped with the insulating layer, temperature measurement heat dissipation mechanism is through the temperature sensor corresponding with every UVLED lamp pearl, monitor its temperature at UVLED lamp pearl during operation, and after the temperature risees, feedback to cooling device and the flexible fender membrane of drive, make cooling device carry out the refrigeration that suits according to the temperature of temperature sensor feedback, two flexible fender membranes of drive also separate to suitable position according to the temperature of temperature sensor feedback simultaneously, open the cool air release mouth that suits, cool down, through temperature sensor and UVLED lamp pearl's one-to-one monitoring, and cooling device's independent cooling down, realize carrying out the heat dissipation that suits according to the work intensification condition of every UVLED lamp pearl, make the comprehensive cooling down of every LED lamp pearl fully stabilize the work.
(4) The insulating layer is made of extremely fine hollow ceramic particle materials, the initial state between the storage box and the two driving telescopic baffle membranes is a closed state, and the insulating layer made of the extremely fine hollow ceramic particle materials has a good insulating effect and can effectively isolate the influence of the internal temperature and the external temperature of the storage box when the storage box is in the closed state.
(5) The extended light supplementing mechanism comprises a plurality of electric telescopic rods arranged at the inner bottom end of the lamp holder, a light supplementing lampshade is fixedly connected between the upper ends of the electric telescopic rods, a transparent cover plate is arranged on the inner wall of the light supplementing lampshade, a light emitting lamp is arranged at the outer end of the light supplementing lampshade, light supplementing fluorescent powder is arranged between the transparent cover plate and the light supplementing lampshade, a lead-out opening is cut at the upper end of the lamp holder, the outer end of the light supplementing lampshade is positioned in the lead-out opening, the upper end of the light supplementing lampshade is flush with the upper end of the lamp holder, the extended light supplementing mechanism drives the light supplementing lampshade to extend outwards through the electric telescopic rods, light scattered by UVLED lamp beads in an edge area is blocked to a certain extent, meanwhile, the light emitting lamp emits light matched with the UVLED lamp beads, the light scattered by the UVLED lamp beads in the edge area is compensated and enhanced, the light of the UVLED lamp beads in the edge area is ensured to be stable, and the light exposing effect of illumination is enhanced.
(6) The lamp light of light filling fluorescent powder and the lamp light phase-match of UVLED lamp pearl, the inner wall fixedly connected with of derivation mouth returns shape seal ring, and the outer end in close contact of shape seal ring and light filling lamp shade, the lamp light phase-match of light filling fluorescent powder can effectually compensate the reinforcing to the lamp light of UVLED lamp pearl, and the setting of shape seal ring returns, make the dust be difficult for entering into inside the lamp stand through the gap between export and the light filling lamp shade, reinforcing dustproof effect.
(7) The diffusion heat conduction mechanism comprises a plurality of deformation memory membranes, a plurality of evenly distributed mounting openings are formed in the left end and the right end of the light supplementing lamp shade, the outer end of the deformation memory membranes is fixedly connected with the inner wall of the mounting opening, the outer end of the light emitting lamp is fixedly connected with a plurality of connecting frames, a plurality of heat conducting wires are fixedly connected between the outer end of the light emitting lamp and the outer end of the deformation memory membranes, a heat dissipation layer is arranged on the surface of the deformation memory membranes, the diffusion heat conduction mechanism drives the deformation memory membranes to deform through lamplight of the light emitting lamp, the heat conducting wires are outwards protruded, the heat conducting wires are pulled to be outwards dispersed, the heat inside the light emitting lamp and the light supplementing lamp shade is dispersed and conducted, heat residues are reduced, heat conduction is accelerated, the heat is quickly and outwards emitted by matching with the heat dissipation layer, and the heat dissipation effect is enhanced.
(8) The deformation memory film body is made of photoinduced shape memory polymer materials, the initial state of the deformation memory film body is a flat state, the deformation memory film body is matched with the lamplight of the luminous lamp, and the deformation memory film body made of the photoinduced shape memory polymer materials has a memory effect, deforms and protrudes outwards under the irradiation of the lamplight of the luminous lamp, and returns to the initial flat state after the lamplight disappears.
(9) The heat conducting wires are made of metal copper materials, the heat conducting wires are distributed in a petal mode, aluminum alloy powder is filled in the heat dissipation layer, good heat conducting effect is achieved through the heat conducting wires made of the metal copper materials, and the aluminum alloy powder is filled in the heat dissipation layer, so that heat dissipation can be accelerated.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of a partial cross-sectional structure of the present invention;
FIG. 3 is a schematic cross-sectional view of a condensing lens according to the present invention;
FIG. 4 is a schematic view of a partial cross-sectional structure of an extended light supplement mechanism according to the present invention;
FIG. 5 is an enlarged schematic view of the structure of FIG. 4A;
fig. 6 is a schematic perspective view of a light supplementing lampshade according to the present invention.
