CN109270799A - A kind of exposure machine convenient for safeguarding - Google Patents
A kind of exposure machine convenient for safeguarding Download PDFInfo
- Publication number
- CN109270799A CN109270799A CN201811144382.XA CN201811144382A CN109270799A CN 109270799 A CN109270799 A CN 109270799A CN 201811144382 A CN201811144382 A CN 201811144382A CN 109270799 A CN109270799 A CN 109270799A
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- Prior art keywords
- lamp
- exposure machine
- exposure
- glued
- lamp bracket
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
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- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
Abstract
The present invention provides a kind of exposure machine convenient for safeguarding, including exposure machine shell, battery, adjustable hose, power switch, assist illuminator, cover, handle, replaceable Exposing Lamp lamp frame structure, spare Exposing Lamp lamp bracket stores mount structure, adjustable bottom bracket structure, fixed outline border, guide duct, fan supporter and minisize axial-flow blower, the battery are glued to the top of exposure machine shell；Upper right of the adjustable hose cementing in battery；The power switch is glued to the right side of battery；The assist illuminator is glued to the right end of adjustable hose.The present invention, which exposes, is embedded with LED exposure lamp on the upside of lamp bracket, when damaging conducive to the LED illumination lamp on individually exposure lamp bracket, will individually expose lamp bracket dismounting, and facilitate and carry out safeguarding the device；Spare lamp bracket is placed in reserve tank, is conducive to store spare lamp bracket, so that convenient can supply in time when exposing lamp bracket damage.
Description
Technical field
The invention belongs to exposure machine technical fields, more particularly to a kind of exposure machine convenient for safeguarding.
Background technique
Exposure machine refers to the ultraviolet light that UVA wavelength is issued by opening light, by the image on film or other transparent bodies
Information is transferred to the machinery equipment on the surface for being coated with photoactive substance, is widely used in semiconductor, microelectronics, biological devices and receives
Rice sciemtifec and technical sphere, common exposure machine citing: excellent (N&Q) ultra-violet exposure system of MYCRO Americanized grace section is suitable for from special
To the ultraviolet or deep UV exposure of 4 sizes very broad range material, NXQ400-6 system is applied successfully to the substrate of size
Semiconductors manufacture, Photon-Electron electrons, plate, frequency microwave, diffraction optics, MEMS, concave-convex or flip equipment are wanted with other
Ask the application of fine print and accurate alignment.
But existing exposure machine does not have there is also not having according to the required LED light for replacing damage immediately to standby
Storage function is played with lamp bracket and inconvenient according to carrying out mobile problem needed for using.
Therefore, one kind exposure machine convenient for safeguarding is invented to be very necessary.
Summary of the invention
In order to solve the above technical problem, the present invention provides a kind of exposure machines convenient for safeguarding, to solve existing exposure
Machine does not have there is not having according to the required LED light for replacing damage immediately and erects storage function and not side to stand-by lamp
Just mobile problem is carried out according to needed for using.A kind of exposure machine convenient for safeguarding, including exposure machine shell, battery is adjustable
Hose, power switch, assist illuminator, cover, handle, replaceable Exposing Lamp lamp frame structure, spare Exposing Lamp lamp bracket store frame
Structure, adjustable bottom bracket structure, fixed outline border, guide duct, fan supporter and minisize axial-flow blower, the battery are glued to
The top of exposure machine shell；Upper right of the adjustable hose cementing in battery；The power switch is glued to storage
The right side of battery；The assist illuminator is glued to the right end of adjustable hose；The cover axis connects in exposure machine shell
Right upper portion；The handle is glued to the upper right of cover；The replaceable Exposing Lamp lamp frame structure is arranged in cover
Lower part, and be mounted on the right side of exposure machine shell；The spare Exposing Lamp lamp bracket storage mount structure is mounted on outside exposure machine
The lower right side of shell inner wall；The adjustable bottom bracket structure is mounted on the lower part of exposure machine shell；The fixation outline border is set
It sets in the lower part of replaceable Exposing Lamp lamp frame structure, and is embedded in the inside of exposure machine shell；The guide duct is glued to solid
Determine the lower part of outline border；The fan supporter is glued at left and right sides of the inside of guide duct；The minisize axial-flow blower setting
In the inside of fixed outline border, and screw is mounted on the top of fan supporter；The replaceable Exposing Lamp lamp frame structure includes base
Platform stores slot, and glass plate, exposes lamp bracket and knob, the base station are embedded in the top on the right side of exposure machine outer casing inner wall；Institute
The storage slot stated is provided with the inside middle position of base station；The glass plate is glued to the top of base station；The exposure
Lamp bracket is plugged on the inside of storage slot；The knob is glued to the middle position of exposure lamp bracket front surface respectively.
