CN109634066A - A kind of single side cold light source exposure machine - Google Patents
A kind of single side cold light source exposure machine Download PDFInfo
- Publication number
- CN109634066A CN109634066A CN201811647452.3A CN201811647452A CN109634066A CN 109634066 A CN109634066 A CN 109634066A CN 201811647452 A CN201811647452 A CN 201811647452A CN 109634066 A CN109634066 A CN 109634066A
- Authority
- CN
- China
- Prior art keywords
- light source
- bracket
- fixed
- led ultraviolet
- exposure machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 15
- 238000001816 cooling Methods 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 6
- 229910052753 mercury Inorganic materials 0.000 abstract description 6
- 238000009825 accumulation Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V21/00—Supporting, suspending, or attaching arrangements for lighting devices; Hand grips
- F21V21/14—Adjustable mountings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V29/00—Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
- F21V29/50—Cooling arrangements
- F21V29/56—Cooling arrangements using liquid coolants
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2115/00—Light-generating elements of semiconductor light sources
- F21Y2115/10—Light-emitting diodes [LED]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of single side cold light source exposure machines, including bracket, slide holder, convex lens, mechanical shutter and LED ultraviolet source；The slide holder is horizontally fixed on the lower end of the bracket, and the LED ultraviolet source is fixed on the upper end of the bracket, and the light of the LED ultraviolet source sequentially passes through the horizontal mechanical shutter being installed on bracket and convex lens is radiated on slide holder.Single side cold light source exposure machine of the present invention, by the setting of LED ultraviolet source, avoid using when mercury lamp light source as power it is excessive caused by hot excess accumulation problem.
Description
Technical field
The invention belongs to exposure machine technical fields, more particularly, to a kind of single side cold light source exposure machine.
Background technique
Typical exposure machine be easy to cause heat area to accumulate, to exposure using mercury lamp light source since mercury lamp light source power is excessive
Machine is caused compared with lossy, and typical exposure machine adjusts inconvenience to the distance between light source and convex lens, influences exposure effect.
Summary of the invention
In view of this, the present invention is directed to propose a kind of single side cold light source exposure machine, replaces mercury lamp by using LED cold light source
Light source avoids the heat area accumulation on exposal machine carrying platform, and using adjustable articulator installation light source and convex lens, facilitates to light
The adjusting of distance, improves exposure efficiency between source and convex lens.
In order to achieve the above objectives, the technical scheme of the present invention is realized as follows:
A kind of single side cold light source exposure machine, including bracket, slide holder, convex lens, mechanical shutter and LED ultraviolet source；
The slide holder is horizontally fixed on the lower end of the bracket, and the LED ultraviolet source is fixed on the upper of the bracket
End, the light of the LED ultraviolet source sequentially passes through the horizontal mechanical shutter being installed on bracket and convex lens is radiated at slide holder
On.
Further, the convex lens is double flat convex lens group.
Further, the monolithic cold light source exposure machine further includes that light source distance adjusts ruler, and the light source distance adjusts ruler
It is vertical to fix on the bracket, and it is located at the side of the LED ultraviolet source and double flat convex lens group.
Further, the single side cold light source exposure machine further includes water-cooling type radiator, and the water-cooling type radiator includes
Water-circulating pipe and water tank, the water-circulating pipe are fixed around LED ultraviolet source, inlet and outlet access water tank, and the water tank is solid
It is scheduled on the outside of bracket.
Further, the LED ultraviolet source is fixed on the bracket by distance adjusting mechanism.
Further, the distance adjusting mechanism includes screw rod, screw sleeve, gear, gear shaft and knob；
The upper end level of the bracket is equipped with two support plates being parallel to each other, and the middle part of underlying support plate is equipped with one
Fixed hole；
The screw sleeve is fixed on vertically in the fixed hole；
The screw rod is inserted in the screw sleeve, and is threadedly engaged with the screw sleeve, and the upper end of the screw rod is fixed
There is the gear with screw coaxial rotation；
The gear shaft is rotatably fixed between two support plates vertically, and is engaged with the gear；
The knob is rotatably fixed in the support plate being located above, and pass through the support plate being located above with it is described
Gear shaft is fixedly and coaxially connected.
Further, a measuring rod is rotatably arranged on the side of the LED ultraviolet source, the measuring rod end
Downside is flushed with the lower end of the LED ultraviolet source, and the side that the light source distance adjusts ruler is equipped with sliding for a vertical direction
Frame, the measuring rod end, which can slide up and down to, is fastened on described slide in frame.
Compared with the existing technology, single side cold light source exposure machine of the present invention has the advantage that
(1) single side cold light source exposure machine of the present invention is avoided by the setting of LED ultraviolet source using mercury lamp
When light source as power it is excessive caused by hot excess accumulation problem.
(2) single side cold light source exposure machine of the present invention is realized parallel to light source by the setting of double screen lens group
The adjustment of degree, it is simple and easy to do, improve exposure quality.
(3) single side cold light source exposure machine of the present invention compares general litho machine using external water cold heat sink
Heat dissipation effect is significant.
