CN209433181U - A kind of single side cold light source exposure machine - Google Patents
A kind of single side cold light source exposure machine Download PDFInfo
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- CN209433181U CN209433181U CN201822256542.1U CN201822256542U CN209433181U CN 209433181 U CN209433181 U CN 209433181U CN 201822256542 U CN201822256542 U CN 201822256542U CN 209433181 U CN209433181 U CN 209433181U
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- light source
- bracket
- fixed
- exposure machine
- led ultraviolet
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Abstract
The utility model provides a kind of single side cold light source exposure machine, including bracket, slide holder, convex lens, mechanical shutter and LED ultraviolet source；The slide holder is horizontally fixed on the lower end of the bracket, and the LED ultraviolet source is fixed on the upper end of the bracket, and the light of the LED ultraviolet source sequentially passes through the horizontal mechanical shutter being installed on bracket and convex lens is radiated on slide holder.Single side cold light source exposure machine described in the utility model, by the setting of LED ultraviolet source, avoid using when mercury lamp light source as power it is excessive caused by hot excess accumulation problem.
Description
Technical field
The utility model belongs to exposure machine technical field, more particularly, to a kind of single side cold light source exposure machine.
Background technique
Typical exposure machine be easy to cause heat area to accumulate, to exposure using mercury lamp light source since mercury lamp light source power is excessive
Machine is caused compared with lossy, and typical exposure machine adjusts inconvenience to the distance between light source and convex lens, influences exposure effect.
Summary of the invention
In view of this, the utility model is directed to a kind of single side cold light source exposure machine, replaced by using LED cold light source
Mercury lamp light source avoids the heat area accumulation on exposal machine carrying platform, and using adjustable articulator installation light source and convex lens, facilitates
Adjusting to distance between light source and convex lens, improves exposure efficiency.
In order to achieve the above objectives, the technical solution of the utility model is achieved in that
A kind of single side cold light source exposure machine, including bracket, slide holder, convex lens, mechanical shutter and LED ultraviolet source；
The slide holder is horizontally fixed on the lower end of the bracket, and the LED ultraviolet source is fixed on the upper of the bracket
End, the light of the LED ultraviolet source sequentially passes through the horizontal mechanical shutter being installed on bracket and convex lens is radiated at slide holder
On.
Further, the convex lens is double flat convex lens group.
Further, the monolithic cold light source exposure machine further includes that light source distance adjusts ruler, and the light source distance adjusts ruler
It is vertical to fix on the bracket, and it is located at the side of the LED ultraviolet source and double flat convex lens group.
Further, the single side cold light source exposure machine further includes water-cooling type radiator, and the water-cooling type radiator includes
Water-circulating pipe and water tank, the water-circulating pipe are fixed around LED ultraviolet source, inlet and outlet access water tank, and the water tank is solid
It is scheduled on the outside of bracket.
Further, the LED ultraviolet source is fixed on the bracket by distance adjusting mechanism.
Further, the distance adjusting mechanism includes screw rod, screw sleeve, gear, gear shaft and knob；
The upper end level of the bracket is equipped with two support plates being parallel to each other, and the middle part of underlying support plate is equipped with one
Fixed hole；
The screw sleeve is fixed on vertically in the fixed hole；
The screw rod is inserted in the screw sleeve, and is threadedly engaged with the screw sleeve, and the upper end of the screw rod is fixed
There is the gear with screw coaxial rotation；
The gear shaft is rotatably fixed between two support plates vertically, and is engaged with the gear；
The knob is rotatably fixed in the support plate being located above, and pass through the support plate being located above with it is described
Gear shaft is fixedly and coaxially connected.
Further, a measuring rod is rotatably arranged on the side of the LED ultraviolet source, the measuring rod end
Downside is flushed with the lower end of the LED ultraviolet source, and the side that the light source distance adjusts ruler is equipped with sliding for a vertical direction
Frame, the measuring rod end, which can slide up and down to, is fastened on described slide in frame.
Compared with the existing technology, single side cold light source exposure machine described in the utility model has the advantage that
(1) single side cold light source exposure machine described in the utility model avoids use by the setting of LED ultraviolet source
When mercury lamp light source as power it is excessive caused by hot excess accumulation problem.
(2) single side cold light source exposure machine described in the utility model is realized by the setting of double screen lens group to light source
The adjustment of the depth of parallelism, it is simple and easy to do, improve exposure quality.