Preferably, the adjustable bottom bracket structure includes internal screw thread fixing pipe, external screw thread strut, support foot, wheel carrier,
Mounting plate and universal return pulley, the internal screw thread fixing pipe are respectively welded at the lower part four corners of exposure machine shell；Described is anti-
Sliding stabilizer blade is glued to the lower part of external screw thread strut；The wheel carrier is welded on the lower right side of internal screw thread fixing pipe；The peace
Loading board is welded on the right side of the lower part of wheel carrier；The universal return pulley screw is mounted on the lower part of mounting plate.
Preferably, spare Exposing Lamp lamp bracket storage mount structure includes storage interpolation frame, inserts bucket, reserve tank, stand-by lamp
Frame, baffle and handle, the storage interpolation frame are embedded in the inner wall lower right side of exposure machine shell；The slotting bucket is plugged on storage
The inside of interpolation frame；The reserve tank is provided with the inside middle and upper part for inserting bucket；The baffle is glued to the right side for inserting bucket；It is described
Handle be glued on the right side of the middle part of baffle.
Preferably, the front surface middle position of the knob is also pasted with label patch, and the label patch is specific to be used
PVC patch.
Preferably, the active carbon dust filtering that the inner right side of the guide duct is also embedded with a thickness of three millimeters to five millimeters
Net.
Preferably, LED exposure lamp is embedded on the upside of the exposure lamp bracket, the Exposing Lamp erection is equipped with multiple.
Preferably, LED exposure lamp is embedded on the upside of the spare lamp bracket, the spare lamp bracket is placed on reserve tank
It is interior.
Preferably, the external screw thread strut is threaded in the lower inside of internal screw thread fixing pipe.
Preferably, the section on the support foot top is set as trapezoidal, and the support foot specifically uses rubber
Stabilizer blade.
Preferably, the upper surface of the glass plate offers the ventilating groove that depth is one millimeter to two millimeters.
Preferably, the diameter of the adjustable hose is two centimetres to three centimetres.
Preferably, the battery is connected electric connection with power switch and assist illuminator.
Compared with prior art, the invention has the benefit that
1. in the present invention, LED exposure lamp is embedded on the upside of the exposure lamp bracket, the Exposing Lamp erection is equipped with more
It is a, be conducive to individually expose lamp bracket dismounting, and facilitate progress in the LED illumination lamp damage on individually exposure lamp bracket
Safeguard the device.
2. in the present invention, LED exposure lamp is embedded on the upside of the spare lamp bracket, the spare lamp bracket is placed on storage
It deposits in slot, is conducive to store spare lamp bracket, so that convenient can supply in time when exposing lamp bracket damage.
3. in the present invention, the external screw thread strut is threaded in the lower inside of internal screw thread fixing pipe, be conducive to
It when needing moving exposure machine, is screwed in pipe inside and rotates external screw thread strut upwards, connect it with ground using universal return pulley
Touching, pushes the exposure machine that can carry out moving the exposure machine.
4. in the present invention, the front surface middle position of the knob is also pasted with label patch, the label patch is specific
It is pasted using PVC, is conducive to facilitate when in use identification classification is carried out to exposure lamp bracket.
5. in the present invention, the inner right side of the guide duct is also embedded with the active carbon with a thickness of three millimeters to five millimeters
Dirt filtrating screen is conducive to prevent minisize axial-flow blower that external dust is pumped into guide duct when in use.
