CN107748482A - A kind of Multifunctional LED parallel exposing machine - Google Patents
A kind of Multifunctional LED parallel exposing machine Download PDFInfo
- Publication number
- CN107748482A CN107748482A CN201711154058.1A CN201711154058A CN107748482A CN 107748482 A CN107748482 A CN 107748482A CN 201711154058 A CN201711154058 A CN 201711154058A CN 107748482 A CN107748482 A CN 107748482A
- Authority
- CN
- China
- Prior art keywords
- multifunctional led
- graduated scale
- shell
- exposing machine
- led parallel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Cultivation Of Plants (AREA)
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
Abstract
The invention discloses a kind of Multifunctional LED parallel exposing machine, including shell, leg, cushion block, falsework structure, heat abstractor, lamp bracket, lamp source, auxiliary lighting apparatus and control panel, described leg to weld from left and right sides of the bottom of shell；Described cushion block is arranged on the middle and lower part of leg；Described falsework structure is arranged on the upper right of lamp bracket.The longitudinal graduated scale of the present invention is arranged on slide rail by regulating block, is advantageous to lateral attitude of the convenient regulation exposed part on falsework body；Located lateral frame is socketed in the right side of longitudinal graduated scale, is advantageous to lengthwise position of the convenient regulation exposed part on falsework body；Air Filter is arranged on the right side of fixed frame, is advantageous to prevent dust from entering fixed frame pair, coordinates circulation pipe and cooling fan, further improves the radiating effect to lamp source；Fluorescent tube uses scalable plastic film capicitor, is advantageous to facilitate the irradiating angle of adjusting illuminating lamp, and further increase uses function.
Description
Technical field
The invention belongs to exposure machine technical field, more particularly to a kind of Multifunctional LED parallel exposing machine.
Background technology
General printed circuit board (PCB) or semiconductor chip are first coated when being exposed developing manufacture process on machined object surface
One layer of photoresistance, then by light source irradiation by the photoresist layer of the wiring pattern image on original copy to machined object surface,
So that the chemical property of photoresist layer produces change because of the irradiation of light source, then resist of delustering is recycled to be irradiated by light source
Photoresistance or unexposed photoresistance from machined object surface remove, with formed corresponding to original copy configuration, this equipment
Referred to as exposure machine.
It is poor to light source cooling effect and not square but existing LED parallel exposing machines do not enrich also there is function
Just exposed part is adjusted the position on falsework the problem of.
Therefore, invent a kind of Multifunctional LED parallel exposing machine and seem very necessary.
The content of the invention
In order to solve the above-mentioned technical problem, the present invention provides a kind of Multifunctional LED parallel exposing machine, existing to solve
LED parallel exposing machine functions are not enriched, and to light source cooling effect difference and are inconvenient to adjust exposed part position on falsework
The problem of.A kind of Multifunctional LED parallel exposing machine, including shell, leg, cushion block, falsework structure, heat abstractor, lamp bracket,
Lamp source, auxiliary lighting apparatus and control panel, described leg are welded from left and right sides of the bottom of shell；Described cushion block installation
In the middle and lower part of leg；Described falsework structure is arranged on the upper right of lamp bracket；Described heat abstractor is arranged on lamp source
Bottom, and on the shell；Described lamp bracket is arranged on the upper right of shell；Described lamp source is arranged in lamp bracket
Between position；Described auxiliary lighting apparatus is arranged on the top of shell；Described control panel is arranged on the right upper portion of shell；
Described falsework structure includes falsework body, horizontal graduated scale, slide rail, regulating block, longitudinal graduated scale, located lateral frame and
Regulating bolt, described horizontal graduated scale are secured transverse to the bottom of falsework body；Described slide rail is arranged on horizontal scale
The bottom of chi；Described regulating block is arranged on slide rail；Described longitudinal graduated scale welds Ei on the top of regulating block.
Preferably, described heat abstractor includes fixed frame, blower rack, Air Filter, water tank, circulating pump, circulation pipe and dissipates
Air-heater, described blower rack are arranged on the lower inside of fixed frame；Described water tank is arranged on the right side of the bottom of fixed frame；Institute
The circulating pump stated is arranged on the left upper portion of water tank；Described circulation pipe is arranged on the inside upper part of fixed frame, and at both ends point
It is not connected with water tank and circulating pump.