(3) single side cold light source exposure machine described in the utility model compares general photoetching using external water cold heat sink
The heat dissipation effect of machine is significant.
Detailed description of the invention
The attached drawing for constituting a part of the utility model is used to provide a further understanding of the present invention, this is practical new
The illustrative embodiments and their description of type are not constituteed improper limits to the present invention for explaining the utility model.?
In attached drawing:
Fig. 1 is single side cold light source exposure machine structure schematic diagram described in the utility model embodiment.
Description of symbols:
1- bracket；2- slide holder；3- convex lens；4- mechanical shutter；5-LED ultraviolet source；6- light source distance adjusts ruler；
61- slides frame；7- water-cooling type radiator；71- water-circulating pipe；72- water tank；8- distance adjusting mechanism；81- screw rod；82- screw rod set
Cylinder；83- gear；84- gear shaft；85- knob；9- measuring rod.
Specific embodiment
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower",
The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is
It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate
Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand
For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result,
Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another
It is described, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition
State the concrete meaning of term in the present invention.
The utility model will be described in detail below with reference to the accompanying drawings and embodiments.
As shown in Figure 1, the utility model provides a kind of single side cold light source exposure machine, including bracket 1, slide holder 2, convex lens 3,
Mechanical shutter 4 and LED ultraviolet source 5；
The slide holder 2 is horizontally fixed on the lower end of the bracket 1, and the LED ultraviolet source 5 is fixed on the bracket 1
Upper end, the light of the LED ultraviolet source 5 sequentially passes through the horizontal mechanical shutter 4 being installed on bracket 1 and convex lens 3 irradiates
On slide holder 2.
The utility model avoids the excessive caused heat of mercury lamp light source power using LED ultraviolet source as exposure light source
Excess accumulation problem.
Further, the convex lens 3 is double flat convex lens group.
Further, the monolithic cold light source exposure machine further includes that light source distance adjusts ruler 6, and the light source distance adjusts ruler
6 are fixed on vertically on the bracket 1, and are located at the side of the LED ultraviolet source 5 and double flat convex lens group.
In the apparatus, ruler is adjusted using light source distance to position, realize that the distance between light source and double flat convex lens group are adjusted,
And then realize and the depth of parallelism of light source is adjusted, it is simple and easy to do, improve exposure quality.
Further, the single side cold light source exposure machine further includes water-cooling type radiator 7, and the water-cooling type radiator 7 wraps
Water-circulating pipe 71 and water tank 72 are included, the water-circulating pipe 71 is fixed around LED ultraviolet source 5, inlet and outlet access water tank 72, and
The water tank 72 is fixed on the outside of bracket 1, using external water cold type radiator, realizes water tank to water-circulating pipe by water pump
Between water circulation, the heat dissipation effect for comparing general litho machine is significant.
Further, the LED ultraviolet source 5 is fixed on the bracket 1 by distance adjusting mechanism 8.
Further, the distance adjusting mechanism 8 includes screw rod 81, screw sleeve 82, gear 83, gear shaft 84 and knob
85；
The upper end level of the bracket 1 is equipped with two support plates being parallel to each other, and the middle part of underlying support plate is equipped with
One fixed hole；
The screw sleeve 82 is fixed on vertically in the fixed hole；
The screw rod 81 is inserted in the screw sleeve 82, and is threadedly engaged with the screw sleeve 82, the screw rod 81
Upper end is fixed with the gear 83 rotated coaxially with the screw rod 81；
The gear shaft 84 is rotatably fixed between two support plates vertically, and is engaged with the gear 83；
The knob 85 is rotatably fixed in the support plate being located above, and passes through the support plate being located above and institute
Gear shaft 84 is stated to be fixedly and coaxially connected.
Knob is turned, then knob band movable gear shaft rotates, and gear shaft driven gear rotation, gear drives screw rod in screw rod set
Rotation in cylinder, and then realize that screw rod drives the raising and lowering of LED ultraviolet source, realize LED ultraviolet source to double flat convex lens group
Between distance adjustment.
Further, a measuring rod 9,9 end of measuring rod are rotatably arranged on the side of the LED ultraviolet source 5
The downside at end is flushed with the lower end of the LED ultraviolet source 5, and the side that the light source distance adjusts ruler 6 is equipped with a vertical direction
Slide frame 61,9 end of measuring rod, which can slide up and down to, is fastened on described slide in frame 61.