6. in the present invention, the section on the support foot top is set as trapezoidal, and the support foot specifically uses
Rubber feet is conducive to the antiskid effect that can be improved the exposure motor spindle and ground when in use.
7. in the present invention, the upper surface of the glass plate offers the ventilating groove that depth is one millimeter to two millimeters, have
Conducive to can play permeation functions to the lower part of required exposure object when in use, and then exposure object needed for preventing is adsorbed on glass
In glass plate.
8. in the present invention, the diameter of the adjustable hose is two centimetres to three centimetres, and being conducive to swing when in use can
It adjusts hose and the irradiating angle of assist illuminator is conveniently adjusted.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is the structural schematic diagram of replaceable Exposing Lamp lamp frame structure of the invention.
Fig. 3 is the structural schematic diagram of spare Exposing Lamp lamp bracket storage mount structure of the invention.
Fig. 4 is the structural schematic diagram of adjustable bottom bracket structure of the invention.
In figure:
1, exposure machine shell；2, battery；3, adjustable hose；4, power switch；5, assist illuminator；6, cover；7, it mentions
Hand；8, replaceable Exposing Lamp lamp frame structure；81, base station；82, slot is stored；83, glass plate；84, lamp bracket is exposed；85, it shakes hands；
851, label pastes；9, spare Exposing Lamp lamp bracket stores mount structure；91, interpolation frame is stored；92, bucket is inserted；93, reserve tank；94, stand-by lamp
Frame；95, baffle；96, handle；10, adjustable bottom bracket structure；101, internal screw thread fixing pipe；102, external screw thread strut；103, anti-skidding
Stabilizer blade；104, wheel carrier；105, mounting plate；106, universal return pulley；11, fixed outline border；12, guide duct；121, active carbon dirt filtrating screen；
13, fan supporter；14, minisize axial-flow blower.
Specific embodiment
The present invention is described further below in conjunction with attached drawing:
Embodiment:
As shown in Figure 1 and Figure 2
The present invention provides a kind of exposure machine convenient for safeguarding, including exposure machine shell 1, battery 2, adjustable hose 3, power supply
Switch 4, assist illuminator 5, cover 6, handle 7, replaceable Exposing Lamp lamp frame structure 8, spare Exposing Lamp lamp bracket store mount structure
9, adjustable bottom bracket structure 10 fixes outline border 11, guide duct 12, fan supporter 13 and minisize axial-flow blower 14, the electric power storage
Pond 2 is glued to the top of exposure machine shell 1；The adjustable hose 3 is glued to the upper right of battery 2；The power supply
Switch 4 is glued to the right side of battery 2；The assist illuminator 5 is glued to the right end of adjustable hose 3；6 axis of cover
Connect the right upper portion in exposure machine shell 1；The handle 7 is glued to the upper right of cover 6；The replaceable Exposing Lamp
The lower part of cover 6 is arranged in lamp frame structure 8, and is mounted on the right side of exposure machine shell 1；The spare Exposing Lamp lamp bracket storage
Mount structure 9 is mounted on the lower right side of 1 inner wall of exposure machine shell；The adjustable bottom bracket structure 10 is mounted on exposure machine shell
1 lower part；The lower part of replaceable Exposing Lamp lamp frame structure 8 is arranged in the fixation outline border 11, and is embedded in exposure machine shell 1
Inside；The guide duct 12 is glued to the lower part of fixed outline border 11；The fan supporter 13 is glued to guide duct 12
The internal left and right sides；The inside of fixed outline border 11 is arranged in the minisize axial-flow blower 14, and screw is mounted on fan supporter
13 top；The active carbon dirt filtrating screen that the inner right side of the guide duct 12 is also embedded with a thickness of three millimeters to five millimeters
121, it can prevent minisize axial-flow blower 14 that external dust is pumped into guide duct 12 when in use, the adjustable hose
3 diameter is two centimetres to three centimetres, swings adjustable hose 3 when in use and the irradiation of assist illuminator 5 is conveniently adjusted
Angle；The replaceable Exposing Lamp lamp frame structure 8 includes base station 81, stores slot 82, and glass plate 83 exposes lamp bracket 84 and draws
