CN105091797A - Intensity correlated autocollimator for single-CCD - Google Patents
Intensity correlated autocollimator for single-CCD Download PDFInfo
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- CN105091797A CN105091797A CN201510293925.4A CN201510293925A CN105091797A CN 105091797 A CN105091797 A CN 105091797A CN 201510293925 A CN201510293925 A CN 201510293925A CN 105091797 A CN105091797 A CN 105091797A
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Abstract
The invention discloses an intensity correlated autocollimator for a single-CCD, including an optical system and an image acquisition system and a data processing module, wherein the optical system is composed of a laser, ground glass, a motor, a reticle, a first spectroscope, a second spectroscope, a first lens and a second lens, and the image acquisition system includes an area array CCD. The area array CCD receives an image signal which is sent at the same time from the optical system through triggering of a synchronous signal sent from the image acquisition system. The two paths of images, after being acquired by the image acquisition system, are subject to intensity correlated calculation and signal processing in the data processing module, and finally a reading is displayed. According to the invention, a reference light path is added the optical system and the overall appearance of the traditional autocollimator are kept, and implementation in terms of engineering is easy. According to the invention, the intensity correlated method of quantum imaging technology is also introduced to the design of the autocollimator, which, can effectively increase the resolution and accuracy of measurement, can reduce errors of measurement caused by air disturbances, and the like, and can increase the sensitivity and stability of the autocollimator.
Description
Technical field
The present invention relates to the intensity correlation autocollimator of a kind of single CCD, belong to precision measurement gauging instrument field.
Background technology
Autocollimator, as a kind of high-precision optical gauging instrument, can be used for measurement of angle, flatness measurement, the many aspects such as squareness measurement, in machining, and the processing of space flight and aviation device and assembling, the every field widespread uses such as Precise physical experiment.The mode that tradition autocollimator product mostly adopts lens combination and face battle array or line array CCD to combine is measured.Therefore under the prior art to improve the measuring accuracy of autocollimator, generally needing to strengthen lens combination focal length, reducing the methods such as CCD pixel dimension.Wherein, the increase of lens combination focal length inevitably increases the volume of autocollimator; And reduce the restriction that CCD pixel dimension is subject to the processing of CCD pixel and field engineering.Simultaneously in actual applications, wide range and high precision also significantly limit the application scenario of autocollimator as a pair implacable contradiction.
Summary of the invention
The problem that the technology of the present invention solves is: overcome prior art deficiency, the intensity correlation autocollimator of a kind of single CCD is provided, autocollimator system achieves the intensity correlation method in quantum imaging technology, can effectively improve measurement resolution and accuracy on the one hand, the measuring error that the factors such as air turbulence cause can also be reduced, two paths of signals imaging on same CCD simultaneously, effectively can suppress the background noise in two paths of signals, sensitivity and stability are improved, and have broad application prospects.
The scheme that technology of the present invention solves is: the intensity correlation autocollimator of a kind of single CCD, comprising: optical system, image capturing system and data processing module; Optical system comprises laser instrument (1), motor (2), ground glass (3), graticule (4), the first spectroscope (5), the first lens (6), the second spectroscope (7), the first catoptron (8), the second lens (9); Image capturing system comprises area array CCD (10).