Measuring rod, which rotatably blocks, to be set, and LED ultraviolet source is cylindrical herein, in this embodiment can be by LED purple
Annular groove is arranged in the lateral surface of outer light source, and annular groove opening direction is horizontal, and a support ring is rotatably arranged in the annular groove, surveys
Gauge rod is fixedly connected along being inserted radially into annular groove for LED ultraviolet source with support ring, since annular groove has certain depth, therefore
Measuring rod can keep horizontal, since the axle center of LED ultraviolet source is motionless, when user of service's turning knob drives LED ultraviolet source
When rotation, measuring rod slides in frame since its end is fastened on, therefore its position in the horizontal plane is motionless, but can be with LED
The rising of ultraviolet source and rise, decline and decline, the measuring rod end close to light source distance adjust ruler embodiment LED ultraviolet source
Height, facilitate the viewing of operator.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model
Protection scope within.
Claims (7)
1. a kind of single side cold light source exposure machine, it is characterised in that: purple including bracket, slide holder, convex lens, mechanical shutter and LED
Outer light source；
The slide holder is horizontally fixed on the lower end of the bracket, and the LED ultraviolet source is fixed on the upper end of the bracket, should
The light of LED ultraviolet source sequentially passes through the horizontal mechanical shutter being installed on bracket and convex lens is radiated on slide holder.
2. single side cold light source exposure machine according to claim 1, it is characterised in that: the convex lens is double flat convex lens group.
3. single side cold light source exposure machine according to claim 1, it is characterised in that: further include that light source distance adjusts ruler, institute
It states light source distance adjusting ruler to fix on the bracket vertically, and is located at the side of the LED ultraviolet source and double flat convex lens group.
4. single side cold light source exposure machine according to claim 1, it is characterised in that: it further include water-cooling type radiator, it is described
Water-cooling type radiator includes water-circulating pipe and water tank, and the water-circulating pipe is fixed around LED ultraviolet source, inlet and outlet access water
Case, and the water tank is fixed on the outside of bracket.
5. single side cold light source exposure machine according to claim 1, it is characterised in that: the LED ultraviolet source passes through distance
Regulating mechanism is fixed on the bracket.
6. single side cold light source exposure machine according to claim 5, it is characterised in that: the distance adjusting mechanism includes spiral shell
Bar, screw sleeve, gear, gear shaft and knob；
The upper end level of the bracket is equipped with two support plates being parallel to each other, and it is fixed that the middle part of underlying support plate is equipped with one
Through-hole；
The screw sleeve is fixed on vertically in the fixed hole；
The screw rod is inserted in the screw sleeve, and is threadedly engaged with the screw sleeve, the upper end of the screw rod be fixed with
The gear of screw coaxial rotation；
The gear shaft is rotatably fixed between two support plates vertically, and is engaged with the gear；
The knob is rotatably fixed in the support plate being located above, and passes through the support plate being located above and the gear
Axis is fixedly and coaxially connected.
7. single side cold light source exposure machine according to claim 3, it is characterised in that: on the side of the LED ultraviolet source
It is rotatably arranged with a measuring rod, the downside of the measuring rod end is flushed with the lower end of the LED ultraviolet source, the light source
Frame is slided equipped with a vertical direction in the side that distance adjusts ruler, and the measuring rod end, which can slide up and down to, is fastened on the cunning
In row frame.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822256542.1U CN209433181U (en) | 2018-12-29 | 2018-12-29 | A kind of single side cold light source exposure machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822256542.1U CN209433181U (en) | 2018-12-29 | 2018-12-29 | A kind of single side cold light source exposure machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209433181U true CN209433181U (en) | 2019-09-24 |
Family
ID=67974823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822256542.1U Active CN209433181U (en) | 2018-12-29 | 2018-12-29 | A kind of single side cold light source exposure machine |
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|---|---|
| CN (1) | CN209433181U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109634066A (en) * | 2018-12-29 | 2019-04-16 | 天津天物金佰微电子有限公司 | A kind of single side cold light source exposure machine |
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2018
- 2018-12-29 CN CN201822256542.1U patent/CN209433181U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109634066A (en) * | 2018-12-29 | 2019-04-16 | 天津天物金佰微电子有限公司 | A kind of single side cold light source exposure machine |
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