CN219108039U - Auxiliary frame of ultraviolet laser lithography device - Google Patents
Auxiliary frame of ultraviolet laser lithography device Download PDFInfo
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- CN219108039U CN219108039U CN202222953867.1U CN202222953867U CN219108039U CN 219108039 U CN219108039 U CN 219108039U CN 202222953867 U CN202222953867 U CN 202222953867U CN 219108039 U CN219108039 U CN 219108039U
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- auxiliary frame
- ultraviolet laser
- laser lithography
- fixedly connected
- lead screw
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Abstract
The utility model discloses an auxiliary frame of an ultraviolet laser lithography device, which relates to the technical field of ultraviolet laser lithography, and comprises the following components: the bottom plate, the lower fixed surface of bottom plate is connected with the supporting legs, the upper surface fixedly connected with fixed auxiliary frame of bottom plate, the inside fixedly connected with backup pad of fixed auxiliary frame, the right part of bottom plate is provided with the mounting groove, the inside of mounting groove is provided with the lead screw, the right-hand member middle part fixedly connected with control knob of lead screw, the inside of mounting groove just is located the outside fixedly connected with slide bar of lead screw, threaded connection has the control frame on the lead screw. The fixed auxiliary frame and the movable auxiliary frame are arranged to limit the substrate in a plurality of directions on the horizontal plane, so that the stability of the substrate is ensured to be good, and the exposure quality is ensured; through lead screw, slide bar, the control frame that set up, whole can be fit for the substrate of different length, the scope of use is great.
Description
Technical Field
The utility model relates to the technical field of ultraviolet laser lithography, in particular to an auxiliary frame of an ultraviolet laser lithography device.
Background
Ultraviolet laser lithography is to irradiate ultraviolet light emitted by an ultraviolet lamp to the surface of a substrate with a layer of photoresist film through a mask plate to cause chemical reaction of photoresist in an exposure area; and then the photoresist in the exposed area or the unexposed area (the former is called positive photoresist and the latter is called negative photoresist) is dissolved and removed by a developing technology, so that the pattern on the mask plate is copied on the photoresist film.
The stable placement of the substrate is one of factors determining the quality of the exposure area, and therefore, an auxiliary frame, which is a device for clamping the substrate, is required, however, there are the following disadvantages:
1. absent the limitation of multiple directions of a horizontal plane, the substrate is easy to move, so that the quality of exposure is affected;
2. the method is not suitable for substrates with different lengths, and has a small application range.
Disclosure of Invention
In order to overcome the defects of the prior art, one of the purposes of the utility model is to provide an auxiliary frame of an ultraviolet laser lithography device, wherein the fixed auxiliary frame and the movable auxiliary frame are arranged to limit the horizontal plane of a substrate in multiple directions, thereby ensuring good stability of the substrate and ensuring the quality of exposure; through lead screw, slide bar, the control frame that set up, whole can be fit for the substrate of different length, the scope of use is great.
One of the purposes of the utility model is realized by adopting the following technical scheme: the utility model provides an auxiliary frame of ultraviolet laser lithography device, includes the bottom plate, the lower fixed surface of bottom plate is connected with the supporting legs, the fixed auxiliary frame of upper fixed surface of bottom plate is connected with, the inside fixedly connected with backup pad of fixed auxiliary frame, the right part of bottom plate is provided with the mounting groove, the inside of mounting groove is provided with the lead screw, the right-hand member middle part fixedly connected with control knob of lead screw, the inside of mounting groove just is located the outside fixedly connected with slide bar of lead screw, threaded connection has the control frame on the lead screw, fixedly connected with removes the auxiliary frame on the control frame. The fixed auxiliary frame and the movable auxiliary frame are arranged to limit the substrate in a plurality of directions on the horizontal plane, so that the stability of the substrate is ensured to be good, and the exposure quality is ensured; through lead screw, slide bar, the control frame that set up, whole can be fit for the substrate of different length, the scope of use is great.
According to the auxiliary frames of the ultraviolet laser lithography device, the number of the fixed auxiliary frames is two, and the fixed auxiliary frames are symmetrically arranged.
According to the auxiliary frame of the ultraviolet laser lithography device, the shape of the fixed auxiliary frame is triangular.
The auxiliary frame of the ultraviolet laser lithography device is provided, and the shape of the supporting plate is triangular and is provided with a plurality of supporting plates. Is suitable for the placement requirements of different heights.
According to the auxiliary frame of the ultraviolet laser lithography device, the number of the sliding rods is two, and the sliding rods are symmetrically arranged. The stability of the movement of the control frame is ensured.
According to the auxiliary frame of the ultraviolet laser lithography device, the sliding rods pass through the control frame and are in sliding connection with each other.
According to the auxiliary frame of the ultraviolet laser lithography device, the number of the movable auxiliary frames is two.
According to the auxiliary frame of the ultraviolet laser lithography device, the number of the supporting feet is four, and the supporting feet are symmetrically arranged.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a schematic view of an auxiliary frame of an ultraviolet laser lithography apparatus according to the present utility model;
FIG. 2 is a top view of an auxiliary frame of an ultraviolet laser lithography apparatus according to the present utility model;
FIG. 3 is a front view of an auxiliary frame of an ultraviolet laser lithography apparatus according to the present utility model;
FIG. 4 is a side view of an auxiliary frame of an ultraviolet laser lithography apparatus according to the present utility model.
Legend description:
1. a bottom plate; 101. supporting feet; 102. fixing an auxiliary frame; 1021. a support plate; 2. a moving auxiliary frame; 201. a control rack; 202. a slide bar; 203. a control knob; 204. and a screw rod.