Laser instrument (1) launches single longitudinal mode continuous laser, ground glass (3) at the uniform velocity rotates under motor (2) drives, the single longitudinal mode continuous laser that laser instrument (1) is launched is modulated into counterfeit thermo-optical, delivers to graticule (4); Aperture offered by graticule (4) and after being fixed on ground glass (3), will through the counterfeit thermo-optical of ground glass (3) through the light beam of the aperture on graticule (4) as light source, namely approximate pointolite, delivers to the first spectroscope (5); Light beam through the aperture on graticule (4) is divided into parallel two-way light beam by the first spectroscope (5), and the parallel two-way light beam separated through light beam and first spectroscope (5) of the aperture on graticule (4) is parallel, the first via light beam of the parallel two-way light beam that the first spectroscope (5) separates delivers to the second spectroscope (7), and the second road light beam delivers to the first lens (6);
The first via light beam of the parallel two-way light beam that the first spectroscope (5) separates by the second spectroscope (7), light splitting is transmitted light beam and folded light beam, folded light beam is given up, the transmitted light beam that the first via light beam light splitting of the parallel two-way light beam that the first spectroscope (5) separates obtains is after the second lens (9) are converted to parallel beam, be irradiated to object under test (11), object under test (11) can replace with the second catoptron, parallel beam again converts converging beam to by the second lens (9) after object under test (11) reflection, be irradiated to the second spectroscope (7), converging beam light splitting through the second lens (9) is become transmitted light beam and folded light beam by the second spectroscope (7), and transmitted light beam is abandoned, and negate irradiating light beam vertical irradiation is to area array CCD (10),
First lens (6) will after the second road beams converge that the first spectroscope (5) light splitting obtains, and after the first catoptron (8) reflection, vertical incidence is to area array CCD (10);
Area array CCD (10) is scan-type sensor, under the control of the synchronous sequence signal sent in data handling system, the folded light beam obtained through the second spectroscope (7) light splitting again by the second lens (9) converging beam respectively of synchronization and the first lens (6) being converged the light beam reflected through the first catoptron (8) is again that a road electric signal exports data processing module to through opto-electronic conversion, and this road electric signal comprises the image of the two-way light beam that area array CCD obtains;
Data processing module, the electric signal that area array CCD (10) exports is gathered, after preservation, the image of the two-way light beam obtained by area array CCD carries out intensity correlation computing, obtain relevance imaging result, namely be radiated at the picture of the hot spot on area array CCD (10) and hot spot as a upper bright spot, this bright spot is the relating dot that the image of the two-way light beam obtained by CCD obtains through association computing, mobile with the rotation of object under test (11), the parallel beam being used for characterizing through the second lens (9) is radiated at the position on object under test (11); By observing the change as a upper bright spot position of hot spot, after the deviation angle of object under test (11) on horizontal and vertical can be calculated, and show.
The single longitudinal mode continuous laser that described laser instrument (1) is launched, incide on the ground glass (3) of rotation, generation time is relevant, noncoherent counterfeit thermo-optical field, space, i.e. speckle field, can carry out intensity correlation imaging with speckle field as lighting source.
Described first spectroscope, the first lens, the first catoptron and area array CCD form reference path, the signal light path formed with the first spectroscope, the second spectroscope, the second lens, object under test and the second area array CCD, composition imaging system.
Described data processing module, the imaging picture that the image of the two-way light beam in the electric signal export the area array CCD (10) gathered images on same area array CCD is divided into two parts, every part comprises an optical signalling, and the time that two optical signallings incide area array CCD (10) is consistent, this two parts intensity correlation is calculated.
Utilize described data processing module to carry out peak-seeking computing to the relating dot in imaging results, obtain the accurate coordinates of relating dot, to improve precision and the accuracy of autocollimator.
Compared with prior art, the invention has the advantages that:
(1) in Project Realization than being easier to, the present invention improves on traditional autocollimator basis, make use of the detectable signal of two-way optical detection system, gathered by image capturing system, and in data processing module, intensity correlation signal transacting is carried out to two path signal.Therefore on the basis keeping the optical system of former autocollimator, overall appearance shape invariance, the local directed complete set of inner structure is carried out, than being easier in Project Realization.
(2) under identical range, measuring accuracy is higher, intensity correlation algorithm in quantum imaging technology is introduced in self-collimation measurement by the present invention, image through data processing module output not only comprises the picture of hot spot on catoptron, also comprise the relating dot on hot spot, in data processing, tradition autocollimator carries out to the picture of hot spot on catoptron the coordinate that sub-pix Subdividing Processing obtains hot spot, then that the relating dot meticulousr to size carries out computing and then obtain the exact position of luminous point in the present invention, contrast traditional autocollimator, the method can realize more high-acruracy survey in identical range situation, effective accuracy improving measurement, reduce error.