Detailed description of the invention
The attached drawing for constituting a part of the invention is used to provide further understanding of the present invention, schematic reality of the invention
It applies example and its explanation is used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is single side cold light source exposure machine structure schematic diagram described in the embodiment of the present invention.
Description of symbols:
1- bracket；2- slide holder；3- convex lens；4- mechanical shutter；5-LED ultraviolet source；6- light source distance adjusts ruler；
61- slides frame；7- water-cooling type radiator；71- water-circulating pipe；72- water tank；8- distance adjusting mechanism；81- screw rod；82- screw rod set
Cylinder；83- gear；84- gear shaft；85- knob；9- measuring rod.
Specific embodiment
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the present invention can phase
Mutually combination.
In the description of the present invention, it is to be understood that, term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of description of the present invention and simplification of the description, rather than instruction or dark
Show that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as pair
Limitation of the invention.In addition, term " first ", " second " etc. are used for description purposes only, it is not understood to indicate or imply phase
To importance or implicitly indicate the quantity of indicated technical characteristic.The feature for defining " first ", " second " etc. as a result, can
To explicitly or implicitly include one or more of the features.In the description of the present invention, unless otherwise indicated, " multiple "
It is meant that two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood by concrete condition
Concrete meaning in the present invention.
The present invention will be described in detail below with reference to the accompanying drawings and embodiments.
As shown in Figure 1, the present invention provides a kind of single side cold light source exposure machine, including bracket 1, slide holder 2, convex lens 3, machinery
Formula shutter 4 and LED ultraviolet source 5；
The slide holder 2 is horizontally fixed on the lower end of the bracket 1, and the LED ultraviolet source 5 is fixed on the bracket 1
Upper end, the light of the LED ultraviolet source 5 sequentially passes through the horizontal mechanical shutter 4 being installed on bracket 1 and convex lens 3 irradiates
On slide holder 2.
It is excessive to avoid the excessive caused heat of mercury lamp light source power using LED ultraviolet source as exposure light source by the present invention
Accumulation problem.
Further, the convex lens 3 is double flat convex lens group.
Further, the monolithic cold light source exposure machine further includes that light source distance adjusts ruler 6, and the light source distance adjusts ruler
6 are fixed on vertically on the bracket 1, and are located at the side of the LED ultraviolet source 5 and double flat convex lens group.
In the apparatus, ruler is adjusted using light source distance to position, realize that the distance between light source and double flat convex lens group are adjusted,
And then realize and the depth of parallelism of light source is adjusted, it is simple and easy to do, improve exposure quality.
Further, the single side cold light source exposure machine further includes water-cooling type radiator 7, and the water-cooling type radiator 7 wraps
Water-circulating pipe 71 and water tank 72 are included, the water-circulating pipe 71 is fixed around LED ultraviolet source 5, inlet and outlet access water tank 72, and
The water tank 72 is fixed on the outside of bracket 1, using external water cold type radiator, realizes water tank to water-circulating pipe by water pump
Between water circulation, the heat dissipation effect for comparing general litho machine is significant.
Further, the LED ultraviolet source 5 is fixed on the bracket 1 by distance adjusting mechanism 8.
Further, the distance adjusting mechanism 8 includes screw rod 81, screw sleeve 82, gear 83, gear shaft 84 and knob
85；
The upper end level of the bracket 1 is equipped with two support plates being parallel to each other, and the middle part of underlying support plate is equipped with
One fixed hole；
The screw sleeve 82 is fixed on vertically in the fixed hole；
The screw rod 81 is inserted in the screw sleeve 82, and is threadedly engaged with the screw sleeve 82, the screw rod 81
Upper end is fixed with the gear 83 rotated coaxially with the screw rod 81；
The gear shaft 84 is rotatably fixed between two support plates vertically, and is engaged with the gear 83；
The knob 85 is rotatably fixed in the support plate being located above, and passes through the support plate being located above and institute
Gear shaft 84 is stated to be fixedly and coaxially connected.
Knob is turned, then knob band movable gear shaft rotates, and gear shaft driven gear rotation, gear drives screw rod in screw rod set
Rotation in cylinder, and then realize that screw rod drives the raising and lowering of LED ultraviolet source, realize LED ultraviolet source to double flat convex lens group
Between distance adjustment.
Further, a measuring rod 9,9 end of measuring rod are rotatably arranged on the side of the LED ultraviolet source 5
The downside at end is flushed with the lower end of the LED ultraviolet source 5, and the side that the light source distance adjusts ruler 6 is equipped with a vertical direction
Slide frame 61,9 end of measuring rod, which can slide up and down to, is fastened on described slide in frame 61.
