CN102944879A - Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device - Google Patents
Four-dimensional imaging device based on MEMS two-dimensional scan mirror and imaging method of imaging device Download PDFInfo
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- CN102944879A CN102944879A CN2012104353709A CN201210435370A CN102944879A CN 102944879 A CN102944879 A CN 102944879A CN 2012104353709 A CN2012104353709 A CN 2012104353709A CN 201210435370 A CN201210435370 A CN 201210435370A CN 102944879 A CN102944879 A CN 102944879A
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Abstract
The invention discloses a four-dimensional imaging device based on an MEMS (Micro Electronic Mechanical System) two-dimensional scan mirror and an imaging method of the imaging device. The device comprises a CPU (Central Processing Unit) module, a pulsed laser, the MEMS two-dimensional scan mirror, a pulse peak retaining circuit, an angle measurement device of the MEMS two-dimensional scan mirror, a semi-transparent and semi-reflective mirror, a first pulsed laser receiving module, a second pulsed laser receiving module and a time interval measurement module. The device integrates a three-dimensional image in a measured area with laser reflection information of a measured objective surface, provides four-dimensional information of the measured area, and can better reflect characteristics of the measured area.
Description
Technical field
The invention belongs to technical field of imaging, relate to a kind of imaging device, especially a kind of light four-dimensional imaging device and formation method thereof based on MEMS two-dimensional scan mirror.
Background technology
Along with the development of laser technology, the ranging technology of pulse laser has been tending towards improving and is ripe.Simultaneously, cooperate the active laser detection apparatus take microelectromechanical systems (Micro Electronic Mechanical System, MEMS) as the core scanning device that certain development has also been arranged.Although yet traditional active laser detection apparatus can generate the 3-D view in tested zone accurately, but can't extract for the feature of tested region surface.
Summary of the invention
The object of the invention is to overcome the shortcoming of above-mentioned prior art, a kind of light four-dimensional imaging device and formation method thereof based on MEMS two-dimensional scan mirror is provided, this device is integrated 3-D view and the measured target surface in tested zone for laser reflection situation information, the four-dimensional information in tested zone is provided, can reflects better the feature in tested zone.
The objective of the invention is to solve by the following technical programs:
This light four-dimensional imaging device based on MEMS two-dimensional scan mirror comprises CPU module, pulsed laser, MEMS two-dimensional scan mirror, pulse peak hold circuit, MEMS two-dimensional scan mirror angle-measuring equipment, semi-transparent semi-reflecting lens, the first pulse laser receiver module, the second pulse laser receiver module, time interval measurement module;
Described MEMS two-dimensional scan mirror is fixed on the dead ahead of semi-transparent semi-reflecting lens, and semi-transparent semi-reflecting lens is fixed on the dead ahead of pulsed laser, and MEMS two-dimensional scan mirror corner measuring apparatus (6) is fixed on two rotation axiss of MEMS two-dimensional scan mirror; Described CPU module is connected 4 with MEMS two-dimensional scan mirror corner measuring apparatus with the peak value of pulse metering circuit respectively by first and second AD converter) be connected; Described time interval measurement module also is connected to the CPU module; Described the first pulse laser receiver module all links to each other with the time interval measurement module with the second pulse laser receiver module; Described the second pulse laser receiver module also is connected with the input end of peak value of pulse metering circuit.
The present invention also proposes a kind of formation method of above-mentioned light four-dimensional imaging device, is specially:
1) pulsed laser emission pulse laser bundle, laser beam is divided into two-way through behind the semi-transparent semi-reflecting lens, one tunnel laser beam shines on the measured target after the scanning of MEMS two-dimensional scan mirror, another road shines on the first pulse laser receiver module, the reflector laser that shines behind the measured target is received by the second pulse laser receiver module, and the first pulse laser receiver module and the second pulse laser receiver module generate respectively two pulse signals and input to the time interval measurement module; The time interval measurement module is measured the mistiming of this two pulse signals, and described CPU module is by reading this mistiming in the time interval measurement module and calculating the distance of measured target;
2) the peak value of pulse metering circuit maintains the pulse signal peak value that the second pulse laser receiver module receives, and by the second A/D converter the peak value of pulse signal is converted to digital signal, and described CPU module reads this peak signal;
3) MEMS two-dimensional scan mirror corner measuring apparatus output two-way voltage signal is in order to control the corner of MEMS two-dimensional scan mirror, and the first A/D converter is measured this two-way voltage signal simultaneously, and the CPU module reads this two-way voltage signal;
4) the CPU module is the range information that reads, peak value of pulse information, and MEMS two-dimensional scan mirror corner information is combined and is generated four-dimensional image.