Hand 85, the base station 81 are embedded in the top on the right side of 1 inner wall of exposure machine shell；The storage slot 82 is provided with base station 81
Inside middle position；The glass plate 83 is glued to the top of base station 81；The exposure lamp bracket 84 is plugged on storage and inserts
The inside of slot 82；The knob 85 is glued to the middle position of exposure 84 front surface of lamp bracket respectively；The exposure lamp bracket 84
Upside be embedded with LED exposure lamp, the exposure lamp bracket 84 is provided with multiple LED illuminations on individually exposure lamp bracket 84
When lamp damages, the dismounting of lamp bracket 84 will be individually exposed, and facilitate and safeguard the device, in the front surface of the knob 85
Between position be also pasted with label patch 851, the described label patch 851 is specifically pasted using PVC, is facilitated when in use to exposure lamp bracket 84
Identification classification is carried out, the upper surface of the glass plate 83 offers the ventilating groove that depth is one millimeter to two millimeters, using
When can play permeation functions to the lower part of required exposure object, and then exposure object needed for preventing is adsorbed on glass plate 83.
As shown in attached drawing 1 and attached drawing 4, in above-described embodiment, specifically, the adjustable bottom bracket structure 10 includes interior spiral shell
Line fixing pipe 101, external screw thread strut 102, support foot 103, wheel carrier 104, mounting plate 105 and universal return pulley 106, described is interior
The pipe 101 that is screwed is respectively welded at the lower part four corners of exposure machine shell 1；The support foot 103 is glued to external screw thread
The lower part of strut 102；The wheel carrier 104 is welded on the lower right side of internal screw thread fixing pipe 101；The mounting plate 105 welds
It connects on the right side of the lower part of wheel carrier 104；106 screw of universal return pulley is mounted on the lower part of mounting plate 105；The external screw thread
Strut 102 is threaded in the lower inside of internal screw thread fixing pipe 101, and when needing moving exposure machine, be screwed pipe inside
External screw thread strut 102 is rotated in 101 upwards, makes it using universal return pulley 106 and ground face contact, pushes the exposure machine that can carry out
The mobile exposure machine, the section on 103 top of support foot are set as trapezoidal, and the support foot 103 specifically uses
Rubber feet can be improved the antiskid effect of the exposure motor spindle and ground when in use.
As shown in attached drawing 1, attached drawing 2 and attached drawing 3, in above-described embodiment, specifically, the spare Exposing Lamp lamp bracket stores
Mount structure 9 includes storage interpolation frame 91, inserts bucket 92, reserve tank 93, spare lamp bracket 94, baffle 95 and handle 96, and the storage is inserted
Frame 91 is embedded in the inner wall lower right side of exposure machine shell 1；The slotting bucket 92 is plugged on the inside of storage interpolation frame 91；The storage
It deposits slot 93 and is provided with the inside middle and upper part for inserting bucket 92；The baffle 95 is glued to the right side for inserting bucket 92；96 glue of handle
It connects on the right side of the middle part of baffle 95；The upside of the spare lamp bracket 94 is embedded with LED exposure lamp, and the spare lamp bracket 94 is put
It sets in reserve tank 93, spare lamp bracket is stored into 94 rows, so that convenient can supply in time when exposing lamp bracket 84 and damaging.
Working principle
The present invention during the work time, when exposing the LED exposure lamp damage on lamp bracket 84, holds knob 85 and exposes LED
The exposure lamp bracket 84 of light lamp damage is extracted out in storage slot 82, while being held handle 96 and being taken out slotting bucket 92 in storage interpolation frame 91
Out, and by spare lamp bracket 94 it is inserted into storage slot 82, and powers on when in use to minisize axial-flow blower 14, make
It extracts outside air by guide duct 12, and radiates to the lower part of exposure lamp bracket 84, while utilizing active carbon dirt filtrating screen
121 pairs of its dusts are filtered, and 4 are turned on the power switch when environment is darker makes battery 2 power to assist illuminator 5 so as to work
Play the role of floor light as range.