(3) stability of display is better, because the present invention carries out self-collimation measurement based on intensity correlation algorithm, compared with traditional autocollimator.Control circuit is little, can the indicating value saltus step that causes of reduction circuit to a certain degree; On the other hand, two-way optical signalling enters same CCD, greatly can suppress the common noise of two paths of signals.Meanwhile, signal intensity association algorithm can effectively reduce the impact of the extraneous factor such as air turbulence, temperature variation, and therefore error is less and indicating value is more stable.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of autocollimator of the present invention.
Embodiment
Basic ideas of the present invention are: the present invention only adopts a CCD imaging device, utilizes the mode of relevance imaging, propose a kind of novel intensity correlation autocollimator based on single CCD.This project plan comparison tradition autocollimator adds a road reference path, and the image formation of two light paths, on same CCD, can keep the overall appearance of former autocollimator substantially.The present invention only utilizes a CCD imaging device, autocollimator system achieves the intensity correlation method in quantum imaging technology, can effectively improve measurement resolution and accuracy on the one hand, the measuring error that the factors such as air turbulence cause can also be reduced, two paths of signals imaging on same CCD simultaneously, effectively can suppress the background noise in two paths of signals, sensitivity and stability are improved, and have broad application prospects.
Below in conjunction with the drawings and specific embodiments, the present invention will be further described in detail.
As shown in Figure 1, the intensity correlation autocollimator of a kind of single CCD, comprise the optical system of laser instrument 1, motor 2, ground glass 3, graticule 4, first spectroscope 5, second spectroscope 7, first lens 6, second lens 9, first catoptron 8 composition, and image capturing system area array CCD 10 and data processing module.
Laser instrument 1 launches single longitudinal mode continuous laser, and service band is at visible light wave range, and single longitudinal mode continuous laser makes the collection of two-way optical signalling synchronously more easily realize, and then completes intensity correlation computing.Ground glass 3 at the uniform velocity rotates under motor 2 drives, the single longitudinal mode continuous laser launched by laser instrument 1 is modulated into counterfeit thermo-optical field, i.e. speckle field, the polishing grain size of ground glass directly affects speckle field speckle size, and then affect relating dot size after association algorithm, polishing particle is less, and relating dot is less, and detection accuracy of the present invention is higher.Counterfeit thermo-optical bundle is irradiated to graticule 4, aperture offered by graticule 4 and after being fixed on ground glass 3, using the counterfeit thermo-optical through ground glass 3 through the light beam of the aperture on graticule 4 as light source, namely approximate pointolite, small aperture size determines signal beams and reference beam and is finally irradiated to spot size on area array CCD 10, small aperture is less, and hot spot is less.
Pointolite light beam delivers to the first spectroscope 5, pointolite light beam (optical axis direction) and the plane of incidence of the first spectroscope 5 are that 45° angle is incident, incidence point must, near spectroscopical light splitting surface (diagonal plane), make the first spectroscope 5 light beam through the aperture on graticule 4 is divided into discerptible two-way light beam parallel up and down as far as possible.