Preferably, described auxiliary lighting apparatus includes battery, sucker, fluorescent tube, illuminating lamp and power switch, described
Sucker is arranged on the bottom of battery；Described illuminating lamp is arranged on the right side of battery by fluorescent tube；Described power switch
It is embedded in the preceding surface of battery；Described illuminating lamp and power switch are electrically connected with battery respectively.
Preferably, described longitudinal graduated scale is arranged on slide rail by regulating block.
Preferably, described located lateral frame is socketed in the right side of longitudinal graduated scale.
Preferably, described regulating bolt is arranged on the junction of regulating block and slide rail.
Preferably, described battery by sucker suction on the top of shell.
Preferably, described Air Filter is arranged on the right side of fixed frame.
Preferably, described fluorescent tube uses scalable plastic film capicitor.
Compared with prior art, beneficial effects of the present invention are：
1st, in the present invention, described longitudinal graduated scale is arranged on slide rail by regulating block, is advantageous to convenient regulation exposure
Lateral attitude of the part on falsework body.
2nd, in the present invention, described located lateral frame is socketed in the right side of longitudinal graduated scale, is advantageous to convenient regulation exposure
Lengthwise position of the part on falsework body.
3rd, in the present invention, described regulating bolt is arranged on the junction of regulating block and slide rail, is advantageous to consolidate fixed block
It is scheduled on slide rail.
4th, in the present invention, for described battery by sucker suction on the top of shell, it is convenient by floor light to be advantageous to
Device is adsorbed on shell, and facilitates dismounting when not in use.
5th, in the present invention, described Air Filter is arranged on the right side of fixed frame, is advantageous to prevent dust from entering fixed frame
It is right, coordinate circulation pipe and cooling fan, further improve the radiating effect to lamp source.
6th, in the present invention, described fluorescent tube uses scalable plastic film capicitor, is advantageous to facilitate the irradiation of adjusting illuminating lamp
Angle, further increase use function.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of the falsework structure of the present invention.
Fig. 3 is the structural representation of the heat abstractor of the present invention.
Fig. 4 is the structural representation of the auxiliary lighting apparatus of the present invention.
In figure：
1st, shell；2nd, leg；3rd, cushion block；4th, falsework structure；41st, falsework body；42nd, horizontal graduated scale；43rd, it is sliding
Rail；44th, regulating block；45th, longitudinal graduated scale；46th, located lateral frame；47th, regulating bolt；5th, heat abstractor；51st, fixed frame；52、
Blower rack；53rd, Air Filter；54th, water tank；55th, circulating pump；56th, circulation pipe；57th, cooling fan；6th, lamp bracket；7th, lamp source；8th, aid in
Lighting device；81st, battery；82nd, sucker；83rd, fluorescent tube；84th, illuminating lamp；85th, power switch；9th, control panel.
Embodiment
The present invention is described further below in conjunction with accompanying drawing：
Embodiment：
As shown in accompanying drawing 1 to accompanying drawing 4
The present invention provides a kind of Multifunctional LED parallel exposing machine, including shell 1, leg 2, cushion block 3, falsework structure
4, heat abstractor 5, lamp bracket 6, lamp source 7, auxiliary lighting apparatus 8 and control panel 9, described leg 2 are welded from the bottom of shell 1
The left and right sides；Described cushion block 3 is arranged on the middle and lower part of leg 2；The top that described falsework structure 4 is arranged on lamp bracket 6 is right
Side；Described heat abstractor 5 is arranged on the bottom of lamp source 7, and on shell 1；Described lamp bracket 6 is arranged on shell 1
Upper right；Described lamp source 7 is arranged on the centre position of lamp bracket 6；Described auxiliary lighting apparatus 8 is arranged on the upper of shell 1
Portion；Described control panel 9 is arranged on the right upper portion of shell 1；Described falsework structure 4 includes falsework body 41, horizontal
To graduated scale 42, slide rail 43, regulating block 44, longitudinal graduated scale 45, located lateral frame 46 and regulating bolt 47, described horizontal quarter
Degree chi 42 is secured transverse to the bottom of falsework body 41；Described slide rail 43 is arranged on the bottom of horizontal graduated scale 42；It is described
Regulating block 44 be arranged on slide rail 43 on；Described longitudinal graduated scale 45 welds Ei on the top of regulating block 44.
