CN105157907A - Differential pressure sensor with overload protecting function - Google Patents
Differential pressure sensor with overload protecting function Download PDFInfo
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- CN105157907A CN105157907A CN201510409373.9A CN201510409373A CN105157907A CN 105157907 A CN105157907 A CN 105157907A CN 201510409373 A CN201510409373 A CN 201510409373A CN 105157907 A CN105157907 A CN 105157907A
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Abstract
The invention discloses a differential pressure sensor with an overload protecting function, which comprises a high-pressure chamber, a low-pressure chamber, and a central elastic corrugated diaphragm used for separating the high-pressure chamber and the low-pressure chamber. The differential pressure sensor is characterized in that a core body seat and one side of a sintering base are fixed on a first welding face; a center seat and the other side of the sintering base are fixed on a second welding face; a silicon piezoresistive chip is arranged on the core body seat; a pinch plate and the center seat are connected in a sealing way through a soldering joint; the central elastic corrugated diaphragm and the center seat are fixed on a third welding face; the low-pressure chamber is then formed; and a second pinch plate and the center seat are connected in a sealing way on a welding face to form the high-pressure chamber. The invention is mainly innovative that the differential pressure sensor with a small measuring range and an overpressure protection function is provided. The differential pressure sensor is mainly used in conditions with a measuring range less than 100Kpa. In case of an overload, the separating diaphragm can be well attached to a bearing pad. The differential pressure sensor can be conveniently used within a large static line pressure range.
Description
Technical field
The present invention relates to a kind of differential pressure pick-up with overload protection function.
Background technology
Differential pressure pick-up is a kind of sensor being used for difference between measurement two pressure, be generally used for the pressure reduction measuring a certain equipment or parts rear and front end, when having now client to use at the scene, pressure difference value may no to scale scope at short notice, easily causes sensor to destroy.
Summary of the invention
Goal of the invention: the present invention, in order to solve the deficiency of existing differential pressure pick-up in small-range is measured, provides a kind of small-range differential pressure pick-up with overload protection function.
Technical scheme: in order to realize foregoing invention object, the technical solution used in the present invention is: a kind of differential pressure pick-up with overload protection function, comprise high-pressure chamber, low pressure volumes and be used for isolation high, the central elastic convoluted diaphragm of low pressure volumes, low pressure volumes: core body seat is fixed on the first face of weld with sintering base side, centre mount is fixed on the second face of weld with sintering base opposite side, described core body seat is provided with silicon pressure drag chip, buckle and centre mount are tightly connected by soldered, central elastic ripple diaphragm and centre mount are fixed on the 3rd face of weld, form low pressure volumes, high-pressure chamber: buckle and centre mount are tightly connected at the 4th face of weld, forms high-pressure chamber.
A kind of differential pressure pick-up with overload protection function; comprise high-pressure chamber, low pressure volumes and be used for isolating the central elastic convoluted diaphragm of high and low pressure cavity; centre mount is fixedly installed on the first face of weld with sintering base; core body seat and central elastic convoluted diaphragm are fixed on the second face of weld; core body seat is provided with silicon pressure drag chip; centre mount and buckle are tightly connected at the 3rd face of weld, form high-pressure chamber and low pressure volumes.
As preferably, be provided with oil circuit between high-pressure chamber, low pressure volumes, oil circuit is connected to and rushes oilhole.
As preferably, described sensor is also provided with the first pressure ring, the second pressure ring, the first isolation diaphragm and the second isolation diaphragm, and the first pressure ring, isolation diaphragm and centre mount are tightly connected on the 4th face of weld, form the first isolated chambers; Second pressure ring, the second spacer and centre mount are tightly connected formation second isolated chambers on the 5th face of weld.
Beneficial effect: compared with prior art, the present invention has overload protection function, and during overload, isolation diaphragm can be attached on rim well, within the scope of very large static line pressure, all can be convenient and practical, there will not be because transshipping the sensor degradation caused.
Accompanying drawing illustrates:
Accompanying drawing 1 is the structural representation of the embodiment of the present invention 1;
Accompanying drawing 2 is structural representations of the embodiment of the present invention 2.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be described in detail.
Embodiment 1:
Fig. 1 is the first form of expression of the present invention: comprise high-pressure chamber, low pressure volumes and be used for isolating the central elastic convoluted diaphragm of high and low pressure cavity, specifically: the present embodiment mesolow cavity: core body seat 1 is fixed on the first face of weld 21 with sintering base 3 side, centre mount 6 is fixed on the second face of weld 22 with sintering base 3 opposite side, described core body seat 1 is provided with silicon pressure drag chip 4, buckle 8 and centre mount 6 are tightly connected by soldered 9, central elastic ripple diaphragm 10 and centre mount 6 are fixed on the 3rd face of weld 23, form low pressure volumes 7; High-pressure chamber: the second buckle 11 is tightly connected at the 4th face of weld 24 with centre mount 6, forms high-pressure chamber 12.