Detailed Description
Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.
Referring to fig. 1-4, an auxiliary frame of an ultraviolet laser lithography apparatus according to an embodiment of the present utility model includes a base plate 1, a supporting leg 101 is fixedly connected to a lower surface of the base plate 1, four supporting legs 101 are symmetrically disposed, a fixed auxiliary frame 102 is fixedly connected to an upper surface of the base plate 1, two fixed auxiliary frames 102 are symmetrically disposed, the fixed auxiliary frame 102 is triangular, a supporting plate 1021 is fixedly connected to an inner portion of the fixed auxiliary frame 102, the supporting plate 1021 is triangular and is provided with a plurality of supporting plates, the supporting plates are suitable for placement requirements of different heights, a mounting groove is provided at a right portion of the base plate 1, a screw rod 204 is provided in the inner portion of the mounting groove, a control knob 203 is fixedly connected to a middle portion of a right end of the screw rod 204, two sliding rods 202 are fixedly connected to an inner portion of the mounting groove and are located at an outer side of the screw rod 204, the sliding rods 202 penetrate through the control frame 201 and are slidably connected to each other, two sliding rods 202 are symmetrically disposed, movement stability of the control frame 201 is ensured, a control frame 201 is screwed on the screw rod 204, a movable auxiliary frame 2 is fixedly connected to the control frame 201, and the movable auxiliary frame 2 is provided on the control frame 201, and the movable auxiliary frame 2 has the supporting plates for two substrates. The fixed auxiliary frame 102 and the movable auxiliary frame 2 are arranged to limit the substrate in a plurality of directions on the horizontal plane, so that the stability of the substrate is ensured to be good, and the exposure quality is ensured; through lead screw 204, slide bar 202, the control frame 201 that set up, the whole substrate that can be fit for different length, the scope of use is great, and the auxiliary frame is installed on ultraviolet laser lithography device's workstation, and ultraviolet laser lithography device's work head is located the top of auxiliary frame for photoetching uses.
Working principle: when in use, the position of the movable auxiliary frame 2 can be correspondingly adjusted according to the length of the substrate, during adjustment, the screw rod 204 is rotated by the control knob 203, the screw rod 204 drives the control frame 201 to approach or separate from the fixed auxiliary frame 102, so that the position of the movable auxiliary frame 2 is changed, the direction depends on whether the control knob 203 rotates clockwise or anticlockwise, the whole can be suitable for substrates with different lengths, the use range is wider, then one end of the substrate is placed on the supporting plate 1021 with the required height, then the movable auxiliary frame 2 is moved by the control knob 203, the other end corner of the substrate is placed in the movable auxiliary frame 2, then the control knob 203 is continuously rotated until the substrate is completely stable, the fixed auxiliary frame 102 and the movable auxiliary frame 2 can limit the plurality of directions of the substrate horizontal plane, the stability of the substrate is guaranteed, and the quality of exposure is guaranteed.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (8)
1. The utility model provides an auxiliary frame of ultraviolet laser lithography device, includes bottom plate (1), its characterized in that, the lower fixed surface of bottom plate (1) is connected with supporting legs (101), the upper surface fixedly connected with fixed auxiliary frame (102) of bottom plate (1), the inside fixedly connected with backup pad (1021) of fixed auxiliary frame (102), the right-hand member of bottom plate (1) is provided with the mounting groove, the inside of mounting groove is provided with lead screw (204), the right-hand member middle part fixedly connected with control knob (203) of lead screw (204), the inside of mounting groove just is located outside fixedly connected with slide bar (202) of lead screw (204), threaded connection has control frame (201) on lead screw (204), fixedly connected with removes auxiliary frame (2) on control frame (201).
2. An auxiliary frame for an ultraviolet laser lithography apparatus as claimed in claim 1, wherein the number of fixed auxiliary frames (102) is two and symmetrically arranged.
3. An auxiliary frame for an ultraviolet laser lithography apparatus as claimed in claim 1, wherein the fixed auxiliary frame (102) is triangular in shape.
4. An auxiliary frame of an ultraviolet laser lithography apparatus as claimed in claim 1, wherein the support plate (1021) is triangular in shape and is provided with a plurality of support plates.
5. An auxiliary frame for an ultraviolet laser lithography apparatus as claimed in claim 1, wherein the number of slide bars (202) is two and symmetrically arranged.
6. An auxiliary frame for an ultraviolet laser lithography apparatus as claimed in claim 1, wherein the slide bar (202) passes through the control frame (201) and is slidably connected to each other.
7. An auxiliary frame for an ultraviolet laser lithography apparatus as claimed in claim 1, wherein there are two said moving auxiliary frames (2).
8. An auxiliary frame for an ultraviolet laser lithography apparatus as claimed in claim 1, wherein the number of support legs (101) is four and symmetrically arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222953867.1U CN219108039U (en) | 2022-11-07 | 2022-11-07 | Auxiliary frame of ultraviolet laser lithography device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222953867.1U CN219108039U (en) | 2022-11-07 | 2022-11-07 | Auxiliary frame of ultraviolet laser lithography device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219108039U true CN219108039U (en) | 2023-05-30 |
Family
ID=86429660
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222953867.1U Active CN219108039U (en) | 2022-11-07 | 2022-11-07 | Auxiliary frame of ultraviolet laser lithography device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219108039U (en) |
-
2022
- 2022-11-07 CN CN202222953867.1U patent/CN219108039U/en active Active
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