Using technical solutions according to the invention or those skilled in the art under the inspiration of technical solution of the present invention,
Similar technical solution is designed, and reaches above-mentioned technical effect, is to fall into protection scope of the present invention.
Claims (10)
1. a kind of exposure machine convenient for safeguarding, which is characterized in that the exposure machine convenient for safeguarding, including exposure machine shell (1) store
Battery (2), adjustable hose (3), power switch (4), assist illuminator (5), cover (6), handle (7), replaceable Exposing Lamp lamp
Frame structure (8), spare Exposing Lamp lamp bracket store mount structure (9), adjustable bottom bracket structure (10), fixed outline border (11), guide duct
(12), fan supporter (13) and minisize axial-flow blower (14), the battery (2) are glued to the top of exposure machine shell (1)；
The adjustable hose (3) is glued to the upper right of battery (2)；The power switch (4) is glued to battery (2)
Right side；The assist illuminator (5) is glued to the right end of adjustable hose (3)；Described cover (6) axis connects in exposure machine shell
(1) right upper portion；The handle (7) is glued to the upper right of cover (6)；The replaceable Exposing Lamp lamp frame structure
(8) it is arranged in the lower part of cover (6), and is mounted on the right side of exposure machine shell (1)；The spare Exposing Lamp lamp bracket stores frame
Structure (9) is mounted on the lower right side of exposure machine shell (1) inner wall；The adjustable bottom bracket structure (10) is mounted on exposure machine
The lower part of shell (1)；The fixation outline border (11) is arranged in the lower part of replaceable Exposing Lamp lamp frame structure (8), and is embedded in
The inside of exposure machine shell (1)；The guide duct (12) is glued to the lower part of fixed outline border (11)；The fan supporter
(13) it is glued at left and right sides of the inside of guide duct (12)；Minisize axial-flow blower (14) setting is in fixed outline border (11)
Inside, and screw is mounted on the top of fan supporter (13)；The replaceable Exposing Lamp lamp frame structure (8) includes base station
(81), slot (82) are stored, glass plate (83) exposes lamp bracket (84) and knob (85), and the base station (81) is embedded in exposure
Top on the right side of machine shell (1) inner wall；The storage slot (82) is provided with the inside middle position of base station (81)；Described
Glass plate (83) is glued to the top of base station (81)；The exposure lamp bracket (84) is plugged on the inside of storage slot (82)；Institute
The knob (85) stated is glued to the middle position of exposure lamp bracket (84) front surface respectively.
2. exposure machine convenient for safeguarding as described in claim 1, which is characterized in that adjustable bottom bracket structure (10) packet
It includes internal screw thread fixing pipe (101), external screw thread strut (102), support foot (103), wheel carrier (104), mounting plate (105) and universal
Return pulley (106), the internal screw thread fixing pipe (101) are respectively welded at the lower part four corners of exposure machine shell (1)；Described is anti-
Sliding stabilizer blade (103) are glued to the lower part of external screw thread strut (102)；The wheel carrier (104) is welded on internal screw thread fixing pipe (101)
Lower right side；The mounting plate (105) is welded on the right side of the lower part of wheel carrier (104)；Described universal return pulley (106) screw
It is mounted on the lower part of mounting plate (105).
3. exposure machine convenient for safeguarding as described in claim 1, which is characterized in that the spare Exposing Lamp lamp bracket stores frame
Structure (9) includes storage interpolation frame (91), inserts bucket (92), reserve tank (93), spare lamp bracket (94), baffle (95) and handle (96),
The storage interpolation frame (91) is embedded in the inner wall lower right side of exposure machine shell (1)；The slotting bucket (92) is plugged on storage and inserts
The inside of frame (91)；The reserve tank (93) is provided with the inside middle and upper part for inserting bucket (92)；The baffle (95) is glued to
Insert the right side of bucket (92)；The handle (96) is glued on the right side of the middle part of baffle (95).