Measuring rod, which rotatably blocks, to be set, and LED ultraviolet source is cylindrical herein, in this embodiment can be by LED purple
Annular groove is arranged in the lateral surface of outer light source, and annular groove opening direction is horizontal, and a support ring is rotatably arranged in the annular groove, surveys
Gauge rod is fixedly connected along being inserted radially into annular groove for LED ultraviolet source with support ring, since annular groove has certain depth, therefore
Measuring rod can keep horizontal, since the axle center of LED ultraviolet source is motionless, when user of service's turning knob drives LED ultraviolet source
When rotation, measuring rod slides in frame since its end is fastened on, therefore its position in the horizontal plane is motionless, but can be with LED
The rising of ultraviolet source and rise, decline and decline, the measuring rod end close to light source distance adjust ruler embodiment LED ultraviolet source
Height, facilitate the viewing of operator.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Within mind and principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (7)
1. a kind of single side cold light source exposure machine, it is characterised in that: purple including bracket, slide holder, convex lens, mechanical shutter and LED
Outer light source；
The slide holder is horizontally fixed on the lower end of the bracket, and the LED ultraviolet source is fixed on the upper end of the bracket, should
The light of LED ultraviolet source sequentially passes through the horizontal mechanical shutter being installed on bracket and convex lens is radiated on slide holder.
2. single side cold light source exposure machine according to claim 1, it is characterised in that: the convex lens is double flat convex lens group.
3. single side cold light source exposure machine according to claim 1, it is characterised in that: further include that light source distance adjusts ruler, institute
It states light source distance adjusting ruler to fix on the bracket vertically, and is located at the side of the LED ultraviolet source and double flat convex lens group.
4. single side cold light source exposure machine according to claim 1, it is characterised in that: it further include water-cooling type radiator, it is described
Water-cooling type radiator includes water-circulating pipe and water tank, and the water-circulating pipe is fixed around LED ultraviolet source, inlet and outlet access water
Case, and the water tank is fixed on the outside of bracket.
5. single side cold light source exposure machine according to claim 1, it is characterised in that: the LED ultraviolet source passes through distance
Regulating mechanism is fixed on the bracket.
6. single side cold light source exposure machine according to claim 5, it is characterised in that: the distance adjusting mechanism includes spiral shell
Bar, screw sleeve, gear, gear shaft and knob；
The upper end level of the bracket is equipped with two support plates being parallel to each other, and it is fixed that the middle part of underlying support plate is equipped with one
Through-hole；
The screw sleeve is fixed on vertically in the fixed hole；
The screw rod is inserted in the screw sleeve, and is threadedly engaged with the screw sleeve, the upper end of the screw rod be fixed with
The gear of screw coaxial rotation；
The gear shaft is rotatably fixed between two support plates vertically, and is engaged with the gear；
The knob is rotatably fixed in the support plate being located above, and passes through the support plate being located above and the gear
Axis is fixedly and coaxially connected.
7. single side cold light source exposure machine according to claim 3, it is characterised in that: on the side of the LED ultraviolet source
It is rotatably arranged with a measuring rod, the downside of the measuring rod end is flushed with the lower end of the LED ultraviolet source, the light source
Frame is slided equipped with a vertical direction in the side that distance adjusts ruler, and the measuring rod end, which can slide up and down to, is fastened on the cunning
In row frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811647452.3A CN109634066A (en) | 2018-12-29 | 2018-12-29 | A kind of single side cold light source exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811647452.3A CN109634066A (en) | 2018-12-29 | 2018-12-29 | A kind of single side cold light source exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109634066A true CN109634066A (en) | 2019-04-16 |
Family
ID=66055161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811647452.3A Pending CN109634066A (en) | 2018-12-29 | 2018-12-29 | A kind of single side cold light source exposure machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109634066A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204300754U (en) * | 2013-12-14 | 2015-04-29 | 豪雅冠得股份有限公司 | Light irradiation device |
| CN205750274U (en) * | 2015-12-25 | 2016-11-30 | 梅州市亮如昼科技有限公司 | A kind of exposing machine of circuit board |
| CN207601503U (en) * | 2017-07-10 | 2018-07-10 | 天津天物金佰微电子有限公司 | A kind of two-sided cold light source exposure machine |
| CN108508708A (en) * | 2018-04-08 | 2018-09-07 | 河南百合特种光学研究院有限公司 | A kind of UV-LED exposure light sources holder |
| CN209433181U (en) * | 2018-12-29 | 2019-09-24 | 天津天物金佰微电子有限公司 | A kind of single side cold light source exposure machine |
-
2018
- 2018-12-29 CN CN201811647452.3A patent/CN109634066A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204300754U (en) * | 2013-12-14 | 2015-04-29 | 豪雅冠得股份有限公司 | Light irradiation device |
| CN205750274U (en) * | 2015-12-25 | 2016-11-30 | 梅州市亮如昼科技有限公司 | A kind of exposing machine of circuit board |
| CN207601503U (en) * | 2017-07-10 | 2018-07-10 | 天津天物金佰微电子有限公司 | A kind of two-sided cold light source exposure machine |
| CN108508708A (en) * | 2018-04-08 | 2018-09-07 | 河南百合特种光学研究院有限公司 | A kind of UV-LED exposure light sources holder |
| CN209433181U (en) * | 2018-12-29 | 2019-09-24 | 天津天物金佰微电子有限公司 | A kind of single side cold light source exposure machine |
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