The reference numerals in the figures illustrate:
100. a lamp holder; 200. a lamp frame; 300. UVLED lamp beads; 400. a condensing lens; 401. an antireflection film; 402. an antistatic layer; 500. a temperature measuring and radiating mechanism; 501. a storage box; 502. a cooling device; 503. driving the telescopic baffle film; 504. a temperature sensor; 505. a thermal insulation layer; 600. an extended light supplementing mechanism; 601. an electric telescopic rod; 602. a light supplementing lampshade; 603. a light emitting lamp; 604. a transparent cover plate; 605. light supplementing fluorescent powder; 700. a diffusion heat conduction mechanism; 701. a deformation memory film body; 702. a heat conducting wire; 703. and (5) connecting a frame.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention; it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present invention are within the protection scope of the present invention.
In the description of the present invention, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "configured to," "engaged with," "connected to," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
Examples:
referring to fig. 1-6, a light source of an exposure machine includes a lamp holder 100, a plurality of uniformly distributed lamp frames 200 are installed in the lamp holder 100, UVLED lamp beads 300 are installed in the lamp frames 200, a condensing lens 400 is installed in the lamp frames 200 and located on the upper side of the UVLED lamp beads 300, a temperature measurement and heat dissipation mechanism 500 is arranged between the lamp frames 200 and the lamp holder 100, an extended light supplementing mechanism 600 is arranged in the lamp holder 100, and a diffusion heat conduction mechanism 700 is arranged in the extended light supplementing mechanism 600.
Referring to fig. 2, an anti-reflective film 401 is disposed on the surface of the condensing lens 400, an anti-static layer 402 is disposed at the outer end of the anti-reflective film 401, and stray light on the surface of the condensing lens 400 can be reduced by the arrangement of the anti-reflective film 401, so that the light transmittance of the condensing lens 400 is increased, the condensing performance is improved, the condensing effect is enhanced, and the anti-static layer 402 can eliminate static accumulation on the surface of the condensing lens 400 and reduce dust adsorption.
Referring to fig. 2, the temperature measurement and heat dissipation mechanism 500 includes a storage box 501 installed between the lamp frame 200 and the lamp holder 100, a cooling device 502 is installed at the inner bottom end of the storage box 501, two tight driving telescopic blocking films 503 are abutted against the inner wall of the storage box 501, a temperature sensor 504 is installed at the outer end of the uv led lamp bead 300, and is electrically connected with the cooling device 502 and the driving telescopic blocking films 503 respectively, a thermal insulation layer 505 is respectively arranged at the inner wall of the storage box 501 and the outer end of the driving telescopic blocking films 503, the temperature measurement and heat dissipation mechanism 500 monitors the temperature of each uv led lamp bead 300 through a temperature sensor 504 corresponding to each uv led lamp bead 300 when the uv led lamp bead 300 works, and feeds back to the cooling device 502 and the driving telescopic blocking films 503 after the temperature rises, so that the cooling device 502 performs adaptive refrigeration according to the temperature fed back by the temperature sensor 504, and simultaneously, the two driving telescopic blocking films 503 are separated to proper positions according to the temperature fed back by the temperature sensor 504, and an adaptive cool air release port is opened for refrigeration, and the temperature sensor 504 and the corresponding to the uv led lamp 300 are cooled, and each uv lamp 300 is cooled down more stably and cooled by the independent monitoring of the temperature sensor 504.
Referring to fig. 2, the insulating layer 505 is made of an ultrafine hollow ceramic particle material, the initial state between the storage box 501 and the two driving telescopic blocking films 503 is a closed state, and the insulating layer 505 made of the ultrafine hollow ceramic particle material has a good insulating effect, and can effectively isolate the influence of the internal temperature and the external temperature of the storage box 501 in the closed state.
Referring to fig. 4 and 6, the extended light supplementing mechanism 600 includes a plurality of electric telescopic rods 601 mounted on the inner bottom of the lamp holder 100, a light supplementing lampshade 602 is fixedly connected between the upper ends of the electric telescopic rods 601, a transparent cover plate 604 is mounted on the inner wall of the light supplementing lampshade 602, a light emitting lamp 603 is mounted on the outer end of the light supplementing lampshade, a light supplementing fluorescent powder 605 is arranged between the transparent cover plate 604 and the light supplementing lampshade 602, a lead-out opening is cut on the upper end of the lamp holder 100, the outer end of the light supplementing lampshade 602 is located in the lead-out opening, the upper end of the light supplementing lampshade 602 is flush with the upper end of the lamp holder 100, the extended light supplementing mechanism 600 drives the light supplementing lampshade 602 to extend outwards through the electric telescopic rods 601, light dispersed in an edge area is blocked to a certain extent, meanwhile, the light emitting lamp 603 emits light, the light supplementing fluorescent powder 605 irradiates, the light dispersed in the edge area is compensated and enhanced, the light dispersed in the UVLED lamp 300 is matched with the UVLED lamp bead 300, and the light dispersed in the edge area is ensured to be stable, and the light-emitting effect of the UVLED lamp bead 300 is enhanced.
