CN108508708A - A kind of UV-LED exposure light sources holder - Google Patents
A kind of UV-LED exposure light sources holder Download PDFInfo
- Publication number
- CN108508708A CN108508708A CN201810303938.9A CN201810303938A CN108508708A CN 108508708 A CN108508708 A CN 108508708A CN 201810303938 A CN201810303938 A CN 201810303938A CN 108508708 A CN108508708 A CN 108508708A
- Authority
- CN
- China
- Prior art keywords
- backing plate
- fixedly connected
- strut
- bull stick
- exposure light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 244000309464 bull Species 0.000 claims abstract description 22
- 230000000694 effects Effects 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 abstract description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 238000000034 method Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fastening Of Light Sources Or Lamp Holders (AREA)
Abstract
The invention discloses a kind of UV LED exposures light source brackets, including strut and bull stick, fixed mesa is fixedly connected at the top of strut, the lower surface of fixed mesa is fixedly connected with screw rod, the outer surface of screw rod is threaded with top nut and lower nut respectively, backing plate is connected between top nut and lower nut, the both sides of backing plate have been fixedly connected with sliding block, the side of strut is fixed and offers sliding slot, the inner wall of sliding block and sliding slot is slidably connected, the bottom of backing plate, which is provided with, is fixedly connected on drawing money on credit for strut side, the outer surface of bull stick is socketed with reflective mirror, one end of bull stick is welded with handle, the back side of strut is fixedly connected with short branch.The present invention is by being arranged bull stick, handle, pointer, protractor, screw rod, top nut, lower nut, backing plate, sliding slot and sliding block, it is non-adjustable to solve reflective mirror angle, collimation and the height of the uniformity and exposure light source for influencing directional light are non-adjustable, the low problem of light source regulated efficiency.
Description
Technical field
The present invention relates to exposure machine technical field, specially a kind of UV-LED exposure light sources holder.
Background technology
In printed circuit board industry, egative film figure is transferred on wiring board, is completed using exposure machine, exposure machine branch
Frame is the workbench of wiring board exposure light source, specifically, placing mask plate above the substrate for being coated with photoresist, then utilizes exposure
Ray machine is exposed substrate, specifically, exposure machine sends out UV ultraviolet lights by opening exposure light source, by the figure on mask plate
As information is transferred on the substrate surface for being coated with photoresist, the pattern based on mask plate, photoresist have the part being exposed and
The part not being exposed.Developer solution is recycled to develop photoresist, you can the part that removal photoresist is exposed retains light
The part that photoresist is not exposed, or the part that photoresist is not exposed is removed, retain the part that photoresist is exposed, to make
Photoresist forms required figure.
Exposure light source holder has the following disadvantages at work used in conventional exposure machine exposure light source platform：
1. reflective mirror angle is non-adjustable, the beam collimation degree and the uniformity of directional light are influenced；
2. the height of exposure light source is non-adjustable, light source regulated efficiency is low.
In addition, it is a kind of novel replacement exposure light source that conventional exposure light source, which uses mercury lamp, UV-LED light sources, for
For the light source bracket under the technical solution of mercury lamp, needing design to match with UV-LED light sources.
Invention content
（One）The technical issues of solution
In view of the deficiencies of the prior art, the present invention provides a kind of UV-LED exposure light sources holders, are exposed with novel UV-LED
Light source matches, and solves that reflective mirror angle is non-adjustable, influences the uniformity of directional light, and the height of exposure light source is non-adjustable,
The problem of light source detection efficiency reduces.
（Two）Technical solution
To achieve the above object, the present invention provides the following technical solutions：A kind of UV-LED exposure light sources holder, including strut and turn
Bar is fixedly connected with fixed mesa at the top of the strut, and the lower surface of the fixed mesa is fixedly connected with screw rod, the spiral shell
The outer surface of bar is threaded with top nut and lower nut respectively, and backing plate is connected between the top nut and lower nut,
The both sides of the backing plate have been fixedly connected with sliding block, and the side of the strut, which is fixed, offers sliding slot, the sliding block and sliding slot
Inner wall is slidably connected, and the bottom of the backing plate, which is provided with, is fixedly connected on drawing money on credit for strut side, the appearance surface cover of the bull stick
It is connected to reflective mirror, one end of the bull stick is welded with handle, and the back side of the strut is fixedly connected with short branch, described bull stick one end
Outer surface be fixedly connected with pointer, the front of the short branch is fixedly connected with protractor, and the side of the backing plate upper surface is solid
Surely it is connected with guide post, the surface of the fixed mesa offers guide slide, and the inner wall of the guide slide, which is fixedly connected with, leads
To set, the upper surface of the backing plate is placed with light-source box.