Second spectroscope 7 by first via light beam (on), light splitting is transmitted light beam and folded light beam, and folded light beam is given up, transmitted light beam is converted to parallel beam through the second lens 9, be signal beams, signal beams is parallel beam, makes the detection range of object under test 11 unrestricted.Parallel beam is irradiated to object under test 11, replaces with the second catoptron, and object under test 11 is rotatable, and parallel beam again converts converging beam to by the second lens 9 after object under test 11 reflects, and is irradiated to the second spectroscope 7; Converging beam light splitting through the second lens 9 is become transmitted light beam and folded light beam by the second spectroscope 7, and transmitted light beam is abandoned, and negate irradiating light beam is irradiated to area array CCD 10; The position relationship of the second lens 9 and graticule 4, area array CCD 10 needs to ensure that graticule 4 and area array CCD 10 are all positioned on the focal plane of the second lens 9;
First lens 6 by through the first spectroscope 5 the second road light beam (under) converge after, reflex to area array CCD 10 through the first catoptron 8; First lens 6 need to ensure that graticule 4 is positioned on two times of focal planes of the first lens 6 with the position relationship of graticule 4, area array CCD 10, and area array CCD 10 is positioned near two times of focal planes of the first lens 6;
Area array CCD 10 is scan-type sensor, under the control of the synchronous sequence signal sent at image capturing system, the light beam light beam reflected through the second spectroscope 7 by the second lens 9 respectively of synchronization and the first lens 6 reflected through the first catoptron 8 is that a road electric signal exports through opto-electronic conversion, this road electric signal comprises the image of the two-way light beam that area array CCD obtains, and the image of two-way light beam can not overlap;
Data processing module, the electric signal that area array CCD 10 exports is gathered, after preservation, the image of two-way light beam that area array CCD obtains is carried out intensity correlation computing: the image that the signal beams synchronization got in a position coordinates and area array CCD obtains of taking up an official post of the reference beam image in area array CCD carries out relevance imaging, finally obtain the picture of hot spot on object under test 11 and hot spot as a upper bright spot, this bright spot is the relating dot that the image of the two-way light beam obtained by CCD obtains through association computing, mobile with the rotation of object under test 11, use peak-seeking algorithm can determine the coordinate of bright spot further again, direct reading coordinate of bright spot, coordinate precision can be promoted 3 to 4 orders of magnitude after using peak-seeking algorithm, by the displacement that observation coordinate of bright spot is horizontal and vertical, calculate object under test to change in the angle of bidimensional, Output rusults.
At this, it should be noted that, the content do not described in detail in this instructions, be that those skilled in the art can be realized by the description in this instructions and prior art, therefore, do not repeat.
The foregoing is only the preferred embodiments of the present invention, be not used for limiting the scope of the invention.For a person skilled in the art, under the prerequisite not paying creative work, can make some amendments and replacement to the present invention, all such modifications and replacement all should be encompassed within protection scope of the present invention.
Claims (6)
1. an intensity correlation autocollimator of single CCD, is characterized in that comprising: optical system, image capturing system and data processing module; Optical system comprises laser instrument (1), motor (2), ground glass (3), graticule (4), the first spectroscope (5), the first lens (6), the second spectroscope (7), the first catoptron (8), the second lens (9); Image capturing system comprises area array CCD (10);
Laser instrument (1) launches single longitudinal mode continuous laser, ground glass (3) at the uniform velocity rotates under motor (2) drives, the single longitudinal mode continuous laser that laser instrument (1) is launched is modulated into counterfeit thermo-optical, delivers to graticule (4); Aperture offered by graticule (4) and after being fixed on ground glass (3), will through the counterfeit thermo-optical of ground glass (3) through the light beam of the aperture on graticule (4) as light source, namely approximate pointolite, delivers to the first spectroscope (5); Light beam through the aperture on graticule (4) is divided into parallel two-way light beam by the first spectroscope (5), and the parallel two-way light beam separated through light beam and first spectroscope (5) of the aperture on graticule (4) is parallel, the first via light beam of the parallel two-way light beam that the first spectroscope (5) separates delivers to the second spectroscope (7), and the second road light beam of the parallel two-way light beam that the first spectroscope (5) separates delivers to the first lens (6);