Be provided with oil circuit 13 between high-pressure chamber 12, low pressure volumes 7, oil circuit 13 is connected to and rushes oilhole.Sensor is also provided with the first pressure ring 31, second pressure ring 32, first isolation diaphragm 41 and the second isolation diaphragm 42, first pressure ring 31, isolation diaphragm 41 are tightly connected on the 5th face of weld 25 with centre mount 6, forms the first isolated chambers 51; Second pressure ring 32, second spacer 42 and centre mount 6 are tightly connected formation second isolated chambers 52 on the 6th face of weld 26, are communicated with respectively with vacuum cavity with positive pressure cavity.
The making step of the present embodiment is: 1) be connected by argon arc welding on the first face of weld 21 with sintering base 3 by core body seat 1, then silicon pressure drag chip 4 is bonded on core body seat 1,5 is spun gold wires, then will sinter base 3 and centre mount 6 and is connected by argon arc welding at the second face of weld 22 and seal; 2) buckle 8 and centre mount 6 to be connected by argon arc welding at soldered 9 and to seal; 3) central elastic convoluted diaphragm 10 and centre mount 6 to be connected by argon arc welding at the 3rd face of weld 23 and to seal, form low pressure volumes 7, second buckle 11 and centre mount 6 to be connected by argon arc welding at the 4th face of weld 24 and to seal, form high-pressure chamber 12,13 for rushing oilhole and the oil circuit between high-pressure chamber and low pressure volumes.
The present invention has overload protection function, and during overload, isolation diaphragm can be attached on rim well, within the scope of very large static line pressure, all can be convenient and practical, and there will not be because transshipping the sensor degradation caused.
Embodiment 2
Fig. 2 is the second form of the present invention: centre mount 6 is fixedly installed on the first face of weld 21 with sintering base 3, core body seat 1 and central elastic convoluted diaphragm 10 are fixed on the second face of weld 22, core body seat 1 is provided with silicon pressure drag chip 4, centre mount 6 and buckle 8 are tightly connected at the 3rd face of weld 23, forming high-pressure chamber 12 with low pressure volumes 7,14 is flexible circuit board.In above two embodiments, 15 is glass insulators, and 16 is silica gel wires.
The making step of the present embodiment is: 1) be connected by argon arc welding at the first face of weld 21 with sintering base 3 by centre mount 6, then silicon pressure drag chip 4 is bonded on core body seat 1,5 is spun gold wires, and core body seat 1 is connected by argon arc welding at the second face of weld 22 with central elastic ripple diaphragm 10; 2) be connected by argon arc welding at the 3rd face of weld 23 with buckle 8 by centre mount 6, formation high-pressure chamber 12 and low pressure volumes 7,13 are for rushing oilhole and the oil circuit between low pressure volumes and high-pressure chamber.3) the first pressure ring 31, first isolation diaphragm 41 and centre mount 6 are passed through argon arc welding welded seal at the 5th face of weld 25, form the first isolated chambers 51, second pressure ring 32 and the second isolation diaphragm 42 are passed through argon arc welding welded seal with buckle 8 at the 6th face of weld 26, forms the second isolated chambers 52.
It is simple that the present invention has structure, and practicality is high, and the advantage of overvoltage protection Be very effective, can within the scope of very large static line pressure, and well protection sensor is not damaged.
Claims (4)
1. one kind has the differential pressure pick-up of overload protection function, comprise high-pressure chamber, low pressure volumes and be used for isolation high, the central elastic convoluted diaphragm of low pressure volumes, it is characterized in that: low pressure volumes: core body seat (1) is fixed on the first face of weld (21) with sintering base (3) side, centre mount (6) is fixed on the second face of weld (22) with sintering base (3) opposite side, described core body seat (1) is provided with silicon pressure drag chip (4), buckle (8) and centre mount (6) are tightly connected by soldered (9), central elastic ripple diaphragm (10) and centre mount (6) are fixed on the 3rd face of weld (23), form low pressure volumes (7), high-pressure chamber: the second buckle (11) and centre mount (6) are tightly connected at the 4th face of weld (24), forms high-pressure chamber (12).
2. there is the differential pressure pick-up of overload protection function as claimed in claim 1, comprise high-pressure chamber, low pressure volumes and be used for isolation high, the central elastic convoluted diaphragm of low pressure volumes, it is characterized in that: centre mount (6) is fixedly installed on the first face of weld (21) with sintering base (3), core body seat (1) and central elastic convoluted diaphragm (10) are fixed on the second face of weld (22), core body seat (1) is provided with silicon pressure drag chip (4), centre mount (6) and buckle (8) are tightly connected at the 3rd face of weld (23), form high-pressure chamber (12) and low pressure volumes (7).
3. there is the differential pressure pick-up of overload protection function as claimed in claim 1 or 2; it is characterized in that: be provided with oil circuit (13) between high-pressure chamber (12), low pressure volumes (7), oil circuit (13) is connected to and rushes oilhole.