Preferably, the quantity of the screw rod is four, and the top of four screw rods is run through and extends to fixed mesa
Upper surface.
Preferably, the outer surface of the backing plate and screw rod is slidably connected, and the bottom of the backing plate offers loophole.
Preferably, the quantity of the sliding block is two, and two sliding blocks are symmetricly set on using the center line of backing plate as symmetry axis
The both sides of backing plate.
Preferably, the inner wall of the guide sleeve and the outer surface of guide post are slidably connected, and the bottom of the guide sleeve is through simultaneously
Extend to the bottom of fixed mesa.
（Three）Advantageous effect
The present invention provides a kind of UV-LED exposure light sources holders, have following advantageous effect：
（1）The present invention can play the role of rotating reflective mirror by the way that bull stick, handle, pointer and protractor is arranged, to operate
Person can facilitate the angle for adjusting reflective mirror as needed, and make reflective mirror angle tune by the cooperation of pointer and protractor
The precision higher of section so that the collimation and the uniformity of directional light are more preferable, and handle can facilitate the rotation of bull stick, are grown by being arranged
Branch and short branch can prevent the shaking generated due to long-time use between strut so that whole device is more stable, to prolong
The service life of the device is grown.
（2）What the present invention can be used by the way that screw rod, top nut, lower nut, backing plate, sliding slot and sliding block is arranged in light-source box
When facilitate adjust light-source box height, to make light source regulated efficiency higher, pass through top nut and the setting of lower nut enhancing
The stability of backing plate can be played when light-source box height is adjusted and be led by the way that guide slide, guide post and guide sleeve is arranged
To effect, the precision of light-source box height adjusting is improved.
Description of the drawings
Fig. 1 is the front view of the present invention；
Fig. 2 is the right view of the present invention；
Fig. 3 is the vertical view of the present invention.
In figure：1 strut, 2 fixed mesas, 3 screw rods, 4 top nuts, 5 lower nuts, 6 backing plates, 7 sliding slots, 8 sliding blocks, 9 draw money on credit, 10
Bull stick, 11 handles, 12 reflective mirrors, 13 short branch, 14 pointers, 15 protractors, 16 guide posts, 17 guide slides, 18 guide sleeves, 19 light sources
Case.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
As shown in Figs. 1-3, the present invention provides a kind of UV-LED exposure light sources support technology scheme：A kind of UV-LED exposures light
The top of source holder, including strut 1 and bull stick 10, strut 1 is fixedly connected with fixed mesa 2, and the lower surface of fixed mesa 2 is fixed
It is connected with screw rod 3, the quantity of screw rod 3 is four, and the top of four screw rods 3 is run through and extends to the upper table of fixed mesa 2
The outer surface in face, screw rod 3 is threaded with top nut 4 and lower nut 5 respectively, is connected between top nut 4 and lower nut 5
Backing plate 6, backing plate 6 and the outer surface of screw rod 3 are slidably connected, and the bottom of backing plate 6 offers loophole, pass through top nut 4 and lower spiral shell
The setting of mother 5 enhances the stability of backing plate 6, and the both sides of backing plate 6 have been fixedly connected with sliding block 8, and the quantity of sliding block 8 is two,
And two sliding blocks 8 are symmetricly set on the both sides of backing plate 6 using the center line of backing plate 6 as symmetry axis, by be arranged screw rod 3, top nut 4,
Lower nut 5, backing plate 6, sliding slot 7 and sliding block 8 can facilitate the height for adjusting light-source box 19 when light-source box 19 uses, to
Keep light source detection more efficient, the side of strut 1, which is fixed, offers sliding slot 7, and sliding block 8 and the inner wall of sliding slot 7 are slidably connected, backing plate
6 bottom be provided be fixedly connected on 1 side of strut draw money on credit 9, the outer surface of bull stick 10 is socketed with reflective mirror 12, bull stick 10
One end is welded with handle 11, and the back side of strut 1 is fixedly connected with short branch 13, by setting draw money on credit 9 and short branch 13 can prevent from propping up
The shaking generated due to long-time use between bar 1 so that whole device is more stable, to extend the use longevity of the device
Life, the outer surface of 10 one end of bull stick are fixedly connected with pointer 14, and the front of short branch 13 is fixedly connected with protractor 15, passes through setting
Bull stick 10, handle 11, pointer 14 and protractor 15 can play the role of rotating reflective mirror 12, to which operator can be according to need
Facilitate the angle for adjusting reflective mirror 12, and 12 angular adjustment of reflective mirror is made by the cooperation of pointer 14 and protractor 15
Precision higher so that the collimation and the uniformity of directional light are more preferable, and handle 11 can facilitate the rotation of bull stick 10,6 upper table of backing plate
The side in face is fixedly connected with guide post 16, and the surface of fixed mesa 2 offers guide slide 17, and the inner wall of guide slide 17 is fixed
It is connected with guide sleeve 18, the outer surface of the inner wall and guide post 16 of guide sleeve 18 is slidably connected, and the bottom of guide sleeve 18 is run through and prolonged
The bottom of fixed mesa 2 is extended to, the upper surface of backing plate 16 is placed with light-source box 19, by the way that guide slide 17,16 and of guide post is arranged
Guide sleeve 18 can play guiding role when light-source box 19 is highly adjusted, and improve the essence that light-source box 19 is highly adjusted
Degree.