In above-described embodiment, specifically, described heat abstractor 5 includes fixed frame 51, blower rack 52, Air Filter 53, water
Case 54, circulating pump 55, circulation pipe 56 and cooling fan 57, described blower rack 52 are arranged on the lower inside of fixed frame 51；Institute
The water tank 54 stated is arranged on the right side of the bottom of fixed frame 51；Described circulating pump 55 is arranged on the left upper portion of water tank 54；It is described
Circulation pipe 56 be arranged on the inside upper part of fixed frame 51, and be connected respectively with water tank 54 and circulating pump 55 at both ends.
In above-described embodiment, specifically, described auxiliary lighting apparatus 8 includes battery 81, sucker 82, fluorescent tube 83, shine
Bright lamp 84 and power switch 85, described sucker 82 are arranged on the bottom of battery 81；Described illuminating lamp 84 passes through fluorescent tube 83
Installed in the right side of battery 81；Described power switch 85 is embedded in the preceding surface of battery 81；The described He of illuminating lamp 84
Power switch 85 is electrically connected with battery 81 respectively.
In above-described embodiment, specifically, described longitudinal graduated scale 45 is arranged on slide rail 43 by regulating block 44.
In above-described embodiment, specifically, described located lateral frame 46 is socketed in the right side of longitudinal graduated scale 45.
In above-described embodiment, specifically, described regulating bolt 47 is arranged on the junction of regulating block 44 and slide rail 43.
In above-described embodiment, specifically, described battery 81 is adsorbed on the top of shell 1 by sucker 82.
In above-described embodiment, specifically, described Air Filter 53 is arranged on the right side of fixed frame 51.
In above-described embodiment, specifically, described fluorescent tube 83 uses scalable plastic film capicitor.
Operation principle
The present invention in the course of the work, in use, the water in water tank 54 is drawn into circulation pipe 56 using circulating pump 55
Then it is flowed into water tank 54 and carries out water circulation, the bottom of lamp source 7 can be radiated, then using cooling fan 57 to it
Further radiating, position of the regulating block 44 on slide rail 43 is adjusted by regulating bolt 47 according to the size of exposed part, further
Adjust position of longitudinal graduated scale 45 on falsework body 41.
Using technical solutions according to the invention, or those skilled in the art is under the inspiration of technical solution of the present invention,
Similar technical scheme is designed, and reaches above-mentioned technique effect, is to fall into protection scope of the present invention.
Claims (9)
1. a kind of Multifunctional LED parallel exposing machine, it is characterised in that the Multifunctional LED parallel exposing machine, including shell
(1), leg (2), cushion block (3), falsework structure (4), heat abstractor (5), lamp bracket (6), lamp source (7), auxiliary lighting apparatus (8)
With control panel (9), described leg (2) is welded from left and right sides of the bottom of shell (1)；Described cushion block (3) is arranged on branch
The middle and lower part of pin (2)；Described falsework structure (4) is arranged on the upper right of lamp bracket (6)；Described heat abstractor (5) is set
Put in the bottom of lamp source (7), and on shell (1)；Described lamp bracket (6) is arranged on the upper right of shell (1)；It is described
Lamp source (7) be arranged on lamp bracket (6) centre position；Described auxiliary lighting apparatus (8) is arranged on the top of shell (1)；Institute
The control panel (9) stated is arranged on the right upper portion of shell (1)；Described falsework structure (4) includes falsework body (41),
Horizontal graduated scale (42), slide rail (43), regulating block (44), longitudinal graduated scale (45), located lateral frame (46) and regulating bolt
(47), described horizontal graduated scale (42) is secured transverse to the bottom of falsework body (41)；Described slide rail (43) is arranged on
The bottom of horizontal graduated scale (42)；Described regulating block (44) is arranged on slide rail (43)；Described longitudinal graduated scale (45) weldering
Ei is met on the top of regulating block (44).
2. Multifunctional LED parallel exposing machine as claimed in claim 1, it is characterised in that described heat abstractor (5) includes
Fixed frame (51), blower rack (52), Air Filter (53), water tank (54), circulating pump (55), circulation pipe (56) and cooling fan
(57), described blower rack (52) is arranged on the lower inside of fixed frame (51)；Described water tank (54) is arranged on fixed frame
(51) on the right side of bottom；Described circulating pump (55) is arranged on the left upper portion of water tank (54)；Described circulation pipe (56) is set
Inside upper part in fixed frame (51), and be connected respectively with water tank (54) and circulating pump (55) at both ends.