4. exposure machine convenient for safeguarding as described in claim 1, which is characterized in that among the front surface of the knob (85)
Position is also pasted with label patch (851), and the label patch (851) is specifically pasted using PVC.
5. exposure machine convenient for safeguarding as described in claim 1, which is characterized in that the inner right side of the guide duct (12)
Also it is embedded with the active carbon dirt filtrating screen (121) with a thickness of three millimeters to five millimeters.
6. exposure machine convenient for safeguarding as described in claim 1, which is characterized in that the upside of the exposure lamp bracket (84) is embedding
Enter to have LED exposure lamp, the exposure lamp bracket (84) is provided with multiple.
7. exposure machine convenient for safeguarding as claimed in claim 3, which is characterized in that the upside of the spare lamp bracket (94) is embedding
Enter to have LED exposure lamp, the spare lamp bracket (94) is placed in reserve tank (93).
8. exposure machine convenient for safeguarding as claimed in claim 2, which is characterized in that described external screw thread strut (102) screw thread
It is connected to the lower inside of internal screw thread fixing pipe (101).
9. exposure machine convenient for safeguarding as claimed in claim 2, which is characterized in that described support foot (103) top
Section is set as trapezoidal, and the support foot (103) specifically uses rubber feet.
10. exposure machine convenient for safeguarding as claimed in claim 2, which is characterized in that the upper surface of the glass plate (83)
Offer the ventilating groove that depth is one millimeter to two millimeters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811144382.XA CN109270799A (en) | 2018-09-29 | 2018-09-29 | A kind of exposure machine convenient for safeguarding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811144382.XA CN109270799A (en) | 2018-09-29 | 2018-09-29 | A kind of exposure machine convenient for safeguarding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109270799A true CN109270799A (en) | 2019-01-25 |
Family
ID=65199157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811144382.XA Pending CN109270799A (en) | 2018-09-29 | 2018-09-29 | A kind of exposure machine convenient for safeguarding |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109270799A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666981A (en) * | 2008-09-02 | 2010-03-10 | 中芯国际集成电路制造(上海)有限公司 | Automatic displacement method and automatic displacement device of photoetching lamp of photoetching machine |
| CN203585721U (en) * | 2013-12-09 | 2014-05-07 | 海尔科化工程塑料国家工程研究中心股份有限公司 | Movable household appliance base |
| CN206115136U (en) * | 2016-09-22 | 2017-04-19 | 深圳市克伦特印刷设备有限公司 | Multi -functional printing -down machine |
| CN206532081U (en) * | 2017-01-12 | 2017-09-29 | 深圳市东方红印刷有限公司 | The printer of replaceable bulb |
| CN107748482A (en) * | 2017-11-20 | 2018-03-02 | 张家港奇点光电科技有限公司 | A kind of Multifunctional LED parallel exposing machine |
| CN107831637A (en) * | 2017-10-19 | 2018-03-23 | 天津王朝包装印刷制品有限公司 | A kind of printer |
-
2018
- 2018-09-29 CN CN201811144382.XA patent/CN109270799A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101666981A (en) * | 2008-09-02 | 2010-03-10 | 中芯国际集成电路制造(上海)有限公司 | Automatic displacement method and automatic displacement device of photoetching lamp of photoetching machine |
| CN203585721U (en) * | 2013-12-09 | 2014-05-07 | 海尔科化工程塑料国家工程研究中心股份有限公司 | Movable household appliance base |
| CN206115136U (en) * | 2016-09-22 | 2017-04-19 | 深圳市克伦特印刷设备有限公司 | Multi -functional printing -down machine |
| CN206532081U (en) * | 2017-01-12 | 2017-09-29 | 深圳市东方红印刷有限公司 | The printer of replaceable bulb |
| CN107831637A (en) * | 2017-10-19 | 2018-03-23 | 天津王朝包装印刷制品有限公司 | A kind of printer |
| CN107748482A (en) * | 2017-11-20 | 2018-03-02 | 张家港奇点光电科技有限公司 | A kind of Multifunctional LED parallel exposing machine |
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Application publication date: 20190125 |