In use, light-source box 19 to be first placed on to the upper surface of backing plate 6, bull stick 1 is rotated by handle 11, to reach
The effect for adjusting 12 angle of reflective mirror, can be signified on protractor 15 according to pointer 14 when 12 angular adjustment of reflective mirror
Reading be adjusted, promote the precision of angular adjustment, the height of backing plate 6 adjusted by rotating top nut 4 and lower nut 5
Degree, to adjust the height of light-source box 19.
Can to sum up obtain, the present invention by be arranged bull stick 1, handle 11, pointer 14, protractor 15, screw rod 3, top nut 4, under
Nut 5, backing plate 6, sliding slot 7 and sliding block 8, solve that 12 angle of reflective mirror is non-adjustable, influence the collimation and the uniformity of directional light,
The problem of irreconcilable light source regulated efficiency of height of exposure light source reduces.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of variations, modification, replace
And modification, the scope of the present invention is defined by the appended.
Claims (5)
1. a kind of UV-LED exposure light sources holder, including strut（1）And bull stick（10）, it is characterised in that：The strut（1）Top
Portion is fixedly connected with fixed mesa（2）, the fixed mesa（2）Lower surface be fixedly connected with screw rod（3）, the screw rod（3）
Outer surface be threaded with top nut respectively（4）And lower nut（5）, the top nut（4）And lower nut（5）Between activity even
It is connected to backing plate（6）, the backing plate（6）Both sides be fixedly connected with sliding block（8）, the strut（1）Side fix offer
Sliding slot（7）, the sliding block（8）With sliding slot（7）Inner wall be slidably connected, the backing plate（6）Bottom be provided with and be fixedly connected on
Strut（1）It draws money on credit side（9）, the bull stick（10）Outer surface be socketed with reflective mirror（12）, the bull stick（10）One end
It is welded with handle（11）, the strut（1）The back side be fixedly connected with short branch（13）, the bull stick（10）The outer surface of one end is solid
Surely it is connected with pointer（14）, the short branch（13）Front be fixedly connected with protractor（15）, the backing plate（6）The one of upper surface
Side is fixedly connected with guide post（16）, the fixed mesa（2）Surface offer guide slide（17）, the guide slide（17）
Inner wall be fixedly connected with guide sleeve（18）, the backing plate（16）Upper surface be placed with light-source box（19）.
2. a kind of UV-LED exposure light sources holder according to claim 1, it is characterised in that：The screw rod（3）Quantity
It it is four, and four screw rods（3）Top run through and extend to fixed mesa（2）Upper surface.
3. a kind of UV-LED exposure light sources holder according to claim 1, it is characterised in that：The backing plate（6）With screw rod
（3）Outer surface be slidably connected, the backing plate（6）Bottom offer loophole.
4. a kind of UV-LED exposure light sources holder according to claim 1, it is characterised in that：The sliding block（8）Quantity
It it is two, and two sliding blocks（8）With backing plate（6）Center line be symmetry axis be symmetricly set on backing plate（6）Both sides.