3. Multifunctional LED parallel exposing machine as claimed in claim 1, it is characterised in that described auxiliary lighting apparatus (8)
Including battery (81), sucker (82), fluorescent tube (83), illuminating lamp (84) and power switch (85), described sucker (82) installation
In the bottom of battery (81)；Described illuminating lamp (84) is arranged on the right side of battery (81) by fluorescent tube (83)；Described
Power switch (85) is embedded in the preceding surface of battery (81)；Described illuminating lamp (84) and power switch (85) respectively with electric power storage
Pond (81) is electrically connected with.
4. Multifunctional LED parallel exposing machine as claimed in claim 1, it is characterised in that described longitudinal graduated scale (45)
It is arranged on by regulating block (44) on slide rail (43).
5. Multifunctional LED parallel exposing machine as claimed in claim 1, it is characterised in that described located lateral frame (46)
It is socketed in the right side of longitudinal graduated scale (45).
6. Multifunctional LED parallel exposing machine as claimed in claim 1, it is characterised in that described regulating bolt (47) peace
Mounted in the junction of regulating block (44) and slide rail (43).
7. Multifunctional LED parallel exposing machine as claimed in claim 3, it is characterised in that described battery (81) passes through
Sucker (82) is adsorbed on the top of shell (1).
8. Multifunctional LED parallel exposing machine as claimed in claim 2, it is characterised in that described Air Filter (53) installation
On the right side of fixed frame (51).
9. Multifunctional LED parallel exposing machine as claimed in claim 3, it is characterised in that described fluorescent tube (83) uses can
Telescopic plastic bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711154058.1A CN107748482A (en) | 2017-11-20 | 2017-11-20 | A kind of Multifunctional LED parallel exposing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711154058.1A CN107748482A (en) | 2017-11-20 | 2017-11-20 | A kind of Multifunctional LED parallel exposing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107748482A true CN107748482A (en) | 2018-03-02 |
Family
ID=61250663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711154058.1A Pending CN107748482A (en) | 2017-11-20 | 2017-11-20 | A kind of Multifunctional LED parallel exposing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107748482A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270799A (en) * | 2018-09-29 | 2019-01-25 | 张家港奇点光电科技有限公司 | A kind of exposure machine convenient for safeguarding |
| CN109283802A (en) * | 2018-09-29 | 2019-01-29 | 张家港奇点光电科技有限公司 | A kind of multi-functional exposure machine base station device |
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| CN105301910A (en) * | 2014-05-26 | 2016-02-03 | 张河生 | Uv led light source structure and parallel light exposure machine |
| CN205175302U (en) * | 2015-11-10 | 2016-04-20 | 中国水产科学研究院南海水产研究所 | A instrument for measuring purple sea urchin shell footpath and shell are high |
| CN206287714U (en) * | 2016-10-25 | 2017-06-30 | 湖北生态工程职业技术学院 | A kind of Multifunctional English teaching aid |
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2017
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Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2795899Y (en) * | 2005-04-20 | 2006-07-12 | 张鸿明 | Exposure machine cooler |
| US7197828B2 (en) * | 2005-05-31 | 2007-04-03 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method utilizing FPD chuck Z position measurement |
| CN201308325Y (en) * | 2008-11-23 | 2009-09-16 | 浙江大学宁波理工学院 | Mirror |
| CN102369484A (en) * | 2010-02-05 | 2012-03-07 | 日本精工株式会社 | Light irradiation device for exposure devices, method for controlling turn-on of same, exposure device, exposure method, and substrate |
| CN201796226U (en) * | 2010-08-26 | 2011-04-13 | 深圳市鑫富宝科技有限公司 | Cooling device of exposure lamp on exposure machine |
| CN203132478U (en) * | 2013-02-27 | 2013-08-14 | 上海宝钢工业技术服务有限公司 | Tool for measuring track rail waist thickness |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109270799A (en) * | 2018-09-29 | 2019-01-25 | 张家港奇点光电科技有限公司 | A kind of exposure machine convenient for safeguarding |
| CN109283802A (en) * | 2018-09-29 | 2019-01-29 | 张家港奇点光电科技有限公司 | A kind of multi-functional exposure machine base station device |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
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| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180302 |