4. there is the differential pressure pick-up of overload protection function as claimed in claim 3, it is characterized in that: described sensor is also provided with the first pressure ring (31), the second pressure ring (32), the first isolation diaphragm (41) and the second isolation diaphragm (42), first pressure ring (31), isolation diaphragm (41) and centre mount (6) are tightly connected on the 4th face of weld (24), form the first isolated chambers (51); Second pressure ring (32), the second spacer (42) and centre mount (6) are tightly connected formation second isolated chambers (52) on the 5th face of weld (25).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510409373.9A CN105157907A (en) | 2015-07-13 | 2015-07-13 | Differential pressure sensor with overload protecting function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510409373.9A CN105157907A (en) | 2015-07-13 | 2015-07-13 | Differential pressure sensor with overload protecting function |
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| Publication Number | Publication Date |
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| CN105157907A true CN105157907A (en) | 2015-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201510409373.9A Pending CN105157907A (en) | 2015-07-13 | 2015-07-13 | Differential pressure sensor with overload protecting function |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105628291A (en) * | 2016-03-10 | 2016-06-01 | 威卡自动化仪表（苏州）有限公司 | Double-diaphragm differential pressure measurement device |
| CN106124116A (en) * | 2016-07-27 | 2016-11-16 | 安费诺(常州)连接系统有限公司 | For detecting pressure transducer and the method for opposing liquid freezing and expansion pressure thereof of hydraulic pressure |
| CN106979840A (en) * | 2017-02-23 | 2017-07-25 | 南京沃天科技有限公司 | Using Welding and with overload protection function differential pressure pick-up |
| CN107576426A (en) * | 2017-07-21 | 2018-01-12 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of silicon on sapphire pressure sensor sensitive structure with self-protection function |
| CN110595672A (en) * | 2019-08-19 | 2019-12-20 | 江苏杰克仪表有限公司 | Novel high-accuracy differential pressure transmitter |
| CN111141447A (en) * | 2020-01-13 | 2020-05-12 | 合肥工业大学 | Anti high absolute formula resonance micro-pressure sensor that transships |
| CN111157171A (en) * | 2020-02-15 | 2020-05-15 | 盛雪梅 | Novel high-overload differential pressure sensor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59203936A (en) * | 1983-05-04 | 1984-11-19 | Hitachi Ltd | Semiconductor differential pressure transmitter |
| CN85101369A (en) * | 1985-04-01 | 1987-01-10 | 株式会社日立制作所 | Semiconductor differentical pressure signal generator |
| CN1036076A (en) * | 1987-11-27 | 1989-10-04 | 株式会社日立制作所 | Differential pressure pick-up |
| JPH07190874A (en) * | 1993-12-27 | 1995-07-28 | Yamatake Honeywell Co Ltd | Differential-pressure and pressure transmitter |
| CN1672025A (en) * | 2002-07-30 | 2005-09-21 | 恩德莱斯和豪瑟尔两合公司 | Differential pressure sensor comprising a symmetric error in the separating bodies |
| DE102011002900A1 (en) * | 2011-01-20 | 2012-07-26 | Siemens Aktiengesellschaft | Pressure Transmitter |
-
2015
- 2015-07-13 CN CN201510409373.9A patent/CN105157907A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59203936A (en) * | 1983-05-04 | 1984-11-19 | Hitachi Ltd | Semiconductor differential pressure transmitter |
| CN85101369A (en) * | 1985-04-01 | 1987-01-10 | 株式会社日立制作所 | Semiconductor differentical pressure signal generator |
| CN1036076A (en) * | 1987-11-27 | 1989-10-04 | 株式会社日立制作所 | Differential pressure pick-up |
| JPH07190874A (en) * | 1993-12-27 | 1995-07-28 | Yamatake Honeywell Co Ltd | Differential-pressure and pressure transmitter |
| CN1672025A (en) * | 2002-07-30 | 2005-09-21 | 恩德莱斯和豪瑟尔两合公司 | Differential pressure sensor comprising a symmetric error in the separating bodies |
| DE102011002900A1 (en) * | 2011-01-20 | 2012-07-26 | Siemens Aktiengesellschaft | Pressure Transmitter |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105628291A (en) * | 2016-03-10 | 2016-06-01 | 威卡自动化仪表（苏州）有限公司 | Double-diaphragm differential pressure measurement device |
| CN106124116A (en) * | 2016-07-27 | 2016-11-16 | 安费诺(常州)连接系统有限公司 | For detecting pressure transducer and the method for opposing liquid freezing and expansion pressure thereof of hydraulic pressure |
| CN106979840A (en) * | 2017-02-23 | 2017-07-25 | 南京沃天科技有限公司 | Using Welding and with overload protection function differential pressure pick-up |
| CN107576426A (en) * | 2017-07-21 | 2018-01-12 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of silicon on sapphire pressure sensor sensitive structure with self-protection function |
| CN110595672A (en) * | 2019-08-19 | 2019-12-20 | 江苏杰克仪表有限公司 | Novel high-accuracy differential pressure transmitter |
| CN111141447A (en) * | 2020-01-13 | 2020-05-12 | 合肥工业大学 | Anti high absolute formula resonance micro-pressure sensor that transships |
| CN111157171A (en) * | 2020-02-15 | 2020-05-15 | 盛雪梅 | Novel high-overload differential pressure sensor |
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Application publication date: 20151216 |
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