Referring to fig. 4, the light of the light supplementing fluorescent powder 605 is matched with the light of the UVLED lamp bead 300, the inner wall of the outlet is fixedly connected with a square sealing collar, the square sealing collar is closely contacted with the outer end of the light supplementing lampshade 602, the light of the light supplementing fluorescent powder 605 is matched with the light of the UVLED lamp bead 300, the light of the UVLED lamp bead 300 can be effectively compensated and enhanced, and the square sealing collar is arranged, so that dust is not easy to enter the lamp holder 100 through a gap between the outlet and the light supplementing lampshade 602, and the dustproof effect is enhanced.
Referring to fig. 4-6, the diffusion heat conduction mechanism 700 includes a plurality of deformation memory films 701, a plurality of evenly distributed mounting openings are cut at the left and right ends of the light supplementing lamp shade 602, the outer ends of the deformation memory films 701 are fixedly connected with the inner walls of the mounting openings, the outer ends of the light emitting lamps 603 are fixedly connected with a plurality of connecting frames 703 with the inner walls of the light supplementing lamp shade 602, a plurality of heat conducting wires 702 are fixedly connected between the outer ends of the light emitting lamps 603 and the outer ends of the deformation memory films 701, a heat dissipation layer is arranged on the surface of the deformation memory films 701, the diffusion heat conduction mechanism 700 drives the deformation memory films 701 to deform through the lamplight of the light emitting lamps 603, the heat conducting wires 702 are outwards protruded, the heat inside the light emitting lamps 603 and the light supplementing lamp shade 602 are outwards dispersed and conducted, heat residues are reduced, heat conduction is accelerated, and the heat is rapidly outwards emitted by matching with the heat dissipation layer, and the heat dissipation effect is enhanced.
Referring to fig. 5-6, the deformation memory film 701 is made of a photo-induced shape memory polymer material, and the initial state of the deformation memory film 701 is a flat state, the deformation memory film 701 is matched with the light of the light-emitting lamp 603, and the deformation memory film 701 made of the photo-induced shape memory polymer material has a memory effect, and deforms to bulge outwards under the irradiation of the light-emitting lamp 603, and returns to the initial flat state after the light disappears.
Referring to fig. 4-5, the plurality of heat conductive wires 702 are made of metal copper material, the plurality of heat conductive wires 702 are distributed in a petal shape, aluminum alloy powder is filled in the heat dissipation layer, the heat conductive wires 702 made of metal copper material have good heat conduction effect, and aluminum alloy powder is filled in the heat dissipation layer, so that heat dissipation can be accelerated.
In the invention, when a related technician uses the plurality of UVLED lamp beads 300 to emit light, the electric telescopic rod 601 drives the light supplementing lamp shade 602 to extend outwards, the lamp light scattered by the UVLED lamp beads 300 in the edge area is blocked to a certain extent by encircling the outer sides of the plurality of UVLED lamp beads 300, meanwhile, the light emitting lamp 603 emits light, the light supplementing fluorescent powder 605 is irradiated, the light supplementing fluorescent powder 605 emits light matched with the UVLED lamp beads 300, the light scattered by the UVLED lamp beads 300 in the edge area is compensated and enhanced, the light of the UVLED lamp beads 300 in the edge area is not easy to darken, the stable light emitting effect is ensured, the lamp light irradiation of the light emitting lamp 603 is influenced, the plurality of deformation memory films 701 are outwards protruded, the plurality of heat conducting wires 702 are pulled to be outwards scattered, and the heat inside the light emitting lamp 603 and the light supplementing lamp shade 602 is scattered and conducted, the heat is reduced, heat conduction is quickened, the heat is conducted outwards rapidly, heat interference is reduced, and in the working process of the UVLED lamp beads 300, the temperatures of the UVLED lamp beads are monitored one by one through the temperature sensors 504, the temperature is fed back to the cooling device 502 and the driving telescopic baffle film 503, the cooling device 502 works according to the temperature fed back by the temperature sensors 504, the cooling device is adaptively refrigerated, meanwhile, the two driving telescopic baffle films 503 are separated to the proper positions according to the temperature fed back by the temperature sensors 504, the adaptive cold air release opening is opened, refrigeration and cooling are carried out, the heat dissipation which is adaptive according to the working temperature rise condition of each UVLED lamp bead 300 is achieved, the heat dissipation and cooling are more complete, and the stable work of each UVLED lamp bead 300 is guaranteed.