The first via light beam of the parallel two-way light beam that the first spectroscope (5) separates by the second spectroscope (7), light splitting is transmitted light beam and folded light beam, folded light beam is given up, the transmitted light beam that the first via light beam light splitting of the parallel two-way light beam that the first spectroscope (5) separates obtains is after the second lens (9) are converted to parallel beam, be irradiated to object under test (11), object under test (11) can replace with the second catoptron, the parallel beam being irradiated to object under test (11) again converts converging beam to by the second lens (9) after object under test (11) reflection, be irradiated to the second spectroscope (7), converging beam light splitting through the second lens (9) is become transmitted light beam and folded light beam by the second spectroscope (7), transmitted light beam is abandoned, the folded light beam that the converging beam light splitting of learning from else's experience the second lens (9) obtains, vertical irradiation is to area array CCD (10),
First lens (6) will after the second road beams converge that the first spectroscope (5) light splitting obtains, and after the first catoptron (8) reflection, vertical incidence is to area array CCD (10);
Area array CCD (10) is scan-type sensor, under the control of the synchronous sequence signal sent in data handling system, the folded light beam obtained through the second spectroscope (7) light splitting again by the second lens (9) converging beam respectively of synchronization and the first lens (6) being converged the light beam reflected through the first catoptron (8) is again that a road electric signal exports data processing module to through opto-electronic conversion, and this road electric signal comprises the image of the two-way light beam that area array CCD obtains;
Data processing module, the electric signal that area array CCD (10) exports is gathered, after preservation, the image of the two-way light beam obtained by area array CCD carries out intensity correlation computing, obtain relevance imaging result, namely be radiated at the picture of the hot spot on area array CCD (10) and hot spot as a upper bright spot, this bright spot is the relating dot that the image of the two-way light beam obtained by CCD obtains through association computing, mobile with the rotation of object under test (11), the parallel beam being used for characterizing through the second lens (9) is radiated at the position on object under test (11); By observing the change as a upper bright spot position of hot spot, after the deviation angle of object under test (11) on horizontal and vertical can be calculated, and show.
2. the intensity correlation autocollimator of a kind of single CCD according to claim 1, it is characterized in that: the single longitudinal mode continuous laser that described laser instrument (1) is launched, incide on the ground glass (3) of rotation, generation time is relevant, noncoherent counterfeit thermo-optical field, space, i.e. speckle field, can carry out intensity correlation imaging with speckle field as lighting source.
3. the intensity correlation autocollimator of a kind of single CCD according to claim 1, it is characterized in that: described first spectroscope, the first lens, the first catoptron and area array CCD form reference path, the signal light path formed with the first spectroscope, the second spectroscope, the second lens, object under test and the second area array CCD, composition imaging system.
4. the intensity correlation autocollimator of a kind of single CCD according to claim 1, it is characterized in that: described data processing module, the imaging picture that the image of the two-way light beam in the electric signal export the area array CCD (10) gathered images on same area array CCD is divided into two parts, every part comprises an optical signalling, and the time that two optical signallings incide area array CCD (10) is consistent, this two parts intensity correlation is calculated.
5. the intensity correlation autocollimator of a kind of single CCD according to claim 1, it is characterized in that: utilize described data processing module to carry out peak-seeking computing to the relating dot in imaging results, obtain the accurate coordinates of relating dot, to improve precision and the accuracy of autocollimator.
6. the intensity correlation autocollimator of a kind of single CCD according to claim 1, is characterized in that: the first via light beam of the parallel two-way light beam that the transmitted light beam that the first via light beam light splitting of the parallel two-way light beam that the first spectroscope (5) separates by described second spectroscope (7) obtains separates with the first spectroscope (5) on the same line.
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Cited By (3)
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| CN109870120A (en) * | 2019-03-09 | 2019-06-11 | 中国人民解放军国防科技大学 | High-sensitivity monitoring system for micro angular displacement of rotating body based on laser polarization measurement |
| CN111158060A (en) * | 2019-12-28 | 2020-05-15 | 中国船舶重工集团公司第七一七研究所 | Intensity correlation imaging system and three-dimensional imaging method thereof |
| CN115727937A (en) * | 2022-11-14 | 2023-03-03 | 巨翊医疗科技(苏州)有限公司 | Method, device and system for measuring mechanical vibration parameters |
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