The present invention has following beneficial effect:
The present invention integrates 3-D view and the measured target surface in tested zone for laser reflection situation information, the four-dimensional information in tested zone is provided, and can reflect better the feature in tested zone.
The present invention be by can obtaining simultaneously distance and the intensity image of target, compares with distance or the intensity of traditional single-mode, more is conducive to identification and tracking to target.
Description of drawings
Fig. 1 is the connection block diagram of device each several part of the present invention.
Embodiment
Below in conjunction with accompanying drawing the present invention is done and to describe in further detail:
Referring to Fig. 1, the present invention is based on the light four-dimensional imaging device of MEMS two-dimensional scan mirror, comprise CPU module 1, pulsed laser 2, MEMS two-dimensional scan mirror 3, pulse peak hold circuit 4, MEMS two-dimensional scan mirror angle-measuring equipment 6, semi-transparent semi-reflecting lens 7, the first pulse laser receiver module (8), the second pulse laser receiver module 9, time interval measurement module 10.
MEMS two-dimensional scan mirror 3 is fixed on the dead ahead of semi-transparent semi-reflecting lens 7, and semi-transparent semi-reflecting lens 7 is fixed on the dead ahead of pulsed laser 2, and MEMS two-dimensional scan mirror corner measuring apparatus 6 is fixed on two rotation axiss of MEMS two-dimensional scan mirror 3; CPU module 1 is connected with the peak value of pulse metering circuit with MEMS two-dimensional scan mirror corner measuring apparatus 6 respectively by first and second AD converter 11,5 and is connected; Described time interval measurement module 10 also is connected to CPU module 1; The first pulse laser receiver module 8 and the second pulse laser receiver module 9) all link to each other with time interval measurement module 10; The second pulse laser receiver module 9 also is connected with the input end of peak value of pulse metering circuit 4.
The formation method of above-described light four-dimensional imaging device is:
1) pulsed laser 2 emission pulse laser bundles, laser beam is divided into two-way through behind the semi-transparent semi-reflecting lens 7, one tunnel laser beam shines on the measured target after 3 scannings of MEMS two-dimensional scan mirror, another road shines on the first pulse laser receiver module 8, the reflector laser that shines behind the measured target is received by the second pulse laser receiver module 9, and the first pulse laser receiver module 8 and the second pulse laser receiver module 9 generate respectively two pulse signals and input to time interval measurement module 10; Time interval measurement module 10 is measured the mistiming of these two pulse signals, and CPU module 1 is by reading this mistiming in the time interval measurement module 10 and calculating the distance of measured target;
2) peak value of pulse metering circuit 4 maintains the pulse signal peak value that the second pulse laser receiver module 9 receives, and by the second A/D converter 5 the peak value of pulse signal is converted to digital signal, and CPU module 1 reads this peak signal;
3) MEMS two-dimensional scan mirror corner measuring apparatus 6 output two-way voltage signals are in order to control the corner of MEMS two-dimensional scan mirror 3, and the first A/D converter 11 is measured this two-way voltage signal simultaneously, and CPU module 1 reads this two-way voltage signal;
4) CPU module 1 is the range information that reads, peak value of pulse information, and MEMS two-dimensional scan mirror corner information is combined and is generated four-dimensional image.
Claims (2)
1. light four-dimensional imaging device based on MEMS two-dimensional scan mirror, it is characterized in that, comprise CPU module (1), pulsed laser (2), MEMS two-dimensional scan mirror (3), pulse peak hold circuit (4), MEMS two-dimensional scan mirror angle-measuring equipment (6), semi-transparent semi-reflecting lens (7), the first pulse laser receiver module (8), the second pulse laser receiver module (9), time interval measurement module (10);
Described MEMS two-dimensional scan mirror (3) is fixed on the dead ahead of semi-transparent semi-reflecting lens (7), semi-transparent semi-reflecting lens (7) is fixed on the dead ahead of pulsed laser (2), and MEMS two-dimensional scan mirror corner measuring apparatus (6) is fixed on two rotation axiss of MEMS two-dimensional scan mirror (3); Described CPU module (1) is connected 4 with MEMS two-dimensional scan mirror corner measuring apparatus (6) with the peak value of pulse metering circuit respectively by first and second AD converter (11,5)) be connected; Described time interval measurement module (10) also is connected to CPU module (1); Described the first pulse laser receiver module (8) all links to each other with time interval measurement module (10) with the second pulse laser receiver module (9); Described the second pulse laser receiver module (9) also is connected with the input end of peak value of pulse metering circuit (4).