The above description is only of the preferred embodiments of the present invention; the scope of the invention is not limited in this respect. Any person skilled in the art, within the technical scope of the present disclosure, may apply to the present invention, and the technical solution and the improvement thereof are all covered by the protection scope of the present invention.
Claims (8)
1. A light source for an exposure machine, comprising a lamp holder (100), characterized in that: the lamp comprises a lamp holder (100), wherein a plurality of lamp frames (200) which are uniformly distributed are arranged in the lamp holder (100), UVLED lamp beads (300) are arranged in the lamp frames (200), a condensing lens (400) is arranged in the lamp frames (200), the condensing lens is arranged on the upper side of the UVLED lamp beads (300), a temperature measuring and radiating mechanism (500) is arranged between the lamp frames (200) and the lamp holder (100), an extending light supplementing mechanism (600) is arranged in the lamp holder (100), and a diffusion heat conducting mechanism (700) is arranged in the extending light supplementing mechanism (600);
the light supplementing mechanism (600) comprises a plurality of electric telescopic rods (601) arranged at the inner bottom end of a lamp holder (100), a plurality of light supplementing lamp covers (602) are fixedly connected between the upper ends of the electric telescopic rods (601), transparent cover plates (604) are arranged on the inner walls of the light supplementing lamp covers (602), luminescent lamps (603) are arranged at the outer ends of the light supplementing lamp covers, light supplementing fluorescent powder (605) is arranged between the transparent cover plates (604) and the light supplementing lamp covers (602), a lead-out opening is cut at the upper end of the lamp holder (100), the outer ends of the light supplementing lamp covers (602) are located in the lead-out opening, and the upper ends of the light supplementing lamp covers (602) are flush with the upper ends of the lamp holder (100).
2. The light source of claim 1, wherein: the surface of the condensing lens (400) is provided with an antireflection film (401), and the outer end of the antireflection film (401) is provided with an antistatic layer (402).
3. The light source of claim 1, wherein: the temperature measurement heat dissipation mechanism (500) comprises a storage box (501) arranged between the lamp frame (200) and the inside of the lamp holder (100), a cooling device (502) is arranged at the inner bottom end of the storage box (501), two tight driving telescopic baffle films (503) are arranged on the inner wall of the storage box (501), a temperature sensor (504) is arranged at the outer end of each UVLED lamp bead (300), the temperature sensor is electrically connected with the cooling device (502) and the driving telescopic baffle films (503) respectively, and a heat insulation layer (505) is arranged at the inner wall of the storage box (501) and the outer end of each driving telescopic baffle film (503).
4. A light source for an exposure machine according to claim 3, wherein: the thermal insulation layer (505) is made of extremely fine hollow ceramic particle materials, and an initial state between the storage box (501) and the two driving telescopic baffle films (503) is a closed state.
5. The light source of claim 1, wherein: the lamplight of the light supplementing fluorescent powder (605) is matched with the lamplight of the UVLED lamp bead (300), the inner wall of the export is fixedly connected with a back-shaped sealing sleeve ring, and the back-shaped sealing sleeve ring is tightly contacted with the outer end of the light supplementing lampshade (602).
6. The light source of claim 1, wherein: the diffusion heat conduction mechanism (700) comprises a plurality of deformation memory film bodies (701), a plurality of evenly distributed mounting openings are formed in the left end and the right end of the light supplementing lamp shade (602), the outer end of the deformation memory film body (701) is fixedly connected with the inner wall of the mounting opening, the outer end of the light emitting lamp (603) is fixedly connected with a plurality of connecting frames (703) with the inner wall of the light supplementing lamp shade (602), a plurality of heat conduction wires (702) are fixedly connected between the outer end of the light emitting lamp (603) and the outer end of the deformation memory film body (701), and a heat dissipation layer is arranged on the surface of the deformation memory film body (701).
7. The light source of claim 6, wherein: the deformation memory film body (701) is made of photoinduced shape memory polymer materials, the initial state of the deformation memory film body (701) is a straight state, and the deformation memory film body (701) is matched with the lamplight of the luminous lamp (603).
8. The light source of claim 6, wherein: the heat conducting wires (702) are made of metal copper materials, the heat conducting wires (702) are distributed in a petal shape, and aluminum alloy powder is filled in the heat dissipation layer.
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| CN202310081526.6A CN116224721B (en) | 2023-02-03 | 2023-02-03 | Light source of exposure machine |
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| CN202310081526.6A CN116224721B (en) | 2023-02-03 | 2023-02-03 | Light source of exposure machine |
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| CN116224721B true CN116224721B (en) | 2023-11-14 |
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| CN116224721A (en) | 2023-06-06 |
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