5. a kind of UV-LED exposure light sources holder according to claim 1, it is characterised in that：The guide sleeve（18）It is interior
Wall and guide post（16）Outer surface be slidably connected, the guide sleeve（18）Bottom run through and extend to fixed mesa（2）Bottom
Portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810303938.9A CN108508708A (en) | 2018-04-08 | 2018-04-08 | A kind of UV-LED exposure light sources holder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810303938.9A CN108508708A (en) | 2018-04-08 | 2018-04-08 | A kind of UV-LED exposure light sources holder |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108508708A true CN108508708A (en) | 2018-09-07 |
Family
ID=63380491
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810303938.9A Pending CN108508708A (en) | 2018-04-08 | 2018-04-08 | A kind of UV-LED exposure light sources holder |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108508708A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109634066A (en) * | 2018-12-29 | 2019-04-16 | 天津天物金佰微电子有限公司 | A kind of single side cold light source exposure machine |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11344811A (en) * | 1998-06-02 | 1999-12-14 | Ushio U Tec:Kk | Exposure device |
| TW200916970A (en) * | 2007-10-11 | 2009-04-16 | Yi-Zhen Zhuang | An exposing equipment |
| CN202041765U (en) * | 2011-05-10 | 2011-11-16 | 志圣科技（广州）有限公司 | Light source device and exposure machine with same |
| TW201209521A (en) * | 2010-08-19 | 2012-03-01 | Kintec Prec Machinery Co Ltd | Light source device for exposure machine and its exposure method |
| CN104423176A (en) * | 2013-08-30 | 2015-03-18 | 深南电路有限公司 | Optical system and exposure machine |
| CN105301910A (en) * | 2014-05-26 | 2016-02-03 | 张河生 | Uv led light source structure and parallel light exposure machine |
| CN205644015U (en) * | 2016-03-23 | 2016-10-12 | 深圳市虎成科技有限公司 | Light source subassembly and possess exposure machine of this light source subassembly |
| CN106483584A (en) * | 2016-12-30 | 2017-03-08 | 厦门大学 | Manufacture the device of variable cycle photonic crystal based on multiple beam interferometry |
| CN206057792U (en) * | 2016-07-18 | 2017-03-29 | 深圳市兆方智能科技有限公司 | A kind of UV LED exposure devices of stable performance and energy-conservation |
| CN206249749U (en) * | 2016-11-02 | 2017-06-13 | 梁怀斐 | A kind of reflection space spatial relation demonstration device of light |
| CN208092432U (en) * | 2018-04-08 | 2018-11-13 | 河南百合特种光学研究院有限公司 | A kind of UV-LED exposure light sources holder |
-
2018
- 2018-04-08 CN CN201810303938.9A patent/CN108508708A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11344811A (en) * | 1998-06-02 | 1999-12-14 | Ushio U Tec:Kk | Exposure device |
| TW200916970A (en) * | 2007-10-11 | 2009-04-16 | Yi-Zhen Zhuang | An exposing equipment |
| TW201209521A (en) * | 2010-08-19 | 2012-03-01 | Kintec Prec Machinery Co Ltd | Light source device for exposure machine and its exposure method |
| CN202041765U (en) * | 2011-05-10 | 2011-11-16 | 志圣科技（广州）有限公司 | Light source device and exposure machine with same |
| CN104423176A (en) * | 2013-08-30 | 2015-03-18 | 深南电路有限公司 | Optical system and exposure machine |
| CN105301910A (en) * | 2014-05-26 | 2016-02-03 | 张河生 | Uv led light source structure and parallel light exposure machine |
| CN205644015U (en) * | 2016-03-23 | 2016-10-12 | 深圳市虎成科技有限公司 | Light source subassembly and possess exposure machine of this light source subassembly |
| CN206057792U (en) * | 2016-07-18 | 2017-03-29 | 深圳市兆方智能科技有限公司 | A kind of UV LED exposure devices of stable performance and energy-conservation |
| CN206249749U (en) * | 2016-11-02 | 2017-06-13 | 梁怀斐 | A kind of reflection space spatial relation demonstration device of light |
| CN106483584A (en) * | 2016-12-30 | 2017-03-08 | 厦门大学 | Manufacture the device of variable cycle photonic crystal based on multiple beam interferometry |
| CN208092432U (en) * | 2018-04-08 | 2018-11-13 | 河南百合特种光学研究院有限公司 | A kind of UV-LED exposure light sources holder |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109634066A (en) * | 2018-12-29 | 2019-04-16 | 天津天物金佰微电子有限公司 | A kind of single side cold light source exposure machine |
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| PB01 | Publication | ||
| PB01 | Publication | ||
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Application publication date: 20180907 |