2. the formation method of a light four-dimensional imaging device claimed in claim 1 is characterized in that:
1) pulsed laser (2) emission pulse laser bundle, be divided into two-way behind the laser beam process semi-transparent semi-reflecting lens (7), one tunnel laser beam shines on the measured target after MEMS two-dimensional scan mirror (3) scanning, another road shines on the first pulse laser receiver module (8), the reflector laser that shines behind the measured target is received by the second pulse laser receiver module (9), and the first pulse laser receiver module (8) and the second pulse laser receiver module (9) generate respectively two pulse signals and input to time interval measurement module (10); The mistiming that time interval measurement module (10) is measured this two pulse signals, described CPU module (1) is by reading this mistiming in the time interval measurement module (10) and calculating the distance of measured target;
2) peak value of pulse metering circuit (4) maintains the pulse signal peak value that the second pulse laser receiver module (9) receives, and by the second A/D converter (5) the peak value of pulse signal being converted to digital signal, described CPU module (1) reads this peak signal;
3) MEMS two-dimensional scan mirror corner measuring apparatus (6) output two-way voltage signal is in order to control the corner of MEMS two-dimensional scan mirror (3), and the first A/D converter (11) is measured this two-way voltage signal simultaneously, and CPU module (1) reads this two-way voltage signal;
4) CPU module (1) is the range information that reads, peak value of pulse information, and MEMS two-dimensional scan mirror corner information is combined and is generated distance-angle-angle-intensity four-dimension image.
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| CN106405572A (en) * | 2016-11-10 | 2017-02-15 | 西安交通大学 | Long distance high resolution laser active imaging device and method based on spatial coding |
| CN108107417A (en) * | 2017-11-07 | 2018-06-01 | 北醒（北京）光子科技有限公司 | A kind of solid-state face battle array laser radar apparatus |
| CN111381239A (en) * | 2018-12-29 | 2020-07-07 | 华为技术有限公司 | Laser measurement module and laser radar |
| WO2020178700A1 (en) * | 2019-03-01 | 2020-09-10 | Beijing Voyager Technology Co., Ltd. | Mems package with double-sided mirror |
| WO2022094962A1 (en) * | 2020-11-06 | 2022-05-12 | 深圳市大疆创新科技有限公司 | Hovering method for unmanned aerial vehicle, unmanned aerial vehicle and storage medium |
| US11493609B2 (en) | 2019-03-01 | 2022-11-08 | Beijing Voyager Technology Co., Ltd. | MEMS device with integrated mirror position sensor |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106405572A (en) * | 2016-11-10 | 2017-02-15 | 西安交通大学 | Long distance high resolution laser active imaging device and method based on spatial coding |
| CN108107417A (en) * | 2017-11-07 | 2018-06-01 | 北醒（北京）光子科技有限公司 | A kind of solid-state face battle array laser radar apparatus |
| CN111381239A (en) * | 2018-12-29 | 2020-07-07 | 华为技术有限公司 | Laser measurement module and laser radar |
| CN111381239B (en) * | 2018-12-29 | 2022-08-19 | 华为技术有限公司 | Laser surveying module and laser radar |
| US11428788B2 (en) | 2018-12-29 | 2022-08-30 | Huawei Technologies Co., Ltd. | Laser measurement module and laser radar |
| WO2020178700A1 (en) * | 2019-03-01 | 2020-09-10 | Beijing Voyager Technology Co., Ltd. | Mems package with double-sided mirror |
| US11262575B2 (en) | 2019-03-01 | 2022-03-01 | Beijing Voyager Technology Co., Ltd. | MEMS package with double-sided mirror |
| US11493609B2 (en) | 2019-03-01 | 2022-11-08 | Beijing Voyager Technology Co., Ltd. | MEMS device with integrated mirror position sensor |
| WO2022094962A1 (en) * | 2020-11-06 | 2022-05-12 | 深圳市大疆创新科技有限公司 | Hovering method for unmanned aerial vehicle, unmanned aerial vehicle and storage medium |
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| CN102944879B (en) | 2015-01-07 |
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Effective date of registration: 20180625 Address after: 710199 Shaanxi Xi'an Aerospace base 385 space Road 8, 820 floor, Chong Chuang square. Patentee after: Xi'an Shenqiong Photoelectric Technology Co., Ltd. Address before: 710049 Xianning West Road, Xi'an, Xi'an, Shaanxi Patentee before: Xi'an